Tail gas treater for epitaxial process

Abstract

The utility model belongs to the technical field of tail gas treatment, particularly relates to a tail gas treater for an epitaxial process, and aims to solve the problems that the actual filtering area of an existing filter plate is limited, solid impurities in tail gas are easy to block the filter plate, and the air permeability of the filter plate is reduced. An upper machine body is fixed at the top end of the lower machine body, a heating gap and a filtering gap are formed in the upper machine body, a tail gas inlet pipe communicated with the filtering gap and used for feeding tail gas is fixed in the upper machine body, and a tail gas outlet pipe communicated with the heating gap and used for exhausting gas is fixed in the upper machine body; a fixed plate is fixed in the upper machine body, the fixed plate is respectively communicated with the heating gap and the filtering gap, and a plurality of filtering cylinders are fixed in the fixed plate; by integrating heating, filtering and cleaning functions, efficient treatment of solid impurities and harmful chemical substances in tail gas is realized, and the reciprocating cleaning function of the scraper effectively keeps the filter cartridge clean.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment, in particular to a tail gas processor of epitaxial process. Background Art

[0002] The epitaxial process is an important semiconductor material preparation technology. Its core principle is to grow new crystals layer by layer on a substrate to prepare materials with high quality and customized properties. The epitaxial process refers to the process of growing a completely ordered single crystal layer on a substrate. This process usually grows a crystal layer with the same lattice orientation as the original substrate on a single crystal substrate. The epitaxial process plays a vital role in semiconductor manufacturing, but at the same time, the exhaust gas generated in its production process is also an important environmental issue that needs to be considered.

[0003] In the prior art, solid impurities in the exhaust gas need to be filtered through a filter plate, but the actual filtration area of ​​the filter plate is limited. The solid impurities in the exhaust gas can easily clog the filter plate, causing the air permeability of the filter plate to decrease, making it inconvenient to treat the exhaust gas. Utility Model Content

[0004] The utility model aims to solve the shortcomings of the prior art that the actual filtration area of ​​the filter plate is limited, and solid debris in the exhaust gas is easy to clog the filter plate, resulting in reduced air permeability of the filter plate, and proposes an exhaust gas processor using an epitaxial process.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] An epitaxial exhaust gas processor comprises a lower body, an upper body is fixed on the top of the lower body, a heating gap and a filtering gap are opened in the upper body, an exhaust gas inlet pipe connected to the filtering gap for taking in exhaust gas is fixed in the upper body, and an exhaust gas outlet pipe connected to the heating gap for exhaust gas is fixed in the upper body;

[0007] A fixing plate is fixed in the upper body, the fixing plate is connected to the heating gap and the filtering gap respectively, a plurality of filter cartridges are fixed in the fixing plate, and the surfaces of the plurality of filter cartridges are provided with filtering holes for filtering solid impurities in the exhaust gas;

[0008] The surfaces of the plurality of filter cartridges are provided with a same scraper for sliding, and the scraper is used to clean the surfaces of the plurality of filter cartridges. A set of extrusion components is provided in the upper body, and the extrusion components are used to drive the scraper to reciprocate and clean the surfaces of the plurality of filter cartridges.

[0009] And a reciprocating assembly used in conjunction with the extrusion assembly, wherein the reciprocating assembly is used to drive the extrusion assembly to perform cleaning.

[0010] In a possible design, a baffle is fixed in the filter gap, and the baffle faces the air intake direction of the exhaust gas intake pipe.

[0011] In a possible design, the extrusion assembly includes two first grooves opened in the upper body and connected to the filter gap, two limit rods are fixed in the two first grooves, a third slider is slid in the two first grooves, the two third sliders slide on the surfaces of the four limit rods respectively, a first slide groove is opened at the ends of the two third sliders close to each other, a second slider slides in the two first slide grooves, a second groove is opened in the lower body, a filter box slides on the top wall of the second groove, two vertical plates are fixed on the top of the filter box, the two second sliders are respectively fixed to the ends of the two vertical plates away from each other, and the scraper is fixed between the two third sliders.

[0012] In a possible design, the reciprocating assembly includes a third groove opened in the lower body, a slide plate slides in the third groove, a second slide groove is opened in the slide plate, a first slider slides in the second slide groove, a rotating rod rotates in the third groove, the first slider is fixed to the bottom end of the rotating rod, a connecting rod is fixed to the side end of the slide plate, the connecting rod moves outward and passes through the second groove, the filter box is fixed to the side end of the connecting rod, a driving motor is fixed to the top of the lower body, and the driving motor is fixedly connected to the rotating rod through a coupling.

[0013] In a possible design, a receiving box is slidably disposed in the second groove, and the receiving box is disposed on the lower side of the plurality of filter cartridges.

[0014] In a possible design, a first magnetic block is fixed to a side end of the accommodating box, a second magnetic block is fixed to an inner wall of the second groove, and the first magnetic block and the second magnetic block are magnetically connected.

[0015] In a possible design, an activated carbon filter is fixed in the exhaust gas outlet pipe.

[0016] In a possible design, a plurality of heating rods for heating the exhaust gas are fixed in the heating gap, an air pump is fixed to the side end of the upper body, an auxiliary air inlet pipe is fixed to the air inlet of the air pump, an auxiliary air outlet pipe is fixed to the exhaust port of the air pump, and the auxiliary air outlet pipe is connected to the heating gap.

[0017] In the present application, when in use, the exhaust gas enters the filter gap through the exhaust gas intake pipe, the exhaust gas will impact the baffle, and the debris in the exhaust gas will be partially blocked by the baffle. When there are too many solid debris on the surface of the baffle, it will automatically fall down and fall into the storage box to be stored. The exhaust gas passes through the filter holes on the surface of multiple filter cartridges and enters the heating gap. The solid debris therein is effectively filtered and enters the heating rod to heat the exhaust gas, so that the exhaust gas is fully burned before being discharged. By starting the air pump to draw outside air into the heating gap, the exhaust gas can be fully burned.

[0018] The driving motor is started to drive the rotating rod to rotate, and the rotation of the rotating rod drives the first slider to perform circular motion, the first slider slides in the second slide groove, the first slider drives the slide plate to perform reciprocating relative movement, the slide plate drives the filter box to reciprocate through the connecting rod, the filter box drives the two vertical plates to reciprocate, the vertical plate drives the second slider to reciprocate, the second slider slides in the first slide groove when reciprocating, the second slider squeezes the third slider to reciprocate up and down, and the third slider drives the scraper to reciprocate up and down to clean the surface of the filter cylinder.

[0019] Beneficial Effects

[0020] In the utility model, the exhaust gas processor of the epitaxial process can achieve the effect of cleaning the filter holes on the surface of multiple filter cartridges to prevent clogging by extruding the components;

[0021] In the utility model, the device realizes efficient treatment of solid impurities and harmful chemicals in tail gas by integrating heating, filtering and cleaning functions. The reciprocating cleaning function of the scraper effectively keeps the filter cartridge clean, and improves the service life of the processor and the stability of the treatment effect. At the same time, the heating rod and activated carbon filter in the heating gap further improve the treatment effect of tail gas. The overall structure is compact, easy to operate, and has high practicality and promotion value. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a front perspective view of an exhaust gas processor using an epitaxial process proposed by the utility model;

[0023] Figure 2 A first partial cross-sectional view of an exhaust gas processor of an epitaxial process proposed by the utility model;

[0024] Figure 3 A second partial cross-sectional view of an exhaust gas processor of an epitaxial process proposed by the utility model;

[0025] Figure 4 This is a partial stereoscopic diagram of an exhaust gas processor using an epitaxial process proposed by the utility model.

[0026] In the figure: 1. lower body; 2. upper body; 3. exhaust gas inlet pipe; 4. exhaust gas outlet pipe; 5. air pump; 6. auxiliary inlet pipe; 7. auxiliary outlet pipe; 8. heating rod; 9. heating gap; 10. filter gap; 11. first groove; 12. limit rod; 13. third slider; 14. first slide groove; 15. fixing plate; 16. filter cartridge; 17. scraper; 18. baffle; 19. activated carbon filter; 20. second groove; 21. accommodating box; 22. first magnetic block; 23. second magnetic block; 24. driving motor; 25. third groove; 26. slide plate; 27. rotating rod; 28. connecting rod; 29. ​​filter box; 30. vertical plate; 31. first slider; 32. second slide groove; 33. second slider. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0028] Example 1

[0029] Reference Figure 1-Figure 4 , an exhaust gas processor, comprising a lower body 1 and an upper body 2, wherein the top of the lower body 1 is fixedly connected to the upper body 2 to form an integral processing chamber, wherein a heating gap 9 and a filtering gap 10 are provided in the upper body 2, wherein the heating gap 9 is used for heating the exhaust gas, and the filtering gap 10 is used for filtering solid impurities in the exhaust gas;

[0030] An exhaust gas inlet pipe 3 is provided in the filter gap 10. One end of the exhaust gas inlet pipe 3 is connected to the exhaust gas source, and the other end extends into the filter gap 10. The exhaust gas enters the filter gap 10 through the exhaust gas inlet pipe 3, and after being filtered, enters the heating gap 9 for heating treatment. The treated exhaust gas is finally discharged through the exhaust gas outlet pipe 4.

[0031] In order to effectively filter the solid impurities in the tail gas, a fixing plate 15 is provided in the upper body 2, and the fixing plate 15 is respectively connected to the heating gap 9 and the filtering gap 10. A plurality of filter cartridges 16 are fixed on the fixing plate 15, and filter holes are provided on the surface of the filter cartridges 16 for filtering the solid impurities in the tail gas.

[0032] In order to keep the filter cartridges 16 clean, a set of scrapers 17 and a squeezing assembly are also provided in the upper body 2. The scrapers 17 slide on the surfaces of the plurality of filter cartridges 16 to clean the filter cartridges 16. The squeezing assembly drives the scrapers 17 to reciprocate and clean the surfaces of the filter cartridges 16 through reciprocating motion.

[0033] Specifically, the extrusion assembly includes two first grooves 11, two limiting rods 12 are respectively fixed in the first grooves 11, and a third slider 13 slides in the first groove 11. The third slider 13 can only move linearly under the restriction of the limiting rod 12. The adjacent ends of the two third sliders 13 are provided with a first slide groove 14, and a second slider 33 slides in the first slide groove 14. A second groove 20 is provided in the lower body 1, and a filter box 29 slides on the top wall of the second groove 20. Two vertical plates 30 are fixed on the top of the filter box 29. The two second sliders 33 are respectively fixed to the ends of the two vertical plates 30 that are far away from each other, and the scraper 17 is fixed between the two third sliders 13.

[0034] In order to drive the third slider 13 and the second slider 33 to reciprocate, the device is further provided with a set of reciprocating components, which include a third groove 25 opened in the lower body 1, a slide plate 26 sliding in the third groove 25, a second slide groove 32 opened in the slide plate 26, a first slider 31 sliding in the second slide groove 32, a rotating rod 27 rotating in the third groove 25, the first slider 31 is fixed to the bottom end of the rotating rod 27, a connecting rod 28 is fixed to the side end of the slide plate 26, the connecting rod 28 moves outward to penetrate into the second groove 20, and the filter box 29 is fixed to the connecting rod 2 At the side end of 8, a driving motor 24 is fixed on the top of the lower body 1, and the driving motor 24 is fixedly connected to the rotating rod 27 through a coupling. When the driving motor 24 is working, the rotating rod 27 rotates, driving the first slider 31 to reciprocate in the second slide groove 32, and then driving the filter box 29 and the second slider 33 to reciprocate in the second groove 20 through the connecting rod 28. Since the second slider 33 is slidably connected to the first slide groove 14 of the third slider 13, the third slider 13 will also reciprocate accordingly, thereby driving the scraper 17 to reciprocate and clean the surface of the filter cylinder 16.

[0035] In order to improve the purification effect of exhaust gas, an activated carbon filter 19 is also fixed in the exhaust gas outlet pipe 4 to further absorb harmful gases in the exhaust gas. At the same time, a plurality of heating rods 8 are also fixed in the heating gap 9 to heat the exhaust gas to remove some harmful substances in the exhaust gas. An air pump 5 is also fixed to the side end of the upper body 2. The air inlet of the air pump 5 is connected to the outside through the auxiliary air inlet pipe 6, and the exhaust port is connected to the heating gap 9 through the auxiliary air outlet pipe 7. When the air pump 5 is working, fresh air from the outside can be introduced into the heating gap 9 to mix and heat with the exhaust gas, thereby improving the treatment effect of the exhaust gas.

[0036] When in use, the exhaust gas enters the filter gap 10 through the exhaust gas inlet pipe 3, and the exhaust gas will impact the baffle 18. The debris in the exhaust gas is partially blocked by the baffle 18. When there are too many solid debris on the surface of the baffle 18, they will automatically fall down and fall into the storage box 21 for storage;

[0037] The present application can be used for tail gas treatment in epitaxial processes, and can also be used in other fields applicable to the present application.

[0038] Example 2

[0039] refer to Figure 1-Figure 4 , improved on the basis of Example 1: an epitaxial process exhaust gas processor, which is used in the field of exhaust gas treatment technology. In order to collect the scraped solid debris, the device is provided with a accommodating box 21 below the second groove 20, and a first magnetic block 22 is fixed to the side end of the accommodating box 21, and a second magnetic block 23 is fixed to the inner wall of the second groove 20. The first magnetic block 22 and the second magnetic block 23 are magnetically connected, which is convenient for taking out and installing the accommodating box 21.

[0040] However, as is well known to those skilled in the art, the working principle and wiring method of the drive motor 24 are commonplace, and are conventional means or common knowledge, and will not be elaborated here. Those skilled in the art may make any optional selections according to their needs or convenience.

[0041] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An epitaxial tail gas processor, characterized in that: include: A lower body (1), an upper body (2) is fixed at the top of the lower body (1), a heating gap (9) and a filtering gap (10) are provided in the upper body (2), an exhaust gas inlet pipe (3) connected to the filtering gap (10) for taking in exhaust gas is fixed in the upper body (2), and an exhaust gas outlet pipe (4) connected to the heating gap (9) for exhaust gas is fixed in the upper body (2); A fixing plate (15) is fixed inside the upper body (2), the fixing plate (15) is respectively connected to the heating gap (9) and the filtering gap (10), a plurality of filter cartridges (16) are fixed inside the fixing plate (15), and the surfaces of the plurality of filter cartridges (16) are provided with filtering holes for filtering solid impurities in the exhaust gas; The surfaces of the plurality of filter cartridges (16) are slidably provided with a same scraper (17), the scraper (17) being used to clean the surfaces of the plurality of filter cartridges (16), and a group of extrusion components being provided in the upper body (2), the extrusion components being used to drive the scraper (17) to reciprocate and clean the surfaces of the plurality of filter cartridges (16); And a reciprocating assembly used in conjunction with the extrusion assembly, wherein the reciprocating assembly is used to drive the extrusion assembly to perform cleaning.

2. The tail gas processor of the epitaxial process according to claim 1, characterized in that: A baffle (18) is fixed in the filtering gap (10), and the baffle (18) faces the air intake direction of the exhaust gas intake pipe (3).

3. The tail gas processor of the epitaxial process according to claim 1, characterized in that: The extrusion assembly comprises two first grooves (11) which are opened in the upper body (2) and connected to the filter gap (10), two limiting rods (12) are fixed in the two first grooves (11), a third slider (13) is slid in the two first grooves (11), the two third sliders (13) respectively slide on the surfaces of the four limiting rods (12), the two third sliders (13) are opened at the ends close to each other of the two third sliders (13), a second slider (33) is slid in the two first sliders (14), a second groove (20) is opened in the lower body (1), a filter box (29) is slid on the top wall of the second groove (20), two vertical plates (30) are fixed at the top of the filter box (29), the two second sliders (33) are respectively fixed at the ends away from each other of the two vertical plates (30), and the scraper (17) is fixed between the two third sliders (13).

4. The tail gas processor of the epitaxial process according to claim 3, characterized in that: The reciprocating assembly comprises a third groove (25) provided in the lower body (1), a slide plate (26) slidingly arranged in the third groove (25), a second slide groove (32) provided in the slide plate (26), a first slide block (31) slidingly arranged in the second slide groove (32), a rotating rod (27) rotating in the third groove (25), the first slide block (31) being fixed to the bottom end of the rotating rod (27), a connecting rod (28) being fixed to the side end of the slide plate (26), the connecting rod (28) being movable outwardly and penetrating into the second groove (20), the filter box (29) being fixed to the side end of the connecting rod (28), a driving motor (24) being fixedly arranged at the top end of the lower body (1), the driving motor (24) being fixedly connected to the rotating rod (27) via a coupling.

5. The tail gas processor of the epitaxial process according to claim 4, characterized in that: A accommodating box (21) is slidably disposed in the second groove (20), and the accommodating box (21) is disposed on the lower side of the plurality of filter cartridges (16).

6. The tail gas processor of the epitaxial process according to claim 5, characterized in that: A first magnetic block (22) is fixed to the side end of the accommodating box (21), a second magnetic block (23) is fixed to the inner wall of the second groove (20), and the first magnetic block (22) and the second magnetic block (23) are magnetically connected.

7. The tail gas processor of the epitaxial process according to claim 1, characterized in that: An activated carbon filter (19) is fixed inside the tail gas outlet pipe (4).

8. The tail gas processor of the epitaxial process according to claim 7, characterized in that: A plurality of heating rods (8) for heating the exhaust gas are fixed in the heating gap (9); an air pump (5) is fixed to the side end of the upper body (2); an auxiliary air intake pipe (6) is fixed to the air inlet of the air pump (5); an auxiliary air outlet pipe (7) is fixed to the air outlet of the air pump (5); and the auxiliary air outlet pipe (7) is connected to the heating gap (9).

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