Sample table capable of cleaning stainless steel sample through chemical reagent

Abstract

The utility model discloses a sample table capable of cleaning a stainless steel sample through a chemical reagent, and relates to the technical field of optical measurement equipment, the sample table comprises a body and a chemical pool, the chemical pool is detachably connected to the top surface of the body, a reaction cavity is formed in the end, close to the body, of the chemical pool, and the body and the chemical pool jointly surround the reaction cavity and seal the reaction cavity; the chemical tank is provided with a liquid inlet and a liquid outlet, and the liquid inlet and the liquid outlet are both communicated with the reaction cavity; the chemical tank is provided with an inclined light channel, one end of the light channel is communicated with the reaction cavity, the other end of the light channel obliquely extends to the outside of the chemical tank and is sealed with the chemical tank, and the light channel is used for emitting electromagnetic light waves into the reaction cavity and reflecting the electromagnetic light waves out of the chemical tank. The sample table has the effect of improving the condition that a detected sample cannot conveniently react with a chemical reagent on an existing sample table.

Description

Technical Field

[0001] The present application relates to the technical field of optical measuring equipment, and in particular to a sample table capable of cleaning stainless steel samples with chemical reagents. Background Art

[0002] Ellipsometer, also known as ellipsometer, is an instrument that uses the optical properties of materials to measure optical constants, microstructure analysis and film thickness. Since the measurement process of ellipsometer does not require direct contact with the sample, will not damage the material surface, and does not require a vacuum environment, it has become a simple, fast and easy-to-implement material measurement instrument.

[0003] Ellipsometry measures the change in polarization state when an electromagnetic light wave is incident obliquely on a surface or the interface between two media. Ellipsometry measures only the electric field component of the electromagnetic light wave to determine the polarization state, because when light interacts with a material, the effect of the electric field on electrons is much greater than that of the magnetic field.

[0004] When performing ellipsometry measurements, some samples, such as stainless steel samples, need to fully react with specific chemical reagents first, and then the chemical reagents must clean the surface of the stainless steel samples before measurement. If the chemical reagents and stainless steel samples react directly on the sample table, there may be insufficient reaction, resulting in insufficient cleaning of the stainless steel samples by the chemical reagents, or contamination, which may cause large errors in the final measurement results. Utility Model Content

[0005] In order to improve the situation that the sample under test is inconvenient to react with chemical reagents on the existing sample table, which affects the final measurement result, the present application provides a sample table that can use chemical reagents to clean stainless steel samples.

[0006] The present application provides a sample table capable of cleaning stainless steel samples with chemical reagents, using the following technical solution:

[0007] A sample table capable of cleaning stainless steel samples with chemical reagents, comprising a body and a chemical pool, wherein the chemical pool is detachably connected to the top surface of the body, a reaction chamber is provided near one end of the body, and the body and the chemical pool jointly surround and seal the reaction chamber;

[0008] The chemical pool is provided with a liquid inlet and a liquid outlet, and the liquid inlet and the liquid outlet are both connected to the reaction chamber;

[0009] The chemical pool is provided with an inclined light channel, one end of which is connected to the reaction chamber, and the other end of which extends obliquely to the outside of the chemical pool and is sealed with the chemical pool. The light channel is used for electromagnetic light waves to enter the reaction chamber and reflect out of the chemical pool.

[0010] By adopting the above technical scheme, when the sample needs to react with the chemical reagent first, a chemical cell is installed on the top surface of the body, so that the chemical cell and the body are combined to form a sealed reaction chamber, and the chemical reagent can be injected from the liquid inlet and enter the reaction chamber. The chemical reagent fills the reaction chamber and reacts with the stainless steel sample accordingly, so that the chemical reagent fully cleans the surface of the stainless steel sample. The excess chemical reagent can be discharged from the reaction chamber to the liquid outlet. A suitable light source can be selected according to different spectral ranges. The electromagnetic light waves emitted by the light source are emitted from the light channel to the surface of the sample after the reaction, and then reflected from the light channel to the outside of the chemical cell, and received and analyzed by the corresponding receiving device. The sealed reaction chamber formed by the combination of the chemical cell and the body is convenient for the sample and the chemical reagent to react directly on the sample table, saving operation steps and being conducive to the output of sample measurement results.

[0011] Optionally, the light channel includes an incident channel and an exit channel, the incident channel and the exit channel are symmetrical along a normal line perpendicular to the plane where the body is located, and one end of the incident channel and the exit channel are both connected to the reaction chamber.

[0012] By adopting the above technical solution, the incident channel and the exit channel provide suitable incident angles and exit angles for the electromagnetic light waves, so that the electromagnetic light waves can be incident into the reaction chamber along the incident channel and reflected along the exit channel, which facilitates the measurement work.

[0013] Optionally, both the incident channel and the exit channel are provided with light-transmitting windows at one end away from the reaction chamber, and the light-transmitting windows are sealed and connected to the chemical pool.

[0014] By adopting the above technical solution, the light-through window can be sealed with the chemical cell, so that the reaction chamber is sealed relative to the external environment, reducing the influence of the outside world on the sample when the chemical reaction is carried out in the reaction chamber. At the same time, the light-through window allows the passage of electromagnetic light waves, so that the electromagnetic light waves can freely pass through the light-through window into the reaction chamber.

[0015] Optionally, a first sealing member is disposed at one end of the chemical pool close to the body, and the first sealing member is disposed around the outside of the reaction chamber.

[0016] By adopting the above technical solution, the first sealing member surrounds the outside of the reaction chamber, which can further improve the sealing performance of the reaction chamber and reduce the leakage of chemical reagents from the gap between the chemical pool and the body.

[0017] Optionally, the opening heights of the liquid inlet and the liquid outlet are both higher than the height of the reaction chamber, a liquid inlet channel is opened inside the chemical pool, the liquid inlet channel is inclined, and the liquid inlet channel connects the reaction chamber and the liquid inlet.

[0018] By adopting the above technical scheme, an inclined liquid inlet channel is opened inside the chemical pool, and chemical reagents can more easily and completely flow into the reaction chamber through the inclined liquid inlet channel. At the same time, the opening heights of the liquid inlet and the liquid outlet are higher than the height of the reaction chamber. Under the premise of reasonable and beautiful structure, the heights of the liquid inlet and the liquid outlet are raised as much as possible, which can effectively reduce the overflow of chemical reagents from the liquid inlet or the liquid outlet, so that the chemical reagents can be fully used and the waste of chemical reagents can be reduced.

[0019] Optionally, the opening height of the liquid outlet is higher than the height of the liquid inlet.

[0020] By adopting the above technical solution, the opening height of the liquid outlet is higher than that of the liquid inlet, which can effectively reduce the situation where the chemical reagent is directly overflowed from the liquid outlet while being injected from the liquid inlet, and further reduce the waste of chemical reagents.

[0021] Optionally, an overflow cavity is provided at one end of the chemical pool away from the body, the overflow cavity connects the reaction cavity and the liquid outlet, and a pressure cover is provided at one end of the chemical pool away from the body, the pressure cover and the chemical pool together surround the overflow cavity and seal the overflow cavity.

[0022] By adopting the above technical solution, the pressure cover and the chemical pool jointly form a sealed overflow chamber. If the amount of chemical reagents injected into the reaction chamber is large, the excess chemical reagents will not flow out directly from the liquid outlet, but will enter the overflow chamber with a larger space for storage, thereby effectively reducing the overflow of chemical reagents from the liquid outlet and reducing the waste of chemical reagents.

[0023] Optionally, a second sealing member is provided at one end of the chemical pool close to the gland, and the second sealing member is arranged around the overflow cavity.

[0024] By adopting the above technical solution, the second sealing member is arranged around the overflow cavity, and the second sealing member can effectively improve the sealing performance of the overflow cavity and reduce the situation where chemical reagents flow out from the gap between the chemical tank and the pressure cover.

[0025] Optionally, a sample stage pressing plate is provided at the bottom of the main body, the main body is located at the center of the sample stage pressing plate, and a reflux groove is provided at one end of the sample stage pressing plate close to the chemical pool, and the reflux groove is provided around the main body.

[0026] By adopting the above technical solution, a reflux groove is opened in the outer circle of the sample table pressure plate. If excess chemical reagents overflow from the liquid outlet, the excess chemical reagents will be gathered in the reflux groove. The reflux groove provides guidance for the excess chemical reagents, which is convenient for the subsequent unified recovery of the overflowed chemical reagents.

[0027] Optionally, a connecting plate is provided at the bottom of the sample stage pressing plate.

[0028] By adopting the above technical solution, a connecting plate is provided at the bottom of the sample stage pressing plate, and the sample stage pressing plate can be fixed on an object such as a workbench through the connecting plate, and the connecting plate provides support for the fixation of the sample stage pressing plate.

[0029] In summary, the present application includes at least one of the following beneficial effects:

[0030] 1. By adopting a method of detachably connecting a chemical pool on the surface of the body, it is convenient for the sample and the chemical reagent to react chemically in the sealed reaction chamber, and it is convenient to measure the performance parameters of the sample in different states;

[0031] 2. By setting the height of the liquid inlet and the liquid outlet higher than the reaction chamber, the overflow of excess chemical reagents from the chemical pool can be effectively reduced;

[0032] 3. By opening an overflow chamber between the liquid outlet and the reaction chamber, excess chemical reagents can be stored in the overflow chamber, further reducing the overflow of excess chemical reagents from the chemical tank and reducing the waste of chemical reagents. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 This is a schematic diagram showing the overall structure of the sample stage in the embodiment of the present application;

[0034] Figure 2 is a partial cross-sectional schematic diagram showing the reaction chamber structure of an embodiment of the present application;

[0035] Figure 3 is a schematic structural diagram showing a first sealing member in an embodiment of the present application;

[0036] Figure 4 is a partial cross-sectional schematic diagram showing the overflow cavity structure in an embodiment of the present application;

[0037] Figure 5 is an exploded schematic diagram showing a second sealing member in an embodiment of the present application;

[0038] Figure 6 It is a schematic diagram showing the structure of the connecting plate according to an embodiment of the present application.

[0039] Explanation of the reference numerals: 1. Main body; 11. Limiting column; 2. Sample stage pressure plate; 21. Reflux groove; 22. Reflux hole; 3. Chemical cell; 31. Liquid inlet; 32. Liquid outlet; 33. Reaction chamber; 34. Liquid inlet channel; 35. Incident channel; 36. Exit channel; 37. Overflow chamber; 38. Overflow channel; 4. First sealing member; 5. Light-transmitting window; 6. Pressure cover; 7. Second sealing member; 8. Connecting plate. DETAILED DESCRIPTION

[0040] The following is combined with Figure 1-6This application is described in further detail.

[0041] The sample stage disclosed in the embodiment of the present application can be used to clean stainless steel samples with chemical reagents, referring to Figure 1 and Figure 2 The sample stage for cleaning stainless steel samples with chemical reagents includes a main body 1, a sample stage pressing plate 2 and a chemical pool 3. The main body 1 is placed horizontally, and the top of the main body 1 is detachably connected to the chemical pool 3. In the embodiment of the present application, the detachable connection can be a bolt connection, so that the chemical pool 3 is fixed to the top surface of the main body 1. The main body 1 is embedded in the top surface of the sample stage pressing plate 2, and is fixed to the sample stage pressing plate 2 by bolt connection with the sample stage pressing plate 2. The main body 1 is located at the center of the sample stage pressing plate 2, and the top surface of the main body 1 is flush with the top surface of the sample stage pressing plate 2. A reflux groove 21 is provided on the top surface of the sample stage pressing plate 2, and the reflux groove 21 is provided around the main body 1. A reflux hole 22 is provided through the side wall of the sample stage pressing plate 2 located in the reflux groove 21, and the reflux hole 22 connects the internal space of the reflux groove 21 with the external space.

[0042] The top surface of the chemical pool 3 is provided with a liquid inlet 31 and a liquid outlet 32, respectively. The chemical pool 3 is provided with a reaction chamber 33 at the center position near one end of the body 1. After the chemical pool 3 and the body 1 are combined into a whole by bolts, the chemical pool 3 and the body 1 surround the reaction chamber 33, so that the reaction chamber 33 becomes a sealed chamber, and the liquid inlet 31 and the liquid outlet 32 ​​are both connected to the reaction chamber 33. The sample to be measured can be a stainless steel sample. Before the stainless steel sample is measured, it is necessary to react the stainless steel sample with a specific chemical reagent so that the chemical reagent cleans the surface of the stainless steel sample. At this time, the sample can be placed on the body 1 first, and then the position of the reaction chamber 33 of the chemical pool 3 corresponds to the sample, and the chemical pool 3 is fixed on the body 1. At this time, the sample is placed in the reaction chamber 33, and then the volume containing the specific chemical reagent can be passed through the guide tube and other objects to pass the chemical reagent from the liquid inlet 31 into the reaction chamber 33. The chemical pool 3 is also provided with an inclined liquid inlet channel 34, which connects the liquid inlet port 31 with the reaction chamber 33, so that the chemical reagent can flow from the liquid inlet port 31 into the reaction chamber 33 and react with the sample. The inclined liquid inlet channel 34 facilitates the chemical reagent to flow more easily and completely into the reaction chamber 33, thereby reducing the chemical reagent remaining in the chemical pool 3.

[0043] The opening heights of the liquid inlet 31 and the liquid outlet 32 ​​are higher than the opening height of the reaction chamber 33, which can raise the heights of the liquid inlet 31 and the liquid outlet 32 ​​relative to the reaction chamber 33, thereby reducing the overflow of chemical reagents. Chemical reagents flow into the reaction chamber 33 from the liquid inlet 31 and gradually fill the reaction chamber 33. If more chemical reagents are injected, the excess chemical reagents can gradually rise until they flow out from the liquid outlet 32 ​​at the top. The excess chemical reagents can be gathered in the reflux groove 21. The reflux groove 21 provides guidance for the overflowing chemical reagents, so that the overflowing chemical reagents are gathered in the reflux groove 21 and finally discharged from the reflux hole 22, which is convenient for the measurement personnel to uniformly recover the overflowing chemical reagents and reduce the waste of chemical reagents. A limiting column 11 is also inserted on the top surface of the main body 1. The number of the limiting columns 11 is two. When the sample to be measured does not need to undergo a chemical reaction before measurement, the limiting column 11 can provide a positioning function for the sample, which is convenient for the measurement personnel to position the sample. In other embodiments of the present application, the number of limiting pillars 11 can be increased according to actual conditions to provide sufficient positioning support for the sample.

[0044] Reference Figure 2 and Figure 3 In the embodiment of the present application, the opening height of the liquid outlet 32 ​​is higher than the opening height of the liquid inlet 31. After the chemical reagent enters the reaction chamber 33, if the injection amount of the chemical reagent is large, the excess chemical reagent gradually raises the liquid level. At this time, the chemical reagent still remains in the chemical pool 3 and can continue to react chemically with the sample, which can effectively reduce the situation where the chemical reagent is still injected from the liquid inlet 31 and directly overflows from the liquid outlet 32, further reducing the waste of chemical reagents.

[0045] A first seal 4 is also embedded at the bottom of the chemical pool 3. The first seal 4 can be a rubber seal ring. The first seal 4 surrounds the reaction chamber 33 and is in contact with the chemical pool 3 and the body 1 at the same time, further improving the sealing of the reaction chamber 33 and reducing the leakage of chemical reagents from the reaction chamber 33.

[0046] Reference Figure 4 and Figure 5, the chemical pool 3 is provided with an inclined incident channel 35 and an exit channel 36 running through the inside, the incident channel 35 and the exit channel 36 connect the outside and the reaction chamber 33, the incident channel 35 and the exit channel 36 are symmetrically distributed relative to the normal line located at the center of the chemical pool 3 and perpendicular to the plane of the body 1, and a light source is placed on the side of the chemical pool 3 close to the incident channel 35, and the light source can be a deuterium halogen tungsten lamp composite light source. The angle of inclination of the incident channel 35 and the exit channel 36 can be adjusted according to the actual measurement position, as long as the electromagnetic light waves emitted by the light source are emitted from the incident channel 35 and then emitted from the exit channel 36. The electromagnetic light waves emitted by the light source can be injected along the incident channel 35 and reach the reaction chamber 33, and the electromagnetic light waves are emitted from the chemical pool 3 from the exit channel 36 after being reflected by the sample, and a receiving instrument is placed on the side of the chemical pool 3 close to the exit channel 36, and the receiving instrument can analyze the reflected electromagnetic light waves and present the final data results on the display.

[0047] The chemical pool 3 is provided with a light-through window 5 at one end of the corresponding incident channel 35 and the exit channel 36 away from the reaction chamber 33. The light-through window 5 can be made of quartz glass. The light-through window 5 is sealed with the chemical pool 3. The light-through window 5 is provided with rubber sealing rings on both sides close to and away from the reaction chamber 33. The rubber sealing rings can improve the sealing performance between the light-through window 5 and the chemical pool 3 and reduce the leakage of chemical reagents. At the same time, the light-through window 5 can also allow electromagnetic light waves emitted by the light source to pass through, so that the electromagnetic light waves can smoothly enter and exit the chemical pool 3.

[0048] Reference Figure 4 and Figure 5 The top surface of the chemical pool 3 is fixedly connected with a gland 6 by bolts, and the gland 6 and the chemical pool 3 are sealed. The liquid outlet 32 ​​penetrates the gland 6 and the chemical pool 3 and is finally connected with the reaction chamber 33. An overflow chamber 37 is opened on the top surface of the chemical pool 3. The gland 6 and the chemical pool 3 surround the overflow chamber 37, so that the overflow chamber 37 is in a sealed state. A second sealing member 7 is also embedded on the top surface of the chemical pool 3. The second sealing member 7 is arranged around the overflow chamber 37. The second sealing member 7 can also be a rubber sealing ring. The second sealing member 7 is simultaneously against the chemical pool 3 and the gland 6, so as to further improve the sealing performance of the overflow chamber 37.

[0049] The chemical pool 3 is also provided with two inclined overflow channels 38 between the reaction chamber 33 and the overflow chamber 37. The two overflow channels 38 are also symmetrically distributed relative to the center position of the chemical pool 3 and perpendicular to the normal line of the plane of the body 1. The overflow channels 38 connect the reaction chamber 33 and the overflow chamber 37. If too much chemical reagent is injected into the reaction chamber 33, the excess chemical reagent will gradually raise its own liquid level and gradually enter the overflow channel 38; if the amount of chemical reagent is more at this time, the excess chemical reagent will enter the overflow chamber 37 along the overflow channel 38 for storage. If the amount of chemical reagent injected at this time is even more, the excess chemical reagent will flow out from the liquid outlet 32. The arrangement of the overflow channel 38 and the overflow chamber 37 enables the chemical pool 3 to store more chemical reagents, thereby reducing the overflow of chemical reagents and reducing the waste of chemical reagents.

[0050] Reference Figure 6 The bottom of the sample stage pressing plate 2 is fixedly connected to a connecting plate 8 by bolts. The sample stage pressing plate 2 can be fixed to a fixed object such as a workbench through the connecting plate 8, so that the position of the sample stage pressing plate 2 is fixed. The connecting plate 8 can provide support for the fixation of the sample stage pressing plate 2.

[0051] The implementation principle of the sample table for cleaning stainless steel samples with chemical reagents in the embodiment of the present application is as follows: the sample to be tested is placed in the reaction chamber 33, and then the corresponding chemical reagent is injected through the liquid inlet 31. The chemical pool 3 can provide a place for chemical reaction between the chemical reagent and the sample to be tested. After the chemical reagent fills the reaction chamber 33 and fully reacts with the sample to be tested, the electromagnetic light wave is injected from the incident channel 35, and is emitted from the output channel 36 after being reflected by the sample to be tested, and is finally injected into the receiving instrument for analysis. The excess chemical reagent can be discharged from the liquid outlet 32 ​​and finally enters the reflux tank 21 for recovery.

[0052] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A sample table for cleaning stainless steel samples with chemical reagents, characterized in that: It comprises a body (1) and a chemical pool (3), wherein the chemical pool (3) is detachably connected to the top surface of the body (1), a reaction chamber (33) is provided at one end of the chemical pool (3) close to the body (1), and the body (1) and the chemical pool (3) jointly surround the reaction chamber (33) and seal the reaction chamber (33); The chemical pool (3) is provided with a liquid inlet (31) and a liquid outlet (32), and the liquid inlet (31) and the liquid outlet (32) are both connected to the reaction chamber (33); The chemical pool (3) is provided with an inclined light channel, one end of which is connected to the reaction chamber (33), and the other end of which extends obliquely toward the outside of the chemical pool (3) and is sealed from the chemical pool (3). The light channel is used for electromagnetic light waves to be emitted into the reaction chamber (33) and reflected out of the chemical pool (3).

2. A sample table for cleaning stainless steel samples with chemical reagents according to claim 1, characterized in that: The light channel comprises an incident channel (35) and an exit channel (36); the incident channel (35) and the exit channel (36) are symmetrical along a normal line perpendicular to the plane where the body (1) is located; one end of each of the incident channel (35) and the exit channel (36) is connected to the reaction chamber (33).

3. The sample stage for cleaning stainless steel samples with chemical reagents according to claim 2, characterized in that: The incident channel (35) and the exit channel (36) are both provided with a light-transmitting window (5) at one end away from the reaction chamber (33), and the light-transmitting window (5) is sealedly connected to the chemical pool (3).

4. The sample stage for cleaning stainless steel samples with chemical reagents according to claim 1, characterized in that: The chemical pool (3) is provided with a first sealing member (4) at one end close to the body (1), and the first sealing member (4) is arranged around the outside of the reaction chamber (33).

5. The sample stage for cleaning stainless steel samples with chemical reagents according to claim 1, characterized in that: The opening heights of the liquid inlet (31) and the liquid outlet (32) are both higher than the height of the reaction chamber (33); a liquid inlet channel (34) is provided inside the chemical pool (3); the liquid inlet channel (34) is arranged at an angle; the liquid inlet channel (34) connects the reaction chamber (33) and the liquid inlet (31).

6. The sample stage for cleaning stainless steel samples with chemical reagents according to claim 5, characterized in that: The opening height of the liquid outlet (32) is higher than the height of the liquid inlet (31).

7. The sample stage for cleaning stainless steel samples with chemical reagents according to claim 6, characterized in that: An overflow chamber (37) is provided at one end of the chemical pool (3) away from the body (1), the overflow chamber (37) being connected to the reaction chamber (33) and the liquid outlet (32), and a pressure cover (6) is provided at one end of the chemical pool (3) away from the body (1), the pressure cover (6) and the chemical pool (3) jointly surrounding the overflow chamber (37) and sealing the overflow chamber (37).

8. The sample stage for cleaning stainless steel samples with chemical reagents according to claim 7, characterized in that: A second sealing member (7) is provided at one end of the chemical pool (3) close to the gland (6), and the second sealing member (7) is arranged around the outside of the overflow cavity (37).

9. The sample stage for cleaning stainless steel samples with chemical reagents according to claim 1, characterized in that: A sample stage pressing plate (2) is arranged at the bottom of the body (1), the body (1) is located at the center of the sample stage pressing plate (2), and a reflux groove (21) is provided at one end of the sample stage pressing plate (2) close to the chemical pool (3), and the reflux groove (21) is provided around the body (1).

10. The sample stage for cleaning stainless steel samples with chemical reagents according to claim 9, characterized in that: A connecting plate (8) is provided at the bottom of the sample stage pressing plate (2).

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