Sputtering target material detection device

Abstract

The utility model discloses a sputtering target material detection device, and relates to the technical field of sputtering target material detection. The device comprises a detection table, a support is fixed on the upper surface of the detection table, and an adjusting table is fixed at one end of the support; sliding grooves are formed in the two sides of the adjusting table, and sliding plates are slidably connected into the sliding grooves. A first motor is fixed to the bottom of the sliding plate, and a driving wheel is fixed to an output shaft of the first motor; a driven wheel is fixed to one end of the transmission rod, and a containing disc is fixed to the end, away from the driven wheel, of the transmission rod. The driving wheel is meshed with the driven wheel; limiting grooves are fixed to the two sides of the detection table. Through the action of the placing disc, the device can adjust the position of the sputtering target material in time, the sputtering target material can be conveniently detected in all directions by the detector, manual adjustment by workers is not needed, manpower is saved, errors caused by manual adjustment are reduced, and the detection result is more accurate.

Description

Technical Field

[0001] The utility model belongs to the technical field of sputtering target material detection, in particular to a sputtering target material detection device. Background Art

[0002] Sputtering is one of the main technologies for preparing thin film materials. It uses ions generated by an ion source, which are accelerated and gathered in a vacuum to form a high-speed energy ion beam to bombard the solid surface. The ions and the atoms on the solid surface exchange kinetic energy, causing the atoms on the solid surface to leave the solid and deposit on the substrate surface. The bombarded solid is the raw material for preparing sputtering deposited thin films, called sputtering targets.

[0003] The publication number "CN216246251U" and the name "A Sputtering Target Detection Device" discloses a sputtering target detection device, which mainly drives the disc to rotate through a half gear, and at the same time, under the action of the cam, the moving bar and the detection head are made to reciprocate up and down, so that the detection head can intermittently detect the sputtering target on the disc. The detection head in the device constantly moves up and down, and not only the range of movement is small, but also the sputtering target cannot be fully detected. At the same time, the back and forth movement is likely to cause deviations in the detection results. Utility Model Content

[0004] The purpose of the utility model is to provide a sputtering target detection device. Through the function of a placing plate, the device can timely adjust the position of the sputtering target, so that the detector can perform all-round detection of the sputtering target without the need for manual adjustment by staff, which not only saves manpower but also reduces the error caused by manual adjustment, making the detection result more accurate, and solving the problem that the existing detection head constantly moves up and down, not only has a small range of movement and is unable to comprehensively detect the sputtering target, but also easily leads to deviations in the detection results during the back-and-forth movement.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A sputtering target material detection device comprises a detection platform, a bracket is fixed on the upper surface of the detection platform, and an adjustment platform is fixed on one end of the bracket;

[0007] Both sides of the adjustment platform are provided with slide grooves, and slide plates are slidably connected inside the slide grooves;

[0008] A first motor is fixed to the bottom of the skateboard, a driving wheel is fixed to the output shaft of the first motor, and a bearing is fixed to the surface of the skateboard;

[0009] A transmission rod is fixed to the inner ring of the bearing, a driven wheel is fixed to one end of the transmission rod, and a placement plate is fixed to the end of the transmission rod away from the driven wheel;

[0010] The driving wheel is meshingly connected with the driven wheel;

[0011] Limiting grooves are fixed on both sides of the testing platform, and limiting strips are slidably connected inside the limiting grooves;

[0012] An adjustment groove is formed on the upper surface of the limit bar, an adjustment block is slidably connected inside the adjustment groove, and a detector is fixed at the bottom of the adjustment block.

[0013] The utility model is further configured as follows: a second motor is fixed on the upper surface of the adjustment table, and a positioning frame is fixed on the upper surface of the slide plate;

[0014] A rotating rod is rotatably connected inside the positioning frame, and the output shaft of the second motor is fixedly connected to one end of the rotating rod.

[0015] The utility model is further configured as follows: a transmission plate is fixed on the outer side of the rotating rod, and an end of the transmission plate away from the rotating rod is rotatably connected to an adjustment frame.

[0016] The utility model is further configured as follows: an adjustment plate is fixed to one end of the adjustment frame;

[0017] A fixing frame is fixed on the upper surface of the slide plate, and the adjusting plate is rotatably connected to the fixing frame.

[0018] The utility model is further configured as follows: connecting grooves are provided on both sides of the inner wall of the slide groove, and connecting blocks are fixed on both sides of the slide plate;

[0019] The connecting block is slidably connected to the connecting groove.

[0020] The utility model is further configured as follows: the inner wall of the limiting groove is a "T"-shaped structure, and the two ends of the limiting strip match the inner wall of the limiting groove.

[0021] The utility model is further configured as follows: the adjustment block is an "I"-shaped structure, and the inner side of the adjustment block matches the adjustment slot.

[0022] The utility model has the following beneficial effects:

[0023] The utility model uses the function of placing the plate, and the device can timely adjust the position of the sputtering target, so that the detector can perform all-round detection of the sputtering target without the need for manual adjustment by the staff, which not only saves manpower but also reduces the error caused by manual adjustment, making the detection result more accurate.

[0024] The utility model can increase the lateral range of movement of the placement plate through the action of the slide plate, and cooperate with the detector with adjustable position to perform comprehensive detection of the sputtering target material on the placement plate without moving the sputtering target material, so that the user can quickly complete the detection work.

[0025] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0027] Figure 1 The utility model is a schematic structural diagram of a sputtering target material detection device.

[0028] Figure 2 It is a schematic diagram of the side view structure of the utility model.

[0029] Figure 3 It is a schematic diagram of the rear view perspective structure of the utility model.

[0030] Figure 4 For the utility model Figure 3 A partial enlarged view of point A in the middle.

[0031] Figure 5 It is a schematic diagram of the skateboard structure of the utility model.

[0032] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0033] 1-testing table, 2-bracket, 3-adjusting table, 4-slide, 5-slide plate, 6-first motor, 7-driving wheel, 8-bearing, 9-transmission rod, 10-driven wheel, 11-placing plate, 12-limiting groove, 13-limiting strip, 14-adjusting groove, 15-adjusting block, 16-detector, 17-second motor, 18-positioning frame, 19-rotating rod, 20-transmission plate, 21-adjusting frame, 22-adjusting plate, 23-fixed frame, 24-connecting groove, 25-connecting block. DETAILED DESCRIPTION

[0034] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present utility model will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0035] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meanings as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0036] In the present invention, unless otherwise specified, directions such as "up" and "down" are usually used in reference to the directions shown in the drawings, or in reference to the vertical, perpendicular or gravity direction; similarly, for ease of understanding and description, "left" and "right" are usually used in reference to the left and right shown in the drawings; "inside" and "outside" refer to the inside and outside relative to the outline of each component itself, but the above-mentioned directions are not used to limit the present invention.

[0037] For specific embodiment 1, please refer to Figure 1-5 The utility model is a sputtering target detection device, including a detection platform 1, a bracket 2 is fixed on the upper surface of the detection platform 1, and an adjustment platform 3 is fixed at one end of the bracket 2; slide grooves 4 are opened on both sides of the adjustment platform 3, and a slide plate 5 is slidably connected inside the slide groove 4; a first motor 6 is fixed at the bottom of the slide plate 5, a driving wheel 7 is fixed on the output shaft of the first motor 6, and a bearing 8 is fixed on the surface of the slide plate 5; a transmission rod 9 is fixed on the inner ring of the bearing 8, a driven wheel 10 is fixed at one end of the transmission rod 9, and a placement plate 11 is fixed at the end of the transmission rod 9 away from the driven wheel 10; the driving wheel 7 is meshed and connected with the driven wheel 10; limiting grooves 12 are fixed on both sides of the detection platform 1, and a limiting strip 13 is slidably connected inside the limiting groove 12; an adjustment groove 14 is opened on the upper surface of the limiting strip 13, an adjustment block 15 is slidably connected inside the adjustment groove 14, and a detector 16 is fixed at the bottom of the adjustment block 15.

[0038] Specifically, the inner wall of the limiting groove 12 is a “T”-shaped structure, and both ends of the limiting strip 13 match the inner wall of the limiting groove 12 .

[0039] Furthermore, the adjustment block 15 is an I-shaped structure, and the inner side of the adjustment block 15 matches the adjustment slot 14 .

[0040] The operation process of this embodiment is as follows: when the device is in use, the sputtering target to be detected is placed on the placement plate 11, and the position of the detector 16 is adjusted by the movable limit bar 13 and the adjustment block 15. When the detector 16 is adjusted to a suitable position, the sputtering target placed on the placement plate 11 can be detected. When it is necessary to detect different parts of the sputtering target, the first motor 6 can be turned on, and the output shaft of the first motor 6 drives the driving wheel 7 at one end thereof to rotate. When the driving wheel 7 rotates, it drives the driven wheel 10 to rotate through engagement. When the driven wheel 10 rotates, it drives the placement plate 11 at one end thereof to rotate together through the transmission rod 9, and the placement plate 11 can rotate the sputtering target. The device can timely adjust the position of the sputtering target, so that the detector 16 can perform all-round detection of the sputtering target, without the need for manual adjustment by the staff, which not only saves manpower, but also reduces the error caused by manual adjustment, making the detection result more accurate.

[0041] For specific embodiment 2, please refer to Figure 1-2On the basis of the specific embodiment 1, a second motor 17 is fixed on the upper surface of the adjusting platform 3, and a positioning frame 18 is fixed on the upper surface of the slide plate 5; a rotating rod 19 is rotatably connected inside the positioning frame 18, and the output shaft of the second motor 17 is fixedly connected to one end of the rotating rod 19; a transmission plate 20 is fixed on the outer side of the rotating rod 19, and an adjusting frame 21 is rotatably connected to the end of the transmission plate 20 away from the rotating rod 19.

[0042] Specifically, an adjusting plate 22 is fixed at one end of the adjusting frame 21 ; a fixing frame 23 is fixed on the upper surface of the slide plate 5 , and the adjusting plate 22 is rotatably connected to the fixing frame 23 .

[0043] Furthermore, connecting grooves 24 are formed on both sides of the inner wall of the slide groove 4 , and connecting blocks 25 are fixed on both sides of the slide plate 5 ; the connecting blocks 25 are slidably connected to the connecting grooves 24 .

[0044] The operation process of this embodiment is as follows: when the device is in use, if the placement plate 11 is to be adjusted forward and backward, the second motor 17 can be turned on, and the output shaft of the second motor 17 drives the rotating rod 19 to rotate. When the rotating rod 19 rotates, it drives the transmission plate 20 on its outer side to rotate. When one end of the transmission plate 20 is lifted upward, it drives the adjustment frame 21 at one end thereof and one end of the adjustment plate 22 to be lifted upward as well. At this time, the other end of the adjustment plate 22 is about to pull the slide plate 5 backward, and the placement plate 11 on the surface of the slide plate 5 moves accordingly. The device can increase the lateral range of movement of the placement plate 11, and cooperate with the detector 16 whose position can be adjusted, so that the sputtering target material can be comprehensively detected without moving the sputtering target material on the placement plate 11, so that the user can quickly complete the detection work.

[0045] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0046] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A sputtering target material detection device, comprising a detection platform (1), characterized in that: A bracket (2) is fixed on the upper surface of the detection platform (1), and an adjustment platform (3) is fixed at one end of the bracket (2); Both sides of the adjustment platform (3) are provided with slide grooves (4), and a slide plate (5) is slidably connected inside the slide groove (4); A first motor (6) is fixed to the bottom of the slide plate (5); a driving wheel (7) is fixed to the output shaft of the first motor (6); and a bearing (8) is fixed to the surface of the slide plate (5); A transmission rod (9) is fixed to the inner ring of the bearing (8), a driven wheel (10) is fixed to one end of the transmission rod (9), and a placement plate (11) is fixed to the end of the transmission rod (9) away from the driven wheel (10); The driving wheel (7) is meshingly connected with the driven wheel (10); The detection platform (1) is provided with fixed limit grooves (12) on both sides, and the limit grooves (12) are internally slidably connected to limit bars (13); An adjustment groove (14) is formed on the upper surface of the limit strip (13), an adjustment block (15) is slidably connected inside the adjustment groove (14), and a detector (16) is fixed at the bottom of the adjustment block (15).

2. A sputtering target detection device according to claim 1, characterized in that: A second motor (17) is fixed on the upper surface of the adjustment platform (3), and a positioning frame (18) is fixed on the upper surface of the slide plate (5); A rotating rod (19) is rotatably connected inside the positioning frame (18), and an output shaft of the second motor (17) is fixedly connected to one end of the rotating rod (19).

3. A sputtering target detection device according to claim 2, characterized in that: A transmission plate (20) is fixed to the outer side of the rotating rod (19), and one end of the transmission plate (20) away from the rotating rod (19) is rotatably connected to an adjustment frame (21).

4. A sputtering target detection device according to claim 3, characterized in that: An adjustment plate (22) is fixed at one end of the adjustment frame (21); A fixing frame (23) is fixed on the upper surface of the slide plate (5), and the adjustment plate (22) is rotatably connected to the fixing frame (23).

5. A sputtering target detection device according to claim 4, characterized in that: The inner wall of the slide groove (4) is provided with connection grooves (24) on both sides, and the slide plate (5) is fixed with connection blocks (25) on both sides; The connection block (25) is slidably connected to the connection groove (24).

6. A sputtering target detection device according to claim 1, characterized in that: The inner wall of the limiting groove (12) is a "T"-shaped structure, and the two ends of the limiting strip (13) match the inner wall of the limiting groove (12).

7. The sputtering target detection device according to claim 1, characterized in that: The adjustment block (15) is an I-shaped structure, and the inner side of the adjustment block (15) matches the adjustment slot (14).

Images