Surface type compensation device and bearing device

Abstract

The utility model relates to the technical field of equipment manufacturing, and provides a surface type compensation device and a bearing device, the surface type compensation device is applied to a target hole of the bearing device, and the bearing device is used for adsorbing a target element; the surface type compensation device comprises a contact head, an elastic structure and a mounting seat which are connected in sequence; the mounting seat is arranged to be mounted in a target hole, the contact head is arranged to support a target element, and the supporting surface of the contact head exceeds the adsorption surface of the bearing device. The surface type compensation device has the elastic structure, and the supporting surface of the contact head exceeds the adsorption surface of the bearing device, so that the supporting surface of the contact head and the adsorption surface are in the same plane when the bearing device adsorbs a target element through the stress displacement of the elastic structure; and the target element is subjected to the required supporting force at the target hole, so that the surface type depression is avoided, and the surface type error of the target element at the target hole reaches the required precision. Compared with a single supporting piece, the surface type compensation device is low in required machining precision and simple in machining process.

Description

Technical Field

[0001] The utility model relates to the technical field of equipment manufacturing, in particular to a surface compensation device and a bearing device. Background Art

[0002] During the component processing, a carrier is generally used for adsorption and fixation. However, a number of holes usually need to be processed on the carrier, such as Figure 1 As shown, the hole position 12 of the carrier 11 lacks support for the component 13, which will cause a surface depression, resulting in a surface error of up to several hundred nanometers, and cannot meet the flatness requirements of the component in some scenarios.

[0003] In order to solve the problem of surface shape changes at the hole position of the component on the carrier, the general approach is to add a support with nanometer-level processing accuracy at the hole position. However, the nanometer-level ultra-precision processing process is complex, the manufacturing cycle is long, and the cost is extremely high. Utility Model Content

[0004] The utility model provides a surface compensation device and a bearing device, which are used to solve the defects in the prior art.

[0005] The utility model provides a surface compensation device, which is applied to a target hole of a carrying device, and the carrying device is used to adsorb a target element;

[0006] The surface compensation device comprises: a contact head, an elastic structure and a mounting seat connected in sequence;

[0007] The mounting seat is configured to be installed in the target hole, the contact head is configured to support the target element, and the supporting surface of the contact head exceeds the adsorption surface of the bearing device.

[0008] According to a surface compensation device provided by the utility model, it also includes: a displacement adjustment structure;

[0009] The displacement adjustment structure is arranged on a side of the mounting seat away from the elastic structure.

[0010] According to a surface compensation device provided by the utility model, the target hole is used to install the bearing device to the target object;

[0011] The mounting base is configured to extend to a mounting position of the target object.

[0012] According to a surface compensation device provided by the utility model, the mounting seat is a T-shaped structure, the mounting seat includes a horizontal portion and a vertical portion arranged below the horizontal portion, and the displacement adjustment structure is sleeved on the vertical portion.

[0013] According to a surface compensation device provided by the utility model, the vertical portion is a cylinder or a prism.

[0014] According to a surface compensation device provided by the utility model, the contact head and the elastic structure both include through holes, and the mounting seat includes mounting holes;

[0015] The central axes of the contact head, the through hole of the elastic structure and the mounting hole coincide with each other, and the sizes of the contact head and the through hole of the elastic structure are both larger than the size of the mounting hole.

[0016] According to a surface compensation device provided by the utility model, the installation hole passes through the installation seat.

[0017] According to a surface compensation device provided by the utility model, the height difference between the support surface and the adsorption surface is 10 μm-30 μm.

[0018] According to a surface compensation device provided by the utility model, the support surface is provided with a protective coating.

[0019] The utility model also provides a bearing device, comprising: a target hole and the above-mentioned surface compensation device;

[0020] The surface compensation device is installed in the target hole.

[0021] A carrying device provided according to the utility model also includes: an installation tool;

[0022] The installation tool is arranged to be connected with the installation hole on the installation seat through the through holes on the contact head and the elastic structure, so as to install the surface compensation device in the target hole.

[0023] The utility model provides a surface compensation device and a bearing device, wherein the surface compensation device is applied to a target hole of the bearing device, and the bearing device is used to adsorb a target element; the surface compensation device comprises: a contact head, an elastic structure and a mounting seat connected in sequence; the mounting seat is configured to be installed in the target hole, the contact head is configured to support the target element, and the supporting surface of the contact head exceeds the adsorption surface of the bearing device. The elastic structure of the surface compensation device exists and the supporting surface of the contact head exceeds the adsorption surface of the bearing device. Through the force displacement of the elastic structure, when the bearing device adsorbs the target element, the supporting surface of the contact head and the adsorption surface can be in the same plane, and the target element is subjected to the required supporting force at the target hole to avoid surface depression, so that the surface error of the target element at the target hole reaches the required accuracy. Compared with a single support, the surface compensation device requires lower processing accuracy, simpler processing technology, shorter manufacturing cycle, and lower required hardware cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on the drawings in the following description without creative work.

[0025] Figure 1 It is a positional relationship diagram between the existing load-bearing device and the components;

[0026] Figure 2 This is one of the structural schematic diagrams of the surface compensation device provided by the utility model;

[0027] Figure 3 This is the second structural schematic diagram of the surface compensation device provided by the utility model;

[0028] Figure 4 This is the third structural schematic diagram of the surface compensation device provided by the utility model;

[0029] Figure 5 This is the fourth structural schematic diagram of the surface compensation device provided by the utility model;

[0030] Figure 6 This is the fifth structural schematic diagram of the surface compensation device provided by the utility model. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] The term "first" or "second" in the specification and claims of the utility model may explicitly or implicitly include one or more of the features. In the description of the utility model, unless otherwise specified, "multiple" means two or more. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / " generally means that the objects connected before and after are in an "or" relationship.

[0033] In the prior art, a support member with nanometer-level machining accuracy is usually added to the hole position. The support member needs high precision when being manufactured, and the process is complex, the manufacturing cycle is long, and the cost is extremely high.

[0034] In addition, for the installation hole position of the bearing device, the support member must also match the size of the fastener that fixes the bearing device. Since the size tolerance of the fastener is mostly at the micron level, it is very difficult to make a fastener that matches the support member, and the accuracy is even more difficult to ensure; moreover, after adding the support member, the disassembly and assembly process of the fastener also becomes very cumbersome, which is not conducive to the repair and maintenance of the bearing device. Therefore, a surface compensation device is provided in the embodiment of the utility model.

[0035] Figure 2-Figure 5 All of them are structural schematic diagrams of a surface compensation device provided in an embodiment of the utility model. Figure 2 and Figure 5 Both show cross-sectional views of the surface compensation device with the target element 26 adsorbed thereon when the target hole 25 is a stepped hole and a through hole. Figure 3 FIG. 2 shows a cross-sectional view of a surface compensation device with a target element 26 adsorbed thereon when the target hole 25 is a straight hole and a non-through hole. Figure 4 FIG. 2 shows a cross-sectional view of the surface compensation device without adsorbing the target element 26 when the target hole 25 is a step-shaped hole and a through hole. Figure 6 FIG. 2 shows a schematic diagram of installing the surface compensation device when the target hole 25 is a stepped hole and a through hole.

[0036] The surface compensation device comprises: a contact head 21, an elastic structure 22 and a mounting seat 23 connected in sequence. The materials of the contact head 21, the elastic structure 22 and the mounting seat 23 can be metal or non-metal, which is not specifically limited here.

[0037] The contact head 21 and the elastic structure 22 , and the elastic structure 22 and the mounting seat 23 can be connected by welding, bonding, riveting or other methods.

[0038] The contact head 21, the elastic structure 22 and the mounting seat 23 can be connected by machining or integrally formed. Machining is a manufacturing process involving the use of mechanical equipment to cut, process, form or change the shape, size and surface characteristics of a workpiece.

[0039] The mounting seat 23 is configured to be mounted in the target hole 25 , and the contact head 21 is configured to support the target component 26 . The supporting surface of the contact head 21 exceeds the adsorption surface of the carrying device 24 .

[0040] It is understandable that the carrying device 24 may be a vacuum adsorption device or an electrostatic adsorption device, or other devices that carry the target component 26 by adsorption. Since the carrying device 24 is used to adsorb the target component 26, the carrying device 24 may use its upper surface as an adsorption surface or its lower surface as an adsorption surface. The adsorption surface is the plane in contact with the target component 26.

[0041] The supporting surface of the contact head 21 exceeds the adsorption surface of the carrier 24 , which means that the distance from the adsorption surface of the carrier 24 to the deepest part of the target hole 25 is smaller than the distance from the supporting surface of the contact head 21 to the deepest part of the target hole 25 .

[0042] Similarly, the supporting surface of the contact head 21 refers to a plane in contact with the target element 26 , and may be located above the target element 26 or below the target element 26 .

[0043] The cross-sectional shapes of the contact head 21 and the mounting seat 23 can match the cross-sectional shapes of the target holes 25 at the corresponding positions, and can be cylindrical, rectangular or other shapes. The target hole 25 can be either a stepped hole or a straight hole. The target hole 25 can be either a through hole or a non-through hole. The size of the contact head 21 can be adaptively adjusted according to the size of the target hole 25 on the upper surface of the carrier 24 to reduce the influence of the gap between the contact head 21 and the target hole 25 on the surface shape of the target element 26.

[0044] The sizes of the elastic structure 22 and the mounting seat 23 can be adaptively adjusted according to the internal size of the target hole 25. If the target hole 25 is a straight hole and a non-through hole, the size of the mounting seat 23 can match the size of the target hole 25 so that the mounting seat 23 can be fixed in the target hole 25. The size of the elastic structure 22 can be smaller than the size of the target hole 25 to avoid the side wall of the target hole 25 contacting the elastic structure 22 and affecting the output of the elastic structure 22.

[0045] The height of the elastic structure 22 is adjustable, and may be a spiral type, a disc type, a spring type, a capsule type, or other flexible structures, such as a gasket, a screw rod, etc. Figure 2 The elastic structure 22 is spiral-shaped. The material of the elastic structure 22 is a flexible material. Due to the existence of the elastic structure 2, the surface compensation device is a flexible surface compensation device.

[0046] In the embodiment of the utility model, the elastic structure 22 can preferably be made of metal with a high elastic limit to avoid deformation caused by repeated compression.

[0047] The displacement and output of the elastic structure 22 may be in a linear relationship or a nonlinear relationship. By controlling the displacement of the elastic structure 22 , the output of the elastic structure 22 on the target element 26 may be controlled.

[0048] The surface compensation device can be applied to a target hole 25 of a carrier 24 , and the carrier 24 is used to adsorb a target element 26 .

[0049] The target hole 25 can be either a mounting hole of the carrier 24 or an adsorption hole of the carrier 24, which is not specifically limited here. When the target hole 25 is a through hole, the deepest part of the target hole 25 is the plane opposite to the adsorption surface of the carrier 24. When the target hole 25 is a non-through hole, the deepest part of the target hole 25 is the inner bottom surface of the target hole 25.

[0050] The target element 26 may be a thin-sheet element, such as a wafer, and the carrier 24 may be a suction cup. In addition, the target element 26 may also be other elements that are easily deformed by force, which is not specifically limited here.

[0051] Since the supporting surface of the contact head 21 exceeds the adsorption surface of the carrier device 24, when the adsorption surface of the carrier device 24 adsorbs the target element 26, the target element 26 is supported by the contact head 21 at the target hole 25, the elastic structure 22 is compressed, and the adsorption force of the carrier device 24 is opposite to the output direction of the elastic structure 22. When the target element 26 is completely adsorbed on the adsorption surface of the carrier device 24, the supporting surface of the contact head 21 and the adsorption surface of the carrier device 24 are located in the same plane, so that the surface depression of the target element 26 at the target hole 25 of the carrier device 24 can be compensated.

[0052] The surface compensation device provided in the embodiment of the utility model is applied to the target hole of the carrying device, and the carrying device is used to adsorb the target element; the surface compensation device includes: a contact head, an elastic structure and a mounting seat connected in sequence; the mounting seat is configured to be installed in the target hole, and the contact head is configured to support the target element, and the supporting surface of the contact head exceeds the adsorption surface of the carrying device. The existence of the elastic structure of the surface compensation device and the supporting surface of the contact head exceeding the adsorption surface of the carrying device, through the force displacement of the elastic structure, can make the supporting surface of the contact head and the adsorption surface of the carrying device be in the same plane when the carrying device adsorbs the target element, and the target element is subjected to the required supporting force at the target hole to avoid surface depression, so that the surface error of the target element at the target hole reaches the required accuracy. Compared with a single support, the surface compensation device requires lower processing accuracy, simpler processing technology, shorter manufacturing cycle, and lower required hardware cost.

[0053] On the basis of the above-mentioned embodiment, the surface shape compensation device provided in the embodiment of the utility model further includes: a displacement adjustment structure 27;

[0054] The displacement adjustment structure 27 is disposed on a side of the mounting seat 23 away from the elastic structure 22 .

[0055] The material of the displacement adjustment structure 27 can be set as needed, for example, it can be a metal material or a non-metal material. The displacement adjustment structure 27 can be a gasket, or a screw adjuster, a grating ruler, a micrometer, etc.

[0056] The displacement adjustment structure 27 can be adjusted by its own flexibility or by an external control signal.

[0057] like Figure 2 , Figure 4 , Figure 5 , Figure 6 As shown, when the target hole 25 is a through hole, the displacement adjustment structure 27 can be disposed between the mounting seat 23 and the target object 28 connected to the surface compensation device.

[0058] like Figure 3 As shown, when the target hole 25 is a non-through hole, the displacement adjustment structure 27 can be disposed between the mounting seat 23 and the inner bottom surface of the target hole 25 .

[0059] In the embodiment of the utility model, by introducing the displacement adjustment structure 27 , the machining accuracy requirements for the contact head 21 , the elastic structure 22 and the mounting seat 23 can be further reduced.

[0060] like Figure 2 , Figure 4 , Figure 5 , Figure 6 As shown, on the basis of the above embodiment, the target hole 25 is used to install the carrying device 24 to the target object 28, and the target hole 25 serves as a mounting hole of the carrying device 24.

[0061] The mounting base 23 is configured to extend to a mounting position of the target object 28 .

[0062] The installation position of the target object 28 may be a groove, and the mounting seat 23 may be key-connected with the target object 28 .

[0063] The outer wall of the mounting seat 23 may also be provided with threads, and the inner wall of the groove may be provided with threads, so that the mounting seat 23 may be threadedly connected to the target object 28 .

[0064] In the embodiment of the utility model, a surface compensation device is applied to the mounting hole of the load-bearing device, replacing the fasteners used to fix the load-bearing device. This not only avoids the problem of difficulty in processing the fasteners, but also greatly improves the processability of the component itself and its integration with the device, makes it easier to realize the function of surface compensation, and greatly reduces the cycle and cost of processing and integration operations.

[0065] like Figure 2 , Figure 4 , Figure 5 , Figure 6As shown, based on the above embodiment, the mounting seat 23 is a T-shaped structure, the mounting seat 23 includes a horizontal portion and a vertical portion arranged below the horizontal portion, the displacement adjustment structure 27 is sleeved on the vertical portion and is located between the horizontal portion of the mounting seat 23 and the target object 28.

[0066] Based on the above embodiment, the vertical portion is a cylinder or a prism. Correspondingly, the structure of the installation position of the target object 28 is a cylindrical groove or a prism groove.

[0067] like Figure 5 As shown, based on the above embodiment, the contact head 21 includes a first through hole 211, the elastic structure 22 includes a second through hole 221, and the mounting seat 23 includes a mounting hole 231. The central axes of the first through hole 211 of the contact head 21, the second through hole 221 of the elastic structure 22, and the mounting hole 231 coincide with each other, and the sizes of the first through hole 211 of the contact head 21 and the second through hole 221 of the elastic structure 22 are both larger than the size of the mounting hole 231.

[0068] The first through hole 211 , the second through hole 221 and the installation hole 231 are configured to place an installation tool to install the surface compensation device on the target object 28 to avoid damage to the elastic structure 22 during the installation of the surface compensation device.

[0069] like Figure 6 As shown, when the surface compensation device needs to be installed on the target object 28, the installation tool 29 needs to be placed in the first through hole 211, the second through hole 221 and the installation hole 231, and then the surface compensation device is installed on the target object 28 using the installation tool 29. The structure of the installation tool 29 can be set as needed, for example, it can be a cylinder whose size matches the installation hole 231 on the mounting seat 23, and the installation tool 29 can be keyed or threaded with the installation hole 231 on the mounting seat 23.

[0070] Here, the size of the installation tool 29 matches the installation hole 231 , which means that when the installation tool 29 is inserted into the installation hole 231 , frictional force is generated between the contact surfaces of the two.

[0071] By applying a downward force to the installation tool 29, the installation seat 23 is driven downward into the target hole 25 and completely fits with the target hole to complete the installation.

[0072] The mounting hole 231 on the mounting seat 23 may or may not pass through the mounting seat 23. In this way, the mounting tool 29 only needs to press against the inner bottom of the mounting hole 231 of the mounting seat 23 to achieve the installation of the surface compensation device when the mounting seat 23 is keyed to the target object 28, without considering the size matching problem between the mounting tool 29 and the mounting hole 231 of the mounting seat 23.

[0073] In the embodiment of the utility model, through the through holes of the contact head 21 and the elastic structure 22 and the installation hole 231 on the mounting seat 23, the surface compensation device can be quickly installed and disassembled by means of installation tools, which is convenient for the repair and maintenance of the surface compensation device and the bearing device.

[0074] like Figure 4 As shown, based on the above embodiment, the height difference between the support surface and the adsorption surface is 10μm-30μm, so as to ensure that the output force of the elastic structure 22 and the adsorption force of the carrier device 24 on the target element 26 are balanced when the contact surface of the contact head 21 and the adsorption surface of the carrier device 24 are in the same plane.

[0075] Based on the above embodiment, the supporting surface of the contact head 21 can be provided with a protective coating, which can be used to prevent the contact surface of the contact head 21 from being contaminated by ions, and can be ZS-711 inorganic anti-corrosion coating, ZS-1033 hydrofluoric acid resistant anti-corrosion coating, etc.

[0076] like Figure 4 As shown, based on the above embodiments, the present utility model further provides a bearing device in the embodiment, including: a target hole 25 and the surface compensation device provided in the above embodiments; the surface compensation device is installed in the target hole 25. The surface compensation device can be integrally formed with the bearing device, so that the process performance of the bearing device can be improved and the integration process can be simplified. It can also be installed in the target hole for easy timely maintenance.

[0077] like Figure 6 As shown, based on the above embodiment, the carrying device provided in the embodiment of the utility model further includes: an installation tool 29;

[0078] The installation tool 29 is arranged to be connected with the installation hole 231 on the installation seat through the contact head and the through hole on the elastic structure, so as to install the surface compensation device in the target hole 25 .

[0079] Specifically, Figure 5As shown, the through holes include a first through hole 211 and a second through hole 221. The first through hole 211, the second through hole 221 and the installation hole 231 are all configured to place an installation tool 29 to install the surface compensation device into a target hole 25 on the target object 28 to avoid damage to the elastic structure 22 when the surface compensation device is installed.

[0080] like Figure 6 As shown, when the surface compensation device needs to be installed on the target object 28, the installation tool 29 needs to be placed in the first through hole 211, the second through hole 221 and the installation hole 231, and then the surface compensation device is installed in the target hole 25 on the target object 28 using the installation tool 29.

[0081] The structure of the installation tool 29 can be set as needed. For example, it can be a cylinder with a size matching the mounting seat 23. The installation tool 29 can be keyed or threadedly connected to the mounting hole 231 on the mounting seat 23.

[0082] Here, the size of the installation tool 29 matches the installation hole 231, which means that when the installation tool 29 is inserted into the installation hole 231, friction will be generated on the contact surface of the two. By applying a downward force to the installation tool 29, the mounting seat 23 is driven downward into the target hole 25 and completely fits with the target hole to complete the installation.

[0083] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A surface compensation device, characterized in that: A target hole applied to a carrier device, the carrier device being used to adsorb a target component; The surface compensation device comprises: a contact head, an elastic structure and a mounting seat connected in sequence; The mounting seat is configured to be installed in the target hole, the contact head is configured to support the target element, and the supporting surface of the contact head exceeds the adsorption surface of the bearing device.

2. The surface compensation device according to claim 1, characterized in that: Also includes: Displacement adjustment structure; The displacement adjustment structure is arranged on a side of the mounting seat away from the elastic structure.

3. The surface compensation device according to claim 2, characterized in that: The target hole is used to mount the carrying device to the target object; The mounting base is configured to extend to a mounting position of the target object.

4. The surface compensation device according to claim 3, characterized in that: The mounting seat is a T-shaped structure, and the mounting seat comprises a horizontal portion and a vertical portion arranged below the horizontal portion, and the displacement adjustment structure is sleeved on the vertical portion.

5. The surface compensation device according to claim 4, characterized in that: The vertical portion is a cylinder or a prism.

6. The surface compensation device according to claim 1, characterized in that: The contact head and the elastic structure both include through holes, and the mounting seat includes a mounting hole; The central axes of the contact head, the through hole of the elastic structure and the mounting hole coincide with each other, and the sizes of the contact head and the through hole of the elastic structure are both larger than the size of the mounting hole.

7. The surface compensation device according to claim 6, characterized in that: The mounting hole passes through the mounting seat.

8. The surface compensation device according to any one of claims 1 to 7, characterized in that: The height difference between the support surface and the adsorption surface is 10 μm-30 μm; And / or, the support surface is provided with a protective coating.

9. A carrying device, characterized in that: include: A target hole and a surface compensation device as claimed in any one of claims 1 to 8; The surface compensation device is installed in the target hole.

10. The carrying device according to claim 9, characterized in that: Also includes: Installation tools; The installation tool is arranged to be connected with the installation hole on the installation seat through the through holes on the contact head and the elastic structure, so as to install the surface compensation device in the target hole.

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