Disassembling and assembling device for solid-state source equipment

Abstract

The utility model provides a dismounting and mounting device for solid-state source equipment. The dismounting and mounting device comprises a fixed base and a wrench piece, the fixed base is used for being fixed with a base of solid-state source equipment; the wrench part comprises a cover body fixing part and a handle part, the cover body fixing part is provided with a containing groove and a penetrating part for an exhaust pipe of the solid-state source equipment to penetrate out, and the containing groove is matched with a cover body of the solid-state source equipment so that the cover body can be embedded in the containing groove during disassembly and assembly. The handle part is connected with the cover body fixing part so as to drive the cover body fixing part to rotate. According to the utility model, by changing the fixing mode of the base of the solid-state source equipment during disassembly, the temperature during disassembly is further optimized, so that the problem that the solid-state source adheres to the cover body of the solid-state source equipment due to the fact that the solid-state source is condensed after sublimation is solved, and by increasing the stress area of the cover body of the solid-state source equipment, the strength sharing is increased, and the disassembly efficiency is improved. And the damage probability of the solid-state source equipment in the cover body dismounting process is further reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a disassembly and assembly device for solid-state source equipment. Background Art

[0002] Solid-state source is one of the commonly selected doping sources in the semiconductor ion implantation industry. The basic principle of using solid-state source equipment is to first heat the solid-state source to the corresponding melting point, sublimate it into gas, and then carry out the ion generation process.

[0003] like Figure 1 and Figure 2 As shown, the base 110 of the solid-state source device 100 in the prior art is not flat and cannot be placed upright alone. When removing the cover 120 of the solid-state source device 100, it is necessary to hold the base 110 tightly with hands, and then carefully and slowly twist the cover 120 with a fixed wrench of a corresponding caliber to remove it. Therefore, the solid-state source in the solid-state source device 100 needs to be cooled to room temperature before the cover 120 can be disassembled. However, this disassembly and assembly method has the following problems:

[0004] (1) Due to the physical properties of the solid source itself, the solid source will adhere to the cavity of the solid source device 100 and the cover 120 after sublimation and condensation, thereby increasing the difficulty of disassembling the cover 120 and increasing the probability of damage to the components of the solid source device 100 during the disassembly process;

[0005] (2) The cover body 120 itself is a cube. During the disassembly process using an existing wrench, the two side walls of the cover body 120 are usually in full contact with the wrench to bear the force. However, the two side walls of the cover body 120 share the force, which can easily cause damage to the graphite cover body 120. If the cover body 120 is damaged during the disassembly process, the cover body 120 can only be destroyed by force, and then the exhaust pipe 130 can be taken out. However, when the cover body 120 is destroyed by force, the threads in the cavity of the solid-state source device 100 and the exhaust pipe 130 may be damaged. Utility Model Content

[0006] The purpose of the utility model is to provide a disassembly and assembly device for a solid-state source device, which optimizes the temperature during disassembly by changing the fixing method of the base of the solid-state source device during disassembly, thereby solving the problem that the solid source sublimates and then condenses, causing the solid source to stick to the cavity and cover of the solid-state source device, thereby reducing the probability of damage to components of the solid-state source device during the disassembly process; and by increasing the force-bearing area of ​​the cover of the solid-state source device, the force sharing is increased, thereby further reducing the probability of damage to the solid-state source device during the disassembly of the cover.

[0007] To achieve the above-mentioned purpose, the disassembly and assembly device for solid-state source equipment of the utility model includes a fixed base and a wrench piece; the fixed base is used to be fixed to the base of the solid-state source equipment; the wrench piece includes a cover fixing portion and a handle portion, the cover fixing portion is provided with a receiving groove and a through portion for the exhaust pipe of the solid-state source equipment to pass through, the receiving groove is adapted to the cover of the solid-state source equipment so that the cover can be embedded in the receiving groove during disassembly and assembly, and the handle portion is connected to the cover fixing portion to drive the cover fixing portion to rotate.

[0008] The beneficial effect of the disassembly and assembly device for solid-state source equipment of the utility model is that: by fixing the fixed base with the base of the solid-state source equipment, it is no longer necessary to fix the base of the solid-state source equipment by hand, so that the cover of the solid-state source equipment can be disassembled and assembled at a temperature above 100°C, that is, the cover of the solid-state source equipment can be disassembled and assembled when the solid-state source has a low physical adhesion, that is, by changing the fixing method of the base of the solid-state source equipment during disassembly, the temperature during disassembly is optimized. The closer the operating temperature is to the sublimation temperature, the lower the physical adhesion of the solid-state source is, and the lower the strength required for disassembly is, thereby solving the problem of solid-state source sublimation temperature. The problem of solid source sticking to the cavity and cover of the equipment due to re-condensation after condensation is solved, which reduces the difficulty of disassembly and assembly, and reduces the probability of damage to components during disassembly; the receiving groove is adapted to the cover of the solid source equipment, so that the cover can be embedded in the receiving groove during disassembly and assembly, so that the four side walls of the cover are in contact and fit with the inner wall of the receiving groove, thereby increasing the force-bearing area of ​​the cover, increasing the force sharing, reducing the probability of damage to the cover during disassembly, avoiding hard force damage to the cover, resulting in damage to the threads in the cavity of the solid source equipment and the exhaust pipe during disassembly, and extending the service life of the cover.

[0009] Preferably, the depth of the receiving groove is less than or equal to the height of the cover body. Its beneficial effect is that when the depth of the receiving groove is greater than the height of the cover body, there will be a gap between the bottom of the receiving groove and the top of the cover body without contact, that is, the actual contact area between the receiving groove and the cover body becomes smaller, so that the contact part between the cover body and the receiving groove is subjected to greater force and is easily damaged, and the lack of contact between the bottom of the receiving groove and the top of the cover body will reduce the friction between the receiving groove and the cover body, so that greater force is required to complete the disassembly and assembly of the cover body.

[0010] Preferably, the depth of the receiving groove is less than or equal to 5 mm. Its beneficial effect is that: the height of the cover body in the general solid-state source device is 5 mm, and when the depth of the receiving groove is greater than 5 mm, there will be a gap between the bottom of the receiving groove and the top of the cover body without contact, that is, the actual contact area between the receiving groove and the cover body becomes smaller, so that the contact part between the cover body and the receiving groove is subjected to greater force and is easily damaged, and the non-contact between the bottom of the receiving groove and the top of the cover body will reduce the friction between the receiving groove and the cover body, so that greater force is required to complete the disassembly and assembly of the cover body.

[0011] Preferably, the handle is arranged on the outside of the bottom plate of the cover fixing part and / or the side wall of the cover fixing part, which has the beneficial effect of facilitating the cover fixing part to rotate by holding the handle.

[0012] Preferably, the cover fixing part and the handle part are an integrated structure, which has the beneficial effect of making the handle part bear a greater force, avoiding the stress deviation caused by the movement of the cover fixing part and the handle part, and reducing the probability of damage to the handle part.

[0013] Preferably, the inner wall of the receiving groove is provided with an anti-slip structure, which has the beneficial effect of increasing the friction between the receiving groove and the cover body, thereby reducing the force required for disassembling the cover body.

[0014] Preferably, the handle portion includes at least two rotating rods, at least two of which are arranged on the side wall of the cover fixing portion, and the rotating rods are extended in a direction away from the side wall of the cover fixing portion. The beneficial effect is that the at least two rotating rods are arranged, which saves more effort and can more conveniently drive the cover fixing portion to rotate by holding the rotating rods, so that the cover is subjected to more uniform force during disassembly and assembly, thereby reducing the probability of damage to the solid-state source device.

[0015] Preferably, the rotating rod movably penetrates the side wall of the cover fixing portion, and one end of the rotating rod is inserted into the receiving groove. Its beneficial effect is that when the cover is embedded in the receiving groove, the rotating rod can penetrate the side wall of the cover fixing portion and be inserted into the receiving groove to abut against one side wall of the cover, so that the other symmetrical side wall of the cover is in contact with the receiving groove and fixed, which is beneficial to increase the force-bearing area of ​​the cover and reduce the probability of damage.

[0016] Preferably, the cover fixing part is provided with a lock structure, the rotating rod is provided with a lock matching part adapted to the lock structure, and the cover fixing part and the rotating rod are locked and fixed by the lock structure and the lock matching part. The beneficial effect is that the stress deviation caused by the movement of the cover fixing part and the handle part is avoided, and the probability of damage to the handle part is reduced.

[0017] Preferably, the handle portion comprises a U-shaped handle piece, and both ends of the U-shaped handle piece are fixedly arranged outside the bottom plate of the cover body fixing portion. The beneficial effect is that the operation is more convenient and labor-saving.

[0018] Preferably, the anti-slip structure comprises a concave-convex structure arranged on the inner wall of the receiving groove, and the concave-convex structure and the cover fixing part are an integrated molded structure. Its beneficial effect is that the friction between the receiving groove and the cover is increased, thereby reducing the force required for disassembly and assembly of the cover.

[0019] Preferably, the fixing base is provided with a fixing piece, and the fixing base is fixed to the base by the fixing piece passing through the threaded through hole on the base, or the fixing base is provided with a threaded through hole, and the fixing base is fixed to the base by the fixing piece passing through the threaded through hole on the fixing base and the threaded through hole on the base. The beneficial effect is that the fixing base can be fixed to the original parts on the solid-state source device, the solid-state source device is less modified, the application range is wide, and it can be promoted.

[0020] Preferably, the fixed base is an insulated fixed base, and the wrench is an insulated wrench. The beneficial effect is that it is conducive to optimizing the temperature during disassembly, thereby solving the problem that the solid source adheres to the cavity and the cover of the device due to the solid source condensing after sublimation, reducing the difficulty of disassembly and assembly, and reducing the probability of damage to components during disassembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic diagram of the main view of a solid-state source device;

[0022] Figure 2 for Figure 1 A schematic top view of a solid state source device is shown;

[0023] Figure 3 This is a schematic structural diagram of a wrench member in a disassembly and assembly device for a solid-state source device according to an embodiment of the utility model;

[0024] Figure 4 for Figure 3 A schematic diagram of the wrench member in the disassembly and assembly device shown facing the open end of the receiving groove;

[0025] Figure 5 for Figure 3 A schematic diagram of the structure of a fixed base in the disassembly and assembly device shown;

[0026] Figure 6 The present invention is a schematic structural diagram of a wrench member in a disassembly and assembly device for a solid-state source device according to another embodiment of the present invention. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the utility model belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0028] In order to overcome the problems existing in the prior art, an embodiment of the utility model provides a disassembly and assembly device for a solid-state source device. By changing the fixing method of the base of the solid-state source device during disassembly, the temperature during disassembly is optimized, thereby solving the problem that the solid source sublimates and then condenses, causing the solid source to stick to the cavity and cover of the solid-state source device, thereby reducing the probability of damage to components of the solid-state source device during the disassembly process; and by increasing the force-bearing area of ​​the cover of the solid-state source device, the force sharing is increased, thereby further reducing the probability of damage to the solid-state source device during the disassembly of the cover.

[0029] Figure 1 is a schematic diagram of the main view of a solid-state source device; Figure 2 for Figure 1 A schematic top view of a solid state source device is shown; Figure 3 This is a schematic structural diagram of a wrench member in a disassembly and assembly device for a solid-state source device according to an embodiment of the utility model; Figure 4 for Figure 3 A schematic diagram of the wrench member in the disassembly and assembly device shown facing the open end of the receiving groove; Figure 5 for Figure 3 A schematic structural diagram of a fixed base in a disassembly and assembly device is shown.

[0030] In some embodiments of the present invention, reference Figures 1 to 5 The disassembly and assembly device for the solid-state source device includes a fixed base 1 and a wrench 2; the fixed base 1 is used to be fixed to the base 110 of the solid-state source device 100; the wrench 2 includes a cover fixing portion 21 and a handle portion (not shown in the figure), the cover fixing portion 21 is provided with a receiving groove 22 and a through portion 23 for the exhaust pipe 130 of the solid-state source device 100 to pass through, the receiving groove 22 is adapted to the cover 120 of the solid-state source device 100, so that the cover 120 can be embedded in the receiving groove 22 during disassembly and assembly, and the handle portion (not shown in the figure) is connected to the cover fixing portion 21 to drive the cover fixing portion 21 to rotate.

[0031] Specifically, by fixing the fixing base 1 to the base 110 of the solid-state source device 100, it is no longer necessary to fix the base 110 of the solid-state source device 100 by hand, so that the cover 120 of the solid-state source device 100 can be disassembled at a temperature above 100°C, that is, the cover 120 of the solid-state source device 100 can be disassembled when the solid-state source has a low physical adhesion. That is, by changing the fixing method of the base 110 of the solid-state source device 100 during disassembly, the temperature during disassembly is optimized. The closer the operating temperature is to the sublimation temperature, the lower the physical adhesion of the solid-state source is, and the lower the force required for disassembly is, thereby solving the problem that the solid-state source sublimates and then condenses, causing the solid-state source to separate the cavity of the solid-state source device 100 from the cover 120. 0 sticking problem, reducing the difficulty of disassembly and assembly, and reducing the damage probability of components of the solid-state source device 100 during disassembly; the receiving groove 22 is adapted to the cover body 120 of the solid-state source device 100, so that the cover body 120 can be embedded in the receiving groove 22 during disassembly and assembly, so that the four side walls of the cover body 120 are in contact with the inner wall of the receiving groove 22, thereby increasing the force-bearing area of ​​the cover body 120, increasing the force sharing, reducing the damage probability of the solid-state source device 100 during the disassembly of the cover body 120, avoiding hard force damage to the cover body 120, resulting in damage to the thread in the cavity of the solid-state source device 100 and the exhaust pipe 130 during the disassembly process, and extending the service life of the cover body 120.

[0032] In some embodiments of the utility model, the depth of the receiving groove is less than or equal to the height of the cover body. When the depth of the receiving groove is greater than the height of the cover body, there will be a gap between the bottom of the receiving groove and the top of the cover body without contact, that is, the actual contact area between the receiving groove and the cover body becomes smaller, so that the contact part between the cover body and the receiving groove is subjected to greater force and is easily damaged, and the lack of contact between the bottom of the receiving groove and the top of the cover body will reduce the friction between the receiving groove and the cover body, so that greater force is required to complete the disassembly and assembly of the cover body.

[0033] In some embodiments of the present invention, the top surface of the cover body 120 is a square structure, the bottom surface of the receiving groove 22 is a square structure, and the side length of the receiving groove 22 is slightly larger than the side length of the cover body 120, so that the cover body 120 can be embedded in the receiving groove 22 during disassembly and assembly.

[0034] In some embodiments of the present invention, the size of the fixed base and the size of the wrench can be customized according to the actual size of different solid-state source equipment models, but the size must be fixed and the adjustable size cannot be selected, and the force of the adjustable size may be affected.

[0035] In some embodiments of the utility model, the depth of the receiving groove is less than or equal to 5 mm. Generally, the height of the cover body in the solid-state source device is 5 mm. When the depth of the receiving groove is greater than 5 mm, there will be a gap between the bottom of the receiving groove and the top of the cover body without contact, that is, the actual contact area between the receiving groove and the cover body becomes smaller, so that the contact part between the cover body and the receiving groove is subjected to greater force and is easily damaged, and the non-contact between the bottom of the receiving groove and the top of the cover body will reduce the friction between the receiving groove and the cover body, resulting in greater force required to complete the disassembly and assembly of the cover body.

[0036] Figure 6 The present invention is a schematic structural diagram of a wrench member in a disassembly and assembly device for a solid-state source device according to another embodiment of the present invention.

[0037] In some embodiments of the present invention, reference Figure 3 , Figure 4 and Figure 6 The handle portion (not shown in the figure) is arranged on the outside of the bottom plate 25 of the cover body fixing portion 21 and / or the side wall 26 of the cover body fixing portion 21, so as to facilitate the rotation of the cover body fixing portion 21 by holding the handle portion (not shown in the figure).

[0038] In the embodiment of the present utility model, reference Figure 3 and Figure 4 The receiving groove 22 is surrounded by the bottom plate 25 of the cover body fixing part 21 and the four side walls 26 of the cover body fixing part 21. The outside of the bottom plate 25 of the cover body fixing part 21 is the outside of the bottom plate of the receiving groove 22. The surface where the bottom plate of the receiving groove 22 is located is opposite to the surface where the opening end of the receiving groove 22 is located.

[0039] In some embodiments of the utility model, the cover fixing portion and the handle portion are integrated into a molded structure, so that the handle portion can bear a greater force, avoiding stress deviation caused by the movement of the cover fixing portion and the handle portion, and reducing the chance of damage to the handle portion.

[0040] In some embodiments of the present invention, reference Figure 3 and Figure 4 The handle portion (not shown) includes at least two rotating rods 24, which are disposed on the side wall 26 of the cover fixing portion 21, and the rotating rods 24 are extended in a direction away from the side wall 26 of the cover fixing portion 21. Providing at least two rotating rods 24 saves more effort, and can more conveniently drive the cover 120 fixing portion to rotate by holding the rotating rods 24, so that the cover 120 is subjected to more uniform force during disassembly and assembly, thereby reducing the probability of damage to the solid-state source device 100.

[0041] In some specific embodiments of the present utility model, reference Figure 3 and Figure 4 The handle portion (not shown) includes four rotating rods 24 , and the four rotating rods 24 are respectively disposed on four side walls 26 of the cover fixing portion 21 .

[0042] In some embodiments of the utility model, the rotating rod movably penetrates the side wall of the cover fixing portion, and one end of the rotating rod is inserted into the receiving groove. When the cover is embedded in the receiving groove, the rotating rod can penetrate the side wall of the cover fixing portion and be inserted into the receiving groove to abut against one side wall of the cover, so that the other symmetrical side wall of the cover is in contact with the receiving groove and fixed, which is beneficial to increase the force-bearing area of ​​the cover and reduce the probability of damage.

[0043] In some embodiments of the utility model, the length of the insertion portion of the rotating rod inserted into the receiving groove is equal to the difference between the side length of the receiving groove along the length direction of the rotating rod and the side length of the cover body along the length direction of the rotating rod, so that the other symmetrical side wall of the cover body is in contact and fixed with the receiving groove, thereby increasing the force area of ​​the cover body, increasing the force sharing, and reducing the chance of damage during the disassembly of the cover body.

[0044] In some embodiments of the utility model, the width of the rotating rod is greater than 1 / 2 of the side length of the receiving groove along the width direction of the rotating rod, and the width of the rotating rod is smaller than the side length of the receiving groove along the width direction of the rotating rod, so that the contact area between the side wall of the cover body and the rotating rod can be increased, thereby increasing the force area of ​​the cover body, increasing the force sharing, and reducing the chance of damage during the disassembly of the cover body.

[0045] In some embodiments of the utility model, the cover fixing part is provided with a lock structure, the rotating rod is provided with a lock matching part adapted to the lock structure, and the cover fixing part and the rotating rod are locked and fixed by the lock structure and the lock matching part, thereby avoiding the movement of the cover fixing part and the handle part to form stress deviation, and reducing the probability of damage to the handle part.

[0046] In some specific embodiments of the utility model, the locking structure includes a latch, which is arranged through the bottom plate of the cover body fixing part, and the latch is arranged close to the side wall of the cover body fixing part, and the lock matching part includes a pin hole or a groove adapted to the latch, and the pin hole or the groove is arranged at the end of the rotating rod facing the bottom plate of the cover body fixing part.

[0047] In other embodiments of the present invention, reference Figure 6 The handle portion includes a U-shaped handle member 27, and both ends of the U-shaped handle member 27 are fixedly arranged outside the bottom plate 25 of the cover body fixing portion 21, which makes operation more convenient and labor-saving.

[0048] In some specific embodiments of the utility model, the U-shaped handle piece is arranged in the middle of the bottom plate of the cover body fixing part, and the U-shaped handle piece is provided with a through hole for the exhaust pipe of the solid-state source device to pass through.

[0049] In some other specific embodiments of the present invention, reference is made to Figure 6 There are four U-shaped handle members 27 , and the four U-shaped handle members 27 are respectively arranged perpendicular to the four side edges of the bottom plate 25 of the cover body fixing portion 21 .

[0050] In some embodiments of the utility model, the inner wall of the receiving groove is provided with an anti-slip structure, which increases the friction between the receiving groove and the cover body, thereby reducing the force required for disassembly and assembly of the cover body.

[0051] In some embodiments of the present invention, the anti-slip structure includes a concave-convex structure provided on the inner wall of the receiving groove, and the concave-convex structure and the cover fixing part are an integrated structure, thereby increasing the friction between the receiving groove and the cover, thereby reducing the force required for disassembly and assembly of the cover.

[0052] In some embodiments of the present invention, reference Figure 2 and Figure 5 The fixing base 1 is provided with a fixing member 11, and the fixing base 1 is fixed to the base 110 by the fixing member 11 passing through the threaded through hole 140 on the base 110. The fixing base 1 can be fixed to the original component (threaded through hole 140) on the solid-state source device 100, with little modification to the solid-state source device 100, a wide range of application, and can be widely used.

[0053] In some embodiments of the present invention, reference Figure 2 and Figure 5 The fixing member 11 is a screw or a latch, and the screw or the latch is fixedly disposed on the body 12 of the fixing base 1 .

[0054] In some other embodiments of the present invention, the fixing base is provided with a threaded through hole, and the fixing base is fixed to the base by a fixing member passing through the threaded through hole on the fixing base and the threaded through hole on the base, that is, the fixing member and the body of the fixing base are detachably arranged.

[0055] In some embodiments of the present invention, the position and size of the fixing member 11 on the fixing base 1 can be designed corresponding to different models of solid-state source devices 100 .

[0056] In some embodiments of the utility model, the fixed base is a heat-insulating fixed base, and the wrench is a heat-insulating wrench. That is, the fixed base and the wrench are both made of heat-insulating materials, which is conducive to optimizing the temperature during disassembly, thereby solving the problem that the solid source is adhered to the cavity and the cover of the device due to the solid source condensing after sublimation, reducing the difficulty of disassembly and assembly, and reducing the probability of damage to components during disassembly.

[0057] Specifically, thermal insulation materials refer to materials that can block the transfer of heat flow, also known as thermal insulation materials. Traditional thermal insulation materials include glass fiber, asbestos, rock wool, silicate, etc., and new thermal insulation materials include aerogel felt, vacuum panels, etc.

[0058] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A disassembly and assembly device for a solid-state source device, characterized in that: include: A fixing base, used for fixing to a base of a solid-state source device; The wrench piece includes a cover fixing portion and a handle portion, wherein the cover fixing portion is provided with a receiving groove and a through portion for an air pipe of a solid-state source device to pass through, the receiving groove is adapted to the cover of the solid-state source device so that the cover can be embedded in the receiving groove during assembly and disassembly, and the handle portion is connected to the cover fixing portion to drive the cover fixing portion to rotate.

2. The disassembly and assembly device for solid-state source equipment according to claim 1, characterized in that: The depth of the receiving groove is less than or equal to the height of the cover body.

3. The disassembly and assembly device for solid-state source equipment according to claim 1 or 2, characterized in that: The depth of the receiving groove is less than or equal to 5 mm.

4. The disassembly and assembly device for solid-state source equipment according to claim 1, characterized in that: The handle portion is arranged on the outside of the bottom plate of the cover fixing portion and / or the side wall of the cover fixing portion.

5. The disassembly and assembly device for solid-state source equipment according to claim 1, characterized in that: The cover fixing portion and the handle portion are an integrated molding structure.

6. The disassembly and assembly device for solid-state source equipment according to claim 1, characterized in that: The inner wall of the receiving groove is provided with an anti-slip structure.

7. The disassembly and assembly device for solid-state source equipment according to claim 1 or 4, characterized in that: The handle portion includes at least two rotating rods, and the at least two rotating rods are arranged on the side wall of the cover body fixing portion, and the rotating rods are extended in a direction away from the side wall of the cover body fixing portion.

8. The disassembly and assembly device for solid-state source equipment according to claim 7, characterized in that: The rotating rod movably penetrates the side wall of the cover body fixing portion, and one end of the rotating rod is inserted into the receiving groove.

9. The disassembly and assembly device for solid-state source equipment according to claim 8, characterized in that: The cover fixing portion is provided with a lock structure, the rotating rod is provided with a lock matching portion adapted to the lock structure, and the cover fixing portion and the rotating rod are locked and fixed by the lock structure and the lock matching portion.

10. The disassembly and assembly device for solid-state source equipment according to claim 1 or 4, characterized in that: The handle portion comprises a U-shaped handle piece, and both ends of the U-shaped handle piece are fixedly arranged outside the bottom plate of the cover body fixing portion.

11. The disassembly and assembly device for solid-state source equipment according to claim 6, characterized in that: The anti-slip structure includes a concave-convex structure arranged on the inner wall of the receiving groove, and the concave-convex structure and the cover body fixing part are an integrated molding structure.

12. The disassembly and assembly device for solid-state source equipment according to claim 1, characterized in that: The fixed base is provided with a fixing piece, and the fixed base is fixed to the base by the fixing piece passing through the threaded through hole on the base, or the fixed base is provided with a threaded through hole, and the fixed base is fixed to the base by the fixing piece passing through the threaded through hole on the fixed base and the threaded through hole on the base.

13. The disassembly and assembly device for solid-state source equipment according to claim 1, characterized in that: The fixed base is a heat-insulating fixed base, and the wrench piece is a heat-insulating wrench piece.

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