Power supply control device of semiconductor temperature control equipment and semiconductor temperature control equipment
By designing a power control device for semiconductor temperature control equipment including a total circuit breaker, a split-excitation tripping coil, an emergency stop component and a PLC power supply, the problem of not being able to disconnect the power supply of the power circuit and the control circuit in the prior art is solved, and the power supply of the power circuit and the control circuit are realized. High reliability and effective management of equipment.
Patent Information
- Application Number
- CN202420889737.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-26
- Publication Date
- 2025-02-25
- Estimated Expiration
- 2034-04-26
AI Technical Summary
The circuit protection device of existing semiconductor-specific temperature control equipment cannot disconnect the power circuit power supply and the control circuit power supply at the same time, and when disconnecting the power circuit power supply, the main contactor needs to be added, resulting in an increase in the size of the equipment and affecting the size of the motor cabinet.
Design a power control device for semiconductor temperature control equipment, including a main circuit breaker, a split-excitation trip coil, an emergency stop component and a PLC power supply. Through the coordination of the emergency stop component and a split-excitation trip coil, the power circuit and control can be controlled simultaneously. Loop, when cutting off the power circuit power supply, the control circuit power supply is cut off, and the equipment is short-circuit overload protection is achieved through the main circuit breaker.
It realizes the power circuit and control circuit at the same time while ensuring the normal operation of the equipment, improves the reliability of the equipment in abnormal situations, and avoids the increase in equipment size and motor cabinet size by reducing component volume.
Smart Images
Figure CN222531322U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a power supply control device for semiconductor temperature control equipment and semiconductor temperature control equipment. Background Art
[0002] When semiconductor-specific temperature control equipment is running in a factory, if a fault occurs and the power cannot be cut off in time, it will lead to an accident, causing the production line to stop and huge economic losses. Therefore, it is necessary to set up a circuit protection device to cut off the power to the control circuit and power circuit in time.
[0003] At present, the circuit protection device used in semiconductor temperature control equipment cannot disconnect the power circuit power supply and control circuit power supply at the same time. When disconnecting the power circuit power supply at the same time, it is necessary to add a main contactor, which increases the volume of the equipment and the size. Due to the limited area of the client site, it also poses certain challenges to the size of the equipment. Utility Model Content
[0004] The utility model provides a power supply control device and a semiconductor temperature control device for semiconductor temperature control equipment, which are used to solve one of the defects in the prior art. The power circuit and the control circuit can be controlled at the same time, and the power supply of the power circuit can be cut off while the power supply of the control circuit is cut off. Under the premise of ensuring the normal operation of the equipment, the main circuit breaker can be directly disconnected to perform short-circuit overload protection of the equipment, thereby improving the reliability of the equipment when it is abnormal. The problem that a main contactor needs to be added when disconnecting the power circuit power supply is solved, and the problem that the main contactor is large in size, which affects the size of the equipment and increases the size of the motor cabinet.
[0005] The utility model provides a power supply control device for semiconductor temperature control equipment, comprising a main circuit breaker, a shunt tripping coil, an emergency stop component and a PLC power supply, wherein the main circuit breaker, the shunt tripping coil, the emergency stop component and the PLC power supply are sequentially connected in parallel to a power circuit, the PLC power supply is suitable for connecting a control circuit, and the emergency stop component is suitable for switching between a first state and a second state, in which, in the first state, the shunt tripping coil is not energized, the main circuit breaker is closed, and both the control circuit and the power circuit are energized, and in the second state, the shunt tripping coil is energized, the main circuit breaker is disconnected, and both the control circuit and the power circuit are de-energized.
[0006] According to a power supply control device of a semiconductor temperature control device provided by the utility model, it also includes a switching power supply, the switching power supply is electrically connected to the power circuit, and the switching power supply is connected in parallel between the emergency stop component and the shunt tripping coil.
[0007] According to a power supply control device of a semiconductor temperature control device provided by the utility model, it also includes a fuse, which is electrically connected to the power circuit and is connected in series between the shunt tripping coil and the main circuit breaker.
[0008] According to a power control device for a semiconductor temperature control device provided by the utility model, the emergency stop component includes a first intermediate relay, the first intermediate relay is electrically connected to the control circuit, the first intermediate relay is linked with the PLC power supply, in the first state, the first intermediate relay is energized, triggering the PLC power supply to power on, and in the second state, the first intermediate relay is de-energized, triggering the PLC power supply to power off.
[0009] According to a power supply control device for a semiconductor temperature control device provided by the utility model, the emergency stop component also includes a second intermediate relay, the second intermediate relay is electrically connected to the control circuit and is connected in parallel with the first intermediate relay, the second intermediate relay is linked with the shunt trip coil, in the first state, the second intermediate relay loses power, triggering the shunt trip coil to be de-energized, and in the second state, the second intermediate relay is energized, triggering the shunt trip coil to be energized.
[0010] According to a power control device for a semiconductor temperature control device provided by the utility model, the emergency stop component also includes a switching switch, and the switching switch is suitable for switching between a first position and a second position. In the first position, the emergency stop component switches to the first state, and in the second position, the emergency stop component switches to the second state.
[0011] According to a power control device for a semiconductor temperature control device provided by the utility model, the switching switch includes a first switch and a second switch, the first switch is connected in series to the first intermediate relay, and the second switch is connected in series to the second intermediate relay.
[0012] The utility model also provides a semiconductor temperature control device, comprising the power supply control device of the semiconductor temperature control device as described above.
[0013] The power supply control device of the semiconductor temperature control device provided by the utility model provides a power supply protection device for semiconductor-specific temperature control equipment. The main circuit breaker, the shunt trip coil, the emergency stop component and the PLC power supply are connected in parallel to the power circuit in sequence, and the main circuit breaker is powered off by controlling the shunt trip coil. The power circuit can supply power to the PLC power supply, and the PLC power supply is connected to the control circuit and can supply power to the control circuit. The emergency stop component can be switched between a first state and a second state. When switched to the first state, the shunt trip coil is not energized, so the main circuit breaker is closed, the power circuit is powered on, the PLC power supply is connected to the power circuit, and the power circuit supplies power to the PLC power supply, so the control circuit is also powered on; when switched to the second state, the shunt trip coil is energized, so the main circuit breaker is disconnected, the power circuit is powered off, and the PLC power supply is disconnected from the power circuit, so the control circuit is also powered on.
[0014] The utility model can control the power circuit and the control circuit at the same time by adding an emergency stop component and a shunt tripping coil to the circuit. When the emergency stop component switches from the first state to the second state, the power supply of the power circuit is cut off while the power supply of the control circuit is cut off. Under the premise of ensuring the normal operation of the equipment, the main circuit breaker is directly disconnected to perform short-circuit overload protection of the equipment, thereby improving the reliability of the equipment when it is abnormal. Moreover, the components of the separation tripping coil and the emergency stop component are small in size and occupy little space. When they are added to the motor cabinet, the size of the motor cabinet itself and the size of the equipment can be avoided from changing. There is no need to consider the site area limit, and the need to add a main contactor when disconnecting the power circuit power supply is solved. Due to the large size of the main contactor, it will affect the size of the equipment and increase the size of the motor cabinet.
[0015] In addition to the technical problems solved by the utility model, the technical features of the technical solutions constituted, and the advantages brought about by the technical features of these technical solutions described above, other technical features of the utility model and the advantages brought about by these technical features will be further explained in conjunction with the accompanying drawings, or will be understood through the practice of the utility model. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0017] Figure 1 The utility model is a circuit structure diagram of a power supply control device of a semiconductor temperature control device.
[0018] Reference numerals:
[0019] 100. Main circuit breaker;
[0020] 200, shunt tripping coil; 210, second power-on port;
[0021] 300, emergency stop component; 310, first intermediate relay; 320, second intermediate relay; 330, switch;
[0022] 400, PLC power supply; 410, first power-on port;
[0023] 500, switching power supply;
[0024] 600, fuse; 610, first fuse; 620, second fuse. DETAILED DESCRIPTION
[0025] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.
[0026] In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.
[0027] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.
[0028] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
[0029] In addition, in the description of the embodiments of the present utility model, unless otherwise specified, "multiple", "multiple roots", and "multiple groups" mean two or more, and "several", "several roots", and "several groups" mean one or more.
[0030] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model embodiment. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.
[0031] like Figure 1 As shown, the power supply control device of the semiconductor temperature control equipment provided by the embodiment of the utility model includes a main circuit breaker 100, a shunt trip coil 200, an emergency stop component 300 and a PLC power supply 400. The main circuit breaker 100, the shunt trip coil 200, the emergency stop component 300 and the PLC power supply 400 are connected in parallel to the power circuit in sequence. The PLC power supply 400 is suitable for connecting to the control circuit, and the emergency stop component 300 is suitable for switching between a first state and a second state. In the first state, the shunt trip coil 200 is not energized, the main circuit breaker 100 is closed, and both the control circuit and the power circuit are powered on. In the second state, the shunt trip coil 200 is energized, the main circuit breaker 100 is disconnected, and both the control circuit and the power circuit are powered off.
[0032] The power supply control device of the semiconductor temperature control device of the embodiment of the utility model provides a power supply protection device for semiconductor temperature control device. The main circuit breaker 100, the shunt tripping coil 200, the emergency stop component 300 and the PLC power supply 400 are connected in parallel to the power circuit in sequence, and the main circuit breaker 100 is controlled to be powered off by the shunt tripping coil 200, the power circuit can supply power to the PLC power supply 400, and the PLC power supply 400 is connected to the control circuit and can supply power to the control circuit. The emergency stop component 300 can be switched between a first state and a second state. When switched to the first state, the shunt tripping coil 200 is not energized, so the main circuit breaker 100 is closed, the power circuit is powered on, the PLC power supply 400 is connected to the power circuit, and the power circuit supplies power to the PLC power supply 400, so the control circuit is also powered on; when switched to the second state, the shunt tripping coil 200 is energized, so the main circuit breaker 100 is disconnected, the power circuit is powered off, and the PLC power supply 400 is disconnected from the power circuit, so the control circuit is also powered off.
[0033] The utility model can control the power circuit and the control circuit at the same time by adding an emergency stop component 300 and a shunt tripping coil 200 to the circuit. When the emergency stop component 300 switches from the first state to the second state, the power supply of the power circuit is cut off while the power supply of the control circuit is cut off. Under the premise of ensuring the normal operation of the equipment, the main circuit breaker 100 is directly disconnected to perform short-circuit overload protection of the equipment, thereby improving the reliability of the equipment when it is abnormal. Moreover, the components separating the tripping coil and the emergency stop component 300 are small in size and occupy little space. When they are added to the motor cabinet, the size of the motor cabinet itself and the size of the equipment can be avoided from changing, and there is no need to consider the site area limit. This solves the problem of adding a main contactor when disconnecting the power circuit power supply. Due to the large size of the main contactor, it will affect the size of the equipment and increase the size of the motor cabinet.
[0034] According to an embodiment provided by the utility model, the power supply control device of the semiconductor temperature control device also includes a switching power supply 500, which is electrically connected to the power circuit, and the switching power supply 500 is connected in parallel between the emergency stop component 300 and the shunt tripping coil 200. In this embodiment, the main circuit breaker 100, the shunt tripping coil 200, the emergency stop component 300, the switching current and the PLC power supply 400 are sequentially connected in parallel to the power circuit, and the switching power supply 500 itself has a certain isolation effect, and is set on the power circuit to play a role in protecting the equipment.
[0035] In this embodiment, the switching power supply 500 is a DC24V switching power supply 500 .
[0036] According to an embodiment provided by the utility model, the power supply control device of the semiconductor temperature control device further includes a fuse 600, the fuse 600 is electrically connected to the power circuit, and the fuse 600 is connected in series between the shunt trip coil 200 and the main circuit breaker 100. In this embodiment, the main circuit breaker 100, the shunt trip coil 200, the emergency stop component 300, the switch current and the PLC power supply 400 are sequentially connected in parallel to the power circuit, and the fuse 600 is connected in series between the shunt trip coil 200 and the main circuit breaker 100, and the control circuit short circuit protection can be performed through the fuse 600.
[0037] In this embodiment, a first fuse 610600 is connected in series to the R power supply line between the main circuit breaker 100 and the shunt tripping coil 200, and a second fuse 620600 is connected in series to the S power supply line between the main circuit breaker 100 and the shunt tripping coil 200.
[0038] According to an embodiment provided by the utility model, the emergency stop component 300 includes a first intermediate relay 310, which is electrically connected to the control circuit. The first intermediate relay 310 is linked with the PLC power supply 400. In the first state, the first intermediate relay 310 is energized, triggering the PLC power supply 400 to power on. In the second state, the first intermediate relay 310 is de-energized, triggering the PLC power supply 400 to power off.
[0039] In this embodiment, the first intermediate relay 310 is connected in parallel to the power circuit between the switching power supply 500 and the PLC power supply 400, and the line connected to the 24V DC power supply input line behind the switching power supply 500 and the 24V power supply contact on the PLC power supply 400 is provided with a first power-on port 410, and the first power-on port 410 is associated with the first intermediate relay 310. When the emergency stop component 300 is switched to the first state, the first intermediate relay 310 is powered by the power circuit, and then the first power-on port 410 is powered, triggering the PLC power supply 400 to power on, and the control circuit to power on, at this time, the shunt tripping coil 200 is not powered, the main relay is in a closed state, and the power circuit is also powered; when the emergency stop component 300 is switched to the second state, the first intermediate relay 310 is de-energized from the power circuit, and then the first power-on port 410 is de-energized, triggering the PLC power supply 400 to power off, and the control circuit is de-energized, at this time, the shunt tripping coil 200 is powered, the main relay is in an open state, and the power circuit is also de-energized.
[0040] According to an embodiment provided by the utility model, the emergency stop component 300 also includes a second intermediate relay 320, which is electrically connected to the control circuit and connected in parallel with the first intermediate relay 310. The second intermediate relay 320 is linked to the shunt trip coil 200. In the first state, the second intermediate relay 320 loses power, triggering the shunt trip coil 200 to be de-energized. In the second state, the second intermediate relay 320 is energized, triggering the shunt trip coil 200 to be energized.
[0041] In this embodiment, the second intermediate relay 320 is connected in parallel to the power circuit between the switching power supply 500 and the PLC power supply 400, and the line connecting the R power supply line after the fuse 600 and the shunt tripping coil 200 is provided with a second power-on port 210, and the second power-on port 210 is associated with the second intermediate relay 320. When the emergency stop component 300 switches to the first state, the second intermediate relay 320 is powered off from the power circuit, and then the second power port 210 is powered off, triggering the shunt trip coil 200 to be powered off, the main circuit breaker 100 is closed, and the power circuit is powered on. At this time, the first intermediate relay 310 is powered on, the PLC power supply 400 is powered on, and the control circuit is also powered on; when the emergency stop component 300 switches to the second state, the second intermediate relay 320 is powered on from the power circuit, and then the second power port 210 is powered on, triggering the shunt trip coil 200 to be powered on, the main circuit breaker 100 is disconnected, and the control circuit loses power. At this time, the first intermediate relay 310 loses power, the PLC power supply 400 loses power, and the control circuit also loses power.
[0042] The emergency stop component 300 is provided with a first intermediate relay 310 and a second intermediate relay 320, and the first intermediate relay 310 is linked with the PLC power supply 400, so as to control the power on and off of the PLC power supply 400, and then control the power on and off of the control circuit, and the second intermediate relay 320 is linked with the shunt tripping coil 200, so as to control the disconnection of the main circuit breaker 100, that is, through the isolation control of the two intermediate relays, the power supply of the power circuit and the control circuit can be cut off at the same time, ensuring the reliability of the power protection circuit of the equipment. At the same time, the intermediate relay also has a certain isolation effect, ensuring that the control power is output only when the front-end power supply and the 24V switching power supply 500 are working normally, playing a role in protecting the equipment.
[0043] According to an embodiment provided by the utility model, the emergency stop component 300 also includes a switching switch 330, which is suitable for switching between a first position and a second position. In the first position, the emergency stop component 300 switches to a first state, and in the second position, the emergency stop component 300 switches to a second state.
[0044] In this embodiment, the switching switch 330 controls the first intermediate relay 310 and the second intermediate relay 320 at the same time. The switching switch 330 is usually in the first position. When the circuit needs to be stopped urgently, the switching switch 330 is pressed, and the switching switch 330 can be switched from the first position to the second position. When the switching switch 330 is in the first position, the first intermediate relay 310 is powered on, and the second intermediate relay 320 is powered off. At this time, the control circuit and the power circuit are both powered on. When the switching switch 330 is in the second position, the first intermediate relay 310 is powered off, and the second intermediate relay 320 is powered on. At this time, the control circuit and the power circuit are both powered off.
[0045] In this embodiment, the switching switch 330 forms two contacts in the emergency stop component 300, namely a first contact and a second contact. The first contact is set at the negative end of the first intermediate relay 310, and the second contact is set at the negative end of the second intermediate relay 320. When the switching switch 330 is in the first position, the COM line after the switching power supply 500 is connected to the first contact. When the switching switch 330 is in the second position, the COM line after the switching power supply 500 is connected to the second contact.
[0046] According to an embodiment provided by the utility model, the switching switch 330 includes a first switch and a second switch, the first switch is connected in series to the first intermediate relay 310, and the second switch is connected in series to the second intermediate relay 320. In this embodiment, the switching switch 330 is composed of two linked first switches and second switches. The first switch controls the connection and disconnection between the first intermediate relay 310 and the power circuit, and the second switch controls the connection and disconnection between the second intermediate relay 320 and the power circuit.
[0047] When the switching switch 330 is switched to the first position, the emergency stop component 300 is in the first state, the first switch is closed, the first intermediate relay 310 is powered, and the first power port 410 is triggered to be powered, so the PLC power supply 400 is powered, and the control circuit is also powered, the second switch is disconnected, and the second power port 210 is triggered to lose power, so the shunt trip coil 200 is not powered, the main circuit breaker 100 is closed, and the power circuit is powered. When the switching switch 330 is switched to the second position, the emergency stop component 300 is in the second state, the first switch is disconnected, the first intermediate relay 310 is powered off, and the first power port 410 is triggered to lose power, so the PLC power supply 400 is powered off, and the control circuit is also powered off, the second switch is closed, and the second power port 210 is triggered to be powered, so the shunt trip coil 200 is powered, the main circuit breaker 100 is disconnected, and the power circuit is powered off.
[0048] The semiconductor temperature control device provided by the present invention is described below. The semiconductor temperature control device described below and the circuit control device of the semiconductor temperature control device described above can be referred to each other.
[0049] An embodiment of the utility model further provides a semiconductor temperature control device, comprising a power supply control device of the semiconductor temperature control device as described in the above embodiment.
[0050] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.
Claims
1. A power control device for a semiconductor temperature control device, characterized in that: The invention comprises a main circuit breaker, a shunt tripping coil, an emergency stop component and a PLC power supply. The main circuit breaker, the shunt tripping coil, the emergency stop component and the PLC power supply are sequentially connected in parallel to a power circuit. The PLC power supply is suitable for connecting a control circuit. The emergency stop component is suitable for switching between a first state and a second state. In the first state, the shunt tripping coil is not energized, the main circuit breaker is closed, and both the control circuit and the power circuit are energized. In the second state, the shunt tripping coil is energized, the main circuit breaker is disconnected, and both the control circuit and the power circuit are de-energized.
2. The power supply control device for semiconductor temperature control equipment according to claim 1, characterized in that: It also includes a switching power supply, which is electrically connected to the power circuit and connected in parallel between the emergency stop component and the shunt tripping coil.
3. The power supply control device for semiconductor temperature control equipment according to claim 2, characterized in that: It also includes a fuse, which is electrically connected to the power circuit and is connected in series between the shunt tripping coil and the main circuit breaker.
4. The power supply control device for semiconductor temperature control equipment according to any one of claims 1 to 3, characterized in that: The emergency stop component includes a first intermediate relay, which is electrically connected to the control circuit and is linked to the PLC power supply. In the first state, the first intermediate relay is energized, triggering the PLC power supply to power on; in the second state, the first intermediate relay is de-energized, triggering the PLC power supply to power off.
5. The power supply control device for semiconductor temperature control equipment according to claim 4, characterized in that: The emergency stop component also includes a second intermediate relay, which is electrically connected to the control circuit and connected in parallel with the first intermediate relay. The second intermediate relay is linked to the shunt trip coil. In the first state, the second intermediate relay loses power, triggering the shunt trip coil to be de-energized. In the second state, the second intermediate relay is energized, triggering the shunt trip coil to be energized.
6. The power supply control device for semiconductor temperature control equipment according to claim 5, characterized in that: The emergency stop component further includes a switch, and the switch is suitable for switching between a first position and a second position. In the first position, the emergency stop component switches to the first state, and in the second position, the emergency stop component switches to the second state.
7. The power supply control device for semiconductor temperature control equipment according to claim 6, characterized in that: The switching switch includes a first switch and a second switch, the first switch is connected in series to the first intermediate relay, and the second switch is connected in series to the second intermediate relay.
8. A semiconductor temperature control device, characterized in that: A power supply control device comprising a semiconductor temperature control device as claimed in any one of claims 1 to 7.