Vacuum angle valve with welded corrugated pipe as connecting piece

Abstract

The utility model relates to the field of vacuum angle valves, in particular to a vacuum angle valve with a welded corrugated pipe as a connecting piece, which comprises a valve body, the corrugated pipe, a valve plate, a flange, a valve rod and a cover plate flange, the cover plate flange is detachably mounted at the top end of the valve body, and the bottom end of the flange is fixedly connected with the top end of the valve plate through the corrugated pipe. The valve rod is fixedly installed at the top end of the valve plate and penetrates through the corrugated pipe and the flange, the top end of the flange is fixedly connected with the bottom end of the cover plate flange, and a shaft sleeve is fixedly arranged in the middle of the cover plate flange. Due to the fact that the corrugated pipe is arranged on the valve rod, when the valve plate works in the valve body, the valve plate cannot make contact with the inner wall of the valve body, abrasion is avoided, meanwhile, when the valve plate faces some doped corrosive gas, the corrugated pipe can well isolate the valve rod from the corrosive gas, the valve rod is well protected, and the stability of normal work of the valve rod is improved.

Description

Technical Field

[0001] The utility model relates to the field of vacuum angle valves, in particular to a vacuum angle valve with a welded bellows as a connecting piece. Background Art

[0002] During the process stage in the semiconductor and coating fields, the process chamber requires a vacuum environment and may be mixed with corrosive gases. As a component that controls the vacuum system's pumping and exhaust, the vacuum angle valve must meet the requirements of use in harsh environments and have excellent reliability and a long service life.

[0003] To ensure the normal and stable operation of the vacuum angle valve in a vacuum environment, it is very important that the dynamic seal ring in contact with the valve stem is intact. When the vacuum angle valve is in use, in some occasions, corrosive gases will inevitably enter the vacuum angle valve, which will cause the dynamic seal ring in contact with the valve stem to be corroded by the corrosive gases, causing the dynamic seal ring to be unable to play its sealing role, and then causing the vacuum angle valve to be unable to work stably and reduce stability. Utility Model Content

[0004] The utility model aims to provide a vacuum angle valve with a welded bellows as a connecting piece.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] Provided is a vacuum angle valve with a welded bellows as a connecting piece, comprising a valve body, a bellows, a valve plate, a flange, a valve stem and a cover flange. The cover flange is detachably mounted on the top of the valve body, the bottom end of the flange and the top end of the valve plate are fixedly connected via a bellows, the valve stem is fixedly mounted on the top of the valve plate and passes through the bellows and the flange respectively, the top end of the flange is fixedly connected to the bottom end of the cover flange, a shaft sleeve is fixedly arranged in the middle of the cover flange, and a controller is fixedly arranged on the top of the valve body.

[0007] Furthermore, it also includes a slide plate, which is detachably mounted on the top end of the valve stem through a connecting piece, and the slide plate is located inside the controller.

[0008] Furthermore, a first connecting hole is provided at the top end of the valve stem, and a second connecting hole is provided on the slide plate.

[0009] Furthermore, an air cavity is provided inside the controller, and an air source connector 1 and an air source connector 2 are respectively provided at the top and bottom ends of the controller.

[0010] Furthermore, a valve stem hole 1 is formed on the flange, and a valve stem hole 2 is formed on the shaft sleeve.

[0011] Furthermore, a dovetail groove is provided at the bottom end of the valve plate, and O-rings are provided in each of the multiple dovetail grooves.

[0012] The beneficial effects of the utility model are as follows: the device fixes the valve plate, the bellows and the flange in connection, and the valve stem is fixedly mounted on the valve plate and located inside the bellows. When the corrosive gas enters the interior of the vacuum angle valve, the corrosive gas can be blocked by the bellows and cannot contact the dynamic sealing ring that contacts the valve stem, so that the dynamic sealing ring can be well protected, the service life of the dynamic sealing ring can be extended, and the stability of the vacuum angle valve is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solution of the embodiment of the utility model, the following is a brief introduction to the drawings required for use in the embodiment of the utility model.

[0014] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0015] Figure 2 It is a schematic cross-sectional view of the three-dimensional structure of the utility model;

[0016] Figure 3 for Figure 2 A local enlarged schematic diagram of point A;

[0017] Figure 4 It is a schematic diagram of a partial three-dimensional structure of the utility model;

[0018] In the figure: 1. valve body; 2. bellows; 3. valve plate; 3a. dovetail groove; 3b. O-ring; 4. flange; 5. valve stem; 6. cover flange; 7. sleeve; 8. controller; 8a. air cavity; 8b. air source connector 1; 8c. air source connector 2; 9. slide plate. DETAILED DESCRIPTION

[0019] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0020] Among them, the drawings are only used for illustrative purposes and represent only schematic diagrams rather than actual pictures, and should not be understood as limitations on this patent; in order to better illustrate the embodiments of the utility model, some parts of the drawings will be omitted, enlarged or reduced, and do not represent the size of the actual product.

[0021] Reference Figures 1 to 4The vacuum angle valve with a welded bellows as a connecting piece shown in the figure comprises a valve body 1, a bellows 2, a valve plate 3, a flange 4, a valve stem 5 and a cover plate flange 6. The cover plate flange 6 is detachably mounted on the top of the valve body 1. The bottom end of the flange 4 and the top end of the valve plate 3 are fixedly connected by the bellows 2. The valve stem 5 is fixedly mounted on the top of the valve plate 3 and passes through the bellows 2 and the flange 4 respectively. The part of the valve stem 5 inside the valve body 1 is wrapped by the bellows 2, so that the valve stem 5 avoids the wear caused by relative sliding with the inner wall of the valve body 1 during the up and down movement, and also avoids the valve stem 5 from contacting with corrosive gas and causing self-corrosion, thereby ensuring the stability of the normal operation of the valve stem 5. The top end of the flange 4 is fixedly connected to the bottom end of the cover plate flange 6. A shaft sleeve 7 is fixedly arranged in the middle of the cover plate flange 6, which is used to cooperate with the valve stem 5 and allow the valve stem 5 to pass through, so as to protect the valve stem 5 and avoid friction with the cover plate flange 6 during the up and down movement, resulting in self-wear. A controller 8 is fixedly provided at the top of the valve body 1, and the controller 8 is used to drive the valve stem 5 to move, so that the valve stem 5 can move up and down, thereby enabling the vacuum angle valve to realize the opening and closing functions.

[0022] It also includes a slide plate 9, which is detachably mounted on the top of the valve stem 5 through a connecting piece. The slide plate 9 is located inside the controller 8. When the staff controls the operation of the controller 8, the slide plate 9 can slide up or down inside the controller 8, and synchronously drive the valve stem 5 to slide up or down, thereby realizing the opening and closing functions of the vacuum angle valve.

[0023] A connecting hole 1 is provided at the top of the valve stem 5 , and a connecting hole 2 is provided on the slide plate 9 . Both the connecting hole 1 and the connecting hole 2 are used to cooperate with the connecting piece, so that the slide plate 9 can be detachably installed on the top of the valve stem 5 .

[0024] An air cavity 8a is provided inside the controller 8, and an air source connector 1 8b and an air source connector 2 8c are respectively provided at the top and bottom ends of the controller 8. The air source connector 2 8c and the air source connector 1 8b can be used to transport gas into the air cavity 8a and discharge the gas in the air cavity 8a. The gas can push the slide plate 9 to slide, so that the slide plate 9 can drive the valve stem 5 to slide up and down, thereby realizing the opening and closing functions of the vacuum angle valve.

[0025] A valve stem hole 1 is provided on the flange 4 and a valve stem hole 2 is provided on the shaft sleeve 7. Both valve stem hole 1 and valve stem hole 2 are used for the valve stem to pass through, so that the valve stem can cooperate with the slide plate 9 inside the controller 8 and move up and down under the control of the controller 8.

[0026] A dovetail groove 3a is formed at the bottom end of the valve plate 3, and an O-type sealing ring 3b is disposed in each of the dovetail grooves.

[0027] Working principle: when the staff fills the air cavity 8a in the controller 8 with gas through the air source connector 8c, the gas can push the slide plate 9 to slide upward. While the slide plate 9 slides upward, it can simultaneously drive the valve stem 5 to move upward, so that the inlet and outlet channels of the vacuum angle valve are connected, realizing the vacuum angle valve opening function; when the staff discharges the gas in the air cavity 8a through the air source connector 8b, the slide plate 9 will fall under the drive of the valve stem 5's own gravity, so that the inlet and outlet channels of the vacuum angle valve are closed, realizing the vacuum angle valve closing function.

[0028] The device is implemented by fixedly connecting the valve plate, bellows and flange, with the valve stem fixedly mounted on the valve plate and located inside the bellows, so that when the valve plate works inside the valve body, it will not contact the inner wall of the valve body, and will not be worn. At the same time, when facing some mixed corrosive gases, the bellows can also well isolate the valve stem from the corrosive gas, so that the valve stem is well protected and the stability of the normal operation of the valve stem is improved.

[0029] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A vacuum angle valve with a welded bellows as a connecting piece, characterized in that: The valve body (1) comprises a valve body (1), a bellows (2), a valve plate (3), a flange (4), a valve stem (5) and a cover plate flange (6), wherein the cover plate flange (6) is detachably mounted on the top end of the valve body (1), the bottom end of the flange (4) and the top end of the valve plate (3) are fixedly connected via the bellows (2), the valve stem (5) is fixedly mounted on the top end of the valve plate (3) and passes through the bellows (2) and the flange (4), the top end of the flange (4) is fixedly connected to the bottom end of the cover plate flange (6), a shaft sleeve (7) is fixedly arranged in the middle of the cover plate flange (6), and a controller (8) is fixedly arranged on the top end of the valve body (1).

2. A vacuum angle valve with a welded bellows as a connecting piece according to claim 1, characterized in that: It also includes a slide plate (9), which is detachably mounted on the top end of the valve stem (5) via a connecting piece, and the slide plate (9) is located inside the controller (8).

3. A vacuum angle valve with a welded bellows as a connecting piece according to claim 2, characterized in that: A first connecting hole is formed at the top end of the valve stem (5), and a second connecting hole is formed on the slide plate (9).

4. A vacuum angle valve with a welded bellows as a connecting piece according to claim 3, characterized in that: An air cavity (8a) is provided inside the controller (8), and an air source connector 1 (8b) and an air source connector 2 (8c) are provided at the top and bottom ends of the controller (8), respectively.

5. A vacuum angle valve with a welded bellows as a connecting piece according to claim 4, characterized in that: The flange (4) is provided with a valve stem hole 1, and the shaft sleeve (7) is provided with a valve stem hole 2.

6. A vacuum angle valve with a welded bellows as a connecting piece according to claim 5, characterized in that: A dovetail groove (3a) is provided at the bottom end of the valve plate (3), and an O-type sealing ring (3b) is provided in each of the plurality of dovetail grooves.

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