Clamping device and wafer processing equipment

Abstract

The utility model is applicable to the technical field of clamping jigs, and provides a clamping device and wafer processing equipment, and the clamping device comprises a base, a first fixing part, a first supporting part, a first sliding part, a second sliding part, an elastic assembly and a clamping part; the first fixing piece, the first supporting piece, the first sliding piece and the second sliding piece are all arranged on the base. The first fixing piece, the first sliding piece and the second sliding piece are all located on the peripheral side of the first supporting piece, and an adsorption hole is formed in the first supporting piece; the first sliding piece and the second sliding piece are connected with the elastic assembly. The first sliding piece and the second sliding piece are each provided with a clamping piece, and the clamping pieces are used for pushing a workpiece adsorbed to the first supporting piece towards the first fixing piece. The height of the top of the first fixing piece and the height of the top of the clamping piece are both larger than that of the top of the first supporting piece. According to the embodiment of the invention, the force of the clamping piece for pushing the workpiece is balanced through the elastic assembly, so that the workpiece is clamped through the clamping piece and the first fixing piece, and the workpiece is prevented from being crushed by the clamping piece.

Description

Technical Field

[0001] The present application relates to the technical field of clamping jigs, and in particular to a clamping device and wafer processing equipment. Background Art

[0002] With the development of electronic technology, the market demand for chips is also increasing rapidly. Wafers are the raw materials for manufacturing chips, so the market demand for wafers is also increasing.

[0003] During the wafer manufacturing process, the wafer needs to be grooved and marked. When the wafer is grooved and marked, the wafer needs to be fixed by a fixture to avoid the position of the wafer being offset during the wafer processing, resulting in a decrease in the wafer processing yield. Due to the thin thickness of the wafer, the force of the fixture clamping the wafer cannot be too large, otherwise it will easily crush the wafer; nor can it be too small, otherwise the fixture will not achieve the purpose of clamping the wafer.

[0004] When clamping a wafer, current fixtures generally use a clamping structure to press the wafer onto a carrier. However, the force used to press the wafer is difficult to control, which makes it easy for the clamping structure to damage the wafer. Utility Model Content

[0005] The embodiments of the present application provide a clamping device and a wafer processing equipment, which can balance the force of pressing the wafer.

[0006] In a first aspect, an embodiment of the present application provides a clamping device, the clamping device comprising:

[0007] Base;

[0008] a first fixing member, the first fixing member being disposed on the base;

[0009] a first support member, wherein the first support member is disposed on the base, the first fixing member is located at a peripheral side of the first support member, the height of the top of the first fixing member is greater than the height of the top of the first support member; and the first support member is provided with a suction hole;

[0010] A first sliding member, the first sliding member is slidably disposed on the base along a first direction, and the first sliding member is located at a peripheral side of the first supporting member;

[0011] a second sliding member, the second sliding member being slidably disposed on the base along the first direction, the second sliding member being located at a peripheral side of the first supporting member; the heights of the tops of the first sliding member and the second sliding member are both less than or equal to the height of the top of the first supporting member;

[0012] an elastic component, the first sliding member and the second sliding member are both connected to the elastic component, and the elastic component is used to drive the first sliding member and the second sliding member to move closer to each other along the first direction;

[0013] A clamping member, wherein the end of the first sliding member away from the second sliding member and the end of the second sliding member away from the first sliding member are both provided with the clamping member, and the height of the top of the clamping member is greater than the height of the top of the first supporting member; the clamping member is used to push the workpiece adsorbed on the first supporting member toward the first fixing member.

[0014] In some possible implementations of the first aspect, the elastic component includes:

[0015] a first elastic member, wherein one end of the first elastic member is connected to the first sliding member, and the other end of the first elastic member is connected to the base;

[0016] A second elastic member, one end of the second elastic member is connected to the second sliding member, and the other end of the second elastic member is connected to the base; the expansion and contraction directions of the first elastic member and the second elastic member are both parallel to the first direction.

[0017] In some possible implementations of the first aspect, the clamping device further includes:

[0018] A pushing member, the pushing member is slidably disposed on the base along a second direction;

[0019] a third elastic member, one end of which is disposed on the pushing member, and the other end of which is disposed on the base, and the third elastic member is used to drive the pushing member to slide between the first sliding member and the second sliding member, so as to push the first sliding member and the second sliding member to slide in opposite directions along the first direction through the pushing member;

[0020] The second direction is perpendicular to the first direction.

[0021] In some possible implementations of the first aspect, the clamping device further includes:

[0022] a first roller, the first roller being arranged on a side of the pushing member close to the first sliding member, the first sliding member having a first inclined surface on a side close to the second sliding member, the first roller being used to abut against the first inclined surface;

[0023] The second roller is arranged on a side of the pushing member close to the second sliding member, the side of the second sliding member close to the first sliding member has a second inclined surface, and the second roller is used to abut against the second inclined surface.

[0024] In some possible implementations of the first aspect, the clamping device further includes:

[0025] A locking assembly is arranged on the base, and is used to lock or release the pushing member.

[0026] In some possible implementations of the first aspect, the locking assembly includes:

[0027] A locking member, wherein a first locking hole is provided on the base, the first locking hole passes through the base, and the locking member is inserted into the first locking hole;

[0028] A fourth elastic member, one end of the fourth elastic member is arranged on the inner wall of the first locking hole, and the other end of the fourth elastic member is arranged on the locking member; a second locking hole is arranged at the bottom of the pushing member, and the fourth elastic member is used to drive the locking member to move toward the pushing member; one end of the locking member close to the pushing member is located on the moving path of the second locking hole, and the locking member can extend into the second locking hole.

[0029] In some possible implementations of the first aspect, the clamping device further includes:

[0030] A second support member, wherein the second support member is arranged on the base, the second support member is located on a side of the first sliding member or the second sliding member away from the first support member, and the height of the top of the second support member is the same as the height of the top of the first support member.

[0031] In some possible implementations of the first aspect, a protrusion is provided on the first fixing member, and the protrusion is located on a side of the first fixing member facing the first supporting member.

[0032] In some possible implementations of the first aspect, the clamping device further includes:

[0033] At least two second fixing members, the second fixing members are arranged on the base, the first fixing member, the second fixing member, the first sliding member and the second sliding member are arranged around the circumference of the first supporting member at intervals, and the height of the top of the second fixing member is higher than the height of the top of the first supporting member.

[0034] In some possible implementations of the first aspect, the clamping device further includes:

[0035] A driving assembly, wherein the base is arranged at an output end of the driving assembly, and the driving assembly is used to drive the base to rotate.

[0036] In a second aspect, an embodiment of the present application provides a wafer processing equipment, which includes a clamping device as described in any one of the above technical solutions.

[0037] The clamping device and wafer processing equipment provided by the embodiment of the present application are characterized in that a suction hole is provided on the first support member so that the workpiece can be adsorbed and fixed to the first support member through the suction hole; the clamping member is provided on the first sliding member or the second sliding member, the heights of the tops of the first fixing member and the clamping member are both greater than the height of the top of the first support member, and the first fixing member, the first sliding member and the second sliding member are all located on the peripheral side of the first support member so that the clamping member and the first fixing member can clamp the peripheral side of the workpiece; the first sliding member and the second sliding member are both connected to the elastic component so that the first sliding member and the second sliding member are driven by the elastic component to approach each other along the first direction, thereby making the clamping member approach each other, so that the workpiece is pushed toward the first fixing member for clamping by the clamping member; because the clamping member is driven by the first sliding member and the second sliding member in the process of pushing the workpiece toward the first fixing member to clamp the workpiece, and the first sliding member and the second sliding member are driven by the elastic component, so the force of the clamping member pushing the workpiece can be balanced by the elastic force of the elastic component, so that the workpiece is clamped by the clamping member and the first fixing member to avoid the clamping member from crushing the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0039] Figure 1 This is a schematic structural diagram of an embodiment of the clamping device of the present application;

[0040] Figure 2 for Figure 1 A partial enlarged view of the middle A;

[0041] Figure 3 for Figure 1 A partial enlarged view of point B in the middle.

[0042] Description of Figure Numbers:

[0043] 1. Base; 2. First fixing member; 21. Bump; 3. First supporting member; 31. Adsorption hole; 4. First sliding member; 41. First inclined surface; 5. Second sliding member; 51. Second inclined surface; 6. Elastic component; 61. Second elastic member; 7. Clamping member; 8. Pushing member; 9. Third elastic member; 10. Second roller; 20. Locking component; 201. Locking member; 30. Locking block; 40. Limiting block; 50. Second supporting member; 60. Second fixing member; 70. Driving component.

[0044] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0045] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0046] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0047] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0048] It should be understood that the term “and / or” used in the specification and appended claims of this application refers to any and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0049] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0050] The embodiments of the present application provide a clamping device and a wafer processing equipment, which are used to solve the technical problem that the force of the clamping structure of the fixture to press the wafer is not easy to control.

[0051] In the embodiments of the present application, Figure 1 As shown, the clamping device includes a base 1, a first fixed member 2, a first support member 3, a first sliding member 4, a second sliding member 5, an elastic component 6 and a clamping member 7. The first fixed member 2 and the first support member 3 are both arranged on the base 1. The first sliding member 4 and the second sliding member 5 are both slidably arranged on the base 1 along the first direction. The first fixed member 2, the first sliding member 4 and the second sliding member 5 are all located on the peripheral side of the first support member 3, and the first support member 3 is provided with an adsorption hole 31. The first sliding member 4 and the second sliding member 5 are both connected to the elastic component 6, and the elastic component 6 is used to drive the first sliding member 4 and the second sliding member 5 to approach each other along the first direction. The end of the first sliding member 4 away from the second sliding member 5 and the end of the second sliding member 5 away from the first sliding member 4 are both provided with a clamping member 7, and the clamping member 7 is used to push the workpiece adsorbed on the first support member 3 toward the first fixed member 2. The heights of the tops of the first fixed member 2 and the clamping member 7 are both greater than the height of the top of the first support member 3, and the heights of the tops of the first sliding member 4 and the second sliding member 5 are both less than or equal to the height of the top of the first support member 3.

[0052] In this embodiment, the first support member 3 is provided with an adsorption hole 31. When the workpiece is placed on the first support member 3, a vacuum is drawn into the adsorption hole 31 so that the workpiece is adsorbed and fixed on the first support member 3. The clamping device can be applied to the field of wafer manufacturing, so the workpiece can be a wafer.

[0053] The heights of the tops of the first fixing member 2 and the clamping member 7 are both greater than the height of the top of the first supporting member 3, and the first fixing member 2, the first sliding member 4 and the second sliding member 5 are all located on the peripheral side of the first supporting member 3, and the clamping member 7 is disposed on the first sliding member 4 and the second sliding member 5. Therefore, after the workpiece is placed on the first supporting member 3, the first fixing member 2 and the clamping member 7 can abut against the peripheral side of the workpiece to clamp the workpiece. Among them, the clamping member 7 can be a rolling member to reduce the friction between the clamping member 7 and the peripheral side of the workpiece, and can also reduce the damage of the clamping member 7 to the peripheral side of the workpiece.

[0054] The heights of the tops of the first sliding member 4 and the second sliding member 5 are both less than or equal to the height of the top of the first supporting member 3, so as to prevent the first sliding member 4 and the second sliding member 5 from lifting the workpiece, causing the workpiece to be suspended in the air, and affecting the adsorption and fixation of the workpiece by the first supporting member 3. Specifically, the heights of the tops of the first sliding member 4 and the second sliding member 5 are both equal to the height of the top of the first supporting member 3, so that the first sliding member 4 and the second sliding member 5 can support the workpiece.

[0055] The first sliding member 4 and the second sliding member 5 are both connected to the elastic component 6, so the first sliding member 4 and the second sliding member 5 can be driven by the elastic component 6 to approach each other along the first direction, so that the clamping members 7 respectively arranged on the first sliding member 4 and the second sliding member 5 approach each other along the first direction. Since the workpiece can be a wafer, during the process of the clamping members 7 approaching each other along the first direction, the wafer can be pushed by the clamping member 7 to center the wafer, and at the same time, the wafer is pushed toward the first fixing member 2, so that the peripheral side of the wafer is clamped by the clamping member 7 and the first fixing member 2.

[0056] One side of the first support member 3 close to the first sliding member 4 and the second sliding member 5 can be parallel to the first direction, so that the first sliding member 4 and the second sliding member 5 can be arranged on the peripheral side of the first support member 3, which is convenient for the clamping member 7 to push the workpiece. It can also increase the area of ​​the workpiece supported by the first support member 3, avoiding too large an area of ​​the workpiece suspended in the air, which affects the subsequent processing of the workpiece.

[0057] In this embodiment, the base 1 and the first support member 3 may both be plate-shaped structures, and the first sliding member 4 and the second sliding member 5 may both be block-shaped structures.

[0058] The first support member 3 of the embodiment of the present application is provided with an adsorption hole 31 so that the workpiece can be adsorbed and fixed to the first support member 3 through the adsorption hole 31; the clamping member 7 is provided on the first sliding member 4 or the second sliding member 5, the height of the top of the first fixing member 2 and the clamping member 7 is greater than the height of the top of the first support member 3, and the first fixing member 2, the first sliding member 4 and the second sliding member 5 are all located on the peripheral side of the first support member 3, so that the clamping member 7 and the first fixing member 2 can clamp the peripheral side of the workpiece; the first sliding member 4 and the second sliding member 5 are both connected to the elastic component 6 to drive the first sliding member 4 and

[0059] The second sliding members 5 approach each other along the first direction, thereby making the clamping members 7 approach each other, so that the workpiece is pushed toward the first fixing member 2 for clamping by the clamping member 7; because the clamping member 7 is driven by the first sliding member 4 and the second sliding member 5 in the process of pushing the workpiece toward the first fixing member 2 to clamp the workpiece, and the first sliding member 4 and the second sliding member 5 are driven by the elastic component 6, the force of the clamping member 7 pushing the workpiece can be balanced by the elastic force of the elastic component 6, so that the workpiece is clamped by the clamping member 7 and the first fixing member 2, and the clamping member 7 is prevented from crushing the workpiece.

[0060] In one embodiment, if Figure 1As shown, the elastic component 6 includes a first elastic member and a second elastic member 61. One end of the first elastic member is connected to the first sliding member 4, and the other end of the first elastic member is connected to the base 1. One end of the second elastic member 61 is connected to the second sliding member 5, and the other end of the second elastic member 61 is connected to the base 1. The expansion and contraction directions of the first elastic member and the second elastic member 61 are both parallel to the first direction.

[0061] The first elastic member can drive the first sliding member 4 to move toward the second sliding member 5, and the second elastic member 61 can drive the second sliding member 5 to move toward the first sliding member 4, so that the first sliding member 4 and the second sliding member 5 can be driven to approach each other along the first direction by the first elastic member and the second elastic member 61. The first elastic member and the second elastic member 61 can be springs.

[0062] In one embodiment, if Figure 1 As shown, the clamping device further includes a pushing member 8 and a third elastic member 9, and the pushing member 8 is slidably disposed on the base 1 along the second direction. One end of the third elastic member 9 is disposed on the pushing member 8, and the other end of the third elastic member 9 is disposed on the base 1. The third elastic member 9 is used to drive the pushing member 8 to slide between the first sliding member 4 and the second sliding member 5, so as to push the first sliding member 4 and the second sliding member 5 to slide in opposite directions along the first direction through the pushing member 8. The second direction is perpendicular to the first direction.

[0063] In this embodiment, both the first direction and the second direction may be parallel to the horizontal plane, that is, parallel to the plane where the first support member 3 is located.

[0064] The third elastic member 9 is used to drive the push member 8 to slide between the first sliding member 4 and the second sliding member 5 along the second direction, so as to separate the first sliding member 4 and the second sliding member 5 through the push member 8, so that the first sliding member 4 and the second sliding member 5 slide in opposite directions. When the first sliding member 4 and the second sliding member 5 slide in opposite directions along the first direction, the elastic component 6 is continuously stretched. At the same time, the clamping member 7 also moves in the opposite direction to increase the distance between the first fixing member 2 and the clamping member 7, so as to facilitate the placement of the workpiece on the first supporting member 3.

[0065] After the workpiece is placed on the first support member 3, force can be applied to the push member 8 so as to drag the push member 8 to move in the second direction away from the first support member 3. At this time, the third elastic member 9 is stretched, and the push member 8 gradually withdraws from the space between the first sliding member 4 and the second sliding member 5. In the process of the push member 8 withdrawing from the space between the first sliding member 4 and the second sliding member 5, the first sliding member 4 and the second sliding member 5 approach each other in the first direction under the drive of the elastic component 6, so that the workpiece is pushed to the first fixing member 2 for clamping through the clamping member 7. When the workpiece needs to be loaded, the distance between the first fixing member 2 and the clamping member 7 can be increased by loosening the push member 8 to place the workpiece on the first support member 3.

[0066] In this embodiment, when the force is applied to the pusher 8 so that the pusher 8 slides along the second direction away from the first support member 3, the force may be applied manually, or by a motor or a cylinder. The height of the top of the pusher 8 is less than or equal to the height of the top of the first support member 3, so as to prevent the pusher 8 from lifting the workpiece and causing the workpiece to be suspended in the air.

[0067] In one embodiment, if Figure 1 and Figure 2 As shown, the clamping device further includes a first roller and a second roller 10. The first roller is arranged on a side of the pusher 8 close to the first sliding member 4, and a side of the first sliding member 4 close to the second sliding member 5 has a first inclined surface 41, and the first roller is used to abut against the first inclined surface 41. The second roller 10 is arranged on a side of the pusher 8 close to the second sliding member 5, and a side of the second sliding member 5 close to the first sliding member 4 has a second inclined surface 51, and the second roller 10 is used to abut against the second inclined surface 51.

[0068] By providing the first inclined surface 41 on the first sliding member 4 and the second inclined surface 51 on the second sliding member 5, the pushing member 8 can be squeezed into the space between the first sliding member 4 and the second sliding member 5, thereby pushing the first sliding member 4 and the second sliding member 5 to slide in opposite directions along the first direction. By providing the first roller and the second roller 10 on the pushing member 8, the friction between the pushing member 8 and the first sliding member 4 and the second sliding member 5 can be reduced.

[0069] In this embodiment, if Figure 2 As shown, the distance between the first inclined surface 41 and the second inclined surface 51 gradually increases along the second direction toward a direction away from the first support member 3 , so as to facilitate separation of the first sliding member 4 and the second sliding member 5 by the pushing member 8 .

[0070] In one embodiment, if Figure 1As shown, the clamping device further includes a locking assembly 20, which is disposed on the base 1 and is used to lock or release the pusher 8. When the locking assembly 20 releases the pusher 8, the pusher 8 moves along the second direction toward the space between the first sliding member 4 and the second sliding member 5 under the drive of the third elastic member 9, so as to separate the first sliding member 4 and the second sliding member 5 through the pusher 8, thereby facilitating the placement of the workpiece on the first support member 3.

[0071] When the workpiece needs to be clamped by the clamping member 7, it is necessary to apply force to the pusher 8 so that the pusher 8 moves in the second direction away from the first support member 3, so that the pusher 8 exits the space between the first slide 4 and the second slide. When the pusher 8 exits the space between the first slide 4 and the second slide, the locking assembly 20 can lock the pusher 8, so that when the force is stopped being applied to the pusher 8, the locking assembly 20 can prevent the pusher 8 from sliding in the second direction, so that the clamping member 7 can maintain the state of clamping the workpiece.

[0072] In one embodiment, if Figure 1 As shown, the locking assembly 20 includes a locking member 201 and a fourth elastic member. A first locking hole is provided on the base 1, the first locking hole passes through the base 1, and the locking member 201 is inserted into the first locking hole. One end of the fourth elastic member is provided on the inner wall of the first locking hole, and the other end of the fourth elastic member is provided on the locking member 201. A second locking hole is provided at the bottom of the push member 8, and the fourth elastic member is used to drive the locking member 201 to move toward the push member 8. One end of the locking member 201 close to the push member 8 is located on the moving path of the second locking hole, and the locking member 201 can extend into the second locking hole.

[0073] Since the end of the locking member 201 close to the pushing member 8 is located on the moving path of the second locking hole, when a force is applied to the pushing member 8 to make the pushing member 8 slide in the second direction away from the first supporting member 3, the second locking hole will pass directly above the locking member 201. When the second locking hole passes directly above the locking member 201, the fourth elastic member will drive the locking member 201 to extend into the second locking hole to lock the pushing member 8 through the locking member 201, thereby preventing the pushing member 8 from sliding in the second direction. In this way, the clamping member 7 can maintain the state of clamping the workpiece.

[0074] When force is applied to the locking member 201 to pull the locking member 201 out of the second locking hole, the fourth elastic member is compressed. At this time, since the pushing member 8 loses the blocking effect of the locking member 201, the pushing member 8, driven by the third elastic member 9, will move toward the first support member 3 along the second direction to separate the first sliding member 4 and the second sliding member 5, thereby facilitating the placement of the workpiece on the first support member 3. At the same time, the pushing member 8 will press the locking member 201 toward the base 1, so that the subsequent second locking hole can pass directly above the locking member 201 again, and the locking member 201 can extend into the second locking hole again.

[0075] The first locking hole may be a stepped hole so that the fourth elastic member may abut against the step in the first locking hole. Since the first locking hole passes through the base 1, force may be applied to the locking member 201 manually, or by a motor or a cylinder, so that the locking member 201 exits the second locking hole.

[0076] In one embodiment, if Figure 1 As shown, the clamping device further includes a locking block 30, which is disposed on the side of the pusher 8, and the second locking hole is located at the bottom of the locking block 30. So that the path of the second locking hole can be located directly above the locking member 201, so as to prevent the locking member 201 from interfering with the sliding of the pusher 8 on the base 1.

[0077] In one embodiment, if Figure 1 As shown, the clamping device further includes a limit block 40, which is disposed on the base 1 and is located on the side of the pusher 8 away from the first support member 3. The limit block 40 limits the position of the pusher 8 so that the pusher 8 is always located directly above the locking member 201, thereby preventing the locking member 201 from being separated from the pressure of the pusher 8.

[0078] Specifically, the limit block 40 is located on the side of the locking block 30 away from the first support member 3, so that the position of the locking block 30 is limited by the limit block 40, so that the locking block 30 is always located directly above the locking member 201, preventing the locking member 201 from escaping from the pressure of the locking block 30.

[0079] In one embodiment, if Figure 1 As shown, the clamping device further includes a second support member 50, which is disposed on the base 1, and is located on the side of the first sliding member 4 or the second sliding member 5 away from the first support member 3, and the height of the top of the second support member 50 is the same as the height of the top of the first support member 3. The second support member 50 is used to support the workpiece and reduce the suspended area of ​​the workpiece to facilitate subsequent processing of the workpiece.

[0080] In one embodiment, if Figure 1 and Figure 3As shown, a protrusion 21 is provided on the first fixing member 2, and the protrusion 21 is located on the side of the first fixing member 2 facing the first supporting member 3. The peripheral side of the workpiece has a groove, and when the workpiece is placed on the first supporting member 3, the protrusion 21 on the first fixing member 2 extends into the groove of the workpiece, and the workpiece is positioned by the protrusion 21 on the first fixing member 2 to play an anti-fool effect.

[0081] In one embodiment, if Figure 1 As shown, the clamping device further includes at least two second fixing members 60, which are arranged on the base 1, and the first fixing member 2, the second fixing member 60, the first sliding member 4 and the second sliding member 5 are arranged around the circumference of the first supporting member 3 at intervals, and the height of the top of the second fixing member 60 is higher than the height of the top of the first supporting member 3. In the process of the clamping member 7 pushing the workpiece toward the first fixing member 2, the second fixing member 60 can block the circumference of the workpiece to limit the workpiece and improve the stability when clamping the workpiece.

[0082] In one embodiment, if Figure 1 As shown, the clamping device also includes a driving assembly 70, and the base 1 is arranged at the output end of the driving assembly 70, and the driving assembly 70 is used to drive the base 1 to rotate. The driving assembly 70 drives the base 1 to rotate, and then the base 1 drives the first support member 3, the first fixing member 2, the first sliding member 4 and the second sliding member 5 to rotate, so that they drive the workpiece to rotate, thereby facilitating the processing of the workpiece. Among them, when the workpiece is a wafer, the wafer can be grooved and marked.

[0083] In addition, an embodiment of the present application also provides a wafer processing equipment, which includes a clamping device. The specific structure of the clamping device refers to the above embodiment. Since the wafer processing equipment adopts all the technical solutions of all the above embodiments, it at least has all the beneficial effects brought by the technical solutions of the above embodiments.

[0084] The above description is only a preferred embodiment of the present application, and does not limit the patent scope of the present application. All equivalent structural changes made by using the contents of the present application specification and drawings under the inventive concept of the present application, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present application.

Claims

1. A clamping device, characterized in that: The clamping device comprises: Base; a first fixing member, the first fixing member being disposed on the base; a first support member, wherein the first support member is disposed on the base, the first fixing member is located at a peripheral side of the first support member, the height of the top of the first fixing member is greater than the height of the top of the first support member; and the first support member is provided with a suction hole; A first sliding member, the first sliding member is slidably disposed on the base along a first direction, and the first sliding member is located at a peripheral side of the first supporting member; a second sliding member, the second sliding member being slidably disposed on the base along the first direction, the second sliding member being located at a peripheral side of the first supporting member; the heights of the tops of the first sliding member and the second sliding member are both less than or equal to the height of the top of the first supporting member; an elastic component, the first sliding member and the second sliding member are both connected to the elastic component, and the elastic component is used to drive the first sliding member and the second sliding member to move closer to each other along the first direction; A clamping member, wherein the end of the first sliding member away from the second sliding member and the end of the second sliding member away from the first sliding member are both provided with the clamping member, and the height of the top of the clamping member is greater than the height of the top of the first supporting member; the clamping member is used to push the workpiece adsorbed on the first supporting member toward the first fixing member.

2. The clamping device according to claim 1, characterized in that The elastic component comprises: a first elastic member, wherein one end of the first elastic member is connected to the first sliding member, and the other end of the first elastic member is connected to the base; A second elastic member, one end of the second elastic member is connected to the second sliding member, and the other end of the second elastic member is connected to the base; the expansion and contraction directions of the first elastic member and the second elastic member are both parallel to the first direction.

3. The clamping device according to claim 1, characterized in that The clamping device also includes: A pushing member, the pushing member is slidably disposed on the base along a second direction; a third elastic member, one end of which is disposed on the pushing member, and the other end of which is disposed on the base, and the third elastic member is used to drive the pushing member to slide between the first sliding member and the second sliding member, so as to push the first sliding member and the second sliding member to slide in opposite directions along the first direction through the pushing member; The second direction is perpendicular to the first direction.

4. The clamping device according to claim 3, characterized in that The clamping device also includes: a first roller, the first roller being arranged on a side of the pushing member close to the first sliding member, the first sliding member having a first inclined surface on a side close to the second sliding member, the first roller being used to abut against the first inclined surface; The second roller is arranged on a side of the pushing member close to the second sliding member, the side of the second sliding member close to the first sliding member has a second inclined surface, and the second roller is used to abut against the second inclined surface.

5. The clamping device according to claim 3, characterized in that The clamping device also includes: A locking assembly is arranged on the base, and is used to lock or release the pushing member.

6. The clamping device according to claim 5, characterized in that The locking assembly comprises: A locking member, wherein a first locking hole is provided on the base, the first locking hole passes through the base, and the locking member is inserted into the first locking hole; A fourth elastic member, one end of the fourth elastic member is arranged on the inner wall of the first locking hole, and the other end of the fourth elastic member is arranged on the locking member; a second locking hole is arranged at the bottom of the pushing member, and the fourth elastic member is used to drive the locking member to move toward the pushing member; one end of the locking member close to the pushing member is located on the moving path of the second locking hole, and the locking member can extend into the second locking hole.

7. The clamping device according to claim 3, characterized in that The clamping device also includes: A second support member, wherein the second support member is arranged on the base, the second support member is located on a side of the first sliding member or the second sliding member away from the first support member, and the height of the top of the second support member is the same as the height of the top of the first support member.

8. The clamping device according to claim 1, characterized in that The first fixing member is provided with a protrusion, and the protrusion is located on a side of the first fixing member facing the first supporting member.

9. The clamping device according to claim 1, characterized in that: The clamping device also includes: At least two second fixing members, the second fixing members are arranged on the base, the first fixing member, the second fixing member, the first sliding member and the second sliding member are arranged around the circumference of the first supporting member at intervals, and the height of the top of the second fixing member is higher than the height of the top of the first supporting member.

10. The clamping device according to claim 1, characterized in that The clamping device also includes: A driving assembly, wherein the base is arranged at an output end of the driving assembly, and the driving assembly is used to drive the base to rotate.

11. A wafer processing equipment, characterized in that: The wafer processing equipment comprises the clamping device according to any one of claims 1 to 10.

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