Buckle protection device and silicon wafer degumming machine

Abstract

The utility model provides a buckle protection device and a silicon wafer degumming machine, the buckle protection device is used for the silicon wafer degumming machine, the silicon wafer degumming machine comprises a crystal support fixing frame, the crystal support fixing frame comprises two stop levers which are used for clamping a silicon wafer and are arranged in parallel, and the two stop levers are used for clamping the silicon wafer. The buckle protection device comprises a first clamping mechanism and a second clamping mechanism. The first clamping mechanism and the second clamping mechanism are used for being connected with the two stop levers in a one-to-one correspondence mode. The two ends of the telescopic rod are connected with the first clamping mechanism and the second clamping mechanism respectively so as to be matched with the first clamping mechanism and the second clamping mechanism to stabilize the crystal support fixing frame. According to the buckle protection device provided by the utility model, when the buckle protection device is applied to the silicon wafer degumming machine, the risk that a silicon wafer is damaged in a cleaning and degumming link can be greatly reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of spare parts for silicon wafer production and processing machinery and equipment in the photovoltaic industry, and in particular to a buckle protection device and a silicon wafer degumming machine. Background Art

[0002] With the rapid development of the global photovoltaic industry in recent years, the market demand for photovoltaic silicon wafers has also increased, driving the rapid expansion of the photovoltaic silicon wafer industry. The manufacturing of solar silicon wafers is generally done by cutting silicon rods into silicon wafers on a diamond wire cutting machine. Silicon rods are generally bonded to the crystal tray with glue and resin plates. After cutting, the silicon rods need to go through two parts: degumming and fine cleaning. Degumming is the first important cleaning process for silicon wafers, and is mainly carried out on a solar silicon wafer degumming machine.

[0003] The silicon wafer debonding machine includes a crystal tray fixing frame. The cut silicon rods and the crystal tray are placed in the crystal tray fixing frame. The crystal tray fixing frame carries the cut silicon rods and the crystal tray to run debonding in the silicon wafer debonding machine. Two baffles are provided on the crystal tray fixing frame. The baffles on both sides are put in place before debonding. During the debonding process, the silicon wafer will fall off from the resin plate to the crystal tray fixing frame. The baffles are used to clamp the silicon wafers that fall from the crystal tray to complete the debonding. However, the baffles will have poor stability and are easy to loosen after working for a long time. In addition, they will inevitably age due to the influence of environmental temperature and humidity, the acid concentration of the debonding solution, and a certain period of time, causing them to fail to work normally, affecting the quality of the silicon wafers, and causing problems such as a high risk of silicon wafers falling off and a large number of silicon wafers damaged during the debonding process. Utility Model Content

[0004] In view of this, the utility model provides a buckle protection device, which greatly reduces the risk of silicon wafer damage during the cleaning and degumming process.

[0005] The utility model also provides a silicon wafer degumming machine with the buckle protection device.

[0006] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0007] According to the buckle protection device of the first aspect of the utility model, the buckle protection device is used for a silicon wafer debonding machine, the silicon wafer debonding machine includes a crystal support fixing frame, the crystal support fixing frame includes two blocking rods arranged parallel to each other for clamping the silicon wafer, and the buckle protection device includes:

[0008] A first clamping mechanism and a second clamping mechanism, wherein the first clamping mechanism and the second clamping mechanism are used to connect the two blocking rods in a one-to-one correspondence.

[0009] A telescopic rod, two ends of which are respectively connected to the first clamping mechanism and the second clamping mechanism to cooperate with the first clamping mechanism and the second clamping mechanism to stabilize the crystal support fixing frame.

[0010] Furthermore, the first holding mechanism comprises:

[0011] A first bayonet base, the first bayonet base is fixed to one end of the telescopic rod, and a first semi-cylindrical bayonet groove is formed on the first bayonet base;

[0012] A second bayonet base, the second bayonet base is rotatably connected to an end of the first bayonet base close to the telescopic rod and is openably / closably connected to an end of the first bayonet base away from the telescopic rod, a second semi-cylindrical slot is also formed on the second bayonet base, the second bayonet base is arranged opposite to the first bayonet base so that the second semi-cylindrical slot and the first semi-cylindrical slot form a clamping space for clamping the baffle rod.

[0013] Furthermore, the second clamping mechanism is connected to the other end of the telescopic rod, and the second clamping mechanism includes:

[0014] A third bayonet base, the third bayonet base being provided with a through hole for being sleeved on the blocking rod;

[0015] A connecting seat connected to the other end of the telescopic rod;

[0016] An active bayonet, one end of which is pivotally connected to the connecting seat, and the active bayonet has a bayonet that cooperates with the outer surface of the third bayonet base so that the second holding mechanism can be clamped on the other end of the telescopic rod through the active bayonet and the third bayonet base.

[0017] Furthermore, the third bayonet base is formed as a cubic structure, and the movable bayonet is formed as an L-shaped bent plate.

[0018] Furthermore, the telescopic rod comprises a first telescopic rod and a second telescopic rod, and the second telescopic rod is a hollow tube.

[0019] Wherein, the first telescopic rod is slidably arranged on one end of the second telescopic rod.

[0020] Furthermore, the first telescopic rod is also formed into a hollow tube, and the telescopic rod further comprises an adjustment mechanism, and the adjustment mechanism is respectively connected to the first telescopic rod and the second telescopic rod to adjust the length of the telescopic rod.

[0021] Further, one or more slots penetrating the tube wall are formed on the tube wall of the first telescopic rod, and an adjustment hole corresponding to the slot and penetrating the tube wall of the second telescopic rod is formed on the one end of the second telescopic rod, and the adjustment mechanism includes:

[0022] A pressing piece, the bottom end of which passes through the adjusting hole and extends into the lumen of the second telescopic rod, and the pressing piece can move up and down relative to the telescopic rod;

[0023] A connecting block, the top of which is connected to the bottom of the pressing member;

[0024] A connecting piece, the connecting piece is formed as an "L"-shaped bent plate, one end of the connecting piece is connected to one side of the connecting block and the other end of the connecting piece passes through the slot upward to fix the length of the telescopic rod;

[0025] An elastic member, the top of which is connected to the bottom of the connecting block, and the bottom of which is connected to the second telescopic rod so that the pressing member can be reset under the action of the elastic member.

[0026] Furthermore, a limit block is provided at the upper end of the pressing member, and when the pressing member is pressed down to a predetermined position, the limit block abuts against the upper surface of the second telescopic rod to limit further downward movement of the pressing member.

[0027] Furthermore, the buckle protection device also includes:

[0028] A pair of plastic protection modules, wherein the pair of plastic protection modules are respectively connected to the first telescopic rod and the second telescopic rod, and each of the plastic protection modules comprises:

[0029] A protection rod, the protection rod comprising a first end and a second end, the first end of the protection rod correspondingly connected to one side of the first telescopic rod or the second telescopic rod;

[0030] A protection block is vertically connected to the second end of the protection rod.

[0031] According to a second aspect of the present invention, a silicon wafer degumming machine includes the buckle protection device according to any embodiment of the first aspect, and the silicon wafer degumming machine includes:

[0032] A wafer support fixing frame, wherein the wafer support fixing frame comprises two blocking rods arranged parallel to each other for clamping the silicon wafer;

[0033] A buckle protection device is connected between the two blocking rods of the crystal support fixing frame.

[0034] The above technical solution of the utility model has at least one of the following beneficial effects:

[0035] According to the buckle protection device of the embodiment of the utility model, when used in a silicon wafer debonding machine, it can effectively enhance the stability of the baffles on both sides of the crystal support fixing frame, so that the silicon wafer can be completely clamped by the baffles after debonding is completed, which greatly improves the problem of silicon wafer damage during the debonding process and improves the yield and quality of silicon wafers.

[0036] In addition, the buckle protection device of the embodiment of the utility model can support the silicon wafer in the event of debonding by providing a plastic protection module, thereby preventing the silicon wafer from falling into the crystal support fixing frame and damaging the silicon wafer, thereby avoiding the risk of silicon wafer damage to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 This is a schematic diagram of the structure of the buckle protection device of an embodiment of the utility model;

[0038] Figure 2 It is a top view of the structure of the buckle protection device of the embodiment of the utility model;

[0039] Figure 3 It is a front view of the structure of the first holding mechanism in the buckle protection device of the embodiment of the utility model;

[0040] Figure 4 It is a structural side view of the first holding mechanism in the buckle protection device of the embodiment of the utility model;

[0041] Figure 5 It is a top view of the structure of the telescopic rod in the buckle protection device of the embodiment of the utility model;

[0042] Figure 6 It is a front view of the structure of the telescopic rod in the buckle protection device of the embodiment of the utility model;

[0043] Figure 7 It is a structural schematic diagram of the adjustment mechanism in the buckle protection device of the embodiment of the utility model;

[0044] Figure 8 It is a structural schematic diagram of the third bayonet base in the buckle protection device of the embodiment of the utility model;

[0045] Fig. 9 It is a structural schematic diagram of the crystal support fixing frame;

[0046] Fig.10 It is a top view of the crystal support fixing frame;

[0047] Fig.11 This is a top view of the buckle protection device of the embodiment of the utility model assembled in the crystal support fixing frame.

[0048] Reference numerals: 1. first clamping mechanism; 11. first bayonet base; 12. second bayonet base; 13. fastening bolt pair; 14. connecting shaft;

[0049] 2. Second holding mechanism; 21. Third bayonet base; 211. Through hole; 22. Connecting seat; 221. Hinge; 222. Fixing bolt; 23. Movable bayonet;

[0050] 3. telescopic rod; 31. first telescopic rod; 311. slot; 32. second telescopic rod; 33. adjustment mechanism; 331. pressing member; 332. connecting block; 333. connecting member; 334. elastic member; 335. limiting block;

[0051] 4. Plastic protection module; 41. Protection rod; 42. Protection block;

[0052] 100. Buckle protection device; 200. Crystal support fixing frame; 210. Stop lever; 220. Fixing plate. DETAILED DESCRIPTION

[0053] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the utility model.

[0054] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "one" do not indicate quantity restrictions, but indicate the existence of at least one. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship also changes accordingly.

[0055] The buckle protection device according to the embodiment of the utility model is first described in detail below with reference to the accompanying drawings.

[0056] The buckle protection device according to the embodiment of the utility model is used in a silicon wafer debonding machine. The silicon wafer debonding machine includes a wafer support fixing frame 200, and the wafer support fixing frame 200 includes two blocking rods 210 arranged parallel to each other for clamping the silicon wafer. Fig. 9 and Fig.10 , describing the crystal support fixing frame 200.

[0057] Fig. 9 2 shows a schematic structural diagram of a crystal support fixing frame 200. Fig.10 A top view of the structure of the crystal support fixing frame 200 is shown.

[0058] The cut silicon rods, that is, silicon wafers, are debonded on a silicon wafer debonding machine. The silicon wafer debonding machine includes a crystal tray fixing frame 200. The cut silicon rods and the crystal tray are placed in the crystal tray fixing frame 200. The crystal tray fixing frame 200 carries the cut silicon rods and the crystal tray to run debonding in the silicon wafer debonding machine. Figures 9 to 10 As shown, two blocking rods 210 are provided on the crystal support fixing frame 200. The blocking rods 210 on both sides need to be put in place before debonding. During the debonding process, the silicon wafer will fall off from the resin plate into the crystal support fixing frame 200, and the blocking rods 210 need to be used to clamp the silicon wafer that has fallen off the crystal support after debonding. However, the blocking rods 210 will have poor stability and are easy to loosen after long-term work. In addition, they will inevitably age due to the influence of environmental temperature and humidity, the acid concentration of the debonding solution, and a certain period of time, causing them to fail to work normally, affecting the quality of the silicon wafer, and causing problems such as a high risk of silicon wafer falling off and a large number of silicon wafers damaged during the debonding process.

[0059] The buckle protection device 100 according to the embodiment of the utility model is used to effectively enhance the stability of the two blocking rods 210 of the crystal support fixing frame 200.

[0060] Figure 1 The structure diagram of the buckle protection device 100 according to the embodiment of the utility model is shown. Figure 2 The structure top view of the buckle protection device 100 according to the embodiment of the utility model is shown. Fig.11 FIG. 1 shows a top view of the buckle protection device 100 of the embodiment of the utility model assembled in the crystal support fixing frame 200. Figure 2 As shown, in each figure of the embodiment of the present utility model, the X direction (as the first direction) is the length direction of the buckle protection device 100, and the Y direction (as the second direction) is the width direction of the buckle protection device 100. The X direction and the Y direction are perpendicular to each other.

[0061] like Figure 1 to Figure 2 , Figures 9 to 11As shown, the buckle protection device 100 according to the embodiment of the utility model is used in a silicon wafer degumming machine, the silicon wafer degumming machine includes a crystal support fixing frame 200, the crystal support fixing frame 200 includes two mutually parallel blocking rods 210 for clamping the silicon wafer, and the buckle protection device 100 includes: a first clamping mechanism 1, a second clamping mechanism 2 and a telescopic rod 3. Among them, the first clamping mechanism 1 and the second clamping mechanism 2 are used to connect the two blocking rods 210 in a one-to-one correspondence. The two ends of the telescopic rod 3 are respectively connected to the first clamping mechanism 1 and the second clamping mechanism 2 to cooperate with the first clamping mechanism 1 and the second clamping mechanism 2 to stabilize the crystal support fixing frame 200.

[0062] Specifically, refer to Figure 1-2 , Figure 9-11 According to the buckle protection device 100 of the utility model, a first clamping mechanism 1 and a second clamping mechanism 2 are provided, which correspond to two mutually parallel blocking rods 210 of the crystal support fixing frame 200 for clamping the silicon wafer, and a telescopic rod 3 is provided, and the first clamping mechanism 1 and the second clamping mechanism 2 are respectively connected through the two ends of the telescopic rod 3 to stabilize the two blocking rods 210 of the crystal support fixing frame 200 for clamping the silicon wafer. Thus, the stability of the blocking rods 210 on both sides of the crystal support fixing frame 200 during the debonding process is effectively enhanced, and the blocking rods 210 can be completely clamped by the blocking rods 210 after the silicon wafer is debonded, so that the silicon wafer falls neatly and orderly into the crystal support fixing frame 200, and the first clamping mechanism 1 and the second clamping mechanism 2 can be placed at reasonable positions on the crystal support fixing frame 200 according to the size requirements of the debonded silicon wafer. By providing the telescopic rod 3, the positions of the first clamping mechanism 1 and the second clamping mechanism 2 corresponding to the blocking rods 210 can be effectively matched, which is applicable to crystal support fixing frames 200 of different specifications, and the risk of silicon wafer fragments is avoided to a certain extent. The design is simple and reasonable, easy to operate, which greatly improves the problem of silicon wafers easily falling off and being damaged during the degumming process, and improves the output and quality of silicon wafers.

[0063] Figure 3 The figure shows a front view of the structure of the first holding mechanism 1 in the buckle protection device 100 of the embodiment of the utility model. Figure 4 A structural side view of the first clamping mechanism 1 in the buckle protection device 100 according to an embodiment of the utility model is shown.

[0064] In some embodiments of the present invention, Figure 3 As shown, the first holding mechanism 1 includes: a first bayonet base 11 and a second bayonet base 12 .

[0065] The first bayonet base 11 is fixed to one end of the telescopic rod 3, and a first semi-cylindrical slot is formed on the first bayonet base 11. The second bayonet base 12 is rotatably connected to the end of the first bayonet base 11 close to the telescopic rod 3 and is openably / closably connected to the end of the first bayonet base 11 away from the telescopic rod 3, and a second semi-cylindrical slot is also formed on the second bayonet base 12. The second bayonet base 12 is arranged opposite to the first bayonet base 11 so that the second semi-cylindrical slot and the first semi-cylindrical slot form a clamping space for clamping the blocking rod 210.

[0066] Specifically, refer to Figure 3 and Fig.10 When the buckle protection device 100 is used, the first bayonet base 11 and the second bayonet base 12 are arranged relative to each other to form a cylindrical clamping space for clamping a side stopper 210 (for example, a stopper 210 of the crystal support fixing frame 200) Fig.10 For example, the first bayonet base 11 and the second bayonet base 12 can be arranged on the left side of the barrier rod 210 of the crystal support fixing frame 200 (ie Fig.10 The blocking rod 210 located on the upper side of the crystal support fixing frame 200 and the front fixing plate 220 (i.e. Fig.10 The first bayonet base 11 and the second bayonet base 12 are respectively formed with connection holes at their ends away from the telescopic rod 3. The first bayonet base 11 and the second bayonet base 12 are detachably connected by a fastening bolt pair 13 so that the first clamping mechanism 1 can adjust the moving position on the blocking rod 210. The side of the first bayonet base 11 close to the telescopic rod 3 can be welded to the telescopic rod 3 by a piece of iron, for example, and cannot be disassembled. A through circular hole is formed at the lower end of the side of the first bayonet base 11 close to the telescopic rod 3 and the lower end of the side of the second bayonet base 12 close to the telescopic rod 3. A connecting shaft 14 is matched in the circular hole to rotatably connect the first bayonet base 11 and the second bayonet base 12 close to the telescopic rod 3. With this connecting shaft 14 as the base point, when the fastening bolt pair 13 is disassembled, the second bayonet base 12 can be opened counterclockwise downward to a certain position, such as Figure 3 As shown by the arrow in the middle. Figure 4 As shown, the side surface of the first bayonet base 11 can be formed into an inverted "concave" shape, and the side surface of the second bayonet base 12 can be formed into an upright "convex" shape, and the first bayonet base 11 and the second bayonet base 12 are pivotally connected via a pin. Thus, the first clamping mechanism 1 can stably clamp the blocking rod 210 and can freely adjust the position on the blocking rod 210.

[0067] Figure 5 The structure top view of the telescopic rod 3 in the buckle protection device 100 of the embodiment of the utility model is shown. Figure 6The structure front view of the telescopic rod 3 in the buckle protection device 100 of the embodiment of the utility model is shown. Figure 8 The structure diagram of the third bayonet base 21 in the buckle protection device 100 according to the embodiment of the utility model is shown.

[0068] In some embodiments of the present invention, reference Figure 5 , Figure 6 as well as Figure 8 The second clamping mechanism 2 is connected to the other end of the telescopic rod 3 , and the second clamping mechanism 2 includes: a third clamping base 21 , a connecting seat 22 and a movable clamping base 23 .

[0069] The third bayonet base 21 is provided with a through hole 211 for being sleeved on the blocking rod 210. The connecting seat 22 is connected to the other end of the telescopic rod 3. One end of the movable bayonet 23 is pivotally connected to the connecting seat 22, and the movable bayonet 23 has a bayonet that matches the outer surface of the third bayonet base 21 so that the second holding mechanism 2 is clamped on the other end of the telescopic rod 3 through the movable bayonet 23 and the third bayonet base 21.

[0070] Specifically, refer to Figure 5 , Figure 6 as well as Figure 8 The third bayonet base 21 is sleeved on the right side blocking rod 210 of the crystal support fixing frame 200 (ie Fig.10 The blocking rod 210 located at the lower side of the crystal support fixing frame 200 and the front fixing plate 220 (i.e. Fig.10 The third bayonet base 21 has a through hole 211 formed inside to match the blocking rod 210. The size of the through hole 211 inside the bayonet base is set according to the size of the blocking rod 210. The connecting seat 22 can be, for example, a hinge 221. One end of the hinge 221 is connected to the other end of the telescopic rod 3 through a fixing bolt 222. One end of the movable bayonet 23 is pivotally connected to the connecting seat 22 to match the third bayonet base 21 through the movable bayonet 23 to clamp the second clamping mechanism 2 to the other end of the telescopic rod 3. The structure is simple and easy to manufacture.

[0071] It should be noted here that regarding the clamping position of the buckle protection device 100 and the baffle rods 210 on both sides of the crystal support fixing frame 200, the above-mentioned distance of this application, for example 80mm-100mm, is only provided for reference and is not specifically limited. It can be adaptively adjusted according to the length of the silicon wafer, that is, the length of the silicon rod after cutting during on-site operation.

[0072] In some embodiments of the present invention, Figure 8As shown, the third bayonet base 21 is formed into a cubic structure, and the movable bayonet 23 is formed into an L-shaped bending plate. In other words, the movable bayonet 23 is directly designed through the structure, for example, the movable bayonet 23 is designed as an L-shaped bending plate to match the cubic structure of the third bayonet base 21, thereby realizing reliable clamping of the blocking rod 210.

[0073] In some embodiments of the present invention, Figure 1-2 As shown, the telescopic rod 3 includes a first telescopic rod 31 and a second telescopic rod 32 extending along a first direction. The second telescopic rod 32 is a hollow tube, wherein the first telescopic rod 31 is slidably disposed on one end of the second telescopic rod 32 .

[0074] That is, when the length of the telescopic rod 3 needs to be adjusted, the operator can do so by sliding the first telescopic rod 31 relative to the second telescopic rod 32. By combining the first telescopic rod 31 with the second telescopic rod 32, the adjustable length of the telescopic rod 3 in the first direction is achieved, so that it can match the crystal support fixing frame 200 of different specifications, thereby improving the flexibility and adaptability of the buckle protection device 100.

[0075] In some embodiments of the present invention, Figure 1-2 As shown, the first telescopic rod 31 is also formed into a hollow tube, and the telescopic rod 3 further includes an adjustment mechanism 33, which is respectively connected to the first telescopic rod 31 and the second telescopic rod 32 to adjust the length of the telescopic rod 3. By setting the adjustment mechanism 33, the first telescopic rod 31 and the second telescopic rod 32 are adjusted to change the total length of the telescopic rod 3, so that it can be freely extended and fixed in position. At the same time, the first telescopic rod 31 and the second telescopic rod 32 both adopt a lightweight hollow tubular structure, which improves the controllability and portability of the telescopic rod 3, so that the buckle protection device 100 can quickly adapt to different specifications of the crystal support fixing frame 200.

[0076] Figure 7 A schematic structural diagram of the adjustment mechanism 33 in the buckle protection device 100 according to an embodiment of the utility model is shown.

[0077] In some embodiments of the present invention, Figure 7 As shown, one or more slots 311 penetrating the tube wall are formed on the tube wall of the first telescopic rod 31, and an adjustment hole corresponding to the slot 311 and penetrating the tube wall of the second telescopic rod 32 is formed at one end of the second telescopic rod 32. The adjustment mechanism 33 includes: a pressing member 331, a connecting block 332, a connecting member 333 and an elastic member 334.

[0078] The bottom end of the pressing member 331 extends through the adjustment hole into the tubular cavity of the second telescopic rod 32, and the pressing member 331 can move up and down relative to the telescopic rod 3. The top of the connecting block 332 is connected to the bottom of the pressing member 331. The connecting member 333 is formed as an "L"-shaped bending plate, one end of the connecting member 333 is connected to one side of the connecting block 332, and the other end of the connecting member 333 passes through the card slot 311 upward to fix the length of the telescopic rod 3. The top of the elastic member 334 is connected to the bottom of the connecting block 332, and the bottom of the elastic member 334 is connected to the second telescopic rod 32 so that the pressing member 331 is reset under the action of the elastic member 334. The elastic member 334 can be, for example, a spring or a spring.

[0079] Specifically, refer to Figure 1 , Figure 2 and Figure 7 The working principle of the adjustment mechanism 33 is as follows: by pressing the pressing member 331 downward, the bottom elastic member 334 is driven to contract downward, driving the "L"-shaped connecting member 333 to move downward as a whole, and at the same time, the other end of the "L"-shaped connecting member 333 passing upward through the slot 311 is brought back to the inside of the rod body of the first telescopic rod 31, and by moving the rod body of the first telescopic rod 31 left and right to the required length position, the other end of the "L"-shaped connecting member 333 is aligned with the slot 311 on the first telescopic rod 31, and the pressing member 331 is released, the elastic member 334 bounces upward, and the connecting member 333 moves upward as a whole, and the other end of the "L"-shaped connecting member 333 is bounced upward and buckled into the slot 311 of the first telescopic rod 31, so that the length can be fixed. In this way, the telescopic rod 3 can be freely extended and retracted and can also be fixed in position.

[0080] In some embodiments of the present invention, Figure 2 As shown, the card slot 311 includes a plurality of card slots 311, and the plurality of card slots 311 are evenly spaced and distributed on the first telescopic rod 31. Thus, a plurality of specific positions for adjusting the length of the telescopic rod 3 are provided, further improving the flexibility and applicability of the buckle protection device 100.

[0081] In some embodiments of the present invention, Figure 7 As shown, a limit block 335 is provided at the upper end of the pressing member 331 . When the pressing member 331 is pressed down to a predetermined position, the limit block 335 abuts against the upper surface of the second telescopic rod 32 to limit the further downward movement of the pressing member 331 .

[0082] That is to say, when the operator presses the pressing piece 331 down to a predetermined position, the limit block 335 contacts the upper surface of the second telescopic rod 32, preventing the pressing piece 331 from continuing to move downward, preventing excessive pressing and adjustment from causing the pressing piece 331 to retract into the second telescopic rod 32 and causing structural damage, thereby improving the durability of the adjustment mechanism 33.

[0083] In some embodiments of the present invention, Figure 1 to Figure 2 As shown, the buckle protection device 100 further includes a pair of plastic protection modules 4 . The pair of plastic protection modules 4 are respectively connected to the first telescopic rod 31 and the second telescopic rod 32 , and each plastic protection module 4 includes a protection rod 41 and a protection block 42 .

[0084] The protection rod 41 includes a first end and a second end, and the first end of the protection rod 41 is correspondingly connected to one side of the first telescopic rod 31 or the second telescopic rod 32. The protection block 42 is vertically connected to the second end of the protection rod 41.

[0085] In actual use, the thickness of the protection block 42 can be 8-10mm (this application only provides a reference value and is not specifically limited). The plastic protection module 4 on the snap-on protection device 100 serves as a second protection measure, which can support the silicon wafer in the event of an accidental debonding, prevent the silicon wafer from falling into the crystal support fixing frame 200 and damaging the silicon wafer, and has a protective effect on the silicon wafer, avoiding the risk of silicon wafer damage to a certain extent, and also improves the current crystal support fixing frame 200. After the silicon wafer is debonded, there are only two blocking rods 210 for the protection measure, and the protection structure is single. In this case, the snap-on protection device 100 can be provided at one end of the crystal support protection frame, or at both ends, so as to clamp the blocking rods 210 on both sides of the crystal support fixing frame 200 at both ends and have two pairs of plastic protection modules 4 of the snap-on protection device 100 to support the silicon wafer respectively in the event of an accident.

[0086] The present application does not limit the material of the protection module, as long as it can be used as a buffer. The plastic protection module 4 used here can play a good role in buffer protection, and is light in weight, easy to replace, and low in cost. In some other embodiments, it can also be a rubber protection module or a protection module made of other materials, which can be adaptively selected according to actual needs on site.

[0087] In addition, the utility model also provides a silicon wafer degumming machine, including the buckle protection device 100 according to the above utility model embodiment, such as Fig.11 As shown, the silicon wafer debonding machine may include: a wafer support fixing frame 200 and a buckle protection device 100. The wafer support fixing frame 200 includes two blocking rods 210 arranged parallel to each other for clamping the silicon wafer, and the buckle protection device 100 is connected between the two blocking rods 210 of the wafer support fixing frame 200.

[0088] In actual use, a buckle protection device 100 can be provided at one end of the two blocking rods 210 of the wafer support fixing frame 200, or at both ends, and an adaptive selection is made according to the degree of looseness of the blocking rods 210 on both sides of the actual wafer support fixing frame 200, the size of the silicon wafer, etc. Therefore, by providing the buckle protection device 100 and applying it to the wafer support fixing frame 200, the problem of silicon wafer damage in the debonding process is greatly improved, and the yield and quality of silicon wafers are improved.

[0089] The above is a preferred embodiment of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A buckle protection device for a silicon wafer debonding machine, the silicon wafer debonding machine comprising a wafer support fixing frame, the wafer support fixing frame comprising two mutually parallel blocking rods for clamping the silicon wafer, characterized in that: The buckle protection device comprises: A first clamping mechanism and a second clamping mechanism, wherein the first clamping mechanism and the second clamping mechanism are used to connect the two blocking rods in a one-to-one correspondence. A telescopic rod, two ends of which are respectively connected to the first clamping mechanism and the second clamping mechanism to cooperate with the first clamping mechanism and the second clamping mechanism to stabilize the crystal support fixing frame.

2. The buckle protection device according to claim 1, characterized in that: The first card holding mechanism comprises: A first bayonet base, the first bayonet base is fixed to one end of the telescopic rod, and a first semi-cylindrical bayonet groove is formed on the first bayonet base; A second bayonet base, the second bayonet base is rotatably connected to an end of the first bayonet base close to the telescopic rod and is openably / closably connected to an end of the first bayonet base away from the telescopic rod, a second semi-cylindrical slot is also formed on the second bayonet base, the second bayonet base is arranged opposite to the first bayonet base so that the second semi-cylindrical slot and the first semi-cylindrical slot form a clamping space for clamping the baffle rod.

3. The buckle protection device according to claim 2, characterized in that: The second clamping mechanism is connected to the other end of the telescopic rod, and the second clamping mechanism includes: A third bayonet base, the third bayonet base being provided with a through hole for being sleeved on the blocking rod; A connecting seat connected to the other end of the telescopic rod; An active bayonet, one end of which is pivotally connected to the connecting seat, and the active bayonet has a bayonet that cooperates with the outer surface of the third bayonet base so that the second holding mechanism can be clamped on the other end of the telescopic rod through the active bayonet and the third bayonet base.

4. The buckle protection device according to claim 3, characterized in that: The third bayonet base is formed into a cubic structure, and the movable bayonet is formed into an L-shaped bending plate.

5. The buckle protection device according to claim 1, characterized in that: The telescopic rod comprises a first telescopic rod and a second telescopic rod, wherein the second telescopic rod is a hollow tube. Wherein, the first telescopic rod is slidably arranged on one end of the second telescopic rod.

6. The buckle protection device according to claim 5, characterized in that: The first telescopic rod is also formed into a hollow tube shape, and the telescopic rod further comprises an adjusting mechanism, and the adjusting mechanism is respectively connected to the first telescopic rod and the second telescopic rod to adjust the length of the telescopic rod.

7. The buckle protection device according to claim 6, characterized in that: One or more slots penetrating the tube wall are formed on the tube wall of the first telescopic rod, and an adjustment hole corresponding to the slot and penetrating the tube wall of the second telescopic rod is formed on the one end of the second telescopic rod, and the adjustment mechanism includes: A pressing piece, the bottom end of which passes through the adjusting hole and extends into the lumen of the second telescopic rod, and the pressing piece can move up and down relative to the telescopic rod; A connecting block, the top of which is connected to the bottom of the pressing member; A connecting piece, the connecting piece is formed as an "L"-shaped bent plate, one end of the connecting piece is connected to one side of the connecting block and the other end of the connecting piece passes upward through the slot to fix the length of the telescopic rod; An elastic member, the top of which is connected to the bottom of the connecting block, and the bottom of which is connected to the second telescopic rod so that the pressing member can be reset under the action of the elastic member.

8. The buckle protection device according to claim 7, characterized in that: A limiting block is provided at the upper end of the pressing member. When the pressing member is pressed down to a predetermined position, the limiting block abuts against the upper surface of the second telescopic rod to limit further downward movement of the pressing member.

9. The buckle protection device according to claim 5, characterized in that: The buckle protection device also includes: A pair of plastic protection modules, wherein the pair of plastic protection modules are respectively connected to the first telescopic rod and the second telescopic rod, and each of the plastic protection modules comprises: A protection rod, the protection rod comprising a first end and a second end, the first end of the protection rod correspondingly connected to one side of the first telescopic rod or the second telescopic rod; A protection block is vertically connected to the second end of the protection rod.

10. A silicon wafer degumming machine, characterized in that: include: A wafer support fixing frame, wherein the wafer support fixing frame comprises two blocking rods arranged parallel to each other for clamping the silicon wafer; A snap-on protection device, wherein the snap-on protection device is the snap-on protection device according to any one of claims 1 to 9, wherein the snap-on protection device is connected between the two blocking rods of the crystal support fixing frame.

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