Openable and closable delivery valve sealing door plate structure

Abstract

The utility model relates to the field of coating process, in particular to a delivery valve sealing door plate structure capable of being opened and closed, which comprises a flange, a corrugated pipe, a fixing plate and a sealing plate, a groove is arranged inside the sealing plate, the flange is fixedly connected with the top end of the groove of the sealing plate through a plurality of fixing pieces, and the corrugated pipe and the groove inside the sealing plate can form a closed cavity. According to the device, a flange, a corrugated pipe and a fixing plate are connected into a whole, the flange and a sealing plate are fixedly connected through a plurality of fixing pieces, so that a closed cavity is formed between the corrugated pipe and the sealing plate, the corrugated pipe drives the sealing plate to move by inflating or deflating the cavity, and the sealing plate is opened or closed. The corrugated pipe is located in the closed cavity and isolated from the outside, direct contact with corrosive gas or impurities can be avoided, the situation that the corrugated pipe is corroded by the corrosive gas and blocked by the impurities to move can be avoided, the stability and corrosion resistance of the whole device are improved, and the service life is prolonged.

Description

Technical Field

[0001] The utility model relates to the field of film coating technology, in particular to an openable and closable delivery valve sealing door plate structure. Background Art

[0002] In coating equipment, the process chamber and the transfer chamber are usually isolated by a transfer valve. When the coating process in the process chamber requires a vacuum environment, the sealing plate of the transfer valve is closed and cooperates with the process chamber to form a completely sealed cavity, so that the environmental requirements required by the process can be met.

[0003] Generally, during the coating process, the seals of the delivery valve sealing plate are in direct contact with the gas. This will cause the delivery valve sealing plate seals to corrode when encountering corrosive gases or impurities, greatly shortening their service life. At the same time, the impurities carried in the corrosive gas will hinder the sliding movement of the delivery valve sealing plate seals, thereby affecting the operation of the entire device and reducing the stability of the normal operation of the device. Utility Model Content

[0004] The utility model aims to provide a sealing door plate structure of a delivery valve which can be opened and closed.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] Provided is an openable and closable conveying valve sealing door plate structure, comprising a flange, a bellows, a fixing plate and a sealing plate, wherein the flange and the fixing plate are fixedly connected via the bellows to form a whole, a groove is provided inside the sealing plate, and the flange is fixedly connected to the top of the groove of the sealing plate via a plurality of fixing parts, and when the flange and the sealing plate are fixedly connected, the bellows and the inner groove of the sealing plate form a closed chamber.

[0007] Furthermore, a plurality of sealing grooves 1 are provided at the bottom end of the inner portion of the fixing plate near the inner portion of the sealing plate groove, and a molded sealing ring 1 is provided inside each of the plurality of sealing grooves 1.

[0008] Furthermore, it also includes a special seal, and a plurality of sealing grooves 2 for connecting with the special seal are opened at one end of the sealing plate away from the flange.

[0009] Furthermore, air holes are provided on the side wall of the sealing plate.

[0010] Furthermore, a plurality of fixing holes 1 are provided on the flange, a plurality of fixing holes 2 for cooperating with the fixing holes 1 are provided on the sealing plate, and the plurality of fixing holes 1 are fixedly connected with the plurality of fixing holes 2 respectively by a plurality of fixing parts.

[0011] Furthermore, a plurality of sealing grooves three are formed at one end of the sealing plate close to the flange, and a molded sealing ring two is disposed in each of the plurality of sealing grooves three.

[0012] Furthermore, the plurality of sealing grooves one and the plurality of sealing grooves three are all dovetail grooves.

[0013] Beneficial effects of the utility model: the device connects the flange, the bellows and the fixed plate into a whole, and fixes the flange to the sealing plate through a plurality of fixings, so that a closed chamber is formed between the bellows and the sealing plate, and the bellows drives the sealing plate to move by inflating or exhausting air into the chamber, so that the sealing plate can realize the opening or closing function. The bellows is located inside the closed chamber, isolated from the outside world, and can avoid direct contact with corrosive gases or impurities, and can avoid being corroded by corrosive gases and being hindered by impurities, so that the stability and corrosion resistance of the whole device are improved, and the service life is extended. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solution of the embodiment of the utility model, the following is a brief introduction to the drawings required for use in the embodiment of the utility model.

[0015] Figure 1 It is a schematic cross-sectional view of the three-dimensional structure of the utility model;

[0016] Figure 2 It is a partial three-dimensional structural schematic diagram of the utility model;

[0017] Figure 3 for Figure 2 A schematic cross-sectional view of a three-dimensional structure;

[0018] Figure 4 is a schematic cross-sectional view of the three-dimensional structure of the sealing plate;

[0019] In the figure: 1. Flange; 1a. Fixing hole 1; 2. Bellows; 3. Fixing plate; 3a. Sealing groove 1; 4. Sealing plate; 4a. Air hole; 4b. Fixing hole 2; 5. Special sealing part; 6. Fixing part. DETAILED DESCRIPTION

[0020] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0021] Among them, the drawings are only used for illustrative purposes and represent only schematic diagrams rather than actual pictures, and should not be understood as limitations on this patent; in order to better illustrate the embodiments of the utility model, some parts of the drawings will be omitted, enlarged or reduced, and do not represent the size of the actual product.

[0022] Reference Figures 1 to 4The structure of a sealing door plate of a delivery valve that can be opened and closed is shown, comprising a flange 1, a bellows 2, a fixed plate 3 and a sealing plate 4. The flange 1 and the fixed plate 3 are fixedly connected to form a whole through the bellows 2. A groove is provided inside the sealing plate 4 for one end of the whole formed by the bellows 2 and the fixed plate 3 to enter. The flange 1 is fixedly connected to the top of the groove of the sealing plate 4 through a plurality of fixing members 6. When the flange 1 and the sealing plate 4 are fixedly connected, the bellows 2 and the inner groove of the sealing plate 4 form a closed chamber. When compressed air is filled into the closed chamber, a positive pressure is formed inside the chamber. When the fixed plate 3 is fixed, the internal pressure bellows will contract, driving the flange 1 to move, thereby causing the sealing plate fixedly connected to the flange 1 to move in the contraction direction, thereby realizing the closed sealing of the sealing plate; when air is pumped into the closed chamber, the internal pressure of the chamber is negative, the external pressure bellows stretches, and the flange 1 is driven to move synchronously. When the fixed plate is fixed, the sealing plate will be driven to move in the extension direction, thereby realizing the opening of the sealing plate.

[0023] A plurality of sealing grooves 3a are provided at the bottom end of the inner groove of the fixing plate 3 near the sealing plate 4, and an O-ring is provided inside each of the plurality of sealing grooves 3a. The plurality of O-rings are used to protect the end of the fixing plate 3 near the sealing plate 4, and can buffer the contact between the fixing plate 3 and the sealing plate 4 when the sealing plate 4 is opening or closing.

[0024] It also includes a special seal 5. The end of the sealing plate 4 away from the flange 1 is provided with a plurality of sealing grooves 2 for connecting with the special seal 5. When the special seal 5 is matched with the sealing grooves 2 on the sealing plate 4, the sealing surface of the process chamber can be sealed.

[0025] The side wall of the sealing plate 4 is provided with an air hole 4a for evacuating or inflating air in the closed chamber formed by the bellows 2 and the inner wall of the sealing plate 4, so that when the fixed plate 3 is fixed, the bellows 2 can synchronously drive the sealing plate 4 to move with the change of air pressure, thereby realizing the opening and closing function of the sealing plate 4.

[0026] The flange 1 is provided with a plurality of fixing holes 1a, and the sealing plate 4 is provided with a plurality of fixing holes 4b for cooperating with the fixing holes 1a. The plurality of fixing holes 1a and the plurality of fixing holes 4b are fixedly connected via a plurality of fixing members 6 respectively. The plurality of fixing holes 1a and the plurality of fixing holes 4b correspond one to one and are both used to cooperate with the plurality of fixing members 6, so that the flange 1 is fixedly connected to the sealing plate 4.

[0027] A plurality of sealing grooves three are provided at one end of the sealing plate 4 close to the flange 1, and O-rings two are arranged in each of the plurality of sealing grooves three. The plurality of O-rings two can seal the gap between the flange 1 and the sealing plate 4, thereby ensuring good airtightness of the closed chamber formed between the bellows 2 and the sealing plate 4, and ensuring normal opening and closing of the sealing plate 4.

[0028] The plurality of sealing grooves 1 3a and the plurality of sealing grooves 3 are all dovetail grooves, which can prevent the sealing ring from falling off.

[0029] Working principle: the flange 1, the bellows 2 and the fixed plate 3 are fixedly connected as a whole, and then one end of the fixed plate 3 is installed into the groove of the sealing plate 4, and the flange 1 is fixedly connected to the sealing plate 4 through a plurality of fixing parts 6, and a closed chamber is formed between the bellows 2 and the sealing plate 4; then compressed air is filled into the chamber through the air hole 4a, and a positive pressure is formed inside the chamber, the fixed plate 3 is fixed, the internal pressure bellows will contract, and synchronously drive the sealing plate 4 to move in the contraction direction, so that the sealing plate 4 is closed and sealed; when the inflation turns into the exhaust, the internal negative pressure of the closed chamber is formed, the fixed plate is fixed, and the external pressure bellows will stretch, and synchronously drive the sealing plate 4 to move in the extension direction, so that the sealing plate 4 is opened.

[0030] The device connects the flange, bellows and fixed plate into a whole, and fixes the flange to the sealing plate through multiple fixings, so that a closed chamber is formed between the bellows and the sealing plate. The bellows drives the sealing plate to move by inflating or exhausting air into the chamber, so that the sealing plate can be opened or closed. The bellows is located inside the closed chamber and isolated from the outside world, which can avoid direct contact with corrosive gases or impurities, and can avoid being corroded by corrosive gases and being hindered by impurities, so that the stability and corrosion resistance of the entire device are improved and the service life is extended.

[0031] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A sealing door plate structure of an openable and closable delivery valve, characterized in that: The invention comprises a flange (1), a bellows (2), a fixing plate (3) and a sealing plate (4); the flange (1) and the fixing plate (3) are fixedly connected via the bellows (2) to form a whole; a groove is provided inside the sealing plate (4); the flange (1) is fixedly connected to the top of the groove of the sealing plate (4) via a plurality of fixing members (6); when the flange (1) and the sealing plate (4) are fixedly connected, the bellows (2) and the groove inside the sealing plate (4) form a closed chamber.

2. The openable and closable delivery valve sealing door structure according to claim 1, characterized in that: A plurality of sealing grooves (3a) are provided at the bottom end of the inner portion of the groove of the sealing plate (4) near the fixing plate (3), and an O-type sealing ring is provided inside each of the plurality of sealing grooves (3a).

3. The openable and closable delivery valve sealing door structure according to claim 2, characterized in that: It also includes a special seal (5), and a plurality of sealing grooves 2 for connecting to the special seal (5) are formed on one end of the sealing plate (4) away from the flange (1).

4. The openable and closable delivery valve sealing door structure according to claim 3, characterized in that: The side wall of the sealing plate (4) is provided with an air hole (4a).

5. The openable and closable delivery valve sealing door structure according to claim 4, characterized in that: The flange (1) is provided with a plurality of fixing holes one (1a), the sealing plate (4) is provided with a plurality of fixing holes two (4b) for cooperating with the fixing holes one (1a), and the plurality of fixing holes one (1a) and the plurality of fixing holes two (4b) are respectively fixedly connected via a plurality of fixing members (6).

6. The openable and closable delivery valve sealing door structure according to claim 5, characterized in that: A plurality of sealing grooves three are formed at one end of the sealing plate (4) close to the flange (1), and an O-type sealing ring two is disposed in each of the plurality of sealing grooves three.

7. The openable and closable delivery valve sealing door structure according to claim 6, characterized in that: The plurality of sealing grooves one (3a) and the plurality of sealing grooves three are both dovetail grooves.

Images