Cutting fluid recycling device

Abstract

The utility model relates to a cutting fluid recycling device which comprises a shell with a hollow structure; the liquid inlet pipe is connected to the shell; the liquid outlet pipe is connected to the upper end of the side surface of the shell; the liquid return pipe is connected to the lower end of the side surface of the shell; the stirring assembly is arranged in the shell; the air pipe is annularly arranged on the inner wall of the shell and comprises an air hole formed in the air pipe; cutting liquid enters the liquid inlet pipe, the air pipe feeds air into the cutting liquid through the air holes, and the stirring assembly drives the cutting liquid in the shell to rotate, so that the liquid level of the cutting liquid rises to the liquid outlet pipe, and the cutting liquid is discharged through the liquid outlet pipe. After silicon powder and carborundum powder in the cutting liquid are removed, the remaining cutting liquid enters the slicing machine again through the liquid return pipe to be recycled, the structure is simple, the treated cutting liquid can meet the recycling requirement, the content of the silicon powder and the content of the carborundum powder in discharged liquid are high, and the recycling efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer production equipment, in particular to a cutting liquid recovery circulation device. Background Art

[0002] During the wire cutting process of silicon wafers, the cutting fluid plays the role of dispersing, lubricating and taking away the cutting heat. The cutting fluid is mixed with the cut silicon powder and corundum powder and enters the recovery and circulation device.

[0003] The recycling and circulation device usually includes multi-stage filtering equipment and multi-stage filter pressing equipment connected in sequence to obtain a circulating cutting fluid with a higher purity. The equipment cost is high and the cutting fluid recovery efficiency is low.

[0004] It should be noted that the information disclosed in the above background technology section is only used to enhance the understanding of the background of the present disclosure, and therefore may include information that does not constitute the prior art known to ordinary technicians in the field. Utility Model Content

[0005] In view of the deficiencies in the prior art, the embodiment of the utility model discloses a cutting fluid recovery circulation device to solve the problem of low cutting fluid recovery efficiency.

[0006] The technical solution adopted by the utility model is as follows:

[0007] A cutting liquid recovery and circulation device comprises: a shell having a hollow structure; a liquid inlet pipe connected to the shell; a liquid outlet pipe connected to the upper end of the shell side; a liquid return pipe connected to the lower end of the shell side; a stirring component arranged in the shell; an air pipe arranged in an annular manner on the inner wall of the shell, comprising: an air hole opened on the air pipe; wherein the liquid inlet pipe enters the cutting liquid, the air pipe takes air into the cutting liquid through the air hole, and the stirring component drives the cutting liquid in the shell to rotate, so that the liquid level of the cutting liquid close to the inner wall of the shell rises to the liquid outlet pipe and is discharged through the liquid outlet pipe.

[0008] A further technical solution is that the cutting fluid recovery and circulation device comprises: a bracket connected between the inner wall of the shell and the outer side of the trachea.

[0009] A further technical solution is that the stirring assembly includes: a motor, which is arranged at the upper end of the shell, and the output shaft of the motor extends into the shell; a rod body, which is connected to the output shaft; and fan blades, which are arranged in an annular shape on the surface of the rod body.

[0010] A further technical solution is that the cutting fluid recovery and circulation device comprises: a fluid replenishing tube connected to the shell.

[0011] A further technical solution is that the cutting liquid recovery circulation device comprises: a liquid level sensor, which is arranged at the upper end of the shell and is close to the inner wall of the shell.

[0012] A further technical solution is that the liquid return pipe comprises: a solenoid valve arranged on the liquid return pipe.

[0013] A further technical solution is that the shell includes: a columnar portion; a conical portion connected to the lower end of the columnar portion; a cover body arranged at the lower end of the conical portion; wherein the liquid inlet pipe, liquid outlet pipe, liquid return pipe, stirring assembly, air pipe, and liquid level sensor are arranged on the columnar portion.

[0014] The beneficial effects of the embodiments of the utility model are as follows:

[0015] (I) The cutting liquid recovery and circulation device of the utility model comprises a shell, on which a liquid inlet pipe, a liquid outlet pipe, a liquid return pipe and a stirring assembly are arranged, and an air pipe is arranged in the shell. The used cutting liquid enters the shell through the liquid inlet pipe, and the air pipe generates tiny bubbles through the air holes to enter the cutting liquid. The stirring assembly drives the cutting liquid to rotate, and the silicon powder and corundum powder in the cutting liquid approach the inner wall of the shell under the action of the centrifugal force generated by the rotation of the cutting liquid. At the same time, the cutting liquid rotates and accelerates the tiny bubbles near the inner wall of the shell to absorb the silicon powder and corundum powder in the cutting liquid, and float to the surface of the cutting liquid. When the cutting liquid reaches a certain rotation speed, the centrifugal force generated by the rotation causes the cutting liquid level near the inner wall of the shell to rise to the liquid outlet pipe, and the cutting liquid containing a large amount of bubbles, silicon powder and corundum powder is thrown out through the liquid outlet pipe. After removing the silicon powder and corundum powder in the cutting liquid, the remaining cutting liquid re-enters the slicer through the liquid return pipe for recycling. The structure is simple, the treated cutting liquid can meet the requirements of reuse, and the silicon powder and corundum powder content in the discharged liquid is high, which improves the recovery efficiency.

[0016] (ii) Further, the housing includes a column, a cone and a cover. The cone is connected to the lower end of the column, and the cover is arranged at the lower end of the cone. The cone collects larger silicon wafer fragments and diamond blocks in the cutting fluid, and the cover is opened regularly to remove the silicon wafer fragments and diamond blocks, so as to ensure the normal operation of the cutting fluid recovery and circulation device, ensure that the cutting fluid can meet the requirements of reuse, and guarantee the quality of the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the cutting fluid recovery circulation device of the utility model.

[0018] Figure 2 for Figure 1 Enlarged view at A.

[0019] Figure 3 It is a cross-sectional view of the air pipe in the cutting fluid recovery circulation device of the utility model.

[0020] In the figure:

[0021] 1. Shell; 11. Column; 12. Cone; 111. Liquid inlet pipe; 112. Liquid outlet pipe; 113. Liquid replenishment pipe; 114. Liquid level sensor; 115. Liquid return pipe; 1151. Solenoid valve; 121. Cover; 122. Support foot; 2. Stirring assembly; 21. Motor; 22. Rod; 23. Fan blade; 31. Air pipe; 32. Air hole; 33. Air pump; 34. Bracket. DETAILED DESCRIPTION

[0022] The specific implementation of the present utility model is described below in conjunction with the accompanying drawings.

[0023] In order to make the purpose, technical scheme and advantages of the utility model clearer, the device proposed in the utility model is further described in detail below in combination with the accompanying drawings and specific implementation methods. According to the following description, the advantages and features of the utility model will be clearer. It should be noted that the accompanying drawings adopt a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the implementation method of the utility model. In order to make the purpose, features and advantages of the utility model more obvious and easy to understand, please refer to the accompanying drawings. It should be noted that the structure, proportion, size, etc. illustrated by the accompanying drawings of this specification are only used to match the content disclosed in the specification, so that people familiar with this technology can understand and read, and are not used to limit the limiting conditions for the implementation of the utility model, so it has no technical substantive significance. Any modification of the structure, change of the proportional relationship or adjustment of the size, without affecting the effect that the utility model can produce and the purpose that can be achieved, should still fall within the scope of the technical content disclosed by the utility model.

[0024] First embodiment:

[0025] This embodiment discloses a cutting fluid recovery and circulation device.

[0026] Figure 1 The schematic diagram of the structure of the cutting fluid recovery and circulation device of the utility model is shown in FIG. Figure 1 As shown, the cutting liquid recovery circulation device includes a shell 1, a liquid inlet pipe 111, a liquid outlet pipe 112, a liquid return pipe 115, a stirring assembly 2 and an air pipe 31. The shell 1 has a hollow structure. The liquid inlet pipe 111 is connected to the shell 1, the liquid outlet pipe 112 is connected to the upper end of the side of the shell 1, and the liquid return pipe 115 is connected to the lower end of the side of the shell 1. The stirring assembly 2 is arranged in the shell 1. The air pipe 31 is annularly arranged on the inner wall of the shell 1, including an air hole 32, and the air hole 32 is opened on the air pipe 31. Among them, the liquid inlet pipe 111 enters the cutting liquid, the air pipe 31 intakes air into the cutting liquid through the air hole 32, and the stirring assembly 2 drives the cutting liquid in the shell 1 to rotate, so that the liquid level of the cutting liquid close to the inner wall of the shell 1 rises to the liquid outlet pipe 112 and is discharged through the liquid outlet pipe 112.

[0027] Figure 2 for Figure 1 Enlarged view at A. Figure 3 FIG. 3 is a cross-sectional view of the air pipe 31 in the cutting fluid recovery and circulation device of the present invention. Figure 2 and Figure 3 As shown, illustratively, the cutting liquid recovery circulation device includes a bracket 34, and the bracket 34 is connected between the inner wall of the shell 1 and the outer side of the air pipe 31. There are four brackets 34, which are arranged at the four equal parts of the outer side of the air pipe 31 and are located in the same plane. The bracket 34 is short in length, so that the air pipe 31 is close to the inner wall of the shell 1, and the bubbles pumped out of the air pipe 31 can also be close to the inner wall. The stirring assembly 2 includes a motor 21, a rod body 22 and a fan blade 23. The motor 21 is arranged at the upper end of the shell 1, and the output shaft of the motor 21 extends into the shell 1. The rod body 22 is connected to the output shaft, and the fan blade 23 is annularly arranged on the surface of the rod body 22. The air pipe 31 is connected to an external air pump 33, and air is pumped into the air pipe 31 through the air pump 33. Preferably, the air hole 32 is opened at the lower end of the air pipe 31 to prevent impurities such as silicon powder and corundum powder from entering the air pipe 31.

[0028] like Figure 1 As shown, further, the cutting fluid recovery and circulation device includes a liquid replenishing tube 113, and the liquid replenishing tube 113 is connected to the housing 1. When the cutting fluid is consumed excessively, the cutting fluid is replenished into the housing 1 through the liquid replenishing tube 113.

[0029] like Figure 1 As shown, further, the cutting liquid recovery and circulation device includes a liquid level sensor 114, which is arranged at the upper end of the housing 1 and close to the inner wall of the housing 1, and can detect the cutting liquid level in the housing 1 when the liquid is flowing in and the cutting liquid level in the housing 1 when the liquid is flowing out. The liquid level of the cutting liquid close to the inner wall of the housing 1 is detected by the liquid level sensor 114 to control the speed of the motor 21 and determine whether liquid replenishment is needed.

[0030] like Figure 1 As shown, further, the liquid return pipe 115 includes a solenoid valve 1151, which is arranged on the liquid return pipe 115, and the opening and closing of the liquid return pipe 115 are controlled by the solenoid valve 1151.

[0031] When this embodiment is working:

[0032] The cutting liquid used in silicon wafer slicing enters the housing 1 through the liquid inlet pipe 111, and the air pump 33 and the motor 21 are started. The air pump 33 pumps air into the air pipe 31, and the air passes through the air hole 32 to generate tiny bubbles and enter the cutting liquid. The motor 21 drives the rod body 22 to rotate, the rod body 22 drives the fan blades 23 to rotate, and the fan blades 23 drive the cutting liquid to rotate. The silicon powder and corundum powder in the cutting liquid approach the inner wall of the housing 1 under the centrifugal force generated by the rotation of the cutting liquid, and the bubbles close to the inner wall of the housing 1 are accelerated to absorb the silicon powder and corundum powder in the cutting liquid.

[0033] When the motor 21 reaches a certain speed, the centrifugal force generated by the rotation causes the cutting liquid level near the inner wall of the housing 1 to rise to the liquid outlet pipe 112, and the cutting liquid containing a large number of bubbles, silicon powder and corundum powder is thrown out through the liquid outlet pipe 112. After removing the silicon powder and corundum powder in the cutting liquid, the solenoid valve 1151 is opened, and the remaining cutting liquid re-enters the slicer through the liquid return pipe 115 for recycling.

[0034] The cutting fluid recovery and circulation device of this embodiment has a simple structure, and the treated cutting fluid can meet the requirements for reuse. The discharged fluid has high contents of silicon powder and corundum powder, which improves the recovery efficiency.

[0035] Second embodiment:

[0036] Based on the first embodiment, the second embodiment further optimizes and refines the housing 1 in the first embodiment.

[0037] like Figure 1 As shown, the housing 1 includes a column 11, a cone 12 and a cover 121. The cone 12 is connected to the lower end of the column 11, and the cover 121 is arranged at the lower end of the cone 12. Among them, the liquid inlet pipe 111, the stirring assembly 2, the air pipe 31 and the liquid level sensor 114 are arranged at the upper end of the column 11, and the liquid return pipe 115 and the liquid outlet pipe 112 are arranged on the side of the column 11.

[0038] Furthermore, a supporting foot 122 is provided at the lower end of the cone portion 12 .

[0039] In this embodiment, the cone portion 12 collects larger silicon wafer fragments and diamond abrasive pieces in the cutting fluid, and regularly opens the cover 121 to remove them, thereby ensuring the normal operation of the cutting fluid recovery and circulation device, ensuring that the cutting fluid can meet the requirements for reuse, and ensuring the quality of the silicon wafers.

[0040] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0041] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A cutting fluid recovery and circulation device, characterized in that: include: A shell having a hollow structure; A liquid inlet pipe connected to the housing; A liquid outlet pipe connected to the upper end of the side surface of the shell; A liquid return pipe connected to the lower end of the side surface of the shell; A stirring assembly is disposed in the housing; The air pipe is annularly arranged on the inner wall of the shell, and comprises: Stomata, opened on the trachea The cutting liquid is introduced into the liquid inlet pipe, the air pipe introduces air into the cutting liquid through the air hole, and the stirring assembly drives the cutting liquid in the shell to rotate, so that the liquid level of the cutting liquid near the inner wall of the shell rises to the liquid outlet pipe and is discharged through the liquid outlet pipe.

2. The cutting fluid recovery and circulation device according to claim 1, characterized in that: The cutting fluid recovery and circulation device comprises: A bracket is connected between the inner wall of the shell and the outer side of the trachea.

3. The cutting fluid recovery and circulation device according to claim 1, characterized in that: The stirring assembly comprises: A motor is arranged at the upper end of the housing, and an output shaft of the motor extends into the housing; A rod body connected to the output shaft; The fan blades are arranged in an annular shape on the surface of the rod body.

4. The cutting fluid recovery and circulation device according to claim 1, characterized in that: The cutting fluid recovery and circulation device comprises: A fluid infusion tube is connected to the shell.

5. The cutting fluid recovery and circulation device according to claim 1, characterized in that: The cutting fluid recovery and circulation device includes: The liquid level sensor is arranged at the upper end of the shell and is located close to the inner wall of the shell.

6. The cutting fluid recovery and circulation device according to claim 5, characterized in that: The liquid return pipe comprises: The solenoid valve is arranged on the liquid return pipe.

7. The cutting fluid recovery and circulation device according to claim 1, characterized in that: The housing 1 comprises: Column part; A cone portion connected to the lower end of the column portion; A cover body, arranged at the lower end of the cone portion; Wherein, the liquid inlet pipe, liquid outlet pipe, liquid return pipe, stirring assembly, air pipe and liquid level sensor are arranged on the column part.

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