Flow uniformizing device and passivation equipment

Abstract

The utility model relates to the technical field of photovoltaic cell production, and provides a flow uniformizing device and passivation equipment, the flow uniformizing device comprises a plurality of flow uniformizing modules which are connected into an integral structure, and an area formed by arranging the flow uniformizing modules is used for fluid to pass through; the flow uniformizing module comprises a frame and a plurality of flow guide blades arranged in the frame side by side, and a gap exists between every two adjacent flow guide blades to form a fluid channel. The guide vane is in running fit with the frame, and the guide vane can rotate around the central axis of the guide vane to adjust the orientation of the fluid channel on the flow uniformizing module; thus, by adjusting the guide vanes on the flow uniformizing modules at different positions, the special gas can be enriched to the area needing to be coated without filling the whole furnace chamber, the consumption of the special gas is effectively reduced while the passivation effect is ensured, and thus the process cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell production, in particular to a current equalizing device and a passivation device. Background Art

[0002] With the application of half-cut cell process in battery cell packaging, laser non-destructive scribing has been promoted, but the damage at the cutting point will lead to a decrease in battery cell efficiency. Passivation process of the cut edge can effectively compensate for the power loss of the battery cell. The passivation process mainly uses special gas TMA, which is expensive, with a price of 1 yuan / gram. On average, each M10 silicon wafer costs 0.003 yuan, which accounts for a large proportion of the entire process cost.

[0003] In the related art, in the ALD passivation process, the special gas in the furnace enters from the furnace mouth and exits from the furnace tail, so that the special gas is evenly distributed in the furnace chamber.

[0004] However, when the above method is used to passivate the edge of the battery, the consumption of TMA is high and a large amount of TMA is wasted, which greatly increases the process cost. Utility Model Content

[0005] The utility model provides a flow uniforming device and a passivation device, which are used to solve the defects of the prior art that the consumption and waste of special gases are high, resulting in high process costs, and can effectively reduce the process consumption of special gases and reduce process costs.

[0006] The utility model provides a flow-uniform device, comprising: a plurality of flow-uniform modules connected into an integral structure, wherein an area formed by the arrangement of the plurality of flow-uniform modules is used for fluid to pass through;

[0007] The flow uniforming module comprises a frame and a plurality of guide vanes arranged in parallel in the frame, and gaps are provided between adjacent guide vanes to form a fluid channel;

[0008] The guide vane is rotatably matched with the frame, and the guide vane can rotate around its own central axis to adjust the direction of the fluid channel on the flow uniforming module.

[0009] According to a flow uniformity device provided by the utility model, it also includes a driving member for driving a plurality of guide blades in the flow uniformity module to rotate synchronously.

[0010] According to a flow uniforming device provided by the utility model, the driving member includes a driving rod, which is arranged along the arrangement direction of the multiple guide blades, and the multiple guide blades are hinged to the driving rod on the same side along the width direction; the driving rod can reciprocate along the axial direction to drive the multiple guide blades to rotate synchronously.

[0011] According to a flow equalizing device provided by the utility model, a plurality of flow equalizing modules can be detachably spliced.

[0012] According to a flow equalizing device provided by the utility model, it also includes a frame, and a plurality of the flow equalizing modules are arranged in a space surrounded by the frame, and adjacent flow equalizing modules and the flow equalizing modules and the frame are spliced ​​by means of groove and tenon fitting.

[0013] According to a flow equalizing device provided by the utility model, it also includes a connecting seat, and the connecting seat includes a first connecting surface and a second connecting surface;

[0014] The first connection surface is fixedly connected to the overall structure, the second connection surface is perpendicular to the plane formed by the arrangement of the plurality of current equalizing modules, and the second connection surface is used to connect with other devices, so that the overall structure includes two connection states;

[0015] In the first connection state, the guide blade is in a horizontal state;

[0016] In the second connection state, the guide vanes are in a vertical state.

[0017] According to a flow equalizing device provided by the utility model, the connecting seat includes a first part and a second part which are perpendicular to each other;

[0018] The first connection surface is formed on the first part, the second connection surface is formed on the second part, the first connection surface and the second connection surface are located outside the corner of the connection seat and are perpendicular to each other, and the second part is provided with a connection hole.

[0019] According to a flow equalizing device provided by the utility model, the connecting seat is fixedly connected to the outer side frame of the overall structure surrounded by a plurality of the flow equalizing modules.

[0020] According to a flow equalizing device provided by the utility model, a plurality of flow equalizing modules are arranged in an array.

[0021] A passivation device provided according to the utility model comprises an annealing furnace and any one of the flow-uniform devices described above, wherein the flow-uniform device is installed at the furnace mouth of the annealing furnace.

[0022] The utility model provides a flow equalizing device and a passivation device. By installing the flow equalizing device at the furnace mouth, the special gas enters the furnace cavity after passing through the area formed by the arrangement of multiple flow equalizing modules at the furnace mouth. The guide vanes on the flow equalizing modules can guide the special gas. By adjusting the angle of the guide vanes, the direction of the fluid channel can be adjusted, thereby changing the flow direction of the special gas. By adjusting the direction of the fluid channels on different flow equalizing modules, the special gas can be enriched in the area where coating is required. For example, when the carriers are placed face to face and the coating interval is located in the middle, by adjusting the guide vanes on the flow equalizing modules at different positions, the fluid channels on the flow equalizing modules on both sides are directed toward the middle, so that the flow equalizing device guides the airflow to be enriched in the middle area. When the coating area is located on both sides, by adjusting the guide vanes on the flow equalizing modules at different positions, the fluid channels are directed toward both sides, so that the flow equalizing device guides the airflow to converge on both sides. With such a configuration, the special gas can be enriched in the area where coating is required without filling the entire furnace cavity. While ensuring the passivation effect, the consumption of the special gas is effectively reduced, thereby reducing the process cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0024] Figure 1 It is a structural schematic diagram of a flow uniforming device provided in an embodiment of the utility model.

[0025] Figure 2 It is a structural schematic diagram of a flow-uniform module provided in an embodiment of the utility model.

[0026] Figure 3 It is a structural schematic diagram of a driving member provided in an embodiment of the utility model.

[0027] Figure 4 It is a structural schematic diagram of a connecting socket provided in an embodiment of the utility model.

[0028] Figure 5 It is a schematic diagram of the structure of the passivation device provided in the embodiment of the utility model.

[0029] Reference numerals:

[0030] 10. Flow-uniform module; 100. Frame; 101. Guide vane; 102. Fluid channel; 11. Frame; 12. Driving member; 120. Driving rod; 13. Connecting seat; 130. First connecting surface; 131. Second connecting surface; 132. First part; 133. Second part; 134. Connecting hole; 20. Annealing furnace; 30. Carrier. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described clearly and completely in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] In order to facilitate the understanding of the current uniforming device and passivation equipment provided by the utility model, its application background is first introduced. With the application of half-cell process in battery cell packaging, laser lossless scribing has been promoted. In order to compensate for the power loss caused by cutting damage, the cut edge of the battery cell needs to be passivated, and the special gas TMA needs to be used in the passivation process.

[0033] In the related art, in the ALD passivation process, the special gas in the furnace enters from the furnace mouth and exits from the furnace tail, and the special gas is evenly distributed in the furnace chamber.

[0034] However, when the above method is used to passivate the battery edge, the flow field of the special gas cannot be controlled, resulting in high special gas consumption and great waste. TMA is expensive, with a price of 1 yuan per gram, which averages out to 0.003 yuan per piece of M10 silicon wafer, accounting for a large proportion of the entire process cost. The large amount of TMA waste greatly increases the process cost.

[0035] Based on the above, the utility model provides a flow uniforming device and a passivation device, which can effectively reduce the process consumption of TMA and reduce the process cost.

[0036] Combine the following Figure 1-Figure 5 The utility model is described in detail.

[0037] Reference Figure 1 and Figure 2A flow equalizing device includes a plurality of flow equalizing modules 10 connected into an integral structure, wherein an area formed by the arrangement of the plurality of flow equalizing modules 10 is used for fluid to pass through; the flow equalizing module 10 includes a frame 100 and a plurality of guide blades 101 arranged in parallel in the frame 100; wherein gaps exist between adjacent guide blades 101 to form fluid channels 102; the guide blades 101 are rotatably matched with the frame 100, so that the guide blades 101 can rotate around their own central axis to adjust the direction of the fluid channels 102 on the flow equalizing module 10.

[0038] In a specific application scenario, the above-mentioned flow equalizing device is installed at the furnace mouth, and the special gas enters the furnace cavity after passing through the area formed by the arrangement of multiple flow equalizing modules 10 at the furnace mouth. The guide vanes 101 on the flow equalizing module 10 can guide the special gas. By adjusting the angle of the guide vanes 101, the direction of the fluid channel 102 can be adjusted, thereby changing the flow direction of the special gas. By adjusting the direction of the fluid channel 102 on the flow equalizing module 10 at different positions, the special gas can be enriched in the area where coating is required; for example, when the carriers 30 are placed face to face and the coating interval is in the middle, by adjusting The guide vanes 101 on the flow equalizing module 10 at different positions are adjusted so that the fluid channels 102 on the flow equalizing modules 10 on both sides face the middle, so that the flow equalizing device guides the airflow to be enriched in the middle area; when the coating area is located on both sides, the guide vanes 101 on the flow equalizing module 10 at different positions are adjusted so that the fluid channels 102 face both sides, so that the flow equalizing device guides the airflow to converge on both sides; with such an arrangement, the special gas can be enriched in the area where coating is required without filling the entire furnace chamber, which effectively reduces the consumption of the special gas while ensuring the passivation effect, thereby reducing the process cost.

[0039] According to different requirements and application scenarios, the number and arrangement of the flow-uniform modules 10 may also be different. Multiple flow-uniform modules 10 may be arranged in an array or in other structures.

[0040] In a specific embodiment of the utility model, nine flow equalizer modules 10 are provided, and the nine flow equalizer modules 10 are arranged in a nine-square grid structure. In practical applications, when the coating area is located in the middle, the guide blades 101 on the middle flow equalizer module 10 are in a vertical state relative to the regional plane formed by the flow equalizer module 10, so that the fluid channel 102 on the middle flow equalizer module 10 is directly opposite to the coating area, and the guide blades 101 on the flow equalizer modules 10 on both sides are set at an angle to the regional plane formed by the flow equalizer module 10, so that the fluid channels 102 on the flow equalizer modules 10 on both sides face the middle, and the gas flows through the flow equalizer modules 10 on both sides and converges toward the middle, so that the gas flowing through the flow equalizer device converges toward the middle as a whole. Similarly, when the coating area is located on both sides, the middle position and the angles of the guide blades 101 on both sides can also be adjusted to make the gas converge to both sides.

[0041] Of course, the flow uniforming module 10 includes but is not limited to the quantity and arrangement methods listed above. Flow uniforming modules 10 with other quantities and other arrangements are also applicable. As long as the airflow can be guided to be enriched in a specific area, the adjustment principle is basically the same, which is to adjust the guide blades 101 on the flow uniforming modules 10 at different positions so that the fluid channels 102 on the flow uniforming modules 10 at different positions are directed toward a specific area.

[0042] The flow-uniform modules 10 may be connected in a non-detachable manner, so that the flow-uniform device can meet the air intake requirements in specific scenarios. For example, the frames 100 of multiple flow-uniform modules 10 may be integrally formed.

[0043] In addition, the flow-uniform modules 10 can be connected in a detachable manner. In this way, the size, quantity, layout, etc. of the flow-uniform modules 10 can be adjusted according to different application scenarios and requirements to meet different flow field requirements. It is highly compatible with carriers 30 of different sizes and different placement positions.

[0044] In order to improve the applicability, in this embodiment, multiple flow equalizing modules 10 are assembled in a detachable manner. In order to facilitate the disassembly and assembly of multiple flow equalizing modules 10, the flow equalizing device also includes a frame 11. The flow equalizing modules 10 are arranged in the space surrounded by the frame 11. The frames 100 of adjacent flow equalizing modules 10 and the frames 100 of the flow equalizing modules 10 and the frame 11 are spliced ​​by a tongue-and-groove fitting method. The tongue-and-groove fitting method refers to two interconnected parts, one of which is provided with a tenon and the other is provided with an embedding groove, and the tenon is embedded in the embedding groove, so that the two parts are assembled.

[0045] Of course, the connection methods between the frames 100 of adjacent flow equalizer modules 10 and between the frames 100 of the flow equalizer modules 10 and the frame 11 include but are not limited to the above-mentioned connection methods. For example, in another embodiment, screws can also be used to fix the two adjacent ones to ensure the stability of the connection between the two adjacent ones. It is understandable that according to different needs and application environments, other methods can be used to connect the flow equalizer modules 10 and the flow equalizer modules 10 and the frame 11, as long as the detachable connection between the flow equalizer modules 10 can be achieved, and they will not be listed one by one in the embodiment of the utility model.

[0046] In order to adjust the direction of the fluid channel 102, refer to Figure 3 The flow-uniform module 10 further includes a driving member 12 for driving the plurality of guide blades 101 in the flow-uniform module 10 to rotate synchronously.

[0047] In a specific embodiment of the present invention, the two ends of the guide blade 101 along the length direction are respectively rotatably connected to the two opposite sides of the frame 100, and the hinge point is close to one side of the guide blade 101 along the width direction; the driving member 12 includes a driving rod 120, and the driving rod 120 is arranged along the arrangement direction of the multiple guide blades 101, and the other sides of the multiple guide blades 101 along the width direction are hinged to the driving rod 120; the driving rod 120 can reciprocate axially to drive the multiple guide blades 101 to rotate synchronously.

[0048] In actual application, the driving rod 120 is pulled axially, and the driving rod 120 synchronously drives the side swings of multiple guide blades 101, thereby driving the multiple guide blades 101 to synchronously rotate around their respective hinge points to adjust the direction of the fluid channel 102 on the guide module.

[0049] The positioning method of the driving rod 120 can be selected according to actual needs. For example, a positioning plate can be fixedly connected to the frame 100 of the flow-uniform module 10, and the driving rod 120 can be slidably penetrated in the positioning plate, so that after the driving rod 120 passes through the positioning plate, nuts are threadedly connected at positions on both sides of the positioning plate on the driving rod 120, and the positioning of the driving rod 120 is achieved by two nuts; or, a positioning sleeve is fixedly connected to the frame 100 of the flow-uniform module 10, and the driving rod 120 is positioned by a top screw after passing through the positioning sleeve. In short, no matter what method or principle of positioning is adopted, as long as the positioning of the driving rod 120 can be achieved.

[0050] It is understandable that the driving member 12 includes but is not limited to the structures listed above, and any driving member 12 with other structures or principles as long as it can drive the multiple guide blades 101 in the flow uniforming module 10 to move synchronously can be applied.

[0051] In order to facilitate the installation of the above-mentioned flow equalization device, refer to Figure 1 and Figure 4 The flow equalizing device further includes a connecting seat 13 , which is fixedly connected to the overall structure composed of a plurality of flow equalizing modules 10 , and can be specifically connected to the frame 11 .

[0052] The connecting seat 13 includes a first connecting surface 130 and a second connecting surface 131, wherein the first connecting surface 130 is fixedly connected to the frame 11, and the second connecting surface 131 is used to connect to other devices, and the second connecting surface 131 is perpendicular to the plane formed by the arrangement of multiple flow equalizing modules 10. In this way, when the second connecting surface 131 is connected to different positions of the device, the guide blade 101 will be in different states. In the first connection state, the guide blade 101 is in a horizontal state, at which time the up and down flow of the airflow can be controlled. In the second connection state, the guide blade 101 is in a vertical state, at which time the left and right flow of the airflow can be controlled. By adjusting the installation method of the flow equalizing device and the rotation angle of the guide blade 101, the effect of guiding the airflow to flow to various areas of the cavity can be achieved.

[0053] In a specific embodiment of the utility model, the connecting seat 13 includes a first part 132 and a second part 133 which are perpendicular to each other. The first connecting surface 130 is formed as a side of the first part 132 located outside the corner of the connecting seat 13, which is used to fit and connect with the frame 11. The second connecting surface 131 is formed as a side of the second part 133 located outside the corner of the connecting seat 13, which is used to fit with the surface to be connected of the equipment. The first connecting surface 130 and the second connecting surface 131 are perpendicular to each other. A connecting hole 134 is provided on the second part 133, which is used to connect with the equipment through a connecting component such as a bolt.

[0054] Specifically, the first part 132 is fixedly connected to the frame 11 by bolts, and the second part 133 is integrally formed with the first part 132 .

[0055] Specifically, two pairs of connection sockets 13 are provided, and the two pairs of connection sockets 13 are connected to the corners on the same side of the frame 11, and the two connection sockets 13 in each pair of connection sockets 13 are respectively provided on both sides of the frame 11 along the width direction. Four connection points can be provided by four connection sockets 13 to ensure the stability of the connection of the flow equalization device.

[0056] It should be noted that the above-mentioned flow-uniform device can be used for, but is not limited to, guiding the special gas in the edge passivation of the battery cell, and the embodiments of the present invention do not limit the application of the above-mentioned flow-uniform device in guiding other fluids.

[0057] It should be noted that the technical features in the embodiments of the present invention can be combined without conflict.

[0058] The passivation device provided by the present invention is described below. The passivation device described below and the flow homogenizing device described above can be referred to each other.

[0059] Reference Figure 5 A passivation device includes an annealing furnace 20 and the above-mentioned flow equalizing device, and the flow equalizing device is installed at the furnace mouth of the annealing furnace 20.

[0060] A carrier 30 is placed in the furnace chamber of the annealing furnace 20, and the carrier 30 is loaded with battery cells. When the carriers 30 are placed face to face and the coating area is located in the middle, the guide vanes 101 on the flow equalizing modules 10 at different positions are adjusted to make the fluid channels 102 on the flow equalizing modules 10 on both sides face the middle, so that the flow equalizing device guides the airflow to be enriched in the middle area.

[0061] The novelty of the utility model is that by installing the above-mentioned flow equalizing device at the furnace mouth, the special gas enters the furnace cavity after passing through the area formed by the arrangement of multiple flow equalizing modules 10 at the furnace mouth, and the guide vanes 101 on the flow equalizing module 10 can guide the special gas. By adjusting the angle of the guide vanes 101, the direction of the fluid channel 102 can be adjusted, thereby changing the flow direction of the special gas. By adjusting the direction of the fluid channel 102 on different flow equalizing modules 10, the special gas can be enriched in the area where coating is required; for example, when the carriers 30 are placed face to face and the coating interval is in the middle, through The guide vanes 101 on the guide modules at different positions are adjusted to make the fluid channels 102 on the flow equalizing modules 10 on both sides face the middle, so that the flow equalizing device guides the airflow to be enriched in the middle area; when the coating area is located on both sides, the guide vanes 101 on the flow equalizing modules 10 at different positions are adjusted to make the fluid channels 102 face both sides, so that the flow equalizing device guides the airflow to converge on both sides; with such an arrangement, the special gas can be enriched in the area where coating is required without filling the entire furnace chamber, which effectively reduces the consumption of the special gas while ensuring the passivation effect, thereby reducing the process cost.

[0062] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A flow equalizing device, characterized in that: include: A plurality of flow-uniform modules (10) connected to form an integral structure, wherein an area formed by the arrangement of the plurality of flow-uniform modules (10) is used for fluid to pass through; The flow-uniform module (10) comprises a frame (100) and a plurality of guide blades (101) arranged in parallel in the frame (100), and gaps between adjacent guide blades (101) form fluid channels (102); The guide blade (101) is rotatably matched with the frame (100), and the guide blade (101) can rotate around its own central axis to adjust the direction of the fluid channel (102) on the flow uniforming module (10).

2. The flow equalizing device according to claim 1, characterized in that: It also includes a driving member (12) for driving a plurality of guide blades (101) in the flow-uniform module (10) to rotate synchronously.

3. The flow equalizing device according to claim 2, characterized in that: The driving member (12) comprises a driving rod (120), the driving rod (120) being arranged along the arrangement direction of the plurality of guide blades (101), and the plurality of guide blades (101) are hingedly connected to the driving rod (120) on the same side in the width direction; The driving rod (120) can reciprocate along the axial direction to drive the plurality of guide blades (101) to rotate synchronously.

4. The flow equalizing device according to claim 1, characterized in that: A plurality of the flow-uniform modules (10) are detachable and spliced.

5. The flow equalizing device according to claim 4, characterized in that: It also comprises a frame (11), wherein a plurality of the flow equalizing modules (10) are arranged in a space surrounded by the frame (11), and adjacent flow equalizing modules (10) and the flow equalizing modules (10) and the frame (11) are spliced ​​by means of groove and tongue engagement.

6. The flow uniforming device according to any one of claims 1 to 5, characterized in that: It also includes a connection seat (13), wherein the connection seat (13) includes a first connection surface (130) and a second connection surface (131); The first connection surface (130) is fixedly connected to the overall structure, the second connection surface (131) is perpendicular to a plane formed by the arrangement of the plurality of current equalizing modules (10), and the second connection surface (131) is used to connect to other equipment, so that the overall structure includes two connection states; In the first connection state, the guide blade (101) is in a horizontal state; In the second connection state, the guide blade (101) is in a vertical state.

7. The flow equalizing device according to claim 6, characterized in that: The connecting seat (13) comprises a first part (132) and a second part (133) which are perpendicular to each other; The first connecting surface (130) is formed on the first part (132), and the second connecting surface (131) is formed on the second part (133); the first connecting surface (130) and the second connecting surface (131) are located outside the corner of the connecting seat (13) and are perpendicular to each other; and a connecting hole (134) is provided on the second part (133).

8. The flow equalizing device according to claim 7, characterized in that: The connection seat (13) is fixedly connected to an outer frame (11) of an integral structure surrounded by a plurality of the flow-uniform modules (10).

9. The flow equalizing device according to claim 1, characterized in that: The plurality of flow-uniform modules (10) are arranged in an array.

10. A passivation device, characterized in that: It comprises an annealing furnace (20) and a flow homogenizing device as claimed in any one of claims 1 to 9, wherein the flow homogenizing device is installed at the furnace mouth of the annealing furnace (20).

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