Gas filter positioning device with self-locking replacement structure

Abstract

The utility model provides a gas filter positioning device with a self-locking dismounting and replacing structure, which comprises a fixed supporting component, a supporting assembly component, a movable supporting component, a bearing and accommodating component and a switching driving component. The movable supporting component and the bearing containing component can conveniently move in the axial direction, then the gas filter is driven to be close to or away from the gas inlet end pipe, matching connection or separation of the gas filter and the gas inlet end pipe is achieved, the dismounting and replacing process of the gas filter is greatly simplified, the working efficiency is improved, and the device has the self-locking function and is convenient to use. And after the installation is completed, the filter and the gas pipe are not separated due to overhigh gas pressure.

Description

Technical Field

[0001] The utility model relates to semiconductor chip production equipment, in particular to a gas filter positioning device with a self-locking disassembly and replacement structure. Background Art

[0002] In the chip manufacturing process, in addition to the use of equipment and raw materials such as lithography machines, photoresists, silicon wafers, etc., gases are also indispensable. Gases can be used to produce the chemical reactions required to shape the electrical properties of semiconductors, and the extremely inactive chemical properties of inert gases can also be used as protective gases in the production process. Among them, neon, xenon, and krypton are essential raw materials in the chip manufacturing process, which are equivalent to the blood of the semiconductor industry. These inert gases cannot be used directly in the production and manufacturing of semiconductors, and need to be used in the form of mixed gases, such as krypton-neon mixed gases, fluorine-neon mixed gases, and so on. In order to obtain a mixed gas, two or more single gases with higher purity are usually mixed through a special filter. When the filter reaches the end of its service life, it must be replaced.

[0003] Patent document CN115821230A discloses a gas filter, which includes a gas filter body, a gas filter flow channel penetrating the gas filter body, a first flow channel for charging reaction gas and a second flow channel for charging precursor on the gas filter body, the first flow channel has a reflux flow channel arranged along the extension direction of the gas filter body, the reflux flow channel runs through the air inlet end of the gas filter body, and the second flow channel is connected to the gas filter flow channel. However, the removal and replacement process of this filter is extremely inconvenient, which affects equipment maintenance and processing efficiency. Therefore, it is necessary to optimize its structure to overcome the above defects. Utility Model Content

[0004] The utility model aims to provide a gas filter positioning device with a self-locking replacement structure to improve the convenience of the filter replacement process.

[0005] The technical solution adopted by the utility model to solve its technical problems is:

[0006] A gas filter positioning device with a self-locking and replacing structure, comprising:

[0007] A fixed support member, which is fixedly installed in the equipment frame through a connecting piece;

[0008] A supporting assembly component, which is connected to the fixed support component and has an assembly space adapted to the air intake end pipe. The air intake end pipe can be fixed in the supporting assembly component through a connecting piece;

[0009] A movable supporting member, which is mounted on the fixed supporting member through an axial guide structure and can move axially on the fixed supporting member;

[0010] A bearing and containing member, which is connected to the movable supporting member and can be adjusted together with the movable supporting member to be close to or away from the air inlet end pipe, and has a containing space adapted to the gas filter inside, and the gas filter can be adjusted together with the supporting assembly member to be connected to or separated from the air inlet end pipe;

[0011] The switching driving component is installed on the supporting assembly component through a radial guiding structure and cooperates with the supporting assembly component through an axial guiding structure. It can move radially on the supporting assembly component and drive the movable supporting component to move axially.

[0012] Specifically, the fixed support member includes:

[0013] A pair of support seats are provided, and both ends of each support seat plate are fixed to the equipment frame by connecting bolts.

[0014] The supporting assembly components include:

[0015] A pair of supporting side plates are provided, each of which is formed at the edge of the supporting seat plate, bent toward the outside of the supporting seat plate and parallel to each other, and each supporting side plate is provided with an axial through groove and a radial through groove corresponding to the position, and the axial through groove and the radial through groove are long strip structures, which respectively penetrate each supporting side plate and extend along the axial direction and radial direction of the intake end pipe, and the end of the radial through groove extends to the end of the axial through groove;

[0016] An assembly end plate is connected between the supporting side plates and has an assembly opening adapted to the air inlet end pipe. The air inlet end pipe can pass through the assembly opening and be fixed to the assembly end plate by connecting bolts.

[0017] The assembly shaft rod is located between the supporting side plates, and two ends of the assembly shaft rod respectively penetrate the supporting side plates.

[0018] The movable supporting components include:

[0019] A pair of supporting side plates are provided, and an axial opening is opened on the top of each supporting side plate. The axial opening is a long strip structure, which passes through the supporting side plates and extends along the axial direction of the intake end pipe. The two ends of the assembly shaft rod are respectively matched with the axial opening through matching sleeves, so that the supporting side plates can move along the axial opening.

[0020] The load-bearing and containing component comprises:

[0021] The bearing end plate is located between the supporting side plates and below the assembly end plate. Both ends of the bearing end plate are respectively connected to the bottom of the supporting side plates and can move along the axial opening with the supporting side plates. The bottom of the gas filter can be placed on the bearing end plate and carried by the bearing end plate gas filter, and the gas filter is driven to move together to make it match or disengage with the intake end pipe.

[0022] The bearing cover plate is connected to the edge of the bearing end plate and bent upwards, with its top bent inwards and provided with a positioning notch adapted to the side shape of the gas filter, and the gas filter is covered and positioned by the bearing cover plate.

[0023] The switching drive component includes:

[0024] A switching pry plate, which is provided with a pair of switching pry plates, each switching pry plate is respectively located between the supporting side plate and the supporting side plate, and its inner end is matched with the radial through groove in the supporting side plate through the radial end shaft, and can move along the radial through groove, and its outer end is matched with the axial through groove in the supporting side plate through the axial end shaft, and is engaged with the top of the supporting side plate. When the inner end of the switching pry plate moves along the radial through groove, it can drive its outer end and the supporting side plate to move along the axial through groove;

[0025] The driving handle is located between the switching pry plates, and both ends of the driving handle are respectively engaged with the switching pry plates. The switching pry plates can be driven by the driving handle to facilitate the removal and replacement of the gas filter.

[0026] In one embodiment of the present utility model, the switching drive component further comprises:

[0027] A pair of interlocking locking rods are provided, each interlocking locking rod is located on the inner side of the supporting side plate and is connected between the axial end shaft and the radial end shaft. It can move with the axial end shaft and the radial end shaft and lock the position of the switching pry plate.

[0028] When in use, the driving handle is pulled outward to deflect the switching pry plate, driving the radial end shaft to move along the radial through groove, and the axial end shaft to move along the axial through groove, thereby driving the supporting side plate to move along the axial through opening, so that the bearing end plate drives the gas filter to move, and the intake end pipe is separated from the gas filter, which is convenient for taking out the old gas filter and putting in the new gas filter. The driving handle is then pressed inward to deflect the switching pry plate, driving the radial end shaft to move in the opposite direction along the radial through groove, and the axial end shaft to move in the opposite direction along the axial through groove, thereby driving the supporting side plate to move in the opposite direction along the axial through opening, so that the bearing end plate drives the gas filter to move in the opposite direction, and the intake end pipe is connected with the gas filter. At this time, the linkage locking rod extends axially, and the radial end shaft just reaches the end of the radial through groove. There is friction resistance between the radial end shaft and the radial through groove, so that it will remain locked when it is not subjected to radial thrust.

[0029] The advantages of the utility model are:

[0030] The positioning device uses axial and radial guiding structures to enable the movable supporting component and the load-bearing and containing component to be easily moved axially, thereby driving the gas filter to move closer to or away from the intake end pipe, thereby achieving connection or disconnection with the intake end pipe, greatly simplifying the gas filter removal and replacement process and improving work efficiency. The device also has a self-locking function, so there is no need to worry about the filter and the air pipe being separated due to excessive gas pressure after installation. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a front structural schematic diagram of a gas filter positioning device with a self-locking disassembly and replacement structure proposed by the utility model;

[0032] Figure 2 is a schematic diagram of the back structure of the positioning device;

[0033] Figure 3 is an exploded view of the positioning device. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model for protection, but merely represents the selected embodiment of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0035] like Figure 1As shown in Figure 3, the gas filter positioning device with a self-locking and replaceable structure proposed by the utility model includes a fixed supporting member, a supporting assembly member, a movable supporting member, a bearing and accommodating member and a switching drive member. The fixed supporting member is fixedly installed in the equipment frame through a connecting member. The supporting assembly member is engaged with the fixed supporting member, and has an assembly space adapted to the intake end pipe inside. The intake end pipe can be fixed in the supporting assembly member through the connecting member. The movable supporting member is installed on the fixed supporting member through an axial guiding structure and can move axially on the fixed supporting member. The bearing and accommodating member is engaged with the movable supporting member and can adjust its position together with the movable supporting member to get close to or away from the intake end pipe. It has an accommodating space adapted to the gas filter inside. The gas filter can adjust its position together with the supporting assembly member to match or disengage with the intake end pipe. The switching drive member is installed on the supporting assembly member through a radial guiding structure and cooperates with the supporting assembly member through the axial guiding structure. It can move radially on the supporting assembly member and drive the movable supporting member to move axially.

[0036] In this embodiment, the fixed supporting member includes a supporting seat plate 100, and a pair of supporting seat plates are provided, and both ends of each supporting seat plate are fixed to the equipment frame by connecting bolts.

[0037] The supporting assembly component includes a supporting side plate 210, an assembly end plate 220 and an assembly shaft 230. A pair of supporting side plates are provided, each of which is formed at the edge of the supporting seat plate, bent toward the outside of the supporting seat plate and parallel to each other. An axial through groove 211 and a radial through groove 212 corresponding to the position are respectively opened in each supporting side plate. The axial through groove and the radial through groove are long strip structures, which respectively penetrate each supporting side plate and extend axially and radially of the intake end pipe respectively. The end of the radial through groove extends to the end of the axial through groove. The assembly end plate is connected between the supporting side plates, and an assembly through hole adapted to the intake end pipe is opened inside the assembly end plate. The intake end pipe can pass through the assembly through hole and be fixed to the assembly end plate by connecting bolts. The assembly shaft is located between the supporting side plates, and its two ends respectively penetrate the supporting side plates.

[0038] The movable supporting component includes a supporting side plate 300, which is provided with a pair of supporting side plates. An axial opening 310 is respectively opened on the top of each supporting side plate. The axial opening is a long strip structure, which passes through the supporting side plates respectively and extends along the axial direction of the intake end pipe respectively. The two ends of the assembly shaft rod are respectively matched with the axial opening through matching sleeves, so that the supporting side plates can move along the axial opening.

[0039] The bearing and containing component includes a bearing end plate 410 and a bearing cover plate 420. The bearing end plate is located between the supporting side plates and below the assembly end plate. Its two ends are respectively connected to the bottom of the supporting side plates and can move along the axial opening together with the supporting side plates. The bottom of the gas filter can be placed on the bearing end plate and supported by the bearing end plate gas filter, which drives the gas filter to move together so that it can be matched with or separated from the intake end pipe. The bearing cover plate is connected to the edge of the bearing end plate and bent toward the top of the bearing end plate. Its top is bent inward and has a positioning recess 421 that matches the side shape of the gas filter. The bearing cover plate gas filter is shielded and positioned.

[0040] The switching driving component includes a switching pry plate 510 and a driving handle 520. A pair of switching pry plates are provided, each of which is located between the supporting side plate and the supporting side plate. The inner end thereof cooperates with the radial through groove in the supporting side plate through the radial end shaft 511 and can move along the radial through groove. The outer end thereof cooperates with the axial through groove in the supporting side plate through the axial end shaft 512 and is engaged with the top of the supporting side plate. When the inner end of the switching pry plate moves along the radial through groove, the outer end thereof and the supporting side plate can be driven to move along the axial through groove. The driving handle is located between the switching pry plates, and the two ends thereof are respectively engaged with the switching pry plates, and the switching pry plates can be driven to move by the driving handle.

[0041] In this embodiment, the switching drive component also includes a linkage locking rod 530, and a pair of linkage locking rods are provided. Each linkage locking rod is located on the inner side of the supporting side plate, and is connected between the axial end shaft and the radial end shaft, and can move with the axial end shaft and the radial end shaft.

[0042] When in use, the driving handle is pulled outward to deflect the switching pry plate, driving the radial end shaft to move along the radial through groove, and the axial end shaft to move along the axial through groove, thereby driving the supporting side plate to move along the axial through opening, so that the bearing end plate drives the gas filter to move, and the intake end pipe is separated from the gas filter, which is convenient for taking out the old gas filter and putting in the new gas filter. The driving handle is then pressed inward to deflect the switching pry plate, driving the radial end shaft to move in the opposite direction along the radial through groove, and the axial end shaft to move in the opposite direction along the axial through groove, thereby driving the supporting side plate to move in the opposite direction along the axial through opening, so that the bearing end plate drives the gas filter to move in the opposite direction, and the intake end pipe is connected with the gas filter. At this time, the linkage locking rod extends axially, and the radial end shaft just reaches the end of the radial through groove. There is friction resistance between the radial end shaft and the radial through groove, so that it will remain in a locked state when it is not subjected to radial thrust, and it can be unlocked when the driving handle is pulled.

[0043] In the description of the present utility model, it should be noted that when terms such as "upper", "lower", "inner", "outer", "left", "right" and the like indicating orientation or positional relationship appear, it should be understood that the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use, or the orientation or positional relationship commonly understood by those skilled in the art, is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the equipment or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, when terms such as "first" and "second" appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that, unless otherwise clearly specified and limited, terms such as "installation", "setting", and "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. A gas filter positioning device with a self-locking and replacement structure, characterized in that: include: A fixed support member, which is fixedly installed in the equipment frame through a connecting piece; A supporting assembly component, which is connected to the fixed support component and has an assembly space adapted to the air intake end pipe. The air intake end pipe can be fixed in the supporting assembly component through a connecting piece; A movable supporting member, which is mounted on the fixed supporting member through an axial guide structure and can move axially on the fixed supporting member; A bearing and containing member, which is connected to the movable supporting member and can be adjusted together with the movable supporting member to be close to or away from the air inlet end pipe, and has a containing space adapted to the gas filter inside, and the gas filter can be adjusted together with the supporting assembly member to be connected to or separated from the air inlet end pipe; The switching driving component is installed on the supporting assembly component through a radial guiding structure and cooperates with the supporting assembly component through an axial guiding structure. It can move radially on the supporting assembly component and drive the movable supporting component to move axially.

2. A gas filter positioning device with a self-locking and replaceable structure according to claim 1, characterized in that: The fixed support member comprises: A pair of support seats are provided, and both ends of each support seat plate are fixed to the equipment frame by connecting bolts.

3. A gas filter positioning device with a self-locking and replaceable structure according to claim 2, characterized in that: The supporting assembly components include: A pair of supporting side plates are provided, each of which is formed at the edge of the supporting seat plate, bent toward the outside of the supporting seat plate and parallel to each other, and each supporting side plate is provided with an axial through groove and a radial through groove corresponding to the position, and the axial through groove and the radial through groove are long strip structures, which respectively penetrate each supporting side plate and extend along the axial direction and radial direction of the intake end pipe, and the end of the radial through groove extends to the end of the axial through groove; An assembly end plate is connected between the supporting side plates and has an assembly opening adapted to the air inlet end pipe. The air inlet end pipe can pass through the assembly opening and be fixed to the assembly end plate by connecting bolts. The assembly shaft rod is located between the supporting side plates, and two ends of the assembly shaft rod respectively penetrate the supporting side plates.

4. A gas filter positioning device with a self-locking and replaceable structure according to claim 3, characterized in that: The movable supporting components include: A pair of supporting side plates are provided, and an axial opening is opened on the top of each supporting side plate. The axial opening is a long strip structure, which passes through the supporting side plates and extends along the axial direction of the intake end pipe. The two ends of the assembly shaft rod are respectively matched with the axial opening through matching sleeves, so that the supporting side plates can move along the axial opening.

5. A gas filter positioning device with a self-locking and replaceable structure according to claim 4, characterized in that: The load-bearing and containing component comprises: The bearing end plate is located between the supporting side plates and below the assembly end plate. Both ends of the bearing end plate are respectively connected to the bottom of the supporting side plates and can move along the axial opening with the supporting side plates. The bottom of the gas filter can be placed on the bearing end plate and carried by the bearing end plate gas filter, and the gas filter is driven to move together to make it match or disengage with the intake end pipe. The bearing cover plate is connected to the edge of the bearing end plate and bent upwards, with its top bent inwards and provided with a positioning notch adapted to the side shape of the gas filter, and the gas filter is covered and positioned by the bearing cover plate.

6. A gas filter positioning device with a self-locking and replaceable structure according to claim 4, characterized in that: The switching drive component includes: A switching pry plate, which is provided with a pair of switching pry plates, each switching pry plate is respectively located between the supporting side plate and the supporting side plate, and its inner end is matched with the radial through groove in the supporting side plate through the radial end shaft, and can move along the radial through groove, and its outer end is matched with the axial through groove in the supporting side plate through the axial end shaft, and is engaged with the top of the supporting side plate. When the inner end of the switching pry plate moves along the radial through groove, it can drive its outer end and the supporting side plate to move along the axial through groove; The driving handle is located between the switching pry plates, and both ends of the driving handle are respectively engaged with the switching pry plates, and the switching pry plates can be driven to move by the driving handle.

7. A gas filter positioning device with a self-locking and replaceable structure according to claim 6, characterized in that: The switching drive component also includes: A pair of linkage locking rods are provided, each linkage locking rod is located on the inner side of the supporting side plate and is connected between the axial end shaft and the radial end shaft, and can move with the axial end shaft and the radial end shaft.

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