Heat recovery device

Abstract

The utility model discloses a heat recovery device which is connected to a hot air outlet of an APF cabinet through an air supply pipeline, so that hot air exhausted by a heat dissipation fan of the APF cabinet can enter the air supply pipeline when the APF cabinet operates, and the heat exchange assembly is arranged on the air supply pipeline, so that the heat exchange assembly can absorb heat of the hot air in the air supply pipeline; therefore, the absorbed heat can be provided for heat utilization equipment such as a water heater and a cleaning machine to be used by a user, heat recycling during operation of the APF cabinet is achieved, and due to the fact that hot air in the air supply pipeline does not escape into the workshop, the temperature rise phenomenon of the area, near the APF cabinet, in the workshop is relieved, and the service life of the APF cabinet is prolonged. Therefore, the performance of other equipment in the workshop is not influenced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing workshops, and in particular to a heat recovery device. Background Art

[0002] Silicon carbide (SiC), as an emerging third-generation semiconductor core material, has excellent properties such as wide bandgap, high critical breakdown electric field strength, high electron mobility, good radiation resistance and chemical stability. This makes it an important substrate wafer material with wide applications, showing good application prospects in the fields of aviation devices, new energy vehicles, rail transportation and household appliances.

[0003] In the silicon carbide process production in the workshop, the crystal growth furnace equipment needs to use an active power filter (APF) cabinet to dynamically suppress harmonics and compensate for reactive power to maintain the quality and stability of the power supply system. However, a large amount of heat will be generated when the APF cabinet works efficiently. This heat will be discharged by the APF cabinet's own cooling fan and will affect the performance of other equipment in the workshop. Utility Model Content

[0004] The purpose of the present application is to provide a heat recovery device that can realize the recovery and utilization of heat when the APF cabinet is in operation, and will not affect the performance of other equipment in the workshop.

[0005] The embodiments of the present application can be implemented as follows:

[0006] In the first aspect, the utility model provides a heat recovery device for use in a silicon carbide production workshop, comprising an air supply duct and a heat exchange component, wherein the air inlet end of the air supply duct is used to be connected to the hot air outlet of the APF cabinet, and the heat exchange component is arranged in the air supply duct, and the heat exchange component is used to absorb the heat of the hot air in the air supply duct and provide it to the heat-using equipment.

[0007] In an optional embodiment, the heat exchange component includes a cold water inlet pipe, a heat exchanger and a hot water outlet pipe connected in sequence, the cold water inlet pipe is used to connect to a cold water source, the heat exchanger is arranged in the air supply pipe, and the hot water outlet pipe is used to connect to a heat-using device.

[0008] In an optional embodiment, the hot water outlet pipe is provided with a temperature sensor and a control valve, and the opening of the control valve can be adjusted according to the detection result of the temperature sensor.

[0009] In an optional embodiment, the air supply duct is provided with an exhaust bypass valve, the exhaust bypass valve is located on the upstream side of the heat exchange component, and the exhaust bypass valve is used to connect the exhaust duct.

[0010] In an optional embodiment, the air supply duct includes an air supply main and at least two air supply branch pipes, each of the air supply branch pipes is used to be connected to the hot air outlet of an APF cabinet, and the air inlet end of the air supply main pipe is connected to the air outlet ends of all the air supply branch pipes.

[0011] In an optional embodiment, the heat recovery device further includes a return air duct, the air outlet end of the supply air duct is connected to the air inlet end of the return air duct, and the air outlet end of the return air duct is used to connect to the air inlet of the APF cabinet.

[0012] In an optional embodiment, the heat recovery device further includes a pressurized fan, the air outlet end of the air supply duct is connected to the negative pressure side of the pressurized fan, and the positive pressure side of the pressurized fan is connected to the air inlet end of the return air duct.

[0013] In an optional embodiment, the air outlet end of the pressurizing fan or the return air duct is provided with a pressure sensor, and the pressurizing fan can be operated or stopped according to the detection result of the pressure sensor.

[0014] In an optional embodiment, the return air duct is provided with a fresh air bypass valve, and the fresh air bypass valve is used to connect the fresh air duct.

[0015] In an optional embodiment, the return air duct includes a return air main and at least two return air branch pipes, the air inlet end of the return air main is connected to the air outlet end of the supply air duct, the air supply end of the return air main is connected to the air inlet ends of all the return air branch pipes, and the air outlet end of each return air branch pipe is used to connect to the air inlet of an APF cabinet.

[0016] The beneficial effects of the embodiments of the present application include, for example:

[0017] It is connected to the hot air outlet of the APF cabinet through the air supply duct, so that the hot air exhausted by the APF cabinet's own heat dissipation fan can enter the air supply duct when the APF cabinet is running. Because the heat exchange component is arranged in the air supply duct, the heat exchange component can absorb the heat of the hot air in the air supply duct. The absorbed heat can be provided to heat-using equipment such as water heaters and cleaning machines for users to use, thereby realizing heat recovery and utilization when the APF cabinet is running. Moreover, since the hot air will not escape into the workshop through the air supply duct, the temperature rise phenomenon in the area near the APF cabinet in the workshop is alleviated, and therefore it will not affect the performance of other equipment in the workshop. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 This is a schematic diagram of the flow path structure principle of the heat recovery device in an embodiment of the present application.

[0020] Icons: 100-heat recovery device; 110-air supply duct; 111-air supply main pipe; 112-air supply branch pipe; 113-exhaust bypass valve; 120-heat exchange component; 121-cold water inlet pipe; 122-heat exchanger; 123-hot water outlet pipe; 124-temperature sensor; 125-control valve; 126-cold water valve; 127-hot water bypass valve; 130-return air duct; 131-return air main pipe; 132-return air branch pipe; 133-fresh air bypass valve; 134-pressure sensor; 140-boosting fan; 200-APF cabinet; 210-hot air outlet; 220-cooling fan; 230-air inlet; 300-heat-using equipment; 310-heating hot water main pipeline; 400-water source. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0022] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0023] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0024] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0025] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0026] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0027] In conjunction with the accompanying drawings, some embodiments of the present application are described in detail below. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0028] The embodiment of the present application discloses a heat recovery device 100 , which is mainly used in a silicon carbide production workshop to recover heat from an APF cabinet 200 .

[0029] The heat recovery device 100 includes an air supply duct 110 and a heat exchange component 120. The air inlet end of the air supply duct 110 is used to connect to the hot air outlet 210 of the APF cabinet 200. The heat exchange component 120 is arranged in the air supply duct 110. The heat exchange component 120 is used to absorb the heat of the hot air in the air supply duct 110 and provide it to the heat-using equipment 300.

[0030] In this way, the hot air outlet 210 of the APF cabinet 200 is connected to the air supply duct 110, so that when the APF cabinet 200 is running, the hot air discharged by its own heat dissipation fan 220 can enter the air supply duct 110, and because the heat exchange component 120 is arranged in the air supply duct 110, the heat exchange component 120 can absorb the heat of the hot air in the air supply duct 110, and the absorbed heat can be provided to heat-using equipment 300 such as water heaters and cleaning machines for users to use, thereby realizing heat recovery and utilization when the APF cabinet 200 is running. In addition, since the hot air will not escape into the workshop through the air supply duct 110, the temperature rise phenomenon in the area near the APF cabinet 200 in the workshop is alleviated, and therefore it will not affect the performance of other equipment in the workshop.

[0031] It should be noted that the heat recovery device 100 can be used to recover heat from one or more APF cabinets 200, for example Figure 1 As shown, when two APF cabinets 200 are connected at the same time, the air supply duct 110 includes an air supply main pipe 111 and at least two air supply branch pipes 112. Each air supply branch pipe 112 is used to be connected to the hot air outlet 210 of an APF cabinet 200. The air inlet end of the air supply main pipe 111 is connected to the air outlet ends of all the air supply branch pipes 112. In this way, heat recovery can be performed simultaneously for more than two APF cabinets 200 used online, thereby improving efficiency.

[0032] Optionally, the air supply main pipe 111 of the air supply duct 110 is provided with an exhaust bypass valve 113, which is located on the upstream side of the heat exchange component 120. The exhaust bypass valve 113 is used to connect the exhaust duct. In this way, the closing (or opening) of the exhaust bypass valve 113 can be selected accordingly according to the actual operation (or stop) of the heat-using equipment 300. When the heat-using equipment 300 is stopped and heat recovery is not needed, the hot air can be directly discharged outside the workshop through the exhaust duct.

[0033] The heat exchange component 120 includes a cold water inlet pipe 121, a heat exchanger 122 and a hot water outlet pipe 123 which are connected in sequence. The cold water inlet pipe 121 is used to connect to the cold water source 400, the heat exchanger 122 is arranged in the air supply main pipe 111 of the air supply duct 110, and the hot water outlet pipe 123 is used to connect to the heat-using equipment 300. In this way, cold water enters from the cold water inlet pipe and passes through the heat exchanger 122. Since the heat exchanger 122 is arranged in the air supply duct 110, the cold water in the heat exchanger 122 can absorb the heat of the hot air and heat up to become hot water. The hot water is sent to the heating hot water main pipe 310 of the heat-using equipment 300 through the hot water outlet pipe 123, thereby realizing the recovery and utilization of the heat generated by the APF cabinet 200.

[0034] Optionally, the hot water outlet pipe 123 is provided with a temperature sensor 124 and a control valve 125. The opening of the control valve 125 can be adjusted according to the detection result of the temperature sensor 124. In this way, the opening of the control valve 125 can be selected accordingly based on the actual temperature of the hot water in the hot water outlet pipe 123 detected by the temperature sensor 124, thereby realizing the control of the water flow rate of the heating hot water main pipe 310 flowing into the heat-using equipment 300 to meet the actual demand for water temperature.

[0035] Of course, it can be understood that the connection between the hot water outlet pipe 123 and the heating hot water main pipe 310 is controlled by the hot water bypass valve 127, so that the hot water bypass valve 127 can be closed when not needed to disconnect the hot water outlet pipe and the heating hot water main pipe 310.

[0036] The cold water inlet pipe 121 is provided with a cold water valve 126 to selectively open or close to control whether the cold water in the water source 400 needs to flow to the heat exchanger 122 .

[0037] The cold water remaining after the user uses the hot water can also be used as the water source 400 to supply the cold water inlet pipe, thereby saving water resources.

[0038] Optionally, the heat recovery device 100 further includes a return air duct 130 , the air outlet end of the supply air duct 110 is connected to the air inlet end of the return air duct 130 , and the air outlet end of the return air duct 130 is used to connect to the air inlet 230 of the APF cabinet 200 .

[0039] In this way, the hot air in the air supply duct 110 absorbs heat through the heat exchange component 120 and then is cooled as cold air. Due to the negative pressure suction of the heat dissipation fan 220 in the APF cabinet 200, it can be sent to the APF cabinet 200 through the return air duct 130 for heat dissipation, thereby realizing the reuse of the cold air after the hot air is cooled, thereby saving fresh air resources.

[0040] Of course, for Figure 1 In the case where at least two APF cabinets 200 are used online, the return air duct 130 can be connected to the air inlets 230 of each APF cabinet 200 at the same time, so as to simultaneously meet the demand for supplying cold air to multiple APF cabinets 200. Specifically, the return air duct 130 includes a return air main pipe 131 and at least two return air branch pipes 132, the air inlet end of the return air main pipe 131 is connected to the positive pressure side of the booster fan 140, the air supply end of the return air main pipe 131 is connected to the air inlet ends of all the return air branch pipes 132, and the air outlet end of each return air branch pipe 132 is used to connect to the air inlet 230 of an APF cabinet 200.

[0041] The return air main pipe 131 of the return air duct 130 is provided with a fresh air bypass valve 133, which is used to connect the fresh air duct. In this way, the fresh air bypass valve 133 can be selectively opened or closed according to actual needs, so that the fresh air in the fresh air duct can be merged into the return air duct 130, thereby meeting the actual cold air demand of the APF cabinet 200.

[0042] It should be noted that, due to the presence of the heat dissipation fan 220 in the APF cabinet 200, the heat dissipation fan 220, the supply air duct and the return air duct 130 can already realize a complete fluid circulation pipeline. However, in order to selectively increase the wind speed and increase the wind pressure, a booster fan 140 can also be provided. That is to say, the heat recovery device 100 also includes a booster fan 140, and the air inlet end of the return air main pipe 131 is connected to the air outlet end of the supply air duct 110, that is, the air outlet end of the supply air duct 110 is connected to the negative pressure side of the booster fan 140, and the positive pressure side of the booster fan 140 is connected to the air inlet end of the return air duct 130.

[0043] Optionally, the air outlet end of the booster fan 140 or the return air main pipe 131 of the return air duct 130 is provided with a pressure sensor 134, and the booster fan 140 can be operated or stopped according to the detection result of the pressure sensor 134. In this way, according to the actual pressure detected by the pressure sensor 134, it can be judged whether the wind pressure of the return air duct 130 is sufficient to provide heat dissipation for the APF cabinet 200. If it is insufficient, the booster fan 140 can be turned on to achieve pressurization.

[0044] The booster fan 140 can be started by a frequency converter to achieve smoother and more efficient operation and save energy.

[0045] In summary, the present embodiment discloses a heat recovery device 100, which is connected to the hot air outlet 210 of the APF cabinet 200 through the air supply duct 110. In this way, when the APF cabinet 200 is in operation, the hot air discharged by its own heat dissipation fan 220 can enter the air supply duct 110. Because the heat exchange component 120 is arranged in the air supply duct 110, the heat exchange component 120 can absorb the heat of the hot air in the air supply duct 110. The absorbed heat can be provided to heat-using equipment 300 such as water heaters and cleaning machines for users to use, thereby realizing heat recovery and utilization when the APF cabinet 200 is in operation. Moreover, since the hot air will not escape into the workshop through the air supply duct 110, the temperature rise phenomenon in the area near the APF cabinet 200 in the workshop is alleviated, and therefore the performance of other equipment in the workshop will not be affected.

[0046] Finally, it should be noted that in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or apparatus that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or apparatus.

[0047] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A heat recovery device (100) for use in a silicon carbide production workshop, characterized in that: The invention comprises an air supply duct (110) and a heat exchange component (120), wherein the air inlet end of the air supply duct (110) is used to be connected to the hot air outlet (210) of the APF cabinet (200), and the heat exchange component (120) is arranged on the air supply duct (110), and the heat exchange component (120) is used to absorb the heat of the hot air in the air supply duct (110) and provide it to the heat-using equipment (300).

2. The heat recovery device (100) according to claim 1, characterized in that: The heat exchange component (120) comprises a cold water inlet pipe (121), a heat exchanger (122) and a hot water outlet pipe (123) which are connected in sequence, the cold water inlet pipe (121) is used to connect to a cold water source (400), the heat exchanger (122) is arranged in the air supply pipe (110), and the hot water outlet pipe (123) is used to connect to a heat-using device (300).

3. The heat recovery device (100) according to claim 2, characterized in that: The hot water outlet pipe (123) is provided with a temperature sensor (124) and a control valve (125), and the opening degree of the control valve (125) can be adjusted according to the detection result of the temperature sensor (124).

4. The heat recovery device (100) according to claim 1, characterized in that: The air supply duct (110) is provided with an exhaust bypass valve (113), and the exhaust bypass valve (113) is located on the upstream side of the heat exchange component (120). The exhaust bypass valve (113) is used to connect the exhaust duct.

5. The heat recovery device (100) according to claim 1, characterized in that: The air supply duct (110) comprises an air supply main pipe (111) and at least two air supply branch pipes (112), each of the air supply branch pipes (112) being used to be connected to a hot air outlet (210) of an APF cabinet (200), and the air inlet end of the air supply main pipe (111) is connected to the air outlet ends of all the air supply branch pipes (112).

6. The heat recovery device (100) according to claim 1, characterized in that: The heat recovery device (100) further comprises a return air duct (130), the air outlet end of the air supply duct (110) being connected to the air inlet end of the return air duct (130), and the air outlet end of the return air duct (130) being used to connect to the air inlet (230) of the APF cabinet (200).

7. The heat recovery device (100) according to claim 6, characterized in that: The heat recovery device (100) further comprises a pressurized fan (140), the air outlet end of the air supply duct (110) is connected to the negative pressure side of the pressurized fan (140), and the positive pressure side of the pressurized fan (140) is connected to the air inlet end of the return air duct (130).

8. The heat recovery device (100) according to claim 7, characterized in that: The air outlet end of the pressurizing fan (140) or the return air duct (130) is provided with a pressure sensor (134), and the pressurizing fan (140) can be operated or stopped according to the detection result of the pressure sensor (134).

9. The heat recovery device (100) according to claim 6, characterized in that: The return air duct (130) is provided with a fresh air bypass valve (133), and the fresh air bypass valve (133) is used to connect the fresh air duct.

10. The heat recovery device (100) according to claim 6, characterized in that: The return air duct (130) comprises a return air main pipe (131) and at least two return air branch pipes (132); the air inlet end of the return air main pipe (131) is connected to the air outlet end of the supply air duct (110); the air supply end of the return air main pipe (131) is connected to the air inlet ends of all the return air branch pipes (132); and the air outlet end of each return air branch pipe (132) is used to connect to an air inlet (230) of an APF cabinet (200).

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