Coating monitoring system and vacuum coating equipment

Abstract

The utility model belongs to the technical field of vacuum coating, and discloses a coating monitoring system and vacuum coating equipment. A monitoring piece of the coating monitoring system comprises a plurality of monitoring points distributed in the radial direction and the circumferential direction, and films can be deposited at the monitoring points under the action of a film deposition source; a first through hole of the monitoring point selection unit is used for selectively exposing at least one monitoring point to an action area of the thin film deposition source; when the monitoring point is exposed to the action area of the thin film deposition source, the monitoring point is in a monitored state, and when the monitoring point is not exposed to the action area of the thin film deposition source, the monitoring point is in a non-monitoring state; and the light projecting and receiving unit is at least used for projecting light to the monitoring point in the monitored state and receiving and detecting light from the monitoring point, so that the utilization rate of the monitoring piece is improved, the replacement frequency of the monitoring piece is reduced, the cost, manpower and material resources are saved, and the working stability and working efficiency of the vacuum coating equipment are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a coating monitoring system and vacuum coating equipment. Background Art

[0002] Vacuum coating equipment has a trend of developing from single-chamber intermittent vacuum coating equipment to multi-chamber continuous vacuum coating equipment. As one of the important components of vacuum coating equipment, the coating monitoring system can be used to synchronously detect the coating thickness of the coated workpiece during the coating process to ensure the coating performance of the coating equipment. The coating optical monitoring system in the prior art is usually composed of a film thickness detection component, a tray, a monitoring piece, and a monitoring piece mounting fixture. The monitoring piece is fixedly set on the monitoring piece mounting fixture and has multiple monitoring points. By rotating the monitoring piece mounting fixture, the monitoring points of the monitoring piece can be exposed one by one, so that the coating material passes through the through hole of the tray to coat a certain monitoring point of the monitoring piece. The film thickness detection component is used to detect the film thickness at the aforementioned monitoring point, and determine whether the coating thickness of the coated workpiece meets the requirements based on the film thickness at the aforementioned monitoring point; after completing the coating of a film layer, the monitoring point usually needs to be replaced to ensure the effectiveness of film thickness monitoring.

[0003] In the prior art, after a certain number of film layers have been plated, if all monitoring points on the monitoring sheet have been used, the monitoring sheet needs to be replaced to ensure that the monitoring points on the monitoring sheet can monitor the coating effect of the next batch of coated workpieces transported to the vacuum coating equipment. However, replacing the monitoring sheet usually requires breaking the vacuum, which is not conducive to continuous vacuum coating. Especially in continuous vacuum coating equipment, if the vacuum is broken to replace the monitoring sheet, the coating efficiency will be significantly reduced; if the coating workpiece rack and the monitoring sheet are automatically transported as a whole without breaking the vacuum, the stability of the coating monitoring system will be significantly reduced. Utility Model Content

[0004] The purpose of the utility model is to provide a coating monitoring system and a vacuum coating device to solve the above problems existing in the coating monitoring system in the prior art.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] Coating monitoring system, including:

[0007] A monitoring sheet, the monitoring sheet comprising a plurality of monitoring points distributed in radial and circumferential directions, and a thin film can be deposited at the monitoring points under the action of a thin film deposition source;

[0008] A monitoring point selection unit, the monitoring point selection unit comprising a first through hole, the first through hole being used to selectively expose at least one of the monitoring points to the active area of ​​the thin film deposition source; when the monitoring point is exposed to the active area of ​​the thin film deposition source, the monitoring point is in a monitored state, and when the monitoring point is not exposed to the active area of ​​the thin film deposition source, the monitoring point is in a non-monitoring state;

[0009] A light-projecting and light-receiving unit is used at least to project light to the monitoring point in the monitored state, and to receive and detect light from the monitoring point.

[0010] As a preferred solution of the above-mentioned coating monitoring system, the coating monitoring system further includes a first driving mechanism, and the monitoring point selection unit further includes a first shielding structure and a second shielding structure sequentially and spaced apart and distributed on a side of the monitoring piece close to the thin film deposition source;

[0011] The first driving mechanism can drive at least any two of the monitoring piece, the first shielding structure and the second shielding structure to rotate around a fixed axis, so that the first shielding structure and the second shielding structure can cooperate to form the first through hole, and the fixed axis is colinear with the rotation axis of the monitoring piece, the rotation axis of the first shielding structure and the rotation axis of the second shielding structure.

[0012] As a preferred solution of the above-mentioned coating monitoring system, the first shielding structure is provided with N second through holes, and the N second through holes are distributed at radial intervals along the first shielding structure. The first driving mechanism can drive at least any two of the monitoring plate, the first shielding structure and the second shielding structure to rotate around the rotation axis, so that each of the second through holes can become the first through hole in turn, and N is a positive integer greater than 1.

[0013] As a preferred solution of the above-mentioned coating monitoring system, the N second through holes are distributed at intervals along the circumference of the first shielding structure;

[0014] The second shielding structure is provided with a third through hole, the length of the third through hole extends along the radial direction of the second shielding structure, and each of the second through holes can be sequentially connected with the third through hole to form the first through hole.

[0015] As a preferred solution of the above-mentioned coating monitoring system, the N second through holes are distributed on the same straight line, and the straight line is any line passing through the rotation center point of the first shielding structure;

[0016] The second shielding structure is provided with N third through holes, and the N third through holes are distributed at intervals along the circumference of the second shielding structure;

[0017] The N third through holes are arranged in one-to-one correspondence with the N second through holes, and the third through holes can penetrate with the second through holes to form the first through holes.

[0018] As a preferred solution of the above-mentioned coating monitoring system, the light-projecting and light-receiving unit includes a light-projecting and light-receiving group, and the light-projecting and light-receiving group includes a light output conduction head and a light receiving conduction head, the light output conduction head is used to transmit the light emitted by the light source to the monitoring piece, and the light receiving conduction head is used to transmit the light reflected or transmitted by the monitoring piece to the detector;

[0019] The number of the light-projecting and light-receiving groups is N, and the N light-projecting and light-receiving groups and the N second through holes are arranged in one-to-one correspondence.

[0020] As a preferred solution of the above-mentioned coating monitoring system, the N second through holes are distributed on the same straight line, and the straight line is any line passing through the rotation center point of the first shielding structure;

[0021] The light-casting and light-receiving unit comprises a light-casting and light-receiving group, and the light-casting and light-receiving group comprises a light output conduction head and a light receiving conduction head, wherein the light output conduction head is used to transmit the light emitted by the light source to the monitoring piece, and the light receiving conduction head is used to transmit the light reflected or transmitted by the monitoring piece to the detector;

[0022] The coating monitoring system also includes a second driving mechanism, which includes a first translation driving mechanism. The light-projecting and light-receiving group is connected to the output end of the first translation driving mechanism, and the first translation driving mechanism can drive the light-projecting and light-receiving group to translate.

[0023] As a preferred solution of the above-mentioned coating monitoring system, the coating monitoring system further includes a third driving mechanism, the third driving mechanism includes a rotation driving mechanism arranged in the coating chamber, and a second translation driving mechanism connected to the output end of the rotation driving mechanism;

[0024] The light-casting and light-receiving unit comprises a light-casting and light-receiving group, and the light-casting and light-receiving group comprises a light output conduction head and a light receiving conduction head, wherein the light output conduction head is used to transmit the light emitted by the light source to the monitoring piece, and the light receiving conduction head is used to transmit the light reflected or transmitted by the monitoring piece to the detector;

[0025] The light-projecting and light-receiving group is connected to the output end of the second translation drive mechanism, the rotation drive mechanism can drive the second translation drive mechanism and the light-projecting and light-receiving group to rotate synchronously around the fixed axis, and the second translation drive mechanism can drive the light-projecting and light-receiving group to translate.

[0026] As a preferred solution of the above-mentioned coating monitoring system, the rotation driving mechanism includes a rotation driving member fixedly arranged in the coating chamber, and a first rotation transmission member, the output shaft of the rotation driving member is transmission-connected to the input end of the first rotation transmission member, the output end of the first rotation transmission member is connected to the second translation driving mechanism, and the rotation driving member can drive the first rotation transmission member, the second translation driving mechanism and the light projection and light receiving group to rotate synchronously around the fixed axis.

[0027] As a preferred solution of the above-mentioned coating monitoring system, the rotation drive mechanism also includes a first gear transmission assembly, the first gear transmission assembly includes a first gear and a first ring gear, the output shaft of the rotation drive member is transmission-connected to the first gear, the outer periphery of the first ring gear is meshed with the first gear, and the first ring gear is rotationally connected to the coating chamber and circumferentially connected to the first rotation transmission member.

[0028] As a preferred solution of the above-mentioned coating monitoring system, the second translation drive mechanism includes a second translation drive component arranged at the output end of the rotation drive mechanism, the output end of the second translation drive component is transmission connected to the light projection and light receiving group, and the second translation drive component can drive the light projection and light receiving group to translate.

[0029] As a preferred solution of the above-mentioned coating monitoring system, the multiple monitoring points of the monitoring piece form N monitoring point groups, and the N monitoring point groups are distributed at radial intervals along the monitoring piece. Each of the monitoring point groups includes multiple monitoring points distributed at circumferential intervals along the monitoring piece, and N is a positive integer greater than 1.

[0030] As a preferred solution of the above-mentioned coating monitoring system, the second through hole is a tapered hole, the large end of the second through hole faces the second shielding structure, and the small end of the second through hole faces the monitoring piece.

[0031] As a preferred solution of the above-mentioned coating monitoring system, the first driving mechanism can drive the first shielding structure and / or the second shielding structure to rotate around the fixed axis to form the first through hole;

[0032] The first driving mechanism can also drive the monitoring piece to rotate around the fixed axis; and / or the first driving mechanism can drive the first shielding structure and the second shielding structure to rotate synchronously around the fixed axis.

[0033] As a preferred solution of the above-mentioned coating monitoring system, the first shielding structure includes a tray, the second shielding structure includes a protective cover, N second through holes are arranged on the tray, and the tray is detachably arranged in the coating chamber;

[0034] The first driving mechanism includes a monitoring plate driving mechanism and a protective cover driving mechanism which are arranged in the coating chamber. The monitoring plate driving mechanism can drive the monitoring plate to rotate around the fixed axis, and the protective cover driving mechanism can drive the protective cover to rotate around the fixed axis.

[0035] As a preferred solution of the above-mentioned coating monitoring system, the monitoring piece driving mechanism includes a monitoring piece driving member arranged in the coating chamber, and a second rotating transmission member, the output shaft of the monitoring piece driving member is transmission-connected to the input end of the second rotating transmission member, the output end of the second rotating transmission member is detachably connected to the monitoring piece, and the monitoring piece driving member can drive the second rotating transmission member and the monitoring piece to rotate synchronously around the fixed axis.

[0036] As a preferred solution of the above-mentioned coating monitoring system, the monitoring film driving mechanism also includes a second gear transmission assembly, the second gear transmission assembly includes a second gear and a second gear ring, the output shaft of the monitoring film driving member is connected to the second gear transmission, the outer periphery of the second gear ring is meshed with the second gear, the second gear ring is rotatably connected to the coating chamber and is circumferentially connected to the second rotating transmission member.

[0037] The vacuum coating equipment comprises a coating chamber and the thin film deposition source, wherein the thin film deposition source is arranged in the coating chamber, and also comprises the above-mentioned coating monitoring system.

[0038] Beneficial effects of the utility model:

[0039] The utility model provides a coating monitoring system and a vacuum coating device. The coating monitoring system includes a monitoring sheet, a monitoring point selection unit and a light-projecting and light-receiving unit. The monitoring sheet includes a plurality of monitoring points distributed in radial and circumferential directions, and a thin film can be deposited at the monitoring points under the action of a thin film deposition source. The monitoring point selection unit includes a first through hole, and the first through hole is used to selectively expose at least one monitoring point to the action area of ​​the thin film deposition source. When the monitoring point is exposed to the action area of ​​the thin film deposition source, the monitoring point is in a monitored state, and when the monitoring point is not exposed to the action area of ​​the thin film deposition source, the monitoring point is in a non-monitoring state. The light-projecting and light-receiving unit is at least used to project light to the monitoring point in the monitored state, and to receive and detect light from the monitoring point.

[0040] When coating a workpiece, the coating monitoring system selectively exposes at least one monitoring point to the action area of ​​the thin film deposition source through the first through hole, and simultaneously detects the film thickness at the monitoring point on the monitoring sheet exposed to the action area of ​​the thin film deposition source through the light projection and light receiving unit, so that the film thickness at the monitoring point can indirectly reflect the film thickness on the workpiece, thereby facilitating the determination of whether the film thickness of the workpiece meets the expected film thickness. Among them, by setting multiple monitoring points distributed along the radial and circumferential directions of the monitoring piece, the number of monitoring points set is effectively increased compared with the prior art, and the utilization rate of the monitoring piece is improved. By setting the first through hole, at least one monitoring point can be selectively exposed to the active area of ​​the thin film deposition source. It can be understood that the first through hole can expose each monitoring point of the monitoring piece to the active area of ​​the thin film deposition source in sequence according to the expected order or the set order. Specifically, when the first through hole selectively exposes at least one monitoring point to the active area of ​​the thin film deposition source and all are coated and the coating thickness is detected, the first through hole will selectively expose at least one of the remaining multiple monitoring points to the active area of ​​the thin film deposition source and be coated in the expected order or the set order, until all the multiple monitoring points of the monitoring piece are coated and the coating thickness is detected, and then the monitoring piece is disassembled and replaced. Therefore, compared with the prior art that can only monitor the film thickness of the workpiece through a circle of monitoring points on the monitoring piece, the coating monitoring system effectively improves the utilization rate of the monitoring piece, effectively reduces the replacement frequency of the monitoring piece, saves costs and manpower and material resources, thereby effectively improving the working stability and work efficiency of the vacuum coating equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 It is a structural schematic diagram of a vacuum coating device provided by a specific embodiment of the utility model;

[0042] Figure 2 This is a schematic diagram of the partial structure of the vacuum coating equipment provided by the specific embodiment of the utility model Figure 1 ;

[0043] Figure 3 It is a structural schematic diagram of a monitoring piece provided by a specific embodiment of the utility model;

[0044] Figure 4 is a structural schematic diagram of a first shielding structure provided by a specific embodiment of the utility model;

[0045] Figure 5 is a structural schematic diagram of a second shielding structure provided by a specific embodiment of the utility model;

[0046] Figure 6 This is a schematic diagram of the partial structure of the vacuum coating equipment provided by the specific embodiment of the utility model Figure 2 ;

[0047] Figure 7 This is a schematic diagram of the partial structure of the vacuum coating equipment provided by the specific embodiment of the utility model Figure 3 ;

[0048] Figure 8 This is a schematic diagram of the partial structure of the vacuum coating equipment provided by the specific embodiment of the utility model Figure 4 ;

[0049] Fig. 9 This is a schematic diagram of the partial structure of the vacuum coating equipment provided by the specific embodiment of the utility model Figure 5 ;

[0050] Fig.10 This is a schematic diagram of the partial structure of the vacuum coating equipment provided by the specific embodiment of the utility model Figure 6 ;

[0051] Fig.11 This is a partial structural diagram of the vacuum coating equipment provided by other embodiments of the present invention. Figure 7 ;

[0052] Fig.12 It is a schematic diagram of the structure of a connecting piece provided in other embodiments of the utility model.

[0053] In the figure:

[0054] 1. Monitoring film; 11. Monitoring point group; 111. Monitoring point; 12. Circumferential limit groove;

[0055] 2. Light projection and light receiving unit;

[0056] 3. First shielding structure; 31. Second through hole; 32. Limiting slot;

[0057] 4. a second shielding structure; 41. a third through hole;

[0058] 5. Third driving mechanism; 51. Second translation driving mechanism; 52. First rotating transmission member;

[0059] 6. Monitoring plate driving mechanism; 61. Monitoring plate driving member; 62. Second rotating transmission member; 621. Insertion rod; 63. Second gear transmission assembly; 631. Second gear; 632. Second gear ring; 64. Connecting member; 641. Supporting part; 642. Connecting part; 6421. Sliding slot; 6422. Circumferential limit block; 65. Support adjustment block; 66. Ball;

[0060] 7. protective cover driving mechanism; 71. protective cover driving member; 72. third rotating transmission member; 73. third gear transmission assembly; 731. third gear; 732. third gear ring;

[0061] 8. A first gear rack assembly;

[0062] 9. Coated umbrella stand;

[0063] 10. Fourth driving mechanism; 101. Coated umbrella frame driving member; 102. Fourth rotating transmission member; 103. Fourth gear transmission assembly; 1031. Fourth gear; 1032. Fourth gear ring. DETAILED DESCRIPTION

[0064] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0065] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0066] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0067] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0068] Figure 1 , Figure 2 , Figure 6 and Fig. 9There are multiple light-projecting and light-receiving units 2, and the multiple light-projecting and light-receiving groups are fixedly arranged in the coating room. The monitoring piece 1 is rotatably connected to the coating room via the monitoring piece driving mechanism 6, the protective cover is rotatably connected to the coating room via the protective cover driving mechanism 7, and the tray is detachably connected to the coating room.

[0069] Figure 7 In the embodiment, the number of the light-projecting and light-receiving unit 2 is one, and the second driving mechanism is used to drive the light-projecting and light-receiving group to translate. Figure 8 In the embodiment, the number of the light-projecting and light-receiving group is one, and the third driving mechanism 5 is used to drive the light-projecting and light-receiving group to translate and / or rotate around a fixed axis.

[0070] Figure 1 , Figure 2 , Figure 5 , Figure 6 , Figure 8 and Fig. 9 In the embodiment, the third through hole 41 is a long hole. Figure 7 In the embodiment, the number of the third through holes 41 is N, and the N third through holes 41 are arranged in a one-to-one correspondence with the N second through holes 31, where N is a positive integer greater than 1.

[0071] The utility model provides a coating monitoring system. Figure 1-3 and Figure 6-9 As shown, the coating monitoring system includes a monitoring piece 1, a monitoring point selection unit and a light-projecting and light-receiving unit 2, the monitoring piece 1 includes a plurality of monitoring points 111 distributed radially and circumferentially, and a thin film can be deposited at the monitoring points 111 under the action of a thin film deposition source; the monitoring point selection unit includes a first through hole, and the first through hole is used to selectively expose at least one monitoring point 111 to the action area of ​​the thin film deposition source; when the monitoring point 111 is exposed to the action area of ​​the thin film deposition source, the monitoring point 111 is in a monitored state, and when the monitoring point 111 is not exposed to the action area of ​​the thin film deposition source, the monitoring point 111 is in a non-monitoring state; the light-projecting and light-receiving unit 2 is at least used to project light to the monitoring point 111 in the monitored state, and to receive and detect light from the monitoring point 111.

[0072] In the following description, when it is mentioned that light is projected to the monitoring point 111, and light is received and detected from the monitoring point 111, it actually means projecting light to the film at the monitoring point 111, and receiving and detecting light transmitted or reflected by the film at the monitoring point 111.

[0073] When coating a workpiece, the coating monitoring system selectively exposes at least one monitoring point 111 to the action area of ​​the thin film deposition source through the first through hole, and simultaneously detects the film thickness at the monitoring point 111 on the monitoring sheet 1 exposed to the action area of ​​the thin film deposition source through the light projection and light receiving unit 2, so that the film thickness at the monitoring point 111 can indirectly reflect the film thickness on the workpiece, thereby facilitating the determination of whether the film thickness of the workpiece meets the expected film thickness. Among them, by setting a plurality of monitoring points 111 distributed along the radial and circumferential directions of the monitoring film 1, the number of monitoring points 111 is effectively increased compared with the prior art, and the utilization rate of the monitoring film 1 is improved. By setting a first through hole, at least one monitoring point 111 can be selectively exposed to the active area of ​​the thin film deposition source. It can be understood that the first through hole can expose each monitoring point 111 of the monitoring film 1 to the active area of ​​the thin film deposition source in sequence according to an expected order or a set order. Specifically, when the first through hole selectively exposes at least one monitoring point 111 to the active area of ​​the thin film deposition source and all are coated and the coating thickness is detected, the first through hole will selectively expose at least one of the remaining multiple monitoring points 111 to the active area of ​​the thin film deposition source and be coated in the expected order or the set order, until all the multiple monitoring points 111 of the monitoring film 1 are coated and the coating thickness is detected, and then the monitoring film 1 is disassembled and replaced. Therefore, compared with the prior art that can only monitor the film thickness of the workpiece through a circle of monitoring points 111 on the monitoring film 1, the coating monitoring system effectively improves the utilization rate of the monitoring film 1, effectively reduces the replacement frequency of the monitoring film 1, saves costs and manpower and material resources, thereby effectively improving the working stability and work efficiency of the vacuum coating equipment.

[0074] It is understandable that the number of monitoring points 111 exposed by the first through hole each time can be set to one or more as required. Specifically, as the number of monitoring points 111 exposed by the first through hole each time gradually increases, the aperture of the first through hole will also gradually increase.

[0075] It is understandable that in Figure 1 In the figure, a thin film deposition source (not shown) is located below the coating umbrella stand.

[0076] Among them, Figure 2-9 As shown, the coating monitoring system also includes a first driving mechanism, and the monitoring point selection unit also includes a first shielding structure 3 and a second shielding structure 4 which are sequentially spaced and distributed on one side of the monitoring piece 1 close to the thin film deposition source; the first driving mechanism can drive at least any two of the monitoring piece 1, the first shielding structure 3 and the second shielding structure 4 to rotate around a fixed axis, so that the first shielding structure 3 and the second shielding structure 4 can cooperate to form a first through hole, and the fixed axis is collinear with the rotation axis of the monitoring piece 1, the rotation axis of the first shielding structure 3 and the rotation axis of the second shielding structure 4.

[0077] Since the first through hole can selectively expose at least one monitoring point 111 to the active area of ​​the thin film deposition source, and the first driving mechanism can drive at least any two of the monitoring plate 1, the first shielding structure 3 and the second shielding structure 4 to rotate around a fixed axis, it can be understood that the relative position of the first through hole and the monitoring point 111 is not fixed.

[0078] After the first driving mechanism drives the first shielding structure 3 and / or the second shielding structure 4 to rotate around the fixed axis to form the first through hole, the first through hole can be driven to rotate around the fixed axis, or the monitoring film 1 can be driven to rotate around the fixed axis, or both the first through hole and the monitoring film 1 can be driven to rotate around the fixed axis, so that the first through hole can expose each monitoring point 111 on the circumference thereof to the active area of ​​the thin film deposition source in turn; after each monitoring point 111 on the circumference of the first through hole is coated and the coating thickness is tested, the first driving mechanism drives the first shielding structure 3 and / or the second shielding structure 4 to rotate around the fixed axis again to form the first through hole. It can be understood that the first through hole formed this time is different from the first through hole formed previously in the radial distribution position along the monitoring film 1, so that the first through hole can expose each monitoring point 111 of the monitoring film 1 to the active area of ​​the thin film deposition source in turn in the expected order or set order.

[0079] Specifically, Figure 2-9 As shown, the first shielding structure 3 is provided with N second through holes 31, and the N second through holes 31 are distributed at intervals along the radial direction of the first shielding structure 3. The first driving mechanism can drive at least any two of the monitoring film 1, the first shielding structure 3, and the second shielding structure 4 to rotate around the rotation axis, so that each second through hole 31 can become a first through hole in turn. N is a positive integer greater than 1. By setting each second through hole 31 to become a first through hole in turn, it can be understood that during the coating process, the first shielding structure 3 and / or the second shielding structure 4 are driven to rotate around the rotation axis by the first driving mechanism, so that only one of the N second through holes 31 can always expose the monitoring point 111 on the monitoring film 1 to the active area of ​​the thin film deposition source, and the N second through holes 31 are distributed at intervals along the radial direction of the first shielding structure 3, so that all the monitoring points 111 on the monitoring film 1 can be effectively utilized. In this embodiment, as Figure 4 As shown, four second through holes 31 are provided as an example.

[0080] Preferably, if Figure 3As shown, the multiple monitoring points 111 of the monitoring sheet 1 form N monitoring point groups 11, and the N monitoring point groups 11 are spaced apart along the radial direction of the monitoring sheet 1, and each monitoring point group 11 includes a plurality of monitoring points 111 spaced apart along the circumferential direction of the monitoring sheet 1. The N monitoring point groups 11 and the N second through holes 31 are arranged in a one-to-one correspondence. Such an arrangement facilitates the first through hole to selectively expose at least one monitoring point 111 to the action area of ​​the thin film deposition source.

[0081] Specifically, Figure 4 , Figure 8 and Fig. 9 As shown, N second through holes 31 are distributed at intervals along the circumference of the first shielding structure 3. Or, as Figure 7 As shown, the N second through holes 31 are distributed on the same straight line, which is any line passing through the rotation center point of the first shielding structure 3. It can be understood that the fixed axis passes through the rotation center point of the first shielding structure 3.

[0082] More specifically, if Figure 2 , Figure 6 , Figure 8 and Fig. 9 As shown, when the N second through holes 31 are distributed at intervals along the circumference of the first shielding structure 3, the second shielding structure 4 is provided with a third through hole 41, the length of the third through hole 41 extends along the radial direction of the second shielding structure 4, and each second through hole 31 can be sequentially connected with the third through hole 41 to form a first through hole. The N second through holes 31 are distributed at intervals along the radial direction of the first shielding structure 3, and are distributed at intervals along the circumference of the first shielding structure 3, so that the N second through holes 31 are not distributed on the same straight line. It can be understood that the same straight line is any line passing through the rotation center point of the first shielding structure 3. By setting the length direction of the third through hole 41 to extend along the radial direction of the second shielding structure 4, that is, the third through hole 41 is a long strip hole, the first driving mechanism drives the first shielding structure 3 and / or the second shielding structure 4 to rotate around the fixed axis, so that the third through hole 41 can be connected with any second through hole 31 to form a first through hole, so that the first through hole formed by the third through hole 41 and the N second through holes 31 respectively has N optional distribution positions, and the N optional distribution positions are respectively the positions of the N second through holes 31.

[0083] More specifically, if Figure 7As shown, when the N second through holes 31 are distributed on the same straight line, the second shielding structure 4 is provided with N third through holes 41, and the N third through holes 41 are distributed at intervals along the circumference of the second shielding structure 4; the N third through holes 41 are arranged one-to-one with the N second through holes 31, and the third through holes 41 can be connected with the second through holes 31 to form a first through hole. The N second through holes 31 are distributed on the same straight line along the radial intervals of the first shielding structure 3, and the N third through holes 41 are arranged to be distributed at intervals along the circumference of the second shielding structure 4. The first driving mechanism drives the first shielding structure 3 and / or the second shielding structure 4 to rotate around the fixed axis, so that the third through hole 41 can be connected with the corresponding second through hole 31 to form a first through hole. The N distribution positions of the first through hole are respectively the positions where the N third through holes 41 are located. It can be understood that the same straight line is any line passing through the rotation center point of the first shielding structure 3.

[0084] For the N second through holes 31 distributed at intervals along the circumference of the first shielding structure 3, and the N second through holes 31 distributed on the same straight line, after the first through hole is formed, the first shielding structure 3 and the second shielding structure 4 are driven by the first driving mechanism to rotate synchronously around the fixed axis so that the first through hole rotates around the fixed axis. Alternatively, the monitoring film 1 is driven to rotate around the fixed axis by the first driving mechanism. Alternatively, the first shielding structure 3 and the second shielding structure 4 are driven synchronously around the fixed axis by the first driving mechanism, and the monitoring film 1 is driven to rotate around the fixed axis. Each monitoring point 111 of the monitoring film 1 can be exposed to the action area of ​​the thin film deposition source.

[0085] Preferably, if Figure 6-9 As shown, the second through hole 31 is a tapered hole, the large end of the second through hole 31 faces the second shielding structure 4, and the small end of the second through hole 31 faces the monitoring sheet 1, so that the thin film deposition source can better coat the monitoring point 111 exposed by the second through hole 31.

[0086] Among them, for the light-emitting and light-receiving unit 2, if Figure 1 , Figure 2 , Figure 6 and Fig. 9 As shown, the light-casting and light-receiving unit 2 can be set to include N light-casting and light-receiving groups, and the N light-casting and light-receiving groups and the N second through holes 31 are set one by one. Each light-casting and light-receiving group includes a light output conduction head and a light receiving conduction head. The light output conduction head is used to transmit the light emitted by the light source to the monitoring film 1, and the light receiving conduction head is used to transmit the light reflected or transmitted by the monitoring film 1 to the detector. That is, each second through hole 31 corresponds to a light-casting and light-receiving group. When any second through hole 31 becomes a first through hole, the corresponding light-casting and light-receiving group cooperates with the light source and the detector to detect the film thickness on the monitoring point 111 of the corresponding area on the monitoring film 1.

[0087] Furthermore, the light-emitting and light-receiving unit 2 may be configured to include N light sources and N detectors, and each light-emitting and light-receiving group corresponds to a light source and a detector. The light-emitting and light-receiving unit 2 may also be configured to include a light source and a detector, and the light output transmission heads of the N light-emitting and light-receiving groups share a light source, and the light receiving transmission heads of the N light-emitting and light-receiving groups share a detector. Wherein, the light source and the detector are both fixedly connected to the coating chamber. Or the light source and the detector are both fixedly connected to other shells outside the coating chamber through a connecting structure. Such an arrangement enables the film thickness of multiple monitoring points 111 of the monitoring film 1 to be detected in sequence according to the expected order or the set order, and enables the coating monitoring system to have high detection stability and high detection accuracy.

[0088] Specifically, when the light-emitting and light-receiving unit 2 includes N light-emitting and light-receiving groups, the N light-emitting and light-receiving groups and the N second through holes 31 are arranged in a one-to-one correspondence, the light-emitting and light-receiving unit 2 includes N light sources and N detectors, and each light-emitting and light-receiving group corresponds to a light source and a detector, the light source emits light, and the light output conduction head is connected to the output end of the light source, and is used to transmit the light emitted by the light source to the monitoring film 1; the detector receives light, and the light receiving conduction head is connected to the input end of the detector, and is used to transmit the light reflected or transmitted by the monitoring film 1 to the detector.

[0089] More specifically, if Figure 1 , Figure 2 , Figure 6 and Fig. 9 As shown, along the extension direction of the fixed axis, the light output conduction head and the light receiving conduction head can be distributed on the side of the monitoring film 1 away from the first shielding structure 3 and the second shielding structure 4. In this case, the light received by the detector is the light reflected by the film of the monitoring point 111 on the monitoring film 1. Preferably, the light output conduction head and the light receiving conduction head are integrated into an integral structure. As an alternative, it can also be arranged that along the extension direction of the fixed axis, the light output conduction head and the light receiving conduction head are distributed on the side of the second shielding structure 4 away from the monitoring film 1 and the first shielding structure 3.

[0090] More specifically, along the extension direction of the fixed axis, the light output conduction head can also be arranged to be distributed on the side of the monitoring sheet 1 away from the first shielding structure 3 and the second shielding structure 4, and the light receiving conduction head can be arranged to be distributed on the side of the second shielding structure 4 away from the first shielding structure 3 and the monitoring sheet. In this case, the light received by the detector is the light transmitted by the film on the monitoring point 111 of the monitoring sheet 1. As an alternative, along the extension direction of the fixed axis, the light receiving conduction head can also be arranged to be distributed on the side of the monitoring sheet away from the first shielding structure 3 and the second shielding structure 4, and the light output conduction head can be arranged to be distributed on the side of the second shielding structure 4 away from the first shielding structure 3 and the monitoring sheet 1.

[0091] More specifically, a first controller is provided, and the first controller can control any light source and a corresponding detector to be in a working state, and control the remaining light sources and detectors to be in a non-working state. The first controller is electrically connected or communicatively connected to the plurality of light sources and the plurality of detectors. When any second through hole 31 becomes a first through hole, the corresponding light source and detector cooperate to detect the film thickness at the monitoring point 111 of the corresponding area on the monitoring sheet 1.

[0092] Among them, Figure 7 and Figure 8 As shown, for the light-casting and light-receiving unit 2, the light-casting and light-receiving unit 2 may also include a light-casting and light-receiving group, and the light-casting and light-receiving group is driven to move by the second driving mechanism or the third driving mechanism 5. Among them, the light-casting and light-receiving group includes a light output conduction head and a light receiving conduction head, the light output conduction head is used to transmit the light emitted by the light source to the monitoring film 1, and the light receiving conduction head is used to transmit the light reflected or transmitted by the monitoring film 1 to the detector. Further, the light-casting and light-receiving unit 2 also includes a light source and a detector; the light output conduction head is connected to the output end of the light source, and is used to transmit the light emitted by the light source to the monitoring film 1; the light receiving conduction head is connected to the input end of the detector, and is used to transmit the light reflected or transmitted by the monitoring film 1 to the detector; the light output conduction head and the light receiving conduction head are integrated into an integral structure, and are distributed on the side of the monitoring film away from the first shielding structure 3 and the second shielding structure 4. It can be understood that the light output conduction head and the light receiving conduction head are an integral structure, and can also detect the film thickness of multiple monitoring points 111 of the monitoring film 1 in sequence according to the expected order or set order.

[0093] Specifically, Figure 7 and Figure 8 As shown, when the light-projecting and light-receiving unit 2 includes a light-projecting and light-receiving group, the N second through holes 31 are distributed on the same straight line, and the straight line is any line passing through the rotation center point of the first shielding structure 3, the second driving mechanism or the third driving mechanism 5 is used to drive the light-projecting and light-receiving group to move. Figure 8 As shown, when the light-projecting and light-receiving unit 2 includes a light-projecting and light-receiving group, and N second through holes 31 are distributed at intervals along the circumference of the first shielding structure 3, the third driving mechanism 5 is used to drive the light-projecting and light-receiving group to move.

[0094] Among them, the second driving mechanism includes a first translation driving mechanism, the light-projecting and light-receiving group is connected to the output end of the first translation driving mechanism, and the first translation driving mechanism can drive the light-projecting and light-receiving group to translate. Specifically, the first translation driving mechanism includes a first translation driving member, and the light-projecting and light-receiving group is connected to the output end of the first translation driving member. After the first driving mechanism drives the first shielding structure 3 and / or the second shielding structure 4 to rotate around a fixed axis to form a first through hole, the first driving mechanism drives the first shielding structure 3 and the second shielding structure 4 to rotate around the fixed axis synchronously, and the first translation driving member drives the light-projecting and light-receiving group to translate, so that the light-projecting and light-receiving group is directly opposite to its second through hole 31. At this time, the first through hole is driven to rotate around the fixed axis by the first driving mechanism, so that the monitoring points 111 on the monitoring film 1 corresponding to the circumference of the second through hole 31 can all be coated; when the monitoring point positions 111 on the monitoring film 1 corresponding to the second through hole 31 are located After the circumferential monitoring points 111 are all coated, the first shielding structure 3 and / or the second shielding structure 4 are driven by the first driving mechanism to rotate around the fixed axis so that one of the remaining multiple second through holes 31 forms a first through hole, and then the first shielding structure 3 and the second shielding structure 4 are driven by the first driving mechanism to rotate synchronously around the fixed axis, and the first translation driving member drives the light-casting and light-receiving group to translate so that the light-casting and light-receiving group is directly opposite to a corresponding second through hole 31, so that the film thickness at multiple monitoring points 111 of the monitoring film 1 can be detected by a light-casting and light-receiving unit 2. Among them, the moving path of the light-casting and light-receiving group driven by the first translation driving member to translate is parallel to the monitoring film 1, and is perpendicular to and intersects with the fixed axis.

[0095] Specifically, the first translation driving member is a linear motor disposed in the coating chamber, and the light projecting and receiving group is disposed at the output end of the linear motor. Figure 7 As shown, the first translation driving member is a motor arranged in the coating chamber, and the first translation driving mechanism also includes a first gear rack assembly 8, the motor is connected to the gear transmission of the first gear rack assembly 8, and the light projecting and receiving group is connected to the rack of the first gear rack assembly 8. As an alternative, the first translation driving member is an electric push rod.

[0096] Among them, Figure 8 As shown, the third driving mechanism 5 includes a rotating driving mechanism arranged in the coating chamber, and a second translation driving mechanism 51 connected to the output end of the rotating driving mechanism, the light-casting and light-receiving group is connected to the output end of the second translation driving mechanism 51, the rotating driving mechanism can drive the second translation driving mechanism 51 and the light-casting and light-receiving group to rotate synchronously around the fixed axis, and the second translation driving mechanism 51 can drive the light-casting and light-receiving group to translate. With such arrangement, for both the cases where the N second through holes 31 are distributed at intervals along the circumference of the first shielding structure 3 and the N second through holes 31 are distributed on the same straight line, the film thickness at multiple monitoring points 111 of the monitoring film 1 can be detected by one light-casting and light-receiving unit 2.

[0097] Specifically, Figure 8 As shown, the rotary drive mechanism includes a rotary drive member arranged in the coating chamber, and a first rotary transmission member 52, the output shaft of the rotary drive member is connected to the input end of the first rotary transmission member 52, the output end of the first rotary transmission member 52 is connected to the second translation drive mechanism 51, and the rotary drive member can drive the first rotary transmission member 52, the second translation drive mechanism 51 and the light projection and light receiving group to rotate synchronously around the fixed axis. It can be understood that the first rotary transmission member 52 is an annular member. Specifically, the rotary drive member is a motor. Preferably, the rotary drive member is distributed outside the coating chamber, and the first rotary transmission member 52 is distributed inside the coating chamber.

[0098] More specifically, the rotary drive mechanism further includes a first gear transmission assembly, which includes a first gear and a first gear ring, the output shaft of the rotary drive member is in transmission connection with the first gear, the outer periphery of the first gear ring is meshed with the first gear, and the first gear ring is rotationally connected to the coating chamber and is circumferentially connected to the first rotary transmission member 52. The rotary drive member drives the first gear and the first gear ring to mesh, thereby driving the first rotary transmission member 52, the second translation drive mechanism 51 and the light projection and light receiving group to rotate synchronously around the fixed axis. It can be understood that the central axis and the rotation center line of the first rotary transmission member 52 are both colinear with the fixed axis.

[0099] More specifically, if Figure 8 As shown, the second translation drive mechanism 51 includes a second translation drive member arranged at the output end of the rotation drive mechanism, the output end of the second translation drive member is connected to the light-projecting and light-receiving group by transmission, and the second translation drive member can drive the light-projecting and light-receiving group to translate. Specifically, the second translation drive member is connected to the output end of the first rotation drive member 52. The moving path of the second translation drive member driving the light-projecting and light-receiving group to translate is parallel to the monitoring film 1, and is perpendicular to and intersects with the fixed axis.

[0100] More specifically, the second translation drive is a linear motor connected to the output end of the first rotating transmission member 52, and the light projection and light receiving group is arranged at the output end of the linear motor. As an alternative, the second translation drive is a motor connected to the output end of the first rotating transmission member 52, and the second translation drive mechanism 51 further includes a second gear rack assembly, the motor is connected to the gear transmission of the second gear rack assembly, and the light projection and light receiving group is connected to the rack of the second gear rack assembly. As an alternative, the second translation drive is an electric push rod.

[0101] Specifically, the first driving mechanism can drive the first shielding structure 3 and / or the second shielding structure 4 to rotate around the fixed axis to form the first through hole. The first driving mechanism can also drive the monitoring sheet 1 to rotate around the fixed axis; and / or, the first driving mechanism can drive the first shielding structure 3 and the second shielding structure 4 to rotate around the fixed axis synchronously. Both can make the first through hole expose each monitoring point 111 on its circumference to the action area of ​​the thin film deposition source in turn.

[0102] In the following specific implementation of the first driving mechanism, Figure 1 , Figure 2 , Figure 6 and Fig. 9 As shown, the exemplary first shielding structure 3 includes a tray, the second shielding structure 4 includes a protective cover, N second through holes 31 are set on the tray, and the tray is detachably set in the coating chamber, and the third through hole 41 is set in the protective cover; the number of light-emitting and light-receiving groups is multiple, and the multiple light-emitting and light-receiving groups are fixedly set in the coating chamber. The details are as follows:

[0103] Among them, Figure 2 and Figure 3 As shown, the first driving mechanism includes a monitoring plate driving mechanism 6 and a protective cover driving mechanism 7 arranged in the coating chamber. The monitoring plate driving mechanism 6 can drive the monitoring plate 1 to rotate around a fixed axis, and the protective cover driving mechanism 7 can drive the protective cover to rotate around a fixed axis. The protective cover driving mechanism 7 drives the protective cover to rotate around the fixed axis, so that the protective cover and the tray can form a first through hole, and the monitoring plate driving mechanism 6 drives the monitoring plate 1 to rotate around the fixed axis, so that each monitoring point 111 on the monitoring plate 1 can be exposed to the action area of ​​the thin film deposition source through the first through hole.

[0104] Among them, Figure 1-3 As shown, the monitoring film driving mechanism 6 includes a monitoring film driving member 61 arranged in the coating chamber, and a second rotating transmission member 62, the output shaft of the monitoring film driving member 61 is drivingly connected to the input end of the second rotating transmission member 62, the output end of the second rotating transmission member 62 is detachably connected to the monitoring film 1, and the monitoring film driving member 61 can drive the second rotating transmission member 62 and the monitoring film 1 to rotate synchronously around the fixed axis. It can be understood that the second rotating transmission member 62 is an annular member. Specifically, the monitoring film driving member 61 is a motor. Preferably, the monitoring film driving member 61 is distributed outside the coating chamber, and the second rotating transmission member 62 is distributed inside the coating chamber.

[0105] Specifically, Figure 1-3As shown, the monitoring film driving mechanism 6 also includes a second gear transmission assembly 63, which includes a second gear 631 and a second gear ring 632. The output shaft of the monitoring film driving member 61 is connected to the second gear 631, and the outer periphery of the second gear ring 632 is meshed with the second gear 631. The second gear ring 632 is rotatably connected to the coating chamber and is circumferentially connected to the second rotating transmission member 62. The monitoring film driving member 61 drives the second gear 631 to mesh with the second gear ring 632, thereby driving the second rotating transmission member 62 and the monitoring film 1 to rotate synchronously around the fixed axis. It can be understood that the central axis and the rotation center line of the second rotating transmission member 62 are both colinear with the fixed axis.

[0106] Among them, Figure 9-12 As shown, the monitoring piece driving mechanism 6 also includes a connecting member 64, one end of which is detachably connected to the monitoring piece 1, and the other end is slidably connected to the second rotating transmission member 62 along the extension direction of the fixed axis, and the connecting member 64 and / or the tray are detachably connected with a support adjustment structure, and the support adjustment structure is distributed between the connecting member 64 and the tray; the support adjustment structure can support the connecting member 64 along the extension direction of the fixed axis, and can adjust the spacing between the monitoring piece 1 and the tray along the extension direction of the fixed axis. In the process of the monitoring piece 1 rotating around the fixed axis, the support adjustment structure can not only support the connecting member 64 so that the connecting member 64 and the monitoring piece 1 rotate synchronously and smoothly around the fixed axis, but also can adjust the spacing between the monitoring piece 1 and the tray along the extension direction of the fixed axis by replacing the support adjustment structure of different specifications, so as to avoid the monitoring piece 1 and the tray from rubbing against each other to damage the monitoring piece 1 and / or the tray, which can effectively improve the service life of the monitoring piece 1 and the tray, and can effectively prevent the coating layer on the monitoring point 111 of the monitoring piece 1 from being worn, thereby further improving the detection of the film thickness by the coating monitoring system. measurement accuracy; secondly, when the monitoring film driving mechanism 6 has been running for a period of time, if the support adjustment structure is worn and the distance between the monitoring film 1 and the tray is not up to standard, for example, when the monitoring film 1 and the tray are worn to the point of being in contact, it is only necessary to replace the support adjustment structure, thereby effectively reducing the cost of detecting the film thickness; secondly, when replacing the support adjustment structure, since the tray is detachably arranged on the support frame, when the tray is detached from the support frame, the connecting member 64 and the monitoring film 1 are synchronously driven away from the second rotating transmission member 62, which facilitates the replacement of the support adjustment structure, thereby effectively improving the efficiency of replacing the support adjustment structure.

[0107] Specifically, Fig. 9 , Fig.10 and 12As shown, the support adjustment structure includes a support adjustment block 65, which is detachably arranged on the connecting member 64 and / or the tray and is distributed between the connecting member 64 and the tray; along the extension direction of the fixed axis, one end of the support adjustment block 65 is used to abut against one of the connecting member 64 and the tray, and the other end is used to connect to the other of the connecting member 64 and the tray. In this way, the support adjustment block 65 can not only adjust the distance between the tray and the monitoring sheet 1, but also support the connecting member 64 and the monitoring sheet 1.

[0108] Specifically, along the extension direction of the fixed axis, one end of the support adjustment block 65 is used to abut against one of the connector 64 and the tray 1, and the other end is used to be threadedly connected, clamped or plugged into the other of the connector 64 and the tray. By threading, clamping or plugging, the support adjustment block can be detachably arranged on the connector 64 and / or the tray. Fig. 9 and Fig.10 As shown, an exemplary support adjustment block 65 is inserted into the tray.

[0109] Specifically, when the ambient temperature of the support and adjustment block 65 is high, threaded connection or clamping is preferably used to avoid the temperature affecting the connection mode of the support and adjustment block 65. When the ambient temperature of the support and adjustment block 65 is low, threaded connection, clamping or plugging can be used.

[0110] More specifically, the support adjustment block 65 is annular. Alternatively, there are multiple support adjustment blocks 65, and the multiple support adjustment blocks 65 are spaced apart along the circumference of the tray. Both methods can support the connecting member 64 on the tray and adjust the distance between the monitoring piece 1 and the tray.

[0111] It can be understood that when the support adjustment block 65 is annular, one end of the support adjustment block 65 abuts against the connecting member 64, and the other end is detachably connected to the tray; or, one end of the support adjustment block 65 abuts against the tray, and the other end is detachably connected to the connecting member 64. When there are multiple support adjustment blocks 65, one end of the multiple support adjustment blocks 65 abuts against the connecting member 64, and the other end is detachably connected to the tray; or, one end of the multiple support adjustment blocks 65 abuts against the tray, and the other end is detachably connected to the connecting member 64; or, one end of a part of the multiple support adjustment blocks 65 abuts against the connecting member 64, and the other end is detachably connected to the tray, and one end of the remaining part abuts against the tray, and the other end is detachably connected to the connecting member 64. The detachable connection method is threaded connection, snap-on connection, or plug-in connection.

[0112] Preferably, the hardness of the support adjustment block 65 is less than the hardness of the connector 64, and less than the hardness of the tray. Such an arrangement can prevent the support adjustment block 65 from damaging the connector 64 and / or the tray during assembly, and can also prevent the support adjustment block 65 from damaging the connector 64 and / or the tray during operation. It is understandable that the hardness of the connector 64 is the same as or different from the hardness of the tray. Exemplarily, the connector 64 is made of copper, the tray is supported by stainless steel, and the outer surfaces of the connector 64 and the tray are plated with a cadmium layer or other hardness-enhancing coating. To increase the service life of the connector 64 and the tray.

[0113] Preferably, the end surface of the support adjustment block 65 used for abutting against one of the connector 64 and the tray is a spherical surface. This can reduce the abutment area of ​​the support adjustment block 65 against one of the connector 64 and the tray, alleviate the wear rate of the support adjustment block 65, and thus effectively further improve the service life of the support adjustment block 65. As an alternative, the end surface of the support adjustment block 65 used for abutting against one of the connector 64 and the tray can also be set to be a plane, etc. It only needs to ensure the support performance and spacing adjustment performance of the support adjustment block 65. Fig.10 As shown, the end surface of the support adjustment block 65 used for abutting against one of the connecting member 64 and the tray is exemplarily arranged as a plane.

[0114] As an alternative, Fig.11 As shown, the support adjustment structure includes a plurality of balls 66, which are distributed at intervals along the circumference of the tray; the balls 66 are detachably arranged on the connector 64 and / or the tray, and are distributed between the connector 64 and the tray; along the extension direction of the fixed axis, one end of the ball 66 is used to abut against one of the connector 64 and the tray, and the other end is used to connect to the connector 64 and the other of the tray. The cooperation of the plurality of balls 66 can also adjust the distance between the tray and the monitoring sheet 1, and can also support the connector 64 and the monitoring sheet 1; secondly, when the ball 66 abuts against one of the connector 64 and the tray, the abutment area is small, so that the wear rate of the ball 66 can be effectively reduced.

[0115] Specifically, Fig.11 As shown, along the extension direction of the fixed axis, one end of the ball 66 is used to abut against one of the connector 64 and the tray, and the other end is inserted into the other of the connector 64 and the tray. This realizes the detachable connection of the ball 66 and enables the ball 66 to roll, thereby further alleviating the wear rate of the ball 66; secondly, the connection method of the ball 66 is not affected by the ambient temperature.

[0116] More specifically, if Fig.11As shown, a limiting slot 32 is provided on a pallet as an example. The limiting slot 32 is an annular slot, and a plurality of balls 66 are partially inserted into the annular slot along the extension direction of the fixed axis. As an alternative, there are multiple limiting slots 32, and the multiple limiting slots 32 are distributed on the pallet at intervals along the circumference of the pallet; at least one ball 66 is distributed in each limiting slot 32, and the ball 66 is partially inserted into the annular slot along the extension direction of the fixed axis. The setting positions of the multiple balls 66 can be limited, and the multiple balls 66 can roll.

[0117] Preferably, if Fig.11 As shown, the limit slot 32 is a stepped slot or a conical slot, and the slot width of the limit slot 32 gradually increases from the slot bottom to the slot mouth of the limit slot 32. The limit slot 32 can be inserted with balls 66 of different diameters to achieve the purpose of adjusting the distance between the monitoring piece 1 and the tray. As an alternative, the slot width of the limit slot 32 can also be set to be larger than the diameter of the ball 66. The limit slot 32 can also be inserted with balls 66 of different diameters to achieve the purpose of adjusting the distance between the monitoring piece 1 and the tray. Fig.11 As shown, the limiting slot 32 is preferably a tapered slot.

[0118] Specifically, Fig. 9 , Fig.10 and Fig.12 As shown, the connecting member 64 includes a supporting portion 641 and a connecting portion 642 connected to each other, the connecting portion 642 is slidably connected to the second rotating transmission member 62 along the extension direction of the fixed axis, and the monitoring piece 1 can be inserted into the outer periphery of the connecting portion 642 along the extension direction of the fixed axis, so that the supporting portion 641 supports the monitoring piece 1. In this way, the monitoring piece 1 and the second rotating transmission member 62 can be detachably connected through the connecting member 64, which is convenient for assembly and disassembly, and also convenient for replacing the supporting adjustment structure. Preferably, the supporting portion 641 and the connecting portion 642 of the connecting member 64 are integrally formed. The structural strength and supporting performance of the connecting member 64 can be improved, and the number of parts can be reduced.

[0119] Specifically, Fig. 9 , Fig.10 and Fig.12As shown, one of the connecting portion 642 and the second rotating transmission member 62 is provided with a sliding slot 6421 extending along the extension direction of the fixed axis, and the other of the connecting portion 642 and the second rotating transmission member 62 can be partially inserted into the sliding slot 6421. Specifically, the other of the connecting portion 642 and the second rotating transmission member 62 is provided with an insertion rod 621, and the insertion rod 621 can be inserted into the sliding slot 6421 along the extension direction of the fixed axis. In order to realize the sliding connection of the connecting member 64 to the second rotating transmission member 62 along the extension direction of the fixed axis. Exemplarily, the insertion rod 621 is set on the second rotating transmission member 62, and the sliding slot 6421 is set on the connecting portion 642. Among them, the insertion rod 621 and the second rotating transmission member 62 can be fixedly connected by welding or the like, or can be detachably connected by threaded connection or the like.

[0120] Preferably, if Fig. 9 , Fig.10 and Fig.12 As shown, the number of the plug rods 621 and the sliding slots 6421 are both multiple, and the multiple plug rods 621 and the multiple sliding slots 6421 are arranged one by one, and the multiple sliding slots 6421 are distributed at intervals along the circumference of the connecting member 64. This further improves the stability of the synchronous rotation of the driving connecting member 64 and the monitoring piece 1 around the fixed axis. For example, Fig.12 As shown, six sliding slots 6421 are set as an example.

[0121] Specifically, Figure 3 and Fig.12 As shown, one of the inner circumferential wall of the monitoring piece 1 and the outer circumferential wall of the connecting portion 642 is recessed with a circumferential limit groove 12, and the other is convexly provided with a circumferential limit block 6422, and the circumferential limit block 6422 can be plugged and matched with the circumferential limit groove 12 along the extension direction of the fixed axis. In this way, when the monitoring piece driving member 61 drives the connecting member 64 and the monitoring piece 1 to rotate synchronously around the fixed axis, the monitoring piece 1 is prevented from rotating relative to the connecting member 64. Exemplarily, in this embodiment, the inner circumferential wall of the monitoring piece 1 is recessed with a circumferential limit groove 12, and the outer circumferential wall of the connecting portion 642 is convexly provided with a circumferential limit block 6422. It is also possible to set the inner circumferential wall of the monitoring piece 1 to convexly provide a circumferential limit block, and the outer circumferential wall of the connecting portion 642 to be recessed with a circumferential limit groove.

[0122] Among them, Figure 1 and Figure 2As shown, the shield driving mechanism 7 includes a shield driving member 71 arranged in the coating chamber, and a third rotating transmission member 72, the output shaft of the shield driving member 71 is connected to the input end of the third rotating transmission member 72, the output end of the third rotating transmission member 72 is detachably connected to the shield, and the shield driving member 71 can drive the third rotating transmission member 72 and the shield to rotate synchronously around the fixed axis. It can be understood that the third rotating transmission member 72 is an annular member. Specifically, the shield driving member 71 is a motor. Preferably, the shield driving member 71 is distributed outside the coating chamber, and the third rotating transmission member 72 is distributed inside the coating chamber.

[0123] Specifically, Figure 1 and Figure 2 As shown, the shield driving mechanism 7 also includes a third gear transmission assembly 73, which includes a third gear 731 and a third gear ring 732. The output shaft of the shield driving member 71 is connected to the third gear 731, and the outer periphery of the third gear ring 732 is meshed with the third gear 731. The third gear ring 732 is rotatably connected to the coating chamber and is circumferentially connected to the third rotating transmission member 72. The shield driving member 71 drives the third gear 731 to mesh with the third gear ring 732, thereby driving the third rotating transmission member 72 and the shield to rotate synchronously around the fixed axis. It can be understood that the central axis and the rotation center line of the third rotating transmission member 72 are both colinear with the fixed axis.

[0124] The utility model also provides a vacuum coating device, including a coating chamber and a thin film deposition source, wherein the thin film deposition source is arranged in the coating chamber, and also includes the above-mentioned coating monitoring system. By adopting the above-mentioned coating monitoring system, the utilization rate of the monitoring piece 1 is effectively improved, the replacement frequency of the monitoring piece 1 is effectively reduced, and the cost and manpower and material resources are saved, thereby effectively improving the working stability and working efficiency of the vacuum coating device.

[0125] Specifically, Figure 1 As shown, the vacuum coating equipment further includes a coating umbrella stand 9, which is spaced apart on the periphery of the structure formed by the monitoring film 1, the first shielding structure 3 and the second shielding structure 4, and is used to set the workpiece to be coated.

[0126] More specifically, if Figure 1As shown, the vacuum coating equipment also includes a fourth driving mechanism 10, which includes a coating umbrella frame driving member 101, a fourth rotating transmission member 102 and a fourth gear transmission assembly 103, and the fourth gear transmission assembly 103 includes a fourth gear 1031 and a fourth gear ring 1032 that are meshed with each other. The coating umbrella frame driving member 101 is arranged in the coating chamber and its output shaft is connected to the fourth gear 1031 by transmission, and the fourth gear ring 1032 is connected to the coating chamber in rotation and is detachably connected to the fourth rotating transmission member 102. The fourth rotating transmission member 102 is also connected to the coating umbrella frame 9, and the central axis and the rotation center line of the coating umbrella frame 9 are both colinear with the fixed axis. It is arranged in this way so that the coating umbrella frame 9 can be driven to rotate around the fixed axis. Specifically, the coating umbrella frame driving member 101 is a motor. Preferably, the coating umbrella frame driving member 101 is distributed outside the coating chamber, and the fourth rotating transmission member 102 and the fourth gear transmission assembly 103 are both distributed in the coating chamber. The fourth rotating transmission member 102 is detachably connected or fixedly connected to the coated umbrella frame 9 .

[0127] The utility model also provides a coating monitoring method, which is used to be implemented in the above-mentioned coating monitoring system. The multiple monitoring points 111 of the monitoring piece 1 form N monitoring point groups 11, and the N monitoring point groups 11 are distributed at radial intervals along the monitoring piece 1. Each monitoring point group 11 includes multiple monitoring points 111 distributed at circumferential intervals along the monitoring piece 1.

[0128] The coating monitoring method comprises:

[0129] Before coating inspection:

[0130] S100 , controlling the first through holes to be distributed on the circumference of any one of the N monitoring point groups 11 .

[0131] Specifically, the first driving mechanism drives at least two of the monitoring plate 1, the first shielding structure 3 and the second shielding structure 4 to rotate around a fixed axis, so that the first shielding structure 3 and the second shielding structure 4 form a first through hole, and the first through hole is distributed on the circumference of any one of the N monitoring point groups 11.

[0132] During the coating inspection process:

[0133] S200, control the first through hole to selectively expose at least one monitoring point 111 in the corresponding monitoring point group 11 to the action area of ​​the thin film deposition source; control the thin film deposition source to coat the exposed monitoring points 111 one by one; control the light projection and light receiving unit 2 to detect the coating thickness of the exposed monitoring points 111 one by one.

[0134] Specifically, the first shielding structure 3 and the second shielding structure 4 are driven to rotate synchronously around the fixed axis by the first driving mechanism; and / or the monitoring sheet 1 is driven to rotate around the fixed axis by the first driving structure, so that the first through hole selectively exposes at least one monitoring point 111 in the corresponding monitoring point group 11 to the action area of ​​the thin film deposition source.

[0135] When all monitoring points 111 on the corresponding monitoring point group 11 are coated and the coating thickness is detected, step S300 is executed.

[0136] S300 , controlling the first through holes to be distributed on the circumference where another one of the N monitoring point groups 11 is located.

[0137] Specifically, the first driving mechanism drives at least two of the monitoring sheet 1, the first shielding structure 3, and the second shielding structure 4 to rotate around the fixed axis, so that the first shielding structure 3 and the second shielding structure 4 form a first through hole. It can be understood that the distribution position of the first through hole formed this time along the radial direction of the first shielding structure 3 is different from the distribution position of the first through hole formed previously along the radial direction of the first shielding structure 3.

[0138] Preferably, the first through holes are sequentially distributed along the radial direction of the first shielding structure 3 on the circumference where the N monitoring point groups 11 are located.

[0139] S400, control the first through hole to selectively expose at least one monitoring point 111 in the corresponding monitoring point group 11 to the action area of ​​the thin film deposition source; control the thin film deposition source to coat the exposed monitoring points 111 one by one; control the light projecting and receiving unit 2 to detect the coating thickness of the exposed monitoring points 111 one by one.

[0140] Specifically, the first shielding structure 3 and the second shielding structure 4 are driven to rotate synchronously around the fixed axis by the first driving mechanism; and / or the monitoring sheet 1 is driven to rotate around the fixed axis by the first driving structure, so that the first through hole selectively exposes at least one monitoring point 111 in the corresponding monitoring point group 11 to the action area of ​​the thin film deposition source.

[0141] When all monitoring points 111 on the corresponding monitoring point group 11 are coated and the coating thickness is detected, the process returns to step S300 .

[0142] When the N monitoring point groups 11 of the monitoring film 1 are all coated, step S500 is executed.

[0143] S500, remove and replace monitoring piece 1.

[0144] By adopting the coating monitoring method to control the above-mentioned coating monitoring system, the working stability and working efficiency of the vacuum coating equipment can be effectively improved.

[0145] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. The coating monitoring system is characterized by: include: A monitoring sheet (1), the monitoring sheet (1) comprising a plurality of monitoring points (111) distributed in radial and circumferential directions, and a thin film can be deposited at the monitoring points (111) under the action of a thin film deposition source; A monitoring point selection unit, the monitoring point selection unit comprising a first through hole, the first through hole being used to selectively expose at least one of the monitoring points (111) to the active area of ​​the thin film deposition source; when the monitoring point (111) is exposed to the active area of ​​the thin film deposition source, the monitoring point (111) is in a monitored state, and when the monitoring point (111) is not exposed to the active area of ​​the thin film deposition source, the monitoring point (111) is in a non-monitoring state; A light-projecting and light-receiving unit (2) is used at least to project light to a monitoring point (111) in the monitored state, and to receive and detect light from the monitoring point (111).

2. The coating monitoring system according to claim 1, characterized in that: The coating monitoring system further comprises a first driving mechanism, and the monitoring point selection unit further comprises a first shielding structure (3) and a second shielding structure (4) which are sequentially spaced and distributed on a side of the monitoring piece (1) close to the thin film deposition source; The first driving mechanism can drive at least any two of the monitoring plate (1), the first shielding structure (3) and the second shielding structure (4) to rotate around a fixed axis, so that the first shielding structure (3) and the second shielding structure (4) can cooperate to form the first through hole, and the fixed axis is collinear with the rotation axis of the monitoring plate (1), the rotation axis of the first shielding structure (3) and the rotation axis of the second shielding structure (4).

3. The coating monitoring system according to claim 2, characterized in that: The first shielding structure (3) is provided with N second through holes (31), and the N second through holes (31) are distributed at intervals along the radial direction of the first shielding structure (3). The first driving mechanism can drive at least any two of the monitoring film (1), the first shielding structure (3) and the second shielding structure (4) to rotate around the rotation axis, so that each of the second through holes (31) can become the first through hole in turn, and N is a positive integer greater than 1.

4. The coating monitoring system according to claim 3, characterized in that: N second through holes (31) are distributed at intervals along the circumference of the first shielding structure (3); The second shielding structure (4) is provided with a third through hole (41), the length of the third through hole (41) extending along the radial direction of the second shielding structure (4), and each of the second through holes (31) can be sequentially connected with the third through hole (41) to form the first through hole.

5. The coating monitoring system according to claim 3, characterized in that: The N second through holes (31) are distributed on the same straight line, and the straight line is any line passing through the rotation center point of the first shielding structure (3); The second shielding structure (4) is provided with N third through holes (41), and the N third through holes (41) are distributed at intervals along the circumference of the second shielding structure (4); The N third through holes (41) are arranged in one-to-one correspondence with the N second through holes (31), and the third through holes (41) can penetrate with the second through holes (31) to form the first through holes.

6. The coating monitoring system according to any one of claims 3 to 5, characterized in that: The light-emitting and light-receiving unit (2) comprises a light-emitting and light-receiving group, the light-emitting and light-receiving group comprises a light output transmission head and a light receiving transmission head, the light output transmission head is used to transmit the light emitted by the light source to the monitoring piece (1), and the light receiving transmission head is used to transmit the light reflected or transmitted by the monitoring piece (1) to the detector; The number of the light-projecting and light-receiving groups is N, and the N light-projecting and light-receiving groups and the N second through holes (31) are arranged in a one-to-one correspondence.

7. The coating monitoring system according to claim 3, characterized in that: The N second through holes (31) are distributed on the same straight line, and the straight line is any line passing through the rotation center point of the first shielding structure (3); The light-emitting and light-receiving unit (2) comprises a light-emitting and light-receiving group, the light-emitting and light-receiving group comprises a light output transmission head and a light receiving transmission head, the light output transmission head is used to transmit the light emitted by the light source to the monitoring piece (1), and the light receiving transmission head is used to transmit the light reflected or transmitted by the monitoring piece (1) to the detector; The coating monitoring system also includes a second driving mechanism, which includes a first translation driving mechanism. The light-projecting and light-receiving group is connected to the output end of the first translation driving mechanism, and the first translation driving mechanism can drive the light-projecting and light-receiving group to translate.

8. The coating monitoring system according to any one of claims 3 to 5, characterized in that: The coating monitoring system further comprises a third driving mechanism (5), wherein the third driving mechanism (5) comprises a rotation driving mechanism arranged in the coating chamber, and a second translation driving mechanism (51) connected to an output end of the rotation driving mechanism; The light-emitting and light-receiving unit (2) comprises a light-emitting and light-receiving group, the light-emitting and light-receiving group comprises a light output transmission head and a light receiving transmission head, the light output transmission head is used to transmit the light emitted by the light source to the monitoring piece (1), and the light receiving transmission head is used to transmit the light reflected or transmitted by the monitoring piece (1) to the detector; The light-projecting and light-receiving group is connected to the output end of the second translation drive mechanism (51); the rotation drive mechanism can drive the second translation drive mechanism (51) and the light-projecting and light-receiving group to rotate synchronously around the fixed axis; and the second translation drive mechanism (51) can drive the light-projecting and light-receiving group to translate.

9. The coating monitoring system according to claim 8, characterized in that: The rotary drive mechanism comprises a rotary drive member fixedly arranged in the coating chamber, and a first rotary transmission member (52), the output shaft of the rotary drive member being in transmission connection with the input end of the first rotary transmission member (52), the output end of the first rotary transmission member (52) being connected with the second translation drive mechanism (51), and the rotary drive member can drive the first rotary transmission member (52), the second translation drive mechanism (51) and the light projection and light receiving group to rotate synchronously around the fixed axis.

10. The coating monitoring system according to claim 9, characterized in that: The rotary drive mechanism also includes a first gear transmission assembly, which includes a first gear and a first gear ring. The output shaft of the rotary drive member is connected to the first gear, and the outer periphery of the first gear ring is meshed with the first gear. The first gear ring is rotatably connected to the coating chamber and is circumferentially connected to the first rotary transmission member (52).

11. The coating monitoring system according to claim 8, characterized in that: The second translation drive mechanism (51) comprises a second translation drive member arranged at the output end of the rotation drive mechanism, the output end of the second translation drive member is transmission-connected to the light-projecting and light-receiving group, and the second translation drive member can drive the light-projecting and light-receiving group to translate.

12. The coating monitoring system according to claim 1, characterized in that: The plurality of monitoring points (111) of the monitoring piece (1) form N monitoring point groups (11), the N monitoring point groups (11) being distributed at intervals along the radial direction of the monitoring piece (1), each monitoring point group (11) comprising a plurality of monitoring points (111) distributed at intervals along the circumferential direction of the monitoring piece (1), and N being a positive integer greater than 1.

13. The coating monitoring system according to any one of claims 3 to 5, characterized in that: The second through hole (31) is a tapered hole, the large end of the second through hole (31) faces the second shielding structure (4), and the small end of the second through hole (31) faces the monitoring piece (1).

14. The coating monitoring system according to any one of claims 2 to 5, characterized in that: The first driving mechanism can drive the first shielding structure (3) and / or the second shielding structure (4) to rotate around the fixed axis to form the first through hole; The first driving mechanism can also drive the monitoring plate (1) to rotate around the fixed axis; and / or the first driving mechanism can drive the first shielding structure (3) and the second shielding structure (4) to rotate synchronously around the fixed axis.

15. The coating monitoring system according to any one of claims 3 to 5, characterized in that: The first shielding structure (3) comprises a tray, the second shielding structure (4) comprises a protective cover, N second through holes (31) are arranged on the tray, and the tray is detachably arranged in the coating chamber; The first driving mechanism comprises a monitoring plate driving mechanism (6) and a protective cover driving mechanism (7) which are arranged in the coating chamber. The monitoring plate driving mechanism (6) can drive the monitoring plate (1) to rotate around the fixed axis, and the protective cover driving mechanism (7) can drive the protective cover to rotate around the fixed axis.

16. The coating monitoring system according to claim 15, characterized in that: The monitoring film driving mechanism (6) includes a monitoring film driving member (61) arranged in the coating chamber, and a second rotating transmission member (62), the output shaft of the monitoring film driving member (61) is drivingly connected to the input end of the second rotating transmission member (62), the output end of the second rotating transmission member (62) is detachably connected to the monitoring film (1), and the monitoring film driving member (61) can drive the second rotating transmission member (62) and the monitoring film (1) to rotate synchronously around the fixed axis.

17. The coating monitoring system according to claim 16, characterized in that: The monitoring film driving mechanism (6) also includes a second gear transmission assembly (63), which includes a second gear (631) and a second ring gear (632). The output shaft of the monitoring film driving member (61) is transmission-connected to the second gear (631), the outer periphery of the second ring gear (632) is meshed with the second gear (631), and the second ring gear (632) is rotationally connected to the coating chamber and circumferentially connected to the second rotating transmission member (62).

18. A vacuum coating device, comprising a coating chamber and the thin film deposition source, wherein the thin film deposition source is arranged in the coating chamber, characterized in that: It also includes the coating monitoring system according to any one of claims 1-17.

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