Graphite boat

Abstract

The utility model provides a graphite boat. The graphite boat is used for bearing silicon wafers and comprises a plurality of parallel graphite boat sheets and a plurality of groups of fixed pressing sheets. The graphite boat sheet has a length direction and a width direction which are perpendicular to the parallel direction and are perpendicular to each other, the graphite boat sheet is provided with a plurality of installation grooves arranged along the length direction, and the installation grooves are used for bearing silicon wafers. The fixed pressing sheets extend along the length direction, each group of fixed pressing sheets comprises a first fixed pressing sheet and a second fixed pressing sheet which are opposite to each other along the width direction, and each group of fixed pressing sheets are positioned on the same side of the graphite boat sheets along the parallel direction; the fixed pressing sheet is rotationally connected to the graphite boat sheet, and the transmission axis is parallel to the parallel direction; the fixed pressing sheet has a first state used for abutting against the silicon wafers in the parallel direction and a second state used for releasing the silicon wafers. According to the graphite boat, the problem of winding plating of the back surface of the silicon wafer is reduced, so that the high-quality rate of a battery is better improved, the rework rate of the battery is reduced, and the production cost of the battery is reduced.

Description

Technical Field

[0001] The present disclosure relates to the technical field of solar cells, and in particular to a graphite boat. Background Art

[0002] With the continuous development of the photovoltaic industry, the demand for photovoltaic modules is increasing. The production process of solar cells mainly includes surface texturing, diffusion bonding, post-cleaning, surface coating, screen printing and high-temperature sintering. Among them, the principle of tubular plasma enhanced chemical vapor deposition (PECVD) is to use pulsed radio frequency to excite the heated rarefied gas to form plasma through glow discharge, and then apply opposite alternating voltages to two corresponding graphite sheets to accelerate the plasma to collide with the gas between the plates and move to the surface of the silicon wafer to complete the coating process.

[0003] In the process of batch manufacturing of silicon wafers, the silicon wafers need to be placed in a graphite boat in batches first, and then the graphite boat carrying the silicon wafers is placed in the PECVD vacuum coating equipment, and the silicon wafers are coated using the PECVD process.

[0004] However, during the silicon wafer coating process, the high temperature will cause stress on the silicon wafer, resulting in the silicon wafer not being completely attached to the graphite boat; or, because the insert is not in place, there is a gap between the silicon wafer and the graphite boat, causing the silicon wafer to be plated on the back side, affecting the quality rate, rework rate and production cost of the battery. Utility Model Content

[0005] In view of this, it is necessary to provide a graphite boat to solve the problem of back-side plating of silicon wafers in view of the above problems.

[0006] The disclosed embodiment provides a graphite boat for carrying silicon wafers. The graphite boat includes a plurality of parallel graphite boat sheets and a plurality of groups of fixed pressing plates. The graphite boat sheets have a length direction and a width direction perpendicular to the parallel direction and perpendicular to each other. The graphite boat sheets are provided with a plurality of mounting grooves arranged along the length direction, and the mounting grooves are used to carry silicon wafers. The fixed pressing plates extend along the length direction, and each group of fixed pressing plates includes a first fixed pressing plate and a second fixed pressing plate opposite to each other along the width direction, and each group of fixed pressing plates is located on the same side of the graphite boat sheet along the parallel direction; the fixed pressing plates are rotatably connected to the graphite boat sheets, and the transmission axis is parallel to the parallel direction; the fixed pressing plates have a first state for abutting against the silicon wafer along the parallel direction and a second state for releasing the silicon wafer.

[0007] The graphite boat provided in the embodiment of the present disclosure has a fixed pressing plate connected to the graphite boat sheet and rotates around an axis. When the fixed pressing plate is in a first state, each group of fixed pressing plates can abut against a side of a plurality of silicon wafers along a length direction facing away from the graphite boat sheet in a parallel direction, so that the other sides of the plurality of silicon wafers are completely in contact with the surfaces of the corresponding plurality of mounting grooves, thereby reducing the problem of back-plating of the silicon wafers, thereby better improving the quality rate of the battery, reducing the rework rate of the battery and reducing the production cost of the battery.

[0008] In some embodiments, the fixed pressing plate includes a connecting portion, a supporting portion and multiple groups of abutting portions, the supporting portion extends along the length direction, the connecting portion is connected to one end of the supporting portion, the connecting portion rotates around the transmission axis and is connected to the graphite boat plate, and the multiple groups of abutting portions are connected to one side of the supporting portion facing the mounting groove along the parallel direction.

[0009] With such arrangement, the support part is used to support multiple groups of abutment parts so as to abut multiple silicon wafers in the length direction, and the connection part is used to connect the graphite boat to drive the support part and the abutment part to rotate, which is conducive to the abutment part abutting or leaving the silicon wafer.

[0010] In some embodiments, each group of abutting portions includes two abutting portions that are connected to each other and arranged along the length direction. The abutting portions are hemispherical in shape, and the spherical surface of the abutting portions is used to abut against the silicon wafer.

[0011] With this arrangement, the contact part between the silicon wafer and the spherical surface is subjected to uniform force and greater pressure, which is conducive to pressing the silicon wafer so that the silicon wafer fits completely into the installation groove, reducing the problem of plating on the back of the silicon wafer, thereby better improving the quality rate of the battery, reducing the rework rate of the battery and reducing the production cost of the battery.

[0012] In some embodiments, the graphite boat sheet extends in the length direction and has two operating feet opposite to each other in the length direction, the operating feet are provided with a first positioning hole extending in a parallel direction, the graphite boat further includes a transmission shaft, the transmission shaft is passed through the first positioning hole. The connecting portion is provided with a connection groove, the transmission shaft is passed through the connection groove to drive the fixed pressing sheet to rotate.

[0013] With such arrangement, the transmission shaft is positioned through the first positioning hole, and the transmission shaft passing through the connecting groove is conducive to driving the fixed pressing plate to rotate, so that the fixed pressing plate is convenient to switch between the first state and the second state.

[0014] In some embodiments, the graphite boat further comprises a plurality of groups of connecting rods and a plurality of connecting blocks, each group of connecting rods comprises a first connecting rod and a second connecting rod opposite to each other in the width direction, the plurality of groups of connecting rods are arranged in parallel in the length direction, the connecting rods extend in the parallel direction and penetrate a plurality of graphite boat sheets, a plurality of connecting blocks are arranged crosswise with the operating feet in the parallel direction, a second positioning hole is arranged on the connecting block, the second positioning hole is arranged corresponding to the first positioning hole in the parallel direction, and the transmission shaft is passed through the first positioning hole and the second positioning hole. A plurality of grooves are arranged in the length direction of the support portion, the grooves are arranged one by one corresponding to the connecting rods, and the grooves can be snapped into the connecting rods.

[0015] In this arrangement, the connecting rod is used to connect multiple parallel graphite boats and fix them to the graphite boats. The groove of the support part is clamped on the connecting rod, which is beneficial to fix the fixed pressing plate on the graphite boat and improves the position accuracy of the fixed pressing plate when it is in the first state.

[0016] In some embodiments, the material of the fixed press piece is ceramic or graphite.

[0017] Such an arrangement enables the fixed pressing sheet to have good chemical stability and strength and can be used in high temperature, high pressure and corrosive environments.

[0018] In some embodiments, among a plurality of parallel graphite boat sheets, the graphite boat sheet located at the end is a single-use graphite boat sheet, and a mounting groove is provided on the side of the single-use graphite boat sheet facing another graphite boat sheet. The graphite boat sheet is provided with a plurality of mounting holes, and the mounting holes correspond to the mounting grooves one by one. The mounting holes are arranged on the bottom surfaces of the corresponding mounting grooves, and the mounting holes pass through the graphite boat sheet along the parallel direction, and the projection of the mounting grooves along the parallel direction covers the mounting holes.

[0019] When the fixed pressing plate is in the first state, the groove of the first fixed pressing plate and the groove of the second fixed pressing plate are arranged opposite to each other in the width direction, the groove of the first fixed pressing plate is clamped to the first connecting rod, and the groove of the second fixed pressing plate is clamped to the second connecting rod.

[0020] In this way, the setting of the mounting holes facilitates the coating process for the single-sided silicon wafer, and a group of fixed pressing plates on the single side are respectively clamped to the corresponding connecting rods along the width direction, which is conducive to the silicon wafer being attached to the mounting groove surface of the single-use graphite boat sheet, and facilitates the fixation of the silicon wafer on the end graphite boat sheet.

[0021] In some embodiments, among a plurality of parallel graphite boat sheets, a graphite boat sheet located between two end graphite boat sheets is a reused graphite boat sheet, and mounting grooves are respectively provided on both sides of the reused graphite boat sheet. The graphite boat sheet is provided with a plurality of mounting holes, and the mounting holes penetrate through the bottom surfaces of two oppositely arranged mounting grooves along the parallel direction, and the projection of the mounting grooves along the parallel direction covers the mounting holes.

[0022] In this way, the installation holes are arranged to facilitate the coating process for the silicon wafers on both sides. A group of fixed pressing plates are respectively clamped on the corresponding connecting rods along the width direction on both sides, which is conducive to the silicon wafers fitting on the surface of the mounting groove of the reused graphite boat sheet, thereby improving the coating efficiency of the silicon wafers.

[0023] In some embodiments, an opening is provided in the connection block corresponding to the graphite boat sheet along the length direction, and the opening is used to expose the transmission shaft, and the transmission shaft located in the opening is passed through the connection groove.

[0024] With such an arrangement, the connecting block can ensure the distance between the two graphite boat sheets corresponding to the two operating feet arranged in parallel along the parallel direction, and at the same time, the transmission shaft at the opening of the connecting block can be connected to the fixed pressing sheet, so as to facilitate the fixed pressing sheet to abut against the silicon wafers carried on both sides of the graphite boat sheet between the two graphite boat sheets corresponding to the two operating feet arranged in parallel along the parallel direction.

[0025] In some embodiments, the graphite boat further comprises a conductive rod and a fixed rod, the conductive rod penetrates through a plurality of operating feet and a plurality of connecting blocks in a parallel direction, the fixed rod penetrates through a plurality of operating feet and a plurality of connecting blocks in a parallel direction, and the transmission shaft is located between the conductive rod and the fixed rod along the length direction.

[0026] In this arrangement, the conductive rod is used for conducting electricity in the graphite boat, the fixed rod is conducive to fixing the entire graphite boat, and the transmission shaft is located between the conductive rod and the fixed rod to limit the fixed pressing plate when it rotates to prevent the fixed pressing plate from falling from both sides along the length direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a structural schematic diagram of a graphite boat when the fixed pressing sheet is in a first state in an embodiment of the present disclosure;

[0028] Figure 2 It is a structural schematic diagram of a graphite boat when the fixed pressing sheet is in a second state in an embodiment of the present disclosure;

[0029] Figure 3 is a top view of a fixed pressing sheet in an embodiment of the present disclosure;

[0030] Figure 4 is a front view of each set of fixed pressing plates in the embodiment of the present disclosure;

[0031] Figure 5 It is a side view of a fixed pressing sheet, a silicon sheet and a graphite boat sheet when the fixed pressing sheet is in a first state in an embodiment of the present disclosure;

[0032] Figure 6 is a front view of a graphite boat in an embodiment of the present disclosure;

[0033] Figure 7 is a side view of a graphite boat in an embodiment of the present disclosure;

[0034] Figure 8 Schematic diagram of the overall structure of the connection block in the embodiment of the present disclosure.

[0035] : Illustrations: 100, graphite boat; 1, graphite boat sheet; 11, mounting groove; 12, operating foot; 121, first positioning hole; 13, mounting hole; 101, single-use graphite boat sheet; 102, multiple-use graphite boat sheet; 2, fixed pressing sheet; 21, first fixed pressing sheet; 22, second fixed pressing sheet; 23, connecting part; 231, connecting groove; 24, supporting part; 241, groove; 25, abutting part; 3, transmission shaft; 4, connecting rod; 41, first connecting rod; 42, second connecting rod; 5, connecting block; 51, second positioning hole; 52, opening; 6, conductive rod; 7, fixing rod; 200, silicon wafer. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present disclosure.

[0037] It should be noted that when a component is referred to as being "mounted on" another component, it may be directly on the other component or there may be a central component. When a component is considered to be "set on" another component, it may be directly set on the other component or there may be a central component at the same time. When a component is considered to be "fixed to" another component, it may be directly fixed on the other component or there may be a central component at the same time.

[0038] The structural dimensions shown in the drawings in this article do not represent the actual dimensions and may be adjusted according to needs during actual production. The directional words "upper", "lower", "left", "right", etc. used in this article refer to the directions in the drawings and should not be regarded as limitations on the actual use of the product unless explicitly stated.

[0039] The first, second, third, etc. in this article are only used to distinguish the same features. It can be understood that the first fixed pressing plate in this article can also be called the second fixed pressing plate, and the second fixed pressing plate can also be called the first fixed pressing plate.

[0040] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present disclosure. The terms used herein in the specification of the present disclosure are only for the purpose of describing specific embodiments and are not intended to limit the present disclosure. The term "or / and" used herein includes any and all combinations of one or more related listed items.

[0041] like Figure 1 As shown, Figure 1 The structure of the graphite boat 100 when the fixed pressing sheet 2 is in the first state in the embodiment of the present disclosure is shown. The present disclosure relates to the technical field of solar cells.

[0042] refer to Figures 2 to 6 The embodiment of the present disclosure provides a graphite boat 100 for carrying a silicon wafer 200. The graphite boat 100 includes a plurality of parallel graphite boat sheets 1 and a plurality of fixed pressing sheets 2.

[0043] The graphite boat sheet 1 has a length direction and a width direction that are perpendicular to each other. The graphite boat sheet 1 extends along the length direction. A plurality of graphite boat sheets 1 are arranged in parallel, and the parallel direction is perpendicular to the length direction and perpendicular to the width direction, and the parallel direction may be the thickness direction of the graphite boat sheet 1. The graphite boat sheet 1 is provided with a plurality of mounting grooves 11. The plurality of mounting grooves 11 are arranged along the length direction. The mounting grooves 11 are used to carry the silicon wafer 200. Exemplarily, the length direction is the left-right direction, the width direction is the up-down direction, and the parallel direction is the front-back direction.

[0044] The fixed pressing plate 2 extends in the length direction. Each group of fixed pressing plates 2 includes a first fixed pressing plate 21 and a second fixed pressing plate 22 opposite to each other in the width direction, and each group of fixed pressing plates 2 is located on the same side of the graphite boat sheet 1 in the parallel direction. The fixed pressing plate 2 is rotatably connected to the graphite boat sheet 1. The transmission axis of the fixed pressing plate 2 is parallel to the parallel direction. The fixed pressing plate 2 has a first state for abutting against the silicon wafer 200 in the parallel direction and a second state for releasing the silicon wafer 200.

[0045] In the graphite boat 100 provided in the embodiment of the present disclosure, the fixed pressing plate 2 is connected to the graphite boat sheet 1 and rotates around the transmission axis. When the fixed pressing plate 2 is in the second state, each group of fixed pressing plates 2 rotates to move away from a corresponding graphite boat sheet 1, and multiple silicon wafers 200 are placed in the corresponding multiple mounting grooves 11 of the graphite boat sheet 1 along the length direction. When the fixed pressing plate 2 is in the first state, each group of fixed pressing plates 2 can abut against the side of the multiple silicon wafers 200 along the length direction facing away from the graphite boat sheet 1 in the parallel direction, so that the other side of the multiple silicon wafers 200 is completely attached to the surface of the corresponding multiple mounting grooves 11.

[0046] In the graphite boat 100 provided in the embodiment of the present disclosure, each group of fixed pressing plates 2 can abut against multiple silicon wafers 200 at the same time, and the operation is simple; the silicon wafer 200 is completely attached to the surface of the mounting groove 11 of the graphite boat sheet 1, reducing the problem of back-plating of the silicon wafer 200, so as to better improve the quality rate of the battery, reduce the rework rate of the battery and reduce the production cost of the battery.

[0047] Exemplarily, the number of graphite boats 1 arranged in parallel ranges from 15 to 30. For example, a total of 16, 20 or other number of graphite boats 1 are arranged from front to back.

[0048] Exemplarily, 8 to 12 mounting grooves 11 are provided on one side of each graphite boat 1 from left to right. For example, 10 mounting grooves 11 are provided on the front side of a graphite boat 1 .

[0049] Exemplarily, the projection of the installation slot 11 along the front-to-back direction is a square, and the side length of the installation slot 11 ranges from 167 mm to 212 mm. For example, the side length of the installation slot 11 is 167 mm.

[0050] Exemplarily, the depth of the mounting groove 11 ranges from 140 um to 170 um. For example, the depth of the mounting groove 11 is 150 um.

[0051] Exemplarily, one mounting groove 11 correspondingly carries one silicon wafer 200 , so that the silicon wafer 200 is attached to the edge portion of the bottom wall of the mounting groove 11 .

[0052] Exemplarily, the fixed pressing plate 2 is prepared according to the size of the mounting groove 11 of the graphite boat sheet 1. Exemplarily, the fixed pressing plate 2 presses the edge of the silicon sheet 200 by 0.2 mm to 0.3 mm.

[0053] Exemplarily, the first fixed pressing plate 21 is located at the upper side for abutting against the upper edge of the silicon wafer 200, and the second fixed pressing plate 22 is located at the lower side for abutting against the lower edge of the silicon wafer 200. In other embodiments, the first fixed pressing plate 21 is located at the lower side, and the second fixed pressing plate 22 is located at the upper side.

[0054] refer to Figures 1 to 5 In some embodiments, the fixed pressing plate 2 includes a connecting portion 23, a supporting portion 24 and a plurality of abutting portions 25. The supporting portion 24 extends in the length direction. The connecting portion 23 is connected to one end of the supporting portion 24. The connecting portion 23 is connected to the graphite boat sheet 1 by rotation around the axis. The plurality of abutting portions 25 are connected to one side of the supporting portion 24 facing the mounting groove 11 in the parallel direction.

[0055] In this configuration, the support portion 24 is used to support multiple groups of abutment portions 25 to abut multiple silicon wafers 200 in the length direction, and the connection portion 23 is used to connect the graphite boat 1 to drive the support portion 24 and the abutment portion 25 to rotate, which is conducive to the abutment portion 25 abutting or leaving the silicon wafer 200.

[0056] Exemplarily, the support portion 24 extends in the left-right direction, the connection portion 23 is connected to the left or right side of the support portion 24 , and the plurality of abutment portions 25 are connected to the rear side or the front side of the support portion 24 .

[0057] refer to Figure 3 and Figure 5In some embodiments, each group of abutting portions 25 includes two abutting portions 25 connected to each other and arranged along the length direction. The abutting portions 25 are hemispherical in shape, and the spherical surface of the abutting portions 25 is used to abut the silicon wafer 200 .

[0058] With such arrangement, the contact part between the silicon wafer 200 and the spherical surface is subjected to uniform force and greater pressure, which is conducive to pressing the silicon wafer 200 so that the silicon wafer 200 fits completely into the mounting groove 11, reducing the problem of plating on the back side of the silicon wafer 200, thereby better improving the quality rate of the battery, reducing the rework rate of the battery and reducing the production cost of the battery.

[0059] Exemplarily, every three groups of abutting portions 25 are used to abut against one silicon wafer 200 , thereby reducing the gap between the silicon wafer 200 and the mounting groove 11 as much as possible, so that the silicon wafer 200 can be completely attached to the bottom surface of the mounting groove 11 .

[0060] In other embodiments, the abutting portion 25 may also be cylindrical or in other shapes.

[0061] refer to Figure 1 and Figure 6 In some embodiments, the graphite boat sheet 1 extends in the length direction and has two operating feet 12 that are opposite to each other in the length direction. The operating feet 12 are provided with a first positioning hole 121 extending in a parallel direction. The graphite boat 100 further includes a transmission shaft 3, which is passed through the first positioning hole 121. The connecting portion 23 is provided with a connecting groove 231, and the transmission shaft 3 is passed through the connecting groove 231 to drive the fixed pressing sheet 2 to rotate.

[0062] With such arrangement, the transmission shaft 3 is positioned through the first positioning hole 121 , and the transmission shaft 3 passing through the connecting groove 231 is conducive to driving the fixed pressing plate 2 to rotate, so as to facilitate the fixed pressing plate 2 to switch between the first state and the second state.

[0063] Exemplarily, the two operating feet 12 are respectively located at the left and right ends of the graphite boat 1 .

[0064] Exemplarily, the two operating feet 12 of the first graphite boat are simultaneously located at the lower half of the graphite boat 1. The two operating feet 12 of the second graphite boat are simultaneously located at the middle part of the graphite boat 1.

[0065] Exemplarily, the first graphite boat sheet and the second graphite boat sheet are spaced apart from each other in front and back.

[0066] Exemplarily, the connection groove 231 of the connection portion 23 is cylindrical, and the transmission shaft 3 passes through the connection groove 231 so that the fixed pressing plate 2 is fixed on the transmission shaft 3. The rotation of the transmission shaft 3 drives the fixed pressing plate 2 to rotate.

[0067] refer to Figures 1 to 5In some embodiments, the graphite boat 100 further includes a plurality of groups of connecting rods 4 and a plurality of connecting blocks 5, each group of connecting rods 4 includes a first connecting rod 41 and a second connecting rod 42 opposite to each other in the width direction, the plurality of groups of connecting rods 4 are arranged in parallel in the length direction, the connecting rods 4 extend in the parallel direction and penetrate through a plurality of graphite boat sheets 1, a plurality of connecting blocks 5 are arranged crosswise with the operating feet 12 in the parallel direction, a second positioning hole 51 is arranged on the connecting block 5, the second positioning hole 51 is arranged corresponding to the first positioning hole 121 in the parallel direction, and the transmission shaft 3 is passed through the first positioning hole 121 and the second positioning hole 51. The support portion 24 is provided with a plurality of grooves 241 in the length direction, the grooves 241 are arranged one by one corresponding to the connecting rods 4, and the grooves 241 can be snapped into the connecting rods 4.

[0068] In this arrangement, the connecting rod 4 is used to connect multiple parallel graphite boat sheets 1 and fix them to the graphite boat sheet 1. The groove 241 of the support portion 24 is clamped on the connecting rod 4, which is beneficial to fix the fixed pressing sheet 2 on the graphite boat sheet 1 and improves the position accuracy of the fixed pressing sheet 2 when it is in the first state.

[0069] Exemplarily, the plurality of first connecting rods 41 penetrate the upper portion of the plurality of graphite boats 1, and the plurality of second connecting rods 42 penetrate the lower portion of the plurality of graphite boats 1. The first connecting rods 41 and the second connecting rods 42 are aligned in the up-down direction.

[0070] Exemplarily, the connection block 5 is located between the two lower operating feet 12 in the front-to-back direction. The connection block 5 is located between the two middle operating feet 12 in the front-to-back direction.

[0071] For example, from front to back, there are the first graphite boat, the second graphite boat, the first graphite boat, and the second graphite boat. Then, one connecting block 5 is located between the two operating feet 12 on the left side of the two first graphite boats, and one connecting block 5 is located between the two operating feet 12 on the right side of the two first graphite boats. One connecting block 5 is located between the two operating feet 12 on the left side of the two second graphite boats, and one connecting block 5 is located between the two operating feet 12 on the right side of the two second graphite boats.

[0072] Exemplarily, the transmission shaft 3 at the lower left side sequentially passes through the first positioning hole 121 of the first graphite boat sheet, the second positioning hole 51 of the connecting block 5 and the first positioning hole 121 of the second first graphite boat sheet.

[0073] Exemplarily, the transmission shaft 3 at the left middle portion passes through the first positioning hole 121 of the second graphite boat, the second positioning hole 51 of the connecting block 5 and the first positioning hole 121 of the second second graphite boat in sequence.

[0074] Exemplarily, the number of the connecting rods 4 is one more than the number of the mounting grooves 11. Exemplarily, the number of the grooves 241 is the same as the number of the connecting rods 4.

[0075] Exemplarily, the groove 241 is an inverted triangle and a semicircle that are connected to each other. For example, the upper half of the groove 241 is an inverted triangle, and the lower half is a semicircle.

[0076] In some embodiments, the material of the fixed pressing plate 2 is ceramic or graphite.

[0077] Such arrangement enables the fixed pressing sheet 2 to have good chemical stability and strength, and can be used in high temperature, high pressure and corrosive environments.

[0078] refer to Figure 5 In some embodiments, among the multiple parallel graphite boats 1, the graphite boat 1 at the end is a single-use graphite boat 101, and a mounting groove 11 is provided on one side of the single-use graphite boat 101 facing another graphite boat 1. ， The graphite boat 1 is provided with a plurality of mounting holes 13 , which correspond to the mounting grooves 11 one by one. The mounting holes 13 are provided on the bottom surface of the corresponding mounting grooves 11 , and the mounting holes 13 penetrate the graphite boat 1 in the parallel direction. The projection of the mounting grooves 11 in the parallel direction covers the mounting holes 13 .

[0079] When the fixed pressing plate 2 is in the first state, the groove 241 of the first fixed pressing plate 21 and the groove 241 of the second fixed pressing plate 22 are arranged opposite to each other in the width direction, the groove 241 of the first fixed pressing plate 21 is clamped to the first connecting rod 41, and the groove 241 of the second fixed pressing plate 22 is clamped to the second connecting rod 42.

[0080] In this way, the installation hole 13 is arranged to facilitate the coating process of the single-sided silicon wafer 200, and a group of fixed pressing plates 2 on the single side are respectively clamped to the corresponding connecting rods 4 along the width direction, which is conducive to the silicon wafer 200 being attached to the surface of the installation groove 11 of the single-use graphite boat sheet 101, and convenient for fixing the silicon wafer 200 on the end graphite boat sheet 1.

[0081] refer to Figure 5 , exemplarily, the graphite boat pieces 1 at the front and rear ends can be called end graphite boat pieces, and the end graphite boat pieces are configured as single-use graphite boat pieces 101. The mounting groove 11 of the single-use graphite boat piece 101 at the front end is opened at the rear side, and the silicon wafer 200 is abutted by the fixed pressing piece 2 at the rear side. The mounting groove 11 of the single-use graphite boat piece 101 at the rear end is opened at the front side, and the silicon wafer 200 is abutted by the fixed pressing piece 2 at the front side.

[0082] Exemplarily, when the first fixed pressing plate 21 is at the upper part, the groove 241 of the first fixed pressing plate 21 is clamped downwardly on the first connecting rod 41. When the second fixed pressing plate 22 is at the lower part, the groove 241 of the second fixed pressing plate 22 is clamped upwardly on the second connecting rod 42. In other embodiments, when the first fixed pressing plate 21 is at the lower part, the groove 241 of the first fixed pressing plate 21 is clamped upwardly on the second connecting rod 42. When the second fixed pressing plate 22 is at the upper part, the groove 241 of the second fixed pressing plate 22 is clamped downwardly on the first connecting rod 41.

[0083] refer to Figure 5 In some embodiments, among a plurality of parallel graphite boat sheets 1, the graphite boat sheet 1 located between two end graphite boat sheets can be configured as a reused graphite boat sheet 102, and mounting grooves 11 are respectively provided on both sides of the reused graphite boat sheet 102. The graphite boat sheet 1 is provided with a plurality of mounting holes 13, and the mounting holes 13 pass through the bottom surfaces of the two oppositely arranged mounting grooves 11 along the parallel direction, and the projection of the mounting grooves 11 along the parallel direction covers the mounting holes 13.

[0084] In this way, the installation holes 13 are arranged to facilitate the coating process for the silicon wafers 200 on both sides. A group of fixed pressing plates 2 are respectively clamped to the corresponding connecting rods 4 along the width direction on both sides, which is beneficial for the silicon wafer 200 to fit on the surface of the installation groove 11 of the reused graphite boat sheet 102, thereby improving the coating efficiency of the silicon wafer 200.

[0085] Exemplarily, the multiple graphite boats 1 in the middle are reused graphite boats 102. Both the front and rear sides of the reused graphite boat 102 are provided with mounting grooves 11. One set of fixed pressing plates 2 abuts against the silicon wafer 200 at the rear side, and the other set of fixed pressing plates 2 abuts against the silicon wafer 200 at the front side.

[0086] Exemplarily, the abutting portions 25 of the two upper fixed pressing plates 2 are arranged correspondingly along the front-to-back direction. The abutting portions 25 of the two lower fixed pressing plates 2 are arranged correspondingly along the front-to-back direction.

[0087] refer to Figure 7 and Figure 8 In some embodiments, along the length direction, the connection block 5 corresponding to the graphite boat sheet 1 is provided with an opening 52 , and the opening 52 is used to expose the transmission shaft 3 , and the transmission shaft 3 located at the opening 52 is passed through the connection groove 231 .

[0088] In this arrangement, the connecting block 5 can ensure the distance between the two graphite boat sheets 1 corresponding to the two operating feet 12 arranged in parallel along the parallel direction. At the same time, the transmission shaft 3 at the opening 52 of the connecting block 5 can be connected to the fixed pressing sheet 2, so that the fixed pressing sheet 2 can be conveniently abutted against the silicon wafer 200 carried on both sides of the graphite boat sheet 1 between the two graphite boat sheets 1 corresponding to the two operating feet 12 arranged in parallel along the parallel direction.

[0089] Exemplarily, a second graphite boat is disposed between the two first graphite boats, and a connecting block 5 is disposed between the operating feet 12 of the two first graphite boats. An opening 52 is provided in the connecting block 5 facing the second graphite boat, so that the fixed pressing plate 2 corresponding to the second graphite boat is connected to the transmission shaft 3 through the opening 52.

[0090] Exemplarily, a first graphite boat is disposed between two second graphite boats, and a connecting block 5 is disposed between the operating feet 12 of the two first graphite boats. An opening 52 is provided in the connecting block 5 facing the first graphite boat, so that the fixed pressing plate 2 corresponding to the first graphite boat is connected to the transmission shaft 3 through the opening 52.

[0091] Exemplarily, the first fixed pressing plate 21 on the front side is connected to the opening 52 on the right side of the connecting block 5, the second fixed pressing plate 22 on the front side is connected to the operating foot 12 on the left side of the first graphite boat sheet, the first fixed pressing plate 21 on the rear side is connected to the opening 52 on the left side of the connecting block 5, and the second fixed pressing plate 22 on the rear side is connected to the operating foot 12 on the right side of the first graphite boat sheet.

[0092] refer to Figure 4 Since part of the connecting block 5 is located in the middle of the graphite boat 1, and the fixed pressing plate 2 needs to abut the edge of the silicon wafer 200, and the edge of the silicon wafer 200 is close to the upper and lower sides of the graphite boat 1, the connecting portion 23 of one fixed pressing plate 2 in each group of fixed pressing plates 2 is set at a right angle and extends a preset distance toward the upper and lower parts.

[0093] refer to Figure 1 In some embodiments, the graphite boat 100 further includes a conductive rod 6 and a fixed rod 7, the conductive rod 6 penetrates through a plurality of operating feet 12 and a plurality of connecting blocks 5 in a parallel direction, the fixed rod 7 penetrates through a plurality of operating feet 12 and a plurality of connecting blocks 5 in a parallel direction, and the transmission shaft 3 is located between the conductive rod 6 and the fixed rod 7 along the length direction.

[0094] In this arrangement, the conductive rod 6 is used for conducting electricity for the graphite boat 100, the fixing rod 7 is conducive to fixing the entire graphite boat 100, and the transmission shaft 3 is located between the conductive rod 6 and the fixing rod 7, and is limited when the fixed pressing plate 2 rotates to prevent the fixed pressing plate 2 from falling from both sides along the length direction.

[0095] Exemplarily, the left operating foot 12 is connected with a fixed rod 7, a rotating rod and a conductive rod 6 in sequence from left to right. The right operating foot 12 is connected with a conductive rod 6, a rotating rod and a fixed rod 7 in sequence from left to right.

[0096] Exemplarily, the conductive rod 6 is a graphite rod, and the fixed rod 7 is a ceramic rod.

[0097] Exemplarily, the fixed pressing plate 2 is also provided with a clamping groove for clamping with the fixed rod 7 .

[0098] like Figure 6 and Figure 8 As shown, the operating foot 12 of the graphite boat 1 is also provided with through holes for penetrating the conductive rod 6 and the fixing rod 7 , and the corresponding connecting block 5 is also provided with through holes for penetrating the conductive rod 6 and the fixing rod 7 .

[0099] Exemplarily, 29 graphite boat sheets 1 are arranged in sequence along the front-to-back direction. The first graphite boat sheet and the second graphite boat sheet are arranged side by side along the front-to-back direction. The frontmost graphite boat sheet 1 has 8 mounting grooves 11 on the side facing the rear, the rearmost graphite boat sheet 1 has 8 mounting grooves 11 on the side facing the front, and the remaining graphite boat sheets 1 have 8 mounting grooves 11 on the front and rear sides, respectively, and the mounting grooves 11 on both sides correspond to each other. The side length of the mounting groove 11 is 167mm*167mm. The supporting portion 24 of each graphite boat sheet 1 includes 9 groups of first connecting rods 41 and second connecting rods opposite to each other in the up-down direction, and the distance between the center of the first connecting rod and the center of the second connecting rod is 192mm. The conductive rod 6 and the fixed rod 7 connect the multiple graphite boat sheets 1 and the connecting block 5. Each operating foot 12 is provided with a first positioning hole 121, wherein the transmission shaft 3 passes through the first positioning hole 121 and the second positioning hole 51. The fixed pressing plate 2 is rotatably connected to the transmission shaft 3 through the connecting hole.

[0100] The method of using the fixed pressing plate 2 is as follows: the first fixed pressing plate 21 and the second fixed pressing plate 22 on one side of the graphite boat sheet 1 to be inserted with the silicon wafer 200 are rotated respectively, so that the groove 241 of this group of fixed pressing plates 2 is separated from the connecting rod 4, and the supporting portion 24 is away from the graphite sheet. At this time, the group of fixed pressing plates 2 is in the second state, and the silicon wafer 200 is inserted by a mechanical arm or manually. After inserting the silicon wafer 200 on one side, the first fixed pressing plate 21 and the second fixed pressing plate 22 are rotated in the opposite direction respectively, so that the abutting portions 25 of the first fixed pressing plate 21 and the second fixed pressing plate 22 are both abutted against the silicon wafer 200. At the same time, the groove 241 of the first fixed pressing plate 21 is clamped on the first connecting rod 41, and the groove 241 of the second fixed pressing plate 22 is clamped on the second connecting rod 42. At this time, the group of fixed pressing plates 2 is in the first state. Repeat the above steps until all silicon wafers 200 are inserted and fixed to the graphite boat 100.

[0101] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0102] The above-mentioned various forms of processes can be used, and steps can be reordered, added or deleted. The steps recorded in the embodiments of the present disclosure can be executed in parallel, sequentially, or in different orders, as long as the desired results of the technical solutions provided by the embodiments of the present disclosure can be achieved, and this document does not limit them here.

[0103] The above-mentioned embodiments only express several implementation methods of the present disclosure, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the disclosed patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present disclosure, and these all belong to the protection scope of the present disclosure. Therefore, the protection scope of the disclosed patent shall be subject to the attached claims.

Claims

1. A graphite boat for carrying silicon wafers, characterized in that: The graphite boat comprises: A plurality of parallel graphite boats, each of which has a length direction and a width direction perpendicular to the parallel direction and perpendicular to each other, and each of which is provided with a plurality of mounting grooves arranged along the length direction, and each of which is used to carry the silicon wafer; and A plurality of groups of fixed pressing plates, wherein the fixed pressing plates extend along the length direction, each group of the fixed pressing plates comprises a first fixed pressing plate and a second fixed pressing plate opposite to each other along the width direction, and each group of the fixed pressing plates is located on the same side of the graphite boat along the parallel direction; the fixed pressing plates are rotatably connected to the graphite boat, and the transmission axis is parallel to the parallel direction; the fixed pressing plates have a first state for abutting against the silicon wafer along the parallel direction and a second state for releasing the silicon wafer.

2. The graphite boat according to claim 1, characterized in that: The fixed pressing plate includes a connecting portion, a supporting portion and a plurality of abutting portions, wherein the supporting portion extends along the length direction, the connecting portion is connected to one end of the supporting portion, the connecting portion is rotatably connected to the graphite boat plate around the transmission axis, and the plurality of abutting portions are connected to one side of the supporting portion facing the mounting groove along the parallel direction.

3. The graphite boat according to claim 2, characterized in that: Each group of the abutting portions includes two abutting portions that are connected to each other and arranged along the length direction. The abutting portions are hemispherical in shape, and the spherical surfaces of the abutting portions are used to abut against the silicon wafer.

4. The graphite boat according to claim 3, characterized in that: The graphite boat sheet extends along the length direction and has two operating feet opposite to each other along the length direction, the operating feet are provided with a first positioning hole extending along the parallel direction, and the graphite boat further includes a transmission shaft, and the transmission shaft is passed through the first positioning hole; The connecting portion is provided with a connecting groove, and the transmission shaft is passed through the connecting groove to drive the fixed pressing plate to rotate.

5. The graphite boat according to claim 4, characterized in that: The graphite boat further includes a plurality of groups of connecting rods and a plurality of connecting blocks, each group of the connecting rods includes a first connecting rod and a second connecting rod that are opposite to each other along the width direction, the plurality of groups of connecting rods are arranged in parallel along the length direction, the connecting rods extend along the parallel direction and penetrate a plurality of the graphite boat sheets, the plurality of connecting blocks are arranged crosswise with the operating feet along the parallel direction, a second positioning hole is provided on the connecting block, the second positioning hole and the first positioning hole are arranged correspondingly along the parallel direction, and the transmission shaft is passed through the first positioning hole and the second positioning hole; The support portion is provided with a plurality of grooves along the length direction, the grooves are arranged in one-to-one correspondence with the connecting rods, and the grooves can be snap-connected to the connecting rods.

6. The graphite boat according to claim 5, characterized in that: The material of the fixed pressing sheet is ceramic or graphite.

7. The graphite boat according to claim 6, characterized in that: Among the plurality of parallel graphite boats, the graphite boat at the end is a single-use graphite boat, the single-use graphite boat is provided with the mounting groove on one side facing another graphite boat, the graphite boat is provided with a plurality of mounting holes, the mounting holes correspond to the mounting grooves one by one, the mounting holes are provided on the bottom surface of the corresponding mounting grooves, the mounting holes penetrate the graphite boat along the parallel direction, and the projection of the mounting groove along the parallel direction covers the mounting holes; When the fixed pressing plate is in the first state, the groove of the first fixed pressing plate and the groove of the second fixed pressing plate are arranged opposite to each other along the width direction, the groove of the first fixed pressing plate is clamped to the first connecting rod, and the groove of the second fixed pressing plate is clamped to the second connecting rod.

8. The graphite boat according to claim 6, characterized in that: Among the multiple parallel graphite boat sheets, the graphite boat sheet located between the two end graphite boat sheets is a reused graphite boat sheet, the mounting grooves are respectively provided on both sides of the reused graphite boat sheet, the graphite boat sheet is provided with a plurality of mounting holes, the mounting holes pass through the bottom surfaces of the two oppositely arranged mounting grooves along the parallel direction, and the projection of the mounting grooves along the parallel direction covers the mounting holes.

9. The graphite boat according to claim 7 or 8, characterized in that: Along the length direction, the connection block corresponding to the graphite boat sheet is provided with an opening, wherein the opening is used to expose the transmission shaft, and the transmission shaft located at the opening is passed through the connection groove.

10. The graphite boat according to claim 6, characterized in that: The graphite boat also includes a conductive rod and a fixed rod, the conductive rod penetrates the plurality of operating feet and the plurality of connecting blocks along the parallel direction, the fixed rod penetrates the plurality of operating feet and the plurality of connecting blocks along the parallel direction, and the transmission shaft is located between the conductive rod and the fixed rod along the length direction.

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