Rotary transmission mechanism of double-arm manipulator

Abstract

The utility model provides a double-arm mechanical arm rotation transmission mechanism which comprises a bearing assembling assembly, a transmission input assembly, an overhanging deflection assembly, a switching linkage assembly, a transmission output assembly and an air source switching assembly. The stability of the arm in the rotating movement process is effectively improved, meanwhile, the precision is improved, the space occupation rate is reduced to a certain degree, a limiting protruding block is further arranged on an assembly end column, a limiting arc groove matched with the limiting protruding block is formed in an input belt wheel, and when the input belt wheel rotates, the input belt wheel can rotate more stably. The rotating range of the large deflection arm is limited through the limiting arc groove and the limiting protruding block, mechanical limiting can be carried out on the movement process of the large deflection arm, and damage to a mechanical arm and other equipment when faults occur due to the fact that a sensor is independently adopted for limiting is avoided.

Description

Technical Field

[0001] The utility model relates to semiconductor production equipment, in particular to a double-arm manipulator rotation transmission mechanism. Background Art

[0002] In a semiconductor production equipment, a dual-arm manipulator is used to perform wafer pick-and-place operations. Patent document CN218747730U discloses a dual-arm manipulator, wherein the left telescopic drive shaft drives the left large arm shell to rotate clockwise or counterclockwise around the rotation axis to a first angle, and drives the left small arm shell to rotate counterclockwise or clockwise around the left large arm shell to a second angle, and drives the left end effector to reciprocate along the radial direction of the rotation axis. The right telescopic drive shaft drives the right large arm shell to rotate counterclockwise or clockwise around the rotation axis to a first angle, and drives the right small arm shell to rotate clockwise or counterclockwise around the right large arm shell to a second angle, and drives the right end effector to reciprocate along the radial direction of the rotation axis. This can solve the problem of requiring two arms for independent telescopic movements, and is suitable for application scenarios with compact space requirements and a large telescopic range. However, the structure of this dual-arm manipulator is relatively complex, which occupies too much space and affects its operating stability. Therefore, it is necessary to optimize the structure of this dual-arm manipulator to overcome the above-mentioned defects. Utility Model Content

[0003] The utility model aims to provide a double-arm manipulator rotation transmission mechanism to improve its operation stability.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] A double-arm manipulator rotation transmission mechanism, comprising:

[0006] A load-bearing assembly component having an assembly space therein;

[0007] A transmission input assembly, which is mounted on the load-bearing assembly through a rotating structure and cooperates with a power-driven rotating assembly, and the power-driven rotating assembly drives the transmission input assembly to rotate in the load-bearing assembly;

[0008] An overhang deflection assembly, which is mounted on the load-bearing assembly assembly through a rotating structure and is engaged with a transmission input assembly, and the transmission input assembly drives the overhang deflection assembly to rotate on the load-bearing assembly assembly;

[0009] a transfer linkage assembly located in the overhang deflection assembly and engaged with the load bearing assembly;

[0010] The transmission output assembly is installed in the overhanging deflection assembly through a rotating structure and can rotate together with the overhanging deflection assembly. The transmission output assembly cooperates with the transfer linkage assembly, and the overhanging deflection assembly drives the transmission output assembly to rotate independently in the overhanging deflection assembly;

[0011] An air source transfer component is installed in the load-bearing assembly component and the transfer linkage component.

[0012] Specifically, the load-bearing assembly components include:

[0013] A load-bearing base, which is formed by enclosing plates and forming an assembly space inside the base;

[0014] An assembly end column, wherein a pair of assembly end columns are provided, each assembly end column is formed in the bearing base and protrudes above the bearing base, and an outer wall of the assembly end column is provided with a limited outer shoulder;

[0015] The assembly pressing block is installed on the assembly end column and is engaged with the transfer linkage component, and a limiting outer ring is arranged on the top of the assembly pressing block.

[0016] The transmission input components include:

[0017] The input pulley is installed on the assembly end column through the lower bearing, and cooperates with the power drive component through the input toothed belt. The power drive component drives the input pulley to rotate on the assembly end column. A limited inner shoulder is provided on the inner wall of the input pulley. The inner ring of the lower bearing is clamped on the outer wall of the assembly end column, and its bottom abuts against the limited outer shoulder, and its top abuts against the bottom of the assembly pressure block. The axial positioning is performed by the inner ring of the lower bearing of the assembly pressure block, and the outer ring of the lower bearing is embedded in the inner wall of the input pulley, and its bottom abuts against the limited inner shoulder.

[0018] In one embodiment of the utility model, the lower bearing is a crossed roller bearing having two annular tracks inside, and the rollers on the tracks are arranged crosswise, which can withstand larger radial loads and axial loads while maintaining higher rigidity and precision.

[0019] Overhang deflection kit includes:

[0020] A deflection arm, which is formed by enclosing a plate, an inner end of which is mounted on an assembly block through an upper bearing, and an outer end of which extends radially outward of the assembly block, an inner ring of the upper bearing is clamped on an outer wall of the assembly block, and a top of the inner ring is engaged with a limiting outer ring, a limiting inner ring is provided in the deflection arm, an outer ring of the upper bearing is embedded in the inner wall of the deflection arm, and a top of the inner ring is engaged with the limiting inner ring;

[0021] The deflection pressure ring surrounds the outside of the assembly pressure block, and its top is engaged with the bottom of the deflection arm and abuts against the bottom of the outer ring of the upper bearing. Its bottom is engaged with the top of the input pulley and abuts against the top of the outer ring of the lower bearing. The input pulley drives the deflection arm to rotate through the deflection pressure ring.

[0022] The transfer linkage components include:

[0023] A transfer pulley is located inside the deflection arm and is engaged with the top of the assembly pressure block.

[0024] The transmission output components include:

[0025] An output pulley is located at the outer end of the deflection arm and is installed in the deflection arm through a bearing and can rotate in the deflection arm;

[0026] A transmission toothed belt cooperates with an output pulley and a transfer pulley. When the deflection boom rotates, the output pulley can be driven to rotate through the transmission toothed belt.

[0027] The gas source adapter kit includes:

[0028] A transfer guide rod, which passes through the bearing base, the assembly end column, the assembly pressure block and the transfer pulley;

[0029] A bottom joint, which is engaged with the bottom of the transfer guide rod and is connected with the gas source equipment through a pipeline;

[0030] A top joint is connected to the top of the transfer guide rod, and the bottom joint is connected to the top joint through the transfer guide rod, and air can be supplied to the suction cup at the end of the manipulator through the top joint.

[0031] In one embodiment of the present invention, the top joint is implemented by a rotatable right-angle air pipe joint.

[0032] In one embodiment of the utility model, a limiting protrusion is provided on the outer wall of the assembly end column, and the limiting protrusion protrudes radially outward along the assembly end column; a limiting arc groove is provided on the inner wall of the input pulley, and the limiting arc groove extends along the circumference of the input pulley and is radially recessed toward the inside of the input pulley, and its shape is adapted to the limiting protrusion. When the input pulley rotates, its rotation range is limited by the limiting arc groove and the limiting protrusion.

[0033] The advantages of the utility model are:

[0034] The rotary transmission mechanism has a multi-layer structure that reasonably coordinates components such as synchronous pulleys, air paths, and other components of different specifications, thereby effectively improving the stability of the arm during the rotational movement, while improving the accuracy and reducing the space occupancy to a certain extent. A limit bump is also provided on the assembly end column, and a matching limit arc groove is provided on the input pulley. When the input pulley rotates, the limit arc groove and the limit bump limit its rotation range, thereby completing the mechanical limitation of the movement process of the deflected arm and avoiding damage to the manipulator and other equipment caused by a failure of the sensor limit alone. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a structural schematic diagram of the rotary transmission mechanism of the double-arm manipulator proposed in the utility model;

[0036] Figure 2 is a schematic cross-sectional structure diagram of the rotary transmission mechanism;

[0037] Figure 3 yes Figure 2 A magnified close-up of point A in the middle;

[0038] Figure 4 It is a structural schematic diagram of the bearing base;

[0039] Figure 5 It is a schematic diagram of the structure of the input pulley. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents the selected embodiment of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0041] like Figure 1 to Figure 5 As shown, the double-arm manipulator rotation transmission mechanism proposed by the utility model includes a load-bearing assembly component, a transmission input component, an overhanging deflection component, a transfer linkage component, a transmission output component and an air source transfer component. The load-bearing assembly component has an assembly space. The transmission input component is installed on the load-bearing assembly component through a rotating structure and cooperates with a power-driven rotation component. The power-driven rotation component drives the transmission input component to rotate in the load-bearing assembly component. The overhanging deflection component is installed on the load-bearing assembly component through a rotating structure and engages with the transmission input component. The overhanging deflection component is driven by the transmission input component to rotate on the load-bearing assembly component. The transfer linkage component is located in the overhanging deflection component and engages with the load-bearing assembly component. The transmission output component is installed in the overhanging deflection component through a rotating structure and can rotate together with the overhanging deflection component. It cooperates with the transfer linkage component. The overhanging deflection component drives the transmission output component to rotate independently in the overhanging deflection component. The air source transfer component is installed in the load-bearing assembly component and the transfer linkage component.

[0042] In this embodiment, the bearing assembly component includes a bearing base 110, an assembly end column 120 and an assembly pressure block 130. The bearing base is formed by enclosing a plate to form an assembly space inside it. A pair of assembly end columns are provided, each of which is formed in the bearing base and protrudes above the bearing base. A limited outer shoulder is provided on the outer wall of the assembly end column. The assembly pressure block is installed on the assembly end column and is engaged with the transfer linkage component, and a limited outer ring is provided on the top.

[0043] The transmission input component includes an input pulley 200, which is installed on the assembly end column through a lower bearing 210 and cooperates with the power drive component through an input toothed belt. The power drive component drives the input pulley to rotate on the assembly end column. A limited inner shoulder is provided on the inner wall of the input pulley. The inner ring of the lower bearing is clamped on the outer wall of the assembly end column, and its bottom abuts against the limited outer shoulder, and its top abuts against the bottom of the assembly pressure block. The axial positioning is performed by the inner ring of the lower bearing of the assembly pressure block, and the outer ring of the lower bearing is embedded in the inner wall of the input pulley, and its bottom abuts against the limited inner shoulder.

[0044] In this embodiment, the lower bearing is a crossed roller bearing. This crossed roller bearing has two annular tracks inside. The rollers on the tracks are arranged crosswise, which can withstand large radial loads and axial loads while maintaining high rigidity and precision.

[0045] The overhanging deflection assembly includes a deflection arm 310 and a deflection pressure ring 320. The deflection arm is formed by enclosing a plate, and its inner end is installed on the assembly pressure block through an upper bearing 330, and its outer end extends radially toward the outside of the assembly pressure block. The inner ring of the upper bearing is clamped on the outer wall of the assembly pressure block, and its top is engaged with the limiting outer ring. A limiting inner ring is provided in the deflection arm, and the outer ring of the upper bearing is embedded in the inner wall of the deflection arm, and its top is engaged with the limiting inner ring. The deflection pressure ring surrounds the outside of the assembly pressure block, and its top is engaged with the bottom of the deflection arm and is engaged with the bottom of the outer ring of the upper bearing. Its bottom is engaged with the top of the input pulley and is engaged with the top of the outer ring of the lower bearing. The input pulley drives the deflection arm to rotate through the deflection pressure ring.

[0046] The transfer linkage assembly includes a transfer pulley 400, which is located inside the deflection arm and is engaged with the top of the assembly pressing block.

[0047] The transmission output assembly includes an output pulley 510 and a transmission toothed belt 520. The output pulley is located at the outer end of the deflection arm and is installed in the deflection arm through a bearing. It can rotate in the deflection arm. The transmission toothed belt cooperates with the output pulley and the transfer pulley. When the deflection arm rotates, the output pulley can be driven to rotate through the transmission toothed belt.

[0048] The air source transfer assembly includes a transfer guide rod 610, a bottom joint 620 and a top joint 630. The transfer guide rod passes through the bearing base, the assembly end column, the assembly pressure block and the transfer pulley. The bottom joint is connected to the bottom of the transfer guide rod and is connected to the air source equipment through a pipeline. The top joint is located in the deflection arm and is connected to the top of the transfer guide rod. The bottom joint is connected to the top joint through the transfer guide rod, and air can be supplied to the suction cup at the end of the manipulator through the top joint.

[0049] In this embodiment, the top joint is implemented by a rotatable right-angle air pipe joint.

[0050] In this embodiment, a limiting protrusion 121 is provided on the outer wall of the assembly end column, and the limiting protrusion protrudes radially outward along the assembly end column; a limiting arc groove 210 is provided on the inner wall of the input pulley, and the limiting arc groove extends along the circumference of the input pulley and is radially recessed toward the inside of the input pulley, and its shape is adapted to the limiting protrusion. When the input pulley rotates, its rotation range is limited by the limiting arc groove and the limiting protrusion.

[0051] In this embodiment, the power drive component is performed by a servo motor, and a travel limit sensor is provided at the power output end thereof, which, together with the limit protrusion and the limit arc groove, limits the rotation range of the manipulator.

[0052] In the description of the present utility model, it should be noted that when terms such as "upper", "lower", "inner", "outer", "left", "right" and the like indicating orientation or positional relationship appear, it should be understood that the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use, or the orientation or positional relationship commonly understood by those skilled in the art, is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the equipment or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, when terms such as "first" and "second" appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that, unless otherwise clearly specified and limited, terms such as "installation", "setting", and "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. A dual-arm manipulator rotation transmission mechanism, characterized in that: include: A load-bearing assembly component having an assembly space therein; A transmission input assembly, which is mounted on the load-bearing assembly through a rotating structure and cooperates with a power-driven rotating assembly, and the power-driven rotating assembly drives the transmission input assembly to rotate in the load-bearing assembly; An overhang deflection assembly, which is mounted on the load-bearing assembly assembly through a rotating structure and is engaged with a transmission input assembly, and the transmission input assembly drives the overhang deflection assembly to rotate on the load-bearing assembly assembly; a transfer linkage assembly located in the overhang deflection assembly and engaged with the load bearing assembly; The transmission output assembly is installed in the overhanging deflection assembly through a rotating structure and can rotate together with the overhanging deflection assembly. The transmission output assembly cooperates with the transfer linkage assembly, and the overhanging deflection assembly drives the transmission output assembly to rotate independently in the overhanging deflection assembly; An air source transfer component is installed in the load-bearing assembly component and the transfer linkage component.

2. A dual-arm manipulator rotation transmission mechanism according to claim 1, characterized in that: The load-bearing assembly components include: A load-bearing base, which is formed by enclosing plates and forming an assembly space inside the base; An assembly end column, wherein a pair of assembly end columns are provided, each assembly end column is formed in the bearing base and protrudes above the bearing base, and an outer wall of the assembly end column is provided with a limited outer shoulder; The assembly pressing block is installed on the assembly end column and is engaged with the transfer linkage component, and a limiting outer ring is arranged on the top of the assembly pressing block.

3. A dual-arm manipulator rotation transmission mechanism according to claim 2, characterized in that: The transmission input components include: The input pulley is installed on the assembly end column through the lower bearing, and cooperates with the power drive component through the input toothed belt. The power drive component drives the input pulley to rotate on the assembly end column. A limited inner shoulder is provided on the inner wall of the input pulley. The inner ring of the lower bearing is clamped on the outer wall of the assembly end column, and its bottom abuts against the limited outer shoulder, and its top abuts against the bottom of the assembly pressure block. The axial positioning is performed by the inner ring of the lower bearing of the assembly pressure block, and the outer ring of the lower bearing is embedded in the inner wall of the input pulley, and its bottom abuts against the limited inner shoulder.

4. A dual-arm manipulator rotation transmission mechanism according to claim 3, characterized in that: Overhang deflection kit includes: A deflection arm, which is formed by enclosing a plate, an inner end of which is mounted on an assembly block through an upper bearing, and an outer end of which extends radially outward of the assembly block, an inner ring of the upper bearing is clamped on an outer wall of the assembly block, and a top of the inner ring is engaged with a limiting outer ring, a limiting inner ring is provided in the deflection arm, an outer ring of the upper bearing is embedded in the inner wall of the deflection arm, and a top of the inner ring is engaged with the limiting inner ring; The deflection pressure ring surrounds the outside of the assembly pressure block, and its top is engaged with the bottom of the deflection arm and abuts against the bottom of the outer ring of the upper bearing. Its bottom is engaged with the top of the input pulley and abuts against the top of the outer ring of the lower bearing. The input pulley drives the deflection arm to rotate through the deflection pressure ring.

5. A dual-arm manipulator rotation transmission mechanism according to claim 4, characterized in that: The transfer linkage components include: A transfer pulley is located inside the deflection arm and is engaged with the top of the assembly pressure block.

6. A dual-arm manipulator rotation transmission mechanism according to claim 5, characterized in that: The transmission output components include: An output pulley is located at the outer end of the deflection arm and is installed in the deflection arm through a bearing and can rotate in the deflection arm; A transmission toothed belt cooperates with an output pulley and a transfer pulley. When the deflection boom rotates, the output pulley can be driven to rotate through the transmission toothed belt.

7. A dual-arm manipulator rotation transmission mechanism according to claim 5, characterized in that: The gas source adapter kit includes: A transfer guide rod, which passes through the bearing base, the assembly end column, the assembly pressure block and the transfer pulley; A bottom joint, which is engaged with the bottom of the transfer guide rod and is connected with the gas source equipment through a pipeline; The top joint is connected with the top of the transition guide rod, and the bottom joint is connected with the top joint through the transition guide rod.

8. The dual-arm manipulator rotation transmission mechanism according to claim 3, characterized in that: A limiting protrusion is provided on the outer wall of the assembly end column, and the limiting protrusion protrudes outward along the radial direction of the assembly end column; A limiting arc groove is provided on the inner wall of the input pulley, which extends along the circumference of the input pulley and is recessed radially into the input pulley. Its shape is adapted to the limiting protrusion. When the input pulley rotates, its rotation range is limited by the limiting arc groove and the limiting protrusion.

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