Wafer cleaning conveying device stable in conveying

Abstract

The utility model discloses a stable wafer cleaning conveying device, relates to the technical field of wafer conveying, and aims to solve the problems that most of existing wafers are conveyed on a conveying belt and are easy to collide with one another, and the wafers are easy to slide due to sundries, so that the moving stability is poor. A driving roller is arranged at one end of the conveying belt, a driven roller is arranged at the other end of the conveying belt, mounting frames are arranged at the two ends of the driving roller, and the surfaces of the two ends of the driving roller and the surfaces of the two ends of the driven roller are rotationally connected with the mounting frames through roller shaft external connection bearings. The stabilizing assemblies are arranged outside the conveying belt, a stabilizing seat is arranged in each stabilizing assembly, and a fixed base is arranged at the lower end of each stabilizing seat; the through groove is formed in the stabilizing seat, the through groove and the stabilizing seat are of an integrated structure, the wafer is inserted into the through groove, and a rotating groove is formed in the inner wall of one side of the through groove.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer conveying, in particular to a conveying device for wafer cleaning with stable conveying. Background Art

[0002] Wafer is one of the most important raw materials of LED, the light-emitting component of LED, and the core part of LED. The quality of wafer will directly determine the performance of LED. Wafer needs to be cleaned before processing and transported by conveyor.

[0003] For example, the Chinese authorized patent (belt conveyor) with announcement number CN207361133U includes a power motor, a roller and a conveyor belt, wherein the power motor is connected to the roller, the number of the rollers is two, the conveyor belt is arranged between the two rollers, the roller is in the shape of a drum with a depression in the middle, and the conveyor belt is in the shape of an arc with a depression in the middle. The belt conveyor provided by the utility model adopts a structural design of a drum and a conveyor belt with a depression in the middle, so that materials are conveyed in the depression conveyor belt, so as to prevent materials such as powder from falling from both sides of the conveyor belt, thereby improving the conveying efficiency of the belt conveyor.

[0004] However, most of the existing wafers are transported on conveyor belts, which are prone to collision with each other and sliding due to debris, resulting in poor movement stability; therefore, it does not meet the existing needs. In this regard, we have proposed a wafer cleaning conveyor with stable transportation. Utility Model Content

[0005] The utility model aims to provide a conveying device for wafer cleaning with stable conveying, so as to solve the problem in the above-mentioned background technology that most of the existing wafers are conveyed on a conveyor belt, which are easy to collide with each other and are also easy to slide due to debris, resulting in poor movement stability.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solution: a conveying device for wafer cleaning with stable conveying, comprising: a conveying belt, a driving roller is arranged at one end of the conveying belt, a driven roller is arranged at the other end of the conveying belt, mounting frames are arranged at both ends of the driving roller, and both end surfaces of the driving roller and the driven roller are rotatably connected to the mounting frame through roller shaft external bearings;

[0007] Also includes:

[0008] A stabilizing component, which is arranged outside the conveyor belt, and a plurality of stabilizing components are provided. The stabilizing component includes a stabilizing seat inside, and a fixed base is provided at the lower end of the stabilizing seat;

[0009] The through groove is arranged inside the stabilizing seat, and the through groove and the stabilizing seat are an integrated structure, and the wafer is inserted into the through groove.

[0010] Preferably, a rotation groove is provided on the inner wall of one side of the through groove, and the rotation groove and the through groove are an integral structure, a rotation column is provided inside the rotation groove, and the rotation column is rotatably connected to the rotation groove through a column shaft.

[0011] Preferably, a recessed groove is provided on the lower surface of the through groove, and the recessed groove and the stabilizing seat are an integral structure.

[0012] Preferably, an anti-outward protrusion groove is provided on the inner bottom surface of the recessed groove, and the anti-outward protrusion groove is inwardly recessed, a single-head fastener is provided inside the anti-outward protrusion groove, and one end of the single-head fastener passes through the stabilizing seat.

[0013] Preferably, a threaded connection groove is provided inside the fixed base, and the single-head fastener is threadedly connected to the fixed base through the threaded connection groove.

[0014] Preferably, an AC motor is disposed at one end of the mounting frame, a motor mounting plate is disposed at one end of the AC motor, and the motor mounting plate is fixed to the mounting frame by external bolts.

[0015] Preferably, a support frame is provided at the lower end of the mounting frame, and the support frame is fixed to the mounting frame by welding, and a stabilizing frame is provided on one side of the support frame, and the stabilizing frame is fixed to the support frame by welding.

[0016] Compared with the prior art, the beneficial effects of the utility model are:

[0017] 1. The utility model arranges a stabilizing assembly outside the conveyor belt, and the stabilizing assembly consists of a stabilizing seat and a fixed base. One end of a single-head fastener passes through the stabilizing seat, and the single-head fastener is threadedly connected to the fixed base through a threaded connection groove. After passing through the fixed base, the single-head fastener continues to be threadedly fixed to the conveyor belt, so that the stabilizing seat and the fixed base are fixed on the conveyor belt. The conveyor belt drives the stabilizing assembly to move, and a cleaning device is installed at one end of the conveyor belt. When the stabilizing assembly moves to one end of the conveyor belt for tilting, gravity is used to realize the sliding of the wafer, and the wafer slides into the cleaning device for cleaning. When sliding, the wafer contacts the rotating column, and the rotating column is rotated under force, thereby facilitating the sliding of the wafer, reducing friction, and avoiding friction damage. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 This is a schematic diagram of the structure of the stabilizing component of the utility model;

[0020] Figure 3This is a schematic diagram of the top view structure of the stabilizing component of the utility model;

[0021] Figure 4 This is a schematic diagram of the split structure of the stabilizing seat and the fixed base of the utility model;

[0022] In the figure: 1. conveyor belt; 2. active roller; 3. driven roller; 4. mounting frame; 5. AC motor; 6. motor mounting plate; 7. support frame; 8. stabilizing frame; 9. stabilizing assembly; 10. stabilizing seat; 11. through groove; 12. fixed base; 13. rotating groove; 14. rotating column; 15. recessed groove; 16. single-head fastener; 17. anti-protrusion groove; 18. threaded connection groove. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0024] See also Figure 1-4 The utility model provides an embodiment: a conveying device for wafer cleaning with stable conveying, comprising: a conveyor belt 1, a driving roller 2 is arranged at one end of the conveyor belt 1, a driven roller 3 is arranged at the other end of the conveyor belt 1, mounting frames 4 are arranged at both ends of the driving roller 2, and both end surfaces of the driving roller 2 and the driven roller 3 are rotatably connected to the mounting frame 4 through roller shaft external bearings;

[0025] Also includes:

[0026] A stabilizing assembly 9 is arranged outside the conveyor belt 1. A plurality of stabilizing assemblies 9 are provided. The stabilizing assembly 9 includes a stabilizing seat 10 inside. A fixed base 12 is provided at the lower end of the stabilizing seat 10.

[0027] A through groove 11 is arranged inside the stable seat 10, and the through groove 11 and the stable seat 10 are an integrated structure. The chip is inserted into the through groove 11. A rotating groove 13 is arranged on the inner wall of one side of the through groove 11, and the rotating groove 13 and the through groove 11 are an integrated structure. A rotating column 14 is arranged inside the rotating groove 13, and the rotating column 14 is rotatably connected to the rotating groove 13 through a column shaft.

[0028] Insert the wafer to be cleaned into the through groove 11 of the stabilizing seat 10, and drive the stabilizing component 9 to move through the conveyor belt 1. The cleaning device is installed at one end of the conveyor belt 1. When the stabilizing component 9 moves to one end of the conveyor belt 1 and tilts, gravity is used to make the wafer slide down and slide into the cleaning device for cleaning. When sliding down, the wafer contacts the rotating column 14, and the rotating column 14 is rotated under force, thereby facilitating the wafer to slide down, reducing friction, and avoiding friction damage.

[0029] See also Figure 2 , 3 A recessed groove 15 is provided on the lower surface of the through groove 11 , and the recessed groove 15 and the stabilizing seat 10 are an integrated structure, which activates a limiting effect on the bottom of the wafer to prevent the wafer from rotating and falling from both sides of the through groove 11 .

[0030] See also Figure 3 The inner bottom surface of the recessed groove 15 is provided with an anti-outward protrusion groove 17, and the anti-outward protrusion groove 17 is inward-shaped, and a single-head fastener 16 is provided inside the anti-outward protrusion groove 17, and one end of the single-head fastener 16 passes through the stable seat 10, and a threaded connection groove 18 is provided inside the fixed base 12, and the single-head fastener 16 is threadedly connected to the fixed base 12 through the threaded connection groove 18, the stable seat 10 is placed on the upper end of the fixed base 12, and the stable seat 10 and the fixed base 12 are aligned, one end of the single-head fastener 16 passes through the stable seat 10, and the single-head fastener 16 is threadedly connected to the fixed base 12 through the threaded connection groove 18, after passing through the fixed base 12, it continues to be threadedly fixed with the conveyor belt 1, so that the stable seat 10 and the fixed base 12 are fixed on the conveyor belt 1.

[0031] See also Figure 1 An AC motor 5 is provided at one end of the mounting frame 4, and a motor mounting plate 6 is provided at one end of the AC motor 5. The motor mounting plate 6 is fixed to the mounting frame 4 by external bolts. The AC motor 5 is started, and the output end is used to drive the active roller 2 to rotate. The active roller 2 and the driven roller 3 are driven by gears and chains (not shown in the figure), so that the conveyor belt 1 drives the stabilizing component 9 to move.

[0032] See also Figure 1 A support frame 7 is provided at the lower end of the mounting frame 4, and the support frame 7 is welded and fixed to the mounting frame 4. A stabilizing frame 8 is provided on one side of the support frame 7, and the stabilizing frame 8 is welded and fixed to the support frame 7, which has a supporting effect on the whole.

[0033] Working principle: When in use, the stabilizing seat 10 is placed on the upper end of the fixed base 12, and the stabilizing seat 10 and the fixed base 12 are aligned, one end of the single-head fastener 16 passes through the stabilizing seat 10, and the single-head fastener 16 is threadedly connected with the fixed base 12 through the threaded connection groove 18, and after passing through the fixed base 12, it continues to be threadedly fixed with the conveyor belt 1, so that the stabilizing seat 10 and the fixed base 12 are fixed on the conveyor belt 1, and the stabilizing seat 10 and the fixed base 12 form a stabilizing assembly 9, and several stabilizing assemblies 9 are equidistantly distributed and fixed, and the wafer to be cleaned is inserted into the stabilizing seat 10 The AC motor 5 is started inside the through groove 11, and the output end is used to drive the active roller 2 to rotate. The active roller 2 and the driven roller 3 are driven by gears and chains (not shown in the figure), so that the conveyor belt 1 drives the stabilizing component 9 to move. The cleaning device is installed at one end of the conveyor belt 1. When the stabilizing component 9 moves to one end of the conveyor belt 1 and tilts, gravity is used to make the wafer slide down and slide into the cleaning device for cleaning. When sliding down, the wafer contacts the rotating column 14, and the rotating column 14 is rotated under force, thereby facilitating the wafer to slide down, reducing friction, and avoiding friction damage.

[0034] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A conveying device for wafer cleaning with stable conveying, comprising a conveyor belt (1), a driving roller (2) being arranged at one end of the conveyor belt (1), a driven roller (3) being arranged at the other end of the conveyor belt (1), mounting frames (4) being arranged at both ends of the driving roller (2), and both end surfaces of the driving roller (2) and the driven roller (3) being rotatably connected to the mounting frame (4) through roller shaft external bearings; Features: Also includes: A stabilizing component (9) is arranged outside the conveyor belt (1), and a plurality of stabilizing components (9) are provided. The stabilizing component (9) includes a stabilizing seat (10) inside, and a fixed base (12) is provided at the lower end of the stabilizing seat (10); A through groove (11) is arranged inside the stabilizing seat (10), and the through groove (11) and the stabilizing seat (10) are an integral structure, and the wafer is inserted into the through groove (11).

2. The wafer cleaning conveying device with stable conveying according to claim 1, characterized in that: A rotating groove (13) is provided on the inner wall of one side of the through groove (11), and the rotating groove (13) and the through groove (11) are an integral structure. A rotating column (14) is provided inside the rotating groove (13), and the rotating column (14) is rotatably connected to the rotating groove (13) via a column shaft.

3. The wafer cleaning conveying device with stable conveying according to claim 1, characterized in that: A recessed groove (15) is provided on the lower surface of the through groove (11), and the recessed groove (15) and the stabilizing seat (10) are an integral structure.

4. The wafer cleaning conveying device with stable conveying according to claim 3, characterized in that: The inner bottom surface of the recessed groove (15) is provided with an anti-external protrusion groove (17), and the anti-external protrusion groove (17) is inwardly recessed. A single-head fastener (16) is provided inside the anti-external protrusion groove (17), and one end of the single-head fastener (16) passes through the stabilizing seat (10).

5. The wafer cleaning conveying device with stable conveying according to claim 3, characterized in that: A threaded connection groove (18) is provided inside the fixed base (12), and the single-head fastener (16) is threadedly connected to the fixed base (12) via the threaded connection groove (18).

6. The wafer cleaning conveying device with stable conveying according to claim 1, characterized in that: An AC motor (5) is disposed at one end of the mounting frame (4), a motor mounting plate (6) is disposed at one end of the AC motor (5), and the motor mounting plate (6) is fixed to the mounting frame (4) by external bolts.

7. The wafer cleaning conveying device with stable conveying according to claim 1, characterized in that: A support frame (7) is provided at the lower end of the mounting frame (4), and the support frame (7) is fixed to the mounting frame (4) by welding; a stabilizing frame (8) is provided on one side of the support frame (7), and the stabilizing frame (8) is fixed to the support frame (7) by welding.

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