Vacuum cavity structure for plasma cleaning machine

Abstract

The utility model belongs to the technical field of vacuum cavities of plasma cleaning machines, and particularly relates to a vacuum cavity structure for a plasma cleaning machine, which comprises a cavity body, the cavity body comprises a sealing cylinder and a fastening screw, the rear side wall of the cavity body is provided with a notch, the outer side wall of the notch is fixedly connected with a concave plate, and the concave plate is fixedly connected with the sealing cylinder. An air valve is fixedly connected to the upper side wall of the cavity, an air outlet pipe is fixedly connected to the output end of the air valve, a ventilation pipeline is arranged on the right side wall of the cavity, the air outlet pipe penetrates through the outer side wall of the cavity and is fixedly connected with the ventilation pipeline, and a refrigerator is fixedly connected to the left side wall of the cavity; the output end of the refrigerator is fixedly connected with a refrigerating pipe. The heat transfer speed is increased through the concave plate, the refrigeration effect is improved, the flowing speed of cold air flow is increased through connection of the refrigeration pipe and the air outlet pipe, finally, the cold air flow is discharged out of the cylinder through the ventilation pipeline, if the equipment works continuously for a long time, condensate water is avoided, and therefore the sealing performance is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum chambers of plasma cleaning machines, in particular to a vacuum chamber structure used for plasma cleaning machines. Background Art

[0002] Plasma cleaning machine is a kind of equipment that uses plasma technology to clean and modify the surface, and the vacuum chamber structure is an important component. The design of the vacuum chamber structure is crucial to the performance and efficiency of the plasma cleaning machine. Since the plasma cleaning process may generate high temperatures, the vacuum chamber structure usually also includes a cooling system to keep the system running within a safe temperature range.

[0003] The existing cooling system will lower the cooling temperature to ensure that the plasma can operate for a long time. However, if the cooling system is turned on for a long time, condensed water will appear in the vacuum chamber of the plasma cleaning machine due to the temperature difference, which will affect the sealing of the vacuum chamber for a long time.

[0004] To solve the above problems, we proposed a vacuum chamber structure for a plasma cleaning machine. Utility Model Content

[0005] The utility model aims to solve the problems in the background technology and proposes a vacuum chamber structure for a plasma cleaning machine.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a vacuum chamber structure for a plasma cleaning machine, comprising a cavity, the cavity comprising a sealing cylinder and a fastening screw, the rear side wall of the cavity is provided with a notch, the outer side wall of the notch is fixedly connected with a concave plate, the upper side wall of the cavity is fixedly connected with an air valve, the output end of the air valve is fixedly connected with an air outlet pipe, the right side wall of the cavity is provided with a ventilation duct, the air outlet pipe passes through the outer side wall of the cavity and is fixedly connected to the ventilation duct, the left side wall of the cavity is fixedly connected with a refrigerator, the output end of the refrigerator is fixedly connected with a refrigeration pipe, the refrigeration pipe passes through the outer side wall of the cavity and is connected to the air outlet pipe, and the bottom two sides of the cavity are fixedly connected with extended edges, and there are threaded holes in the extended edges.

[0007] In the above-mentioned vacuum chamber structure for a plasma cleaning machine, a thread groove of the same size as the threaded hole of the extension edge is provided at the bottom of the sealing cylinder, and the extension edge is threadedly connected to the thread groove by a fastening screw, and the left side wall of the sealing cylinder is fixedly connected to an air pump, and the output end of the air pump is fixedly connected to a one-way valve, and the top end of the sealing cylinder is rotatably connected to a sealing cover, and the outer side wall of the sealing cylinder is fixedly connected to a sealing plate, and the sealing plate is provided with a transparent glass.

[0008] In the above-mentioned vacuum chamber structure for a plasma cleaning machine, the ventilation duct runs through the right side wall of the sealing cylinder, and a sealing ring is sleeved on the top of the sealing cylinder.

[0009] In the above-mentioned vacuum chamber structure for a plasma cleaning machine, a sealing strip is provided at the contact portion between the transparent glass and the sealing plate.

[0010] In the above-mentioned vacuum chamber structure for a plasma cleaning machine, a sealing gasket is provided at the contact portion between the ventilation duct and the sealing cylinder.

[0011] In the above-mentioned vacuum chamber structure for a plasma cleaning machine, the refrigeration tubes are evenly distributed in a wave shape and attached to the concave plate.

[0012] Compared with the existing technology, the advantages of the vacuum chamber structure for plasma cleaning machine are:

[0013] The utility model increases the speed of heat transfer through the concave plate to improve the refrigeration effect, increases the flow speed of the cold air through the connection of the refrigeration pipe and the exhaust pipe, and finally discharges it to the outside of the cylinder through the ventilation pipe. If the equipment continues to work for a long time, condensation water is avoided, thereby ensuring the sealing. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a front view of the vacuum chamber;

[0015] Figure 2 This is a front cross-sectional view of a vacuum chamber structure for a plasma cleaning machine proposed by the utility model;

[0016] Figure 3 This is a front view of a vacuum chamber structure for a plasma cleaning machine proposed by the utility model.

[0017] In the figure: 1 cavity, 2 air valve, 3 ventilation pipe, 4 air outlet pipe, 5 refrigerator, 6 refrigeration pipe, 7 extension edge, 8 sealing cover, 9 sealing cylinder, 10 true air pump, 11 one-way valve, 12 sealing plate, 13 perspective glass, 14 concave plate, 15 sealing ring. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0019] Reference Figure 1-Figure 3A vacuum chamber structure for a plasma cleaning machine comprises a chamber 1, the chamber 1 comprises a sealing cylinder 9 and a fastening screw, a notch is provided on the rear side wall of the chamber 1, a concave plate 14 is fixedly connected to the outer wall of the notch, an air valve 2 is fixedly connected to the upper side wall of the chamber 1, an outlet pipe 4 is fixedly connected to the output end of the air valve 2, a ventilation pipe 3 is provided on the right side wall of the chamber 1, the outlet pipe 4 passes through the outer wall of the chamber 1 and is fixedly connected to the ventilation pipe 3, a refrigerator 5 is fixedly connected to the left side wall of the chamber 1, a refrigeration pipe 6 is fixedly connected to the output end of the refrigerator 5, the refrigeration pipe 6 passes through the outer wall of the chamber 1 and is connected to the outlet pipe 4, an extension edge 7 is fixedly connected to both sides of the bottom of the chamber 1, a threaded hole is provided in the extension edge 7, the ventilation pipe 3 passes through the right side wall of the sealing cylinder 9, a sealing ring 15 is sleeved on the top of the sealing cylinder 9, and the contact part between the ventilation pipe 3 and the sealing cylinder 9 A sealing gasket is provided, which can increase the sealing performance and prevent external airflow from entering the cylinder and affecting the sealing performance. The refrigeration tube 6 is evenly distributed in a wavy shape and fits on the concave plate 14. The concave plate 14 is made of aluminum with a high transmission speed. It can effectively spread the cooling effect and improve the heat dissipation effect. When the plasma cleaning machine needs to run for a long time, the air valve 2 and the refrigerator 5 are started. The air valve 2 can accelerate the flow of air, and the refrigerator 5 ensures the heat dissipation performance. After the air valve 2 is started, it will pass through the air outlet pipe 4 and finally blow through the ventilation pipe 3. When the refrigerator 5 is turned on, part of the heat of the refrigeration tube 6 will be dispersed through the air outlet pipe 4, thereby avoiding the occurrence of condensed water. The refrigeration tube 6 is wavy up and down, which can better transfer heat to the concave plate 14, increase the cooling area, and reduce the phenomenon of condensed water. The sealing performance of the vacuum chamber can be guaranteed in the long run.

[0020] The bottom of the sealing cylinder 9 is provided with a threaded groove of the same size as the threaded hole of the extension edge 7, and the extension edge 7 is threadedly connected to the threaded groove by a fastening screw. The left side wall of the sealing cylinder 9 is fixedly connected with an air pump 10, and the output end of the air pump 10 is fixedly connected with a one-way valve 11. The top of the sealing cylinder 9 is rotatably connected with a sealing cover 8, and the outer side wall of the sealing cylinder 9 is fixedly connected with a sealing plate 12, and the sealing plate 12 is provided with a transparent glass 13. The contact part between the transparent glass 13 and the sealing plate 12 is provided with a sealing strip, and the sealing strip can prevent external airflow from entering the sealing cylinder 9 through the gap at the edge of the transparent glass 13. Start the air pump 10 and open the one-way valve 11 to discharge the air inside the cylinder and outside the cavity 1. This one-way valve 11 can only allow the gas in the cylinder to pass outward, thereby improving the sealing performance, and the sealing plate 12 can ensure the sealing of the transparent glass 13.

[0021] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum chamber structure for a plasma cleaning machine, comprising a chamber (1), characterized in that: The cavity (1) comprises a sealing cylinder (9) and a fastening screw, a recess is provided on the rear side wall of the cavity (1), and a recessed plate (14) is fixedly connected to the outer side wall of the recess, an air valve (2) is fixedly connected to the upper side wall of the cavity (1), and an outlet pipe (4) is fixedly connected to the output end of the air valve (2), a ventilation pipe (3) is provided on the right side wall of the cavity (1), and the outlet pipe (4) passes through the outer side wall of the cavity (1) and is fixedly connected to the ventilation pipe (3), a refrigerator (5) is fixedly connected to the left side wall of the cavity (1), and a refrigeration pipe (6) is fixedly connected to the output end of the refrigerator (5), and the refrigeration pipe (6) passes through the outer side wall of the cavity (1) and is connected to the outlet pipe (4), and an extension edge (7) is fixedly connected to both sides of the bottom of the cavity (1), and a threaded hole is provided in the extension edge (7).

2. The vacuum chamber structure for a plasma cleaning machine according to claim 1, characterized in that: The bottom of the sealing cylinder (9) is provided with a thread groove of the same size as the threaded hole of the extension edge (7), and the extension edge (7) is threadedly connected to the thread groove by a fastening screw. The left side wall of the sealing cylinder (9) is fixedly connected to an air pump (10), and the output end of the air pump (10) is fixedly connected to a one-way valve (11). The top end of the sealing cylinder (9) is rotatably connected to a sealing cover (8), and the outer side wall of the sealing cylinder (9) is fixedly connected to a sealing plate (12), and the sealing plate (12) is provided with a transparent glass (13).

3. The vacuum chamber structure for a plasma cleaning machine according to claim 1, characterized in that: The ventilation pipe (3) passes through the right side wall of the sealing cylinder (9), and a sealing ring (15) is sleeved on the top of the sealing cylinder (9).

4. The vacuum chamber structure for a plasma cleaning machine according to claim 2, characterized in that: A sealing strip is provided at the contact portion between the transparent glass (13) and the sealing plate (12).

5. The vacuum chamber structure for a plasma cleaning machine according to claim 3, characterized in that: A sealing gasket is provided at the contact portion between the ventilation pipe (3) and the sealing cylinder (9).

6. The vacuum chamber structure for a plasma cleaning machine according to claim 1, characterized in that: The refrigeration tubes (6) are evenly distributed and attached to the concave plate (14) in a wave shape.

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