Steam-water separation system for dust-free room

Abstract

The utility model relates to a steam-water separation system for a dust-free room, which comprises a steam-water separation box, a liquid inlet is arranged on one side wall surface of the steam-water separation box, and an exhaust port and a liquid outlet are sequentially arranged on the other side wall surface of the steam-water separation box from top to bottom; the liquid inlet is connected with a waste liquid outlet of the cleaning tank through a first waste liquid pipe group; the liquid outlet is connected with an inlet of a U-shaped pipe through a second waste liquid pipe group; an outlet of the U-shaped pipe is connected with an inlet of an alkaline waste liquid collecting system through a third waste liquid pipe group; the exhaust port is connected with an inlet of the alkaline waste gas collecting system through the waste gas pipe group unit; the waste gas pipe set unit comprises a first waste gas pipe set and a second waste gas pipe set which are sequentially connected, and the first waste gas pipe set is obliquely arranged. By arranging the steam-water separation box and the corresponding pipe set, waste gas volatilized from the ammonia water waste liquid can be effectively prevented from flowing back into the cleaning tank, and the body health of maintenance personnel is not affected.

Description

Technical Field

[0001] The utility model relates to the technical field of integrated circuit production and manufacturing, in particular to a steam-water separation system for a clean room. Background Art

[0002] CMP equipment, or wafer polishing equipment, achieves efficient removal of excess material on the wafer surface and global nanoscale flattening through the synergistic effect of chemical corrosion and mechanical grinding. It is a key process technology required for the front-end processes of advanced integrated circuit manufacturing, advanced packaging and other links.

[0003] In the prior art, a cleaning tank for cleaning wafers is provided in the CMP equipment, which requires the use of ammonia water. The used ammonia water is connected to the factory's waste liquid collection system through a waste liquid discharge pipe, and then discharged to the outside of the CMP equipment. However, since ammonia water is highly volatile, when the operator is performing maintenance on the CMP equipment, the ammonia gas volatilized from the ammonia waste liquid in the waste liquid discharge pipe will return to the cleaning tank (the cleaning liquid in the cleaning tank will be emptied during the maintenance of the CMP equipment), causing the operator to accidentally inhale ammonia gas, which is not conducive to the operator's health; at the same time, the volatilized ammonia gas will adhere to the inner wall of the cleaning tank, affecting the quality of the subsequent processed products, increasing the wafer defect rate, and reducing the product quality. Utility Model Content

[0004] In view of the shortcomings of the above-mentioned existing production technology, the applicant provides a steam-water separation system for a clean room. By setting a steam-water separation box and a corresponding pipe group, it can effectively prevent the waste gas emitted by the volatilized ammonia waste liquid from flowing back into the cleaning tank, thereby preventing the operator from accidentally inhaling it and ensuring the safety of the operation; at the same time, it can effectively improve the maintenance effect, effectively reduce the wafer defect rate, and improve product quality.

[0005] The technical solution adopted by the utility model is as follows:

[0006] A steam-water separation system for a clean room comprises a steam-water separation box, a liquid inlet is provided on one side wall of the steam-water separation box, and an exhaust port and a liquid outlet are provided on the other side wall of the steam-water separation box in sequence from top to bottom;

[0007] The liquid inlet is connected to the waste liquid outlet of the cleaning tank through the first waste liquid pipe group, so that the waste liquid in the cleaning tank is discharged to the steam-water separation box;

[0008] The liquid outlet is connected to the inlet of the U-shaped tube through the second waste liquid pipe group, and the outlet of the U-shaped tube is connected to the inlet of the alkaline waste liquid collection system through the third waste liquid pipe group, so that the waste liquid in the steam-water separation box is discharged to the alkaline waste liquid collection system;

[0009] The exhaust port is connected to the inlet of the alkaline exhaust gas collection system through the exhaust pipe assembly unit, so that the exhaust gas in the steam-water separation box is discharged to the alkaline exhaust gas collection system;

[0010] The exhaust pipe group unit comprises a first exhaust pipe group and a second exhaust pipe group which are connected in sequence, and the first exhaust pipe group is arranged obliquely so that the liquid component in the exhaust gas in the steam-water separation box condenses and flows back into the steam-water separation box.

[0011] As a further improvement of the above technical solution:

[0012] The inclination angle θ of the first exhaust pipe group is in the range of 30°-35°.

[0013] The second exhaust pipe group is arranged horizontally.

[0014] A water baffle is installed in the interior of the steam-water separation box. The top end surface of the water baffle is higher than the liquid inlet, and the bottom end surface of the water baffle is lower than the liquid inlet.

[0015] The steam-water separation box is made of FPA plastic material.

[0016] The first waste liquid pipe set, the second waste liquid pipe set and the third waste liquid pipe set are all made of polypropylene.

[0017] The first exhaust pipe group and the second exhaust pipe group are both made of stainless steel with Teflon coating.

[0018] A transparent sealing cover plate is detachably mounted on the top of the steam-water separation box.

[0019] The liquid inlet, the air outlet and the liquid outlet are arranged on two opposite side walls of the steam-water separation box.

[0020] The cleaning tank is arranged inside the CMP machine.

[0021] The beneficial effects of the utility model are as follows:

[0022] The utility model has a compact and reasonable structure and is easy to operate. Through the steam-water separation box and the corresponding pipe group, it can effectively prevent the waste gas emitted by the ammonia waste liquid from flowing back into the cleaning tank, thereby preventing the operator from accidentally inhaling it and ensuring the safety of the operation; at the same time, it can effectively improve the maintenance effect, effectively reduce the wafer defect rate, and improve product quality.

[0023] The utility model also has the following advantages:

[0024] (1) In the present invention, by making the inclination angle θ of the first exhaust pipe group range from 30° to 35°, the liquid component of the exhaust gas in the exhaust pipe group unit can be effectively discharged, so that the gas component of the exhaust gas can flow to the alkaline exhaust gas collection system, and the liquid component can flow back to the steam-water separation box.

[0025] (2) In the present invention, by providing a water baffle, it is possible to prevent waste liquid from splashing into the waste gas pipe unit when the waste liquid flow rate is large; at the same time, the water baffle has a flow disturbance effect, which can disturb the waste liquid and promote the volatilization of ammonia therein.

[0026] (3) The U-shaped tube in the present invention can effectively prevent the ammonia in the waste liquid discharged through the liquid outlet from further volatilizing and flowing back.

[0027] (4) In the present invention, a transparent sealing cover is provided, so that the operator can observe the liquid level in the steam-water separation box through the transparent sealing cover. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of the utility model.

[0029] Figure 2 It is a schematic diagram of the flow direction of waste liquid and waste gas in the utility model.

[0030] Among them: 1. cleaning tank; 2. first waste liquid pipe group; 3. steam-water separation box; 4. CMP machine; 5. second waste liquid pipe group; 6. U-shaped pipe; 7. third waste liquid pipe group; 8. alkaline waste liquid collection system; 9. water baffle; 10. first waste gas pipe group; 11. second waste gas pipe group; 12. alkaline waste gas collection system; 13. liquid inlet; 14. liquid outlet; 15. exhaust port; 16. ground; 17. elevated floor. DETAILED DESCRIPTION

[0031] The specific implementation of the present utility model is described below in conjunction with the accompanying drawings.

[0032] The structure and functions of the utility model are as follows:

[0033] like Figure 1-Figure 2As shown, a steam-water separation system for a clean room includes a steam-water separation box 3, a liquid inlet 13 is provided on one side wall of the steam-water separation box 3, and an exhaust port 15 and a liquid outlet 14 are provided on the other side wall of the steam-water separation box 3 in sequence from top to bottom; the liquid inlet 13 is connected to the waste liquid outlet of the cleaning tank 1 through the first waste liquid pipe group 2, so that the waste liquid in the cleaning tank 1 is discharged to the steam-water separation box 3; the liquid outlet 14 is connected to the inlet of the U-shaped pipe 6 through the second waste liquid pipe group 5, and the outlet of the U-shaped pipe 6 is connected to the alkali liquid outlet through the third waste liquid pipe group 7. The exhaust port 15 is connected to the inlet of the alkaline waste liquid collection system 8, so that the waste liquid in the steam-water separation box 3 is discharged to the alkaline waste liquid collection system 8; the exhaust port 15 is connected to the inlet of the alkaline waste gas collection system 12 through the exhaust pipe group unit, so that the waste gas in the steam-water separation box 3 is discharged to the alkaline waste gas collection system 12; the exhaust pipe group unit includes a first exhaust pipe group 10 and a second exhaust pipe group 11 connected in sequence, and the first exhaust pipe group 10 is arranged obliquely, so that the liquid component in the waste gas in the steam-water separation box 3 condenses and flows back into the steam-water separation box 3. The steam-water separation system of the present invention is used to transport and discharge the waste liquid generated in the cleaning tank 1 in the CMP machine 4. The CMP machine 4 is usually installed in a dust-free room with a higher cleanliness level. The cleaning tank 1 is arranged inside the CMP machine 4. An elevated floor 17 is installed in such a dust-free room. The steam-water separation system of the present invention is suitable for a dust-free room environment and can be installed under the elevated floor 17 of the dust-free room. It has a compact layout, high space utilization, and can effectively prevent the backflow of volatile waste gas.

[0034] In the utility model, the waste liquid is ammonia waste liquid, which can volatilize ammonia gas, and the volatilized ammonia gas contains water vapor, thus becoming waste steam, the liquid component of the waste steam is water vapor, and the gas component is ammonia gas;

[0035] like Figure 1 As shown, the inclination angle θ of the first exhaust pipe group 10 is in the range of 30°-35°; within this angle range, the liquid component of the exhaust gas in the exhaust pipe group unit can be effectively discharged, so that the gas component of the exhaust gas can flow into the alkaline exhaust gas collection system 12, and the liquid component can flow back into the steam-water separation box 3, and then be discharged into the alkaline waste liquid collection system 8 through the waste liquid pipe group below;

[0036] In order to ensure the exhaust gas collection effect, the alkaline exhaust gas collection system 12 maintains negative pressure;

[0037] The second exhaust pipe group 11 is arranged horizontally, and at the same time, the second exhaust pipe group 11 is flush with the top end surface of the steam-water separation box 3, so that a compact structure can be achieved.

[0038] A water baffle 9 is installed inside the steam-water separation box 3. The top end surface of the water baffle 9 is higher than the liquid inlet 13, and the bottom end surface of the water baffle 9 is lower than the liquid inlet 13. The water baffle 9 is a thin plastic plate, which is used to prevent the waste liquid from splashing into the waste gas pipe group unit when the waste liquid flow is large. At the same time, the baffle 9 has a turbulent effect, which can disturb the waste liquid and promote the volatilization of ammonia therein.

[0039] The steam-water separation box 3 is made of FPA plastic material, and a transparent sealing cover is detachably installed on the top of the steam-water separation box 3. An observation window is arranged on the top of the steam-water separation box 3, and a transparent sealing cover is installed at the observation window. The transparent sealing cover is made of acid- and alkali-resistant plastic material, and is detachably sealed and installed by screws and sealing rings. The operator can observe the liquid level in the steam-water separation box 3 through the transparent sealing cover.

[0040] The first waste liquid pipe group 2, the second waste liquid pipe group 5 and the third waste liquid pipe group 7 are all made of polypropylene; the first waste gas pipe group 10 and the second waste gas pipe group 11 are all made of stainless steel with Teflon coating. They are suitable for alkaline waste liquid and waste gas, are corrosion-resistant and have low cost.

[0041] The liquid inlet 13, the exhaust port 15 and the liquid outlet 14 are arranged on the opposite side walls of the steam-water separation box 3, that is, the liquid inlet 13 and the exhaust port 15 are arranged on the opposite side walls of the steam-water separation box 3, the liquid inlet 13 and the liquid outlet 14 are arranged on the opposite side walls of the steam-water separation box 3, the exhaust port 15 and the liquid outlet 14 are arranged on the same side wall of the steam-water separation box 3, and the exhaust port 15 is located above the liquid outlet 14.

[0042] like Figure 2 As shown, in the present invention, the installation height of the elevated floor 17 is 600 mm, that is, the distance h1 between the bottom end surface of the elevated floor 17 and the ground 16 is 600 mm;

[0043] The height difference h2 between the liquid inlet 13 and the liquid outlet 14 is about 100 mm, thereby ensuring that the waste liquid flowing in from the liquid inlet 13 is discharged through the liquid outlet 14 as much as possible and facilitating the volatilization of ammonia in the waste liquid.

[0044] The height difference h3 between the inlet of the U-shaped tube 6 and the ground 16 is about 350 mm, thereby providing installation space for the subsequent connection between the third waste liquid pipe group 7 and the alkaline waste liquid collection system 8;

[0045] The height requirement of the U-shaped tube 6 itself is less than 350 mm to ensure that the U-shaped tube 6 can be installed smoothly.

[0046] The working process of the utility model is as follows:

[0047] like Figure 2As shown, the waste liquid in the cleaning tank 1 flows into the steam-water separation box 3 through the first waste liquid pipe group 2 and the liquid inlet 13, and the water baffle 9 prevents the waste liquid from splashing into the waste gas pipe group unit;

[0048] The waste liquid in the steam-water separation box 3 flows into the alkaline waste liquid collection system through the liquid outlet 14, the second waste liquid pipe group 6, the U-shaped pipe 6 and the third waste liquid pipe group 7 in sequence;

[0049] During the outflow of the waste liquid in the steam-water separation box 3, the volatilized waste gas containing ammonia and water vapor flows into the alkaline waste gas collection system through the exhaust port 15, the first waste gas pipe group 10 and the second waste gas pipe group 11 in sequence;

[0050] During the exhaust gas discharge process, part of the liquid components therein will condense on the inner wall surface of the exhaust gas pipe group unit, and the condensed accumulated water will flow back to the steam-water separation box 3 through the inclined first exhaust gas pipe group 10.

[0051] The above description is an explanation of the utility model, not a limitation of the utility model. The scope of the utility model is defined by the claims. Any form of modification can be made within the protection scope of the utility model.

Claims

1. A steam-water separation system for a clean room, characterized in that: It comprises a steam-water separation box (3), wherein a liquid inlet (13) is provided on one side wall of the steam-water separation box (3), and an exhaust port (15) and a liquid outlet (14) are provided on the other side wall of the steam-water separation box (3) in sequence from top to bottom; The liquid inlet (13) is connected to the waste liquid outlet of the cleaning tank (1) through the first waste liquid pipe group (2), so that the waste liquid in the cleaning tank (1) is discharged to the steam-water separation box (3); The liquid outlet (14) is connected to the inlet of the U-shaped tube (6) through the second waste liquid pipe group (5), and the outlet of the U-shaped tube (6) is connected to the inlet of the alkaline waste liquid collection system (8) through the third waste liquid pipe group (7), so that the waste liquid in the steam-water separation box (3) is discharged to the alkaline waste liquid collection system (8); The exhaust port (15) is connected to the inlet of the alkaline waste gas collection system (12) through the waste gas pipe assembly unit, so that the waste gas in the steam-water separation box (3) is discharged to the alkaline waste gas collection system (12); The exhaust pipe group unit comprises a first exhaust pipe group (10) and a second exhaust pipe group (11) which are connected in sequence, and the first exhaust pipe group (10) is arranged obliquely so that the liquid components in the exhaust gas in the steam-water separation box (3) condense and flow back into the steam-water separation box (3).

2. A steam-water separation system for a clean room as claimed in claim 1, characterized in that: The inclination angle θ of the first exhaust pipe group (10) is in the range of 30°-35°.

3. The steam-water separation system for a clean room according to claim 1, characterized in that: The second exhaust pipe group (11) is arranged horizontally.

4. A steam-water separation system for a clean room as claimed in claim 1, characterized in that: A water baffle (9) is installed in the interior of the steam-water separation box (3), wherein the top end surface of the water baffle (9) is higher than the liquid inlet (13), and the bottom end surface of the water baffle (9) is lower than the liquid inlet (13).

5. The steam-water separation system for a clean room according to claim 1, characterized in that: The steam-water separation box (3) is made of FPA plastic material.

6. The steam-water separation system for a clean room according to claim 1, characterized in that: The first waste liquid pipe group (2), the second waste liquid pipe group (5) and the third waste liquid pipe group (7) are all made of polypropylene.

7. The steam-water separation system for a clean room according to claim 1, characterized in that: The first exhaust pipe group (10) and the second exhaust pipe group (11) are both made of stainless steel with a Teflon coating.

8. The steam-water separation system for a clean room according to claim 1, characterized in that: A transparent sealing cover plate is detachably mounted on the top of the steam-water separation box (3).

9. The steam-water separation system for a clean room according to claim 1, characterized in that: The liquid inlet (13), the exhaust port (15) and the liquid outlet (14) are arranged on two opposite side walls of the steam-water separation box (3).

10. The steam-water separation system for a clean room according to claim 1, characterized in that: The cleaning tank (1) is arranged inside the CMP machine (4).

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