Safe and reliable tail gas washing equipment

Abstract

The utility model discloses safe and reliable tail gas washing equipment which comprises a shell body and a fan, an airflow channel is formed in an inner cavity of the shell body, the airflow channel is communicated with an air inlet and an air outlet in the shell body, tail gas can enter through the air inlet and be discharged from the air outlet under the action of the fan, and the tail gas can enter the shell body through the air outlet. Spraying heads and rectifying plates are arranged in the air flow channel, the spraying heads are communicated with a water source and used for spraying washing tail gas, each rectifying plate comprises a plurality of through holes allowing the tail gas to penetrate through, the rectifying plates divide the air flow channel into a plurality of relatively independent cavities, the air flow channel comprises an upstream channel and a downstream channel, and the upstream channel is communicated with the downstream channel. The two ends of the upstream channel are provided with two first valves respectively, and the two first valves can control the upstream channel to be communicated with the downstream channel or the outside. The device is reasonable in structure, safe, reliable and convenient to maintain.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor tail gas treatment, and in particular to a safe and reliable tail gas water washing device. Background Art

[0002] In the semiconductor manufacturing industry, some harmful exhaust gases need to go through specific treatment processes to reduce their harm to the environment and personnel. Water washing or spraying is a commonly used exhaust gas treatment method, especially suitable for treating pollutants that are soluble in water or can be removed by water chemical reactions, such as acidic, alkaline, organic and other harmful exhaust gases. This method is simple and effective and can treat most of the harmful gases that are soluble in water.

[0003] In production practice, due to equipment failure or shutdown for maintenance, there are situations where the water washing equipment cannot spray water for washing. If the exhaust gas is still input normally at this time, there will be a major safety hazard. Utility Model Content

[0004] The utility model discloses a safe and reliable tail gas washing device, which solves the technical problem of the high risk of tail gas diffusion after failure of the spray washing device in the prior art, and has the technical advantages of reasonable structure, safety, reliability and convenient maintenance. The technical solution adopted is as follows

[0005] A safe and reliable exhaust gas washing device comprises a shell body and a fan, wherein an inner cavity of the shell body forms an air flow channel, wherein the air flow channel is respectively connected to an air inlet and an exhaust port on the shell body, wherein under the action of the fan, the exhaust gas can enter through the air inlet and be discharged from the exhaust port, wherein a spray head and a rectifying plate are arranged in the air flow channel, wherein a plurality of spray heads are connected to a water source for spraying and washing the exhaust gas, wherein the rectifying plate comprises a plurality of through holes for the exhaust gas to pass through, and a plurality of the rectifying plates divide the air flow channel into a plurality of relatively independent chambers, wherein the air flow channel comprises an upstream channel and a downstream channel, wherein two first valves are respectively arranged at both ends of the upstream channel, and wherein the two first valves can control the upstream channel to be connected to the downstream channel or to the outside.

[0006] Based on the above technical solution, there are multiple air inlets, all of which are arranged on the side wall of the upstream channel between the two first valves.

[0007] On the basis of the above technical solution, the upstream channel can be connected to other water washing equipment through an exhaust gas pipeline, and a second valve is provided on the exhaust gas pipeline.

[0008] Based on the above technical solution, the two first valves have the same structure and include a valve plate, and the valve plate includes a shaft rod, which passes through the shell body and is rotatably connected to the shell body. Driving the shaft rod to rotate can enable the first valve to open or close the upstream channel.

[0009] Based on the above technical solution, the upstream channel also includes a limit assembly arranged near the first valve, and the limit assembly includes two limit strips arranged opposite to each other, the two limit strips extend along the inner wall surface of the upstream channel, and the two limit strips can respectively abut against the top and bottom surfaces of the valve plate at corresponding positions to limit the rotation of the valve plate and seal the upstream channel.

[0010] On the basis of the above technical solution, it also includes a water pump. The shell body is connected downwardly to a water tank. The inner cavity of the water tank is connected to the upstream channel and the downstream channel to store spray water. The water inlet of the water pump is connected to the inner cavity of the water tank through a filter to supply water to the sprinkler head.

[0011] On the basis of the above technical solution, a filler is provided in at least one chamber of the airflow channel, and the filler is used to increase the contact time and contact area between water vapor and exhaust gas.

[0012] On the basis of the above technical solution, a plurality of transversely extending water pipes are provided in the air flow channel, and a plurality of the spray heads are disposed on the plurality of water pipes and have different outlet directions.

[0013] On the basis of the above technical solution, it also includes a first plate, and multiple air inlets are evenly distributed on the side wall of the upstream channel, and the air inlets have an inclination angle toward the direction of the air flow. The first plate is arranged one-to-one with the air inlets and has an inclination angle to guide the air flow entering through the air inlets to flow along the set air flow direction.

[0014] On the basis of the above technical solution, it also includes a second plate, which is fixed on the inner wall of the downstream channel and inclined to partially cover the exhaust port. The exhaust gas mixed with water vapor collides with the second plate and is discharged from the exhaust port.

[0015] Beneficial Effects

[0016] The utility model has a reasonable structure. The air flow channel in the shell body includes an upstream channel and a downstream channel. The upstream channel is provided with two first valves, which can control the upstream channel to be connected with the downstream channel or the outside. In this way, when the equipment fails or needs to be shut down for maintenance, the two first valves can control the upstream channel to be connected with other water washing equipment and isolated from the downstream channel. It has high safety in use and is simple and easy to operate. In addition, it also includes a limit assembly, which is used to abut against the top or bottom surface of the valve plate when the valve plate cuts off the upstream channel. In this way, on the one hand, the rotation of the valve plate can be limited, and on the other hand, the sealing effect of the valve on the upstream channel can be improved.

[0017] The shell body is connected downwardly to the inner cavity of the water tank. The water tank is used to collect large particles mixed in the exhaust gas and provide water for the sprinkler head, effectively saving water.

[0018] In the present invention, the arrangement of multiple rectifying plates can, on the one hand, rectify the exhaust gas passing through, and on the other hand, the formed chamber can be used to accommodate fillers or filter materials to reduce the exhaust gas flow rate and improve the water washing effect.

[0019] The air inlet in the utility model has an inclination angle toward the direction of the air flow, and is also provided with a first plate in a one-to-one correspondence, so that the exhaust gas flow can be guided to flow in a set direction to avoid causing large disturbances. In addition, the second plate can effectively slow down the air flow velocity and reduce the discharge of water vapor to avoid burdening the downstream process. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the utility model. For ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0021] Figure 1 : A schematic diagram of the structure of the utility model;

[0022] Figure 2 : Figure 1 A schematic diagram of the local enlarged structure at point A in the middle;

[0023] Figure 3 : Schematic diagram of the structure of the water pipe and the sprinkler head thereon;

[0024] Figure 4 : Schematic diagram of the structure of the rectifier plate;

[0025] Figure 5 : Figure 1 A schematic diagram of the structure in which the first two valves in the middle are actuated to connect the upstream channel with the exhaust gas pipeline; DETAILED DESCRIPTION

[0026] The following description and accompanying drawings fully illustrate the specific embodiments of this article so that those skilled in the art can practice them. Parts and features of some embodiments may be included in or replace parts and features of other embodiments. The scope of the embodiments of this article includes the entire scope of the claims, as well as all available equivalents of the claims. Herein, the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the embodiments can be referred to each other.

[0027] The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, it can also be the internal communication of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0028] As used herein, the term "plurality" means two or more than two, unless otherwise specified.

[0029] In this document, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B means: A or B.

[0030] In this article, the term "and / or" is a description of the association relationship between objects, indicating that three relationships may exist. For example, A and / or B means: A or B, or, A and B.

[0031] like Figures 1 to 5A safe and reliable exhaust gas washing device is shown, comprising a shell body 1 and a fan. The shell body 1 is made of sheet metal, has a relatively flat surface, and its inner wall is coated with an anti-corrosion coating, or the shell body 1 is made of plastic.

[0032] The inner cavity of the shell body 1 forms an air flow channel 3, and the two ends of the air flow channel 3 are respectively connected to the air inlet 4 and the exhaust port 5 on the shell body 1. The fan is fixed and arranged close to the exhaust port 5. The volute and impeller of the fan are made of polymer plastic, which effectively improves the acid and corrosion resistance of the fan, reduces costs and increases service life. Under the action of the fan, the exhaust gas enters through the air inlet 4 and is discharged from the exhaust port 5.

[0033] The air flow channel 3 is provided with a spray head 6 and a rectifying plate 7. A plurality of spray heads 6 are connected to a water source for spraying and washing the tail gas. The air flow channel 3 is provided with a plurality of transversely extending water pipes 14. Figure 3 As shown, the plurality of spray heads 6 are disposed on a plurality of water pipes 14 and have different outlet directions to improve the uniformity of spraying.

[0034] like Figure 4 As shown, the rectifying plate 7 includes a plurality of through holes for the exhaust gas to pass through, and the exhaust gas is rectified after passing through the through holes, and the plurality of rectifying plates 7 divide the air flow channel into a plurality of relatively independent chambers, and the chambers are used to store fillers 13 or filter materials. Figure 1 As shown, a packing 13 is provided in a chamber, and the packing 13 is used to increase the contact time and contact area between water vapor and exhaust gas. The packing 13 is such as Raschig rings, Pall rings, step rings, Interlocks packing, etc. The packing 13 is existing technology, and those skilled in the art can select it according to needs, which will not be described here.

[0035] like Figure 1 As shown, the air flow channel 3 includes an upstream channel 31 and a downstream channel 32. Two first valves 8 are respectively provided at both ends of the upstream channel 31. The two first valves 8 can control the upstream channel 31 to communicate with the downstream channel 32 or the outside.

[0036] Specifically, there are multiple air inlets 4, all of which are arranged on the side wall of the upstream passage 31 between the two first valves 8. The two first valves 8 have the same structure and include a valve plate 81. The valve plate 81 includes a shaft 82. The shaft 82 passes through the shell body 1 and is rotatably connected to the shell body 1. A bearing is sleeved at the rotation connection. The shaft 82 is driven to rotate, so that the first valve 8 can open or close the upstream passage 31. The linkage operating rod (not shown) is also included. The linkage operating rod is respectively connected to the two shafts 32 to realize the linkage of the two valve plates 81. Under normal working conditions, such as Figure 1 As shown, the two valve plates 81 control the upstream channel 31 and the downstream channel 32 to communicate with each other and to isolate them from the outside. Figure 5As shown, the linkage operating lever is operated, and the two valve plates 81 control the upstream channel 31 to communicate with the outside and isolate it from the downstream channel 32. This operation is efficient and can respond quickly. In order to avoid exhaust gas leakage, the upstream channel 31 is connected to other water washing equipment through the exhaust gas pipeline 9, and a second valve is provided on the exhaust gas pipeline 9 to facilitate automatic control. The linkage operating lever is a prior art, and those skilled in the art can select it according to their needs. It will not be repeated here. In other embodiments of the present invention, the linkage operating lever can also be replaced by a manual operating lever and an electric actuator.

[0037] like Figure 2 As shown, the inner wall of the upstream channel 31 also includes a limit assembly 11 arranged near the first valve 8, and the limit assembly 11 includes two limit strips arranged opposite to each other, and the two limit strips extend along the inner wall surface of the upstream channel 31, and when the valve plate 81 cuts off the upstream channel 31, the two limit strips can respectively abut against the top surface and the bottom surface of the valve plate 81 at the corresponding positions to limit the rotation of the valve plate 81 and seal the upstream channel 31. In addition, in order to avoid damaging the valve plate 81 and improve the sealing performance, rubber pads are also provided at the end surfaces of the two limit strips facing the valve plate 81 to further protect the valve plate 81 from bumps and improve the sealing performance.

[0038] It also includes a first plate 15, and multiple air inlets 4 are evenly distributed on the side wall of the upstream channel 31, and the air inlet 4 has an inclination angle toward the direction of the air flow. The first plate 15 is arranged one-to-one with the air inlet 4 and has an inclination angle. In this embodiment, the inclination angle of the first plate 14 is consistent with the inclination angle of the air inlet 4 to guide the air flow entering through the air inlet 4 to flow along the set air flow direction. At the same time, the exhaust gas entering through the air inlet 4 also first collides with the inner wall of the upstream channel 31, which is beneficial to reduce the exhaust gas flow rate and cause large particles therein to settle.

[0039] like Figure 1 As shown, it also includes a second plate 16, which is fixed on the inner wall of the downstream channel 32 and is inclined to partially cover the exhaust port 5. The exhaust gas mixed with water vapor collides with the second plate 16 and is discharged from the exhaust port 5. In this way, the exhaust gas flowing to the exhaust port 5 will first collide with the second plate 16, causing the mixed water vapor therein to condense and drip, thereby reducing the amount of water vapor discharged.

[0040] It also includes a water pump (not shown). The shell body 1 is connected to a water tank 12 downward. The inner cavity of the water tank 12 is connected to the upstream channel 31 and the downstream channel 32 to store spray water. The water inlet of the water pump is connected to the inner cavity of the water tank 12 through a filter to supply water to the sprinkler head. The filter is a prior art, and those skilled in the art can select it according to their needs. In order to facilitate the implementation of monitoring the pH value of the spray water in the water tank 12 to determine whether the spray water needs to be replaced, a pH sensor is also provided in the water tank 12. The pH sensor is used to monitor the pH value of the spray water and is electrically connected to an external controller. In addition, a feeding port is also provided on the shell body 1. The feeding port is closed under normal working conditions. When it is necessary to add a reagent to adjust the pH value of the spray water, the reagent can be added into the water tank 12 through the feeding port.

[0041] like Figure 1 As shown, a plurality of viewing windows are provided on the side walls of the shell body 1 and the water tank 12 . In this embodiment, the viewing windows of the storage cabinet of the shell body 1 are arranged corresponding to the positions of the water pipes 14 , so that the staff can conveniently check the spraying conditions in the shell body 1 .

[0042] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications based on the present invention belong to the scope of protection required by the present invention.

Claims

1. A safe and reliable tail gas washing equipment, characterized in that: The invention comprises a shell body (1) and a fan, wherein an inner cavity of the shell body (1) is formed with an air flow channel (3), wherein the air flow channel (3) is respectively connected to an air inlet (4) and an air outlet (5) on the shell body (1), and under the action of the fan, exhaust gas can enter through the air inlet (4) and be discharged from the exhaust outlet (5), wherein a spray head (6) and a rectifying plate (7) are arranged in the air flow channel (3), wherein a plurality of spray heads (6) are connected to a water source for spraying water to wash the exhaust gas, wherein the rectifying plate (7) comprises a plurality of through holes for the exhaust gas to pass through, and wherein a plurality of the rectifying plates (7) divide the air flow channel (3) into a plurality of relatively independent chambers, wherein the air flow channel (3) comprises an upstream channel (31) and a downstream channel (32), wherein two first valves (8) are respectively arranged at both ends of the upstream channel (31), and wherein the two first valves (8) can control the upstream channel (31) to be connected to the downstream channel (32) or to the outside.

2. The safe and reliable tail gas washing equipment according to claim 1 is characterized in that: There are multiple air inlets (4) and all are arranged on the side wall of the upstream channel (31) between the two first valves (8).

3. The safe and reliable tail gas washing equipment according to claim 2 is characterized in that: The upstream channel (31) can be connected to other water washing equipment through a tail gas pipeline (9), and a second valve is provided on the tail gas pipeline (9).

4. The safe and reliable tail gas washing equipment according to claim 2 is characterized in that: The two first valves (8) have the same structure and comprise a valve plate (81). The valve plate (81) comprises a shaft (82). The shaft (82) passes through the shell body (1) and is rotatably connected to the shell body (1). When the shaft (82) is driven to rotate, the first valve (8) can open or close the upstream channel (31).

5. The safe and reliable tail gas washing equipment according to claim 4 is characterized in that: The upstream channel (31) further comprises a limit assembly (11) arranged near the first valve (8), the limit assembly (11) comprising two limit strips arranged opposite to each other, the two limit strips extending along the inner wall surface of the upstream channel (31), and the two limit strips can respectively abut against the top surface and the bottom surface of the valve plate (81) at corresponding positions, so as to limit the rotation of the limit valve plate (81) and seal the upstream channel (31).

6. The safe and reliable tail gas washing equipment according to any one of claims 1 to 5, characterized in that: It also includes a water pump. The shell body (1) is connected downwardly to a water tank (12). The inner cavity of the water tank (12) is connected to the upstream channel (31) and the downstream channel (32) to store spray water. The water inlet of the water pump is connected to the inner cavity of the water tank (12) through a filter to supply water to the spray head (6).

7. The safe and reliable tail gas washing equipment according to claim 6 is characterized in that: A filler (13) is provided in at least one chamber of the air flow channel (3), and the filler (13) is used to increase the contact time and contact area between water vapor and exhaust gas.

8. The safe and reliable tail gas washing equipment according to claim 7 is characterized in that: A plurality of transversely extending water pipes (14) are arranged in the air flow channel (3), and a plurality of the spray heads (6) are arranged on the plurality of water pipes (14) and have different outlet directions.

9. The safe and reliable tail gas washing equipment according to claim 7 or 8, characterized in that: It also comprises a first plate (15), a plurality of the air inlets (4) are evenly distributed on the side wall of the upstream channel (31), and the air inlets (4) have an inclination angle towards the flow direction of the air flow, and the first plate (15) is arranged in a one-to-one correspondence with the air inlets (4) and has an inclination angle to guide the air flow entering through the air inlets (4) to flow along the set air flow direction.

10. The safe and reliable tail gas washing equipment according to claim 9 is characterized in that: It also includes a second plate (16), which is fixedly mounted on the inner side wall of the downstream channel (32) and arranged at an angle to partially shield the exhaust port (5), and the exhaust gas mixed with water vapor collides with the second plate (16) and is discharged from the exhaust port (5).

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