Faraday cup and ion implanter

Abstract

The utility model relates to the technical field of Faraday cups, in particular to a Faraday cup and an ion implanter, the Faraday cup comprises a placement part, a graphite part and a clamping part, the placement part is used for placing the graphite part, a clamping gap for clamping the graphite part is formed between at least part of the clamping part and the placement part, and the clamping part and the placement part are movably connected. Therefore, the size of the clamping gap is increased or reduced. According to the Faraday cup and the ion implanter provided by the invention, the graphite part is effectively fixed through clamping of the clamping part and the placement part instead of a screw, so that the phenomena that the graphite part is damaged due to screw slipping between the screw and the graphite part and the graphite part is rubbed by the screw and scraps fall off are avoided.

Description

Technical Field

[0001] The present application relates to the technical field of Faraday cups, and in particular to a Faraday cup and an ion implanter. Background Art

[0002] A Faraday cup is a metal cup-shaped vacuum detector used to measure the incident intensity of charged particles. It determines the number of incident electrons or ions by measuring the current. The front Faraday cup of the existing Varian implanter is constantly consumed by the ion beam bombardment, which requires the replacement of graphite after a period of use of the Varian implanter.

[0003] The existing graphite is installed on the front Faraday cup of the Varian injection machine and is connected to the beam channel clamping device. This requires the entire device to be dismantled when replacing the graphite, and the Faraday cup needs to be replaced as a whole. On the one hand, disassembling and assembling the device consumes a lot of manpower, which is time-consuming and laborious; on the other hand, the overall replacement of the Faraday cup is costly.

[0004] Nowadays, there are Faraday cups that use screws to detachably connect graphite and a metal frame, such as the CN202363408U Faraday cup described in Chinese patent literature. However, in the process of screwing the graphite, not only is it easy for the screw to slip and damage the graphite, but also the graphite is very likely to produce debris under the action of the screwing friction, which is difficult to clean and easily affects the accuracy of the Faraday cup. Utility Model Content

[0005] The purpose of the present application is to provide a Faraday cup and an ion implanter, so as to solve the technical problems existing in the prior art to a certain extent, that in the process of screwing graphite to install the graphite, not only the screw is prone to slippage and thus damages the graphite, but also the graphite is very likely to produce debris remaining in the Faraday cup due to the friction of the screw, which is difficult to clean and easily affects the accuracy of the Faraday cup.

[0006] According to a first aspect of the present application, a Faraday cup is provided, comprising a seating portion, a graphite portion and a clamping portion, wherein the seating portion is used to seat the graphite portion, a clamping gap for clamping the graphite portion is formed between at least a portion of the clamping portion and the seating portion, and the clamping portion and the seating portion are movably connected to increase or decrease the size of the clamping gap.

[0007] Preferably, the clamping portion is detachably connected to the seating portion.

[0008] Preferably, the placement portion is provided with a placement platform for supporting the graphite portion, and the clamping portion is connected to the placement platform.

[0009] Preferably, the clamping portion comprises:

[0010] A support column extending along a first direction, one end of the support column being connected to the placement portion;

[0011] A clamping claw is fixedly arranged at the other end of the pillar, and a clamping gap is formed between the placement platform and the clamping claw.

[0012] Preferably, the side surface of the clamp facing the placement platform is parallel to the placement platform, and the first direction is perpendicular to the placement platform.

[0013] Preferably, the clamping portion further includes an externally threaded connecting column, the clamping portion is provided with a connecting hole penetrating the clamping portion, and the externally threaded connecting column penetrates the connecting hole and is threadedly connected to the seating portion.

[0014] Preferably, the support column and the clamping jaw are integrally formed.

[0015] Preferably, there are a plurality of the clamping parts, and the plurality of the clamping parts are arranged at intervals along the circumference of the graphite part.

[0016] Preferably, it further comprises a metal sleeve, and the placement portion is embedded in the metal sleeve.

[0017] According to the second aspect of the present application, an ion implanter is provided, comprising a Faraday cup as described in any of the above technical solutions, and thus having all the beneficial technical effects of the Faraday cup, which will not be described in detail herein.

[0018] Compared with the prior art, the beneficial effects of this application are:

[0019] The Faraday cup provided by the present application forms a clamping gap for clamping the graphite part by setting at least part of the clamping part and the placement part, and makes the clamping part and the placement part movably connected to increase or decrease the size of the clamping gap. In this way, when the Faraday cup needs to install and fix the graphite part, the clamping gap can be reduced so that the graphite part is clamped in the clamping gap to achieve the fixation of the graphite part; when the graphite part needs to be replaced, the clamping gap can be increased to release the graphite part to be replaced, so as to facilitate the replacement of the graphite part. Compared with the existing Faraday cup fixing method of directly screwing through the graphite part by screws, the Faraday cup provided by the present application effectively replaces the screw to fix the graphite part by clamping and clamping the clamping part and the placement part, thereby avoiding the phenomenon of slipping between the screw and the graphite part to damage the graphite part and the graphite part being rubbed off by the screw.

[0020] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0022] Figure 1 A schematic diagram of the axonometric structure of a partial structure of a Faraday cup provided in an embodiment of the present application;

[0023] Figure 2 A schematic diagram of a side view of a partial structure of a Faraday cup provided in an embodiment of the present application;

[0024] Figure 3 A schematic diagram of a partial structure of a Faraday cup provided in an embodiment of the present application;

[0025] Figure 4 A schematic diagram of the explosion structure of a Faraday cup provided in an embodiment of the present application;

[0026] Figure 5 A schematic diagram of the partial structure of the ion implanter provided in an embodiment of the present application.

[0027] Reference numerals:

[0028] 1-Faraday cup; 11-graphite part; 12-settling part; 121-settling platform; 131-pillar; 132-clamping claw; 133-external threaded connecting column; 14-metal sleeve; 15-support; 2-gripping device; 3-sealing plate; 4-handle; 5-electronic control module.

[0029] F1-first direction; F2-second direction; F3-third direction. DETAILED DESCRIPTION

[0030] The technical solution of the present application will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0031] The components of the embodiments of the present application generally described and shown in the drawings herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed, but merely represents the selected embodiments of the present application.

[0032] Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making any creative work shall fall within the scope of protection of this application.

[0033] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0034] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0035] Refer to the following Figures 1 to 4 The Faraday cup 1 and the ion implanter according to some embodiments of the present application are described.

[0036] See also Figures 1 to 5 As shown, an embodiment of the first aspect of the present application provides a Faraday cup 1, which includes a graphite cup. The graphite cup includes a placement portion 12, a graphite portion 11 and a clamping portion. The placement portion 12 is used to place the graphite portion 11, and a clamping gap for clamping the graphite portion 11 is formed between at least a portion of the clamping portion and the placement portion 12. The clamping portion and the placement portion 12 are movably connected to increase or decrease the size of the clamping gap.

[0037] According to the Faraday cup 1 provided by the above technical features, a clamping gap for clamping the graphite part 11 is formed by setting at least part of the clamping part and the placement part 12, and the clamping part and the placement part 12 are movably connected to increase or decrease the size of the clamping gap. In this way, when the Faraday cup 1 needs to install and fix the graphite part 11, the clamping gap can be reduced so that the graphite part 11 is clamped in the clamping gap to achieve the fixation of the graphite part 11; when the graphite part 11 needs to be replaced, the clamping gap can be increased to release the graphite part 11 to be replaced, so as to facilitate the replacement of the graphite part 11. Compared with the existing Faraday cup 1 fixing method of directly screwing through the graphite part 11 by screws, the Faraday cup 1 provided by the present application effectively replaces the screw to fix the graphite part 11 by clamping and clamping the clamping part and the placement part 12, thereby avoiding the phenomenon of slipping between the screw and the graphite part 11 to damage the graphite part 11 and the graphite part 11 being rubbed off by the screw.

[0038] Preferably, if Figure 4 As shown, the Faraday cup 1 may further include a metal sleeve 14 and a support 15. The support 15 and the metal sleeve 14 may be buckled with each other along the first direction F1 described below to form a receiving space, and the graphite cup may be assembled in the receiving space.

[0039] Optionally, the metal sleeve 14 and the support 15 may be fixed via screw connection, and a plurality of sealing rings may be provided between the metal sleeve 14 and the support 15 to seal the metal sleeve 14 and the support 15 .

[0040] Preferably, the placement portion 12 may be embedded in the metal sleeve 14 . In other words, the placement portion 12 is fixed in the metal sleeve 14 to ensure a fixed connection between the graphite cup and the metal sleeve 14 .

[0041] It should be noted that the connection relationship between the metal sleeve 14 and the support 15 and the ion implanter and the graphite cups of the metal sleeve 14 and the support 15 are all prior arts in the art and will not be described in detail here.

[0042] Preferably, the clamping part and the placement part 12 are detachably connected. In this way, when the graphite part 11 needs to be replaced, the operator can remove the graphite part 11 by removing the clamping part from the placement part 12. Because the middle part of the graphite part 11 to be replaced is usually consumed, thinned or even hollowed out, the graphite part 11 is very likely to break due to slight scratches and vibrations during the removal of the graphite part 11. The detachable connection between the clamping part and the placement part 12 of the Faraday cup 1 provided in the present application can effectively reduce the probability of scratches between the graphite part 11 and the clamping part during the process of taking and placing the graphite part 11, thereby effectively reducing the probability of the graphite part 11 breaking during the installation and removal process.

[0043] Preferably, if Figure 1 As shown, the above-mentioned clamping part can also include an external threaded connecting column 133. The clamping part can be provided with a connecting hole passing through the clamping part. The external threaded connecting column 133 passes through the connecting hole and is threadedly connected to the placement part 12, so as to realize the movable connection between the clamping part and the placement part 12.

[0044] Optionally, the external threaded connection column 133 may be a screw, a bolt, or the like.

[0045] However, it is not limited to this, and the connection form between the above-mentioned clamping part and the seating part 12 is not limited to the connection form through the above-mentioned external threaded connecting column 133. As long as the fixing and disassembly of the graphite part 11 can be achieved, the above-mentioned clamping part and the seating part 12 can also be connected in other ways. For example, as not shown in the figure, the clamping part can be hinged to the seating part 12 via a rotating shaft. In this way, the clamping part can be rotated to be opposite to the seating part 12 and rotated out of the seating part 12, so that the graphite part 11 can be fixed and disassembled.

[0046] Preferably, if Figure 1 As shown, the placement portion 12 is disposed on a placement platform 121 for supporting the graphite portion 11 , and the clamping portion is connected to the placement platform 121 , so as to support the placement portion 12 and thereby ensure the placement stability of the graphite portion 11 .

[0047] In an embodiment, Figures 1 to 3 As shown, the clamping part may include a pillar 131 and a clamping claw 132. The pillar 131 may extend along the first direction F1, and one end of the pillar 131 is connected to the placement part 12. The clamping claw 132 is fixedly arranged at the other end of the pillar 131, and a clamping gap is formed between the placement platform 121 and the clamping claw 132.

[0048] See also Figures 1 to 3 , F1 shown in the figure may be an example of the first direction F1 mentioned above. For the convenience of description, two directions perpendicular to each other on a plane perpendicular to the first direction F1 are defined as the second direction F2 and the second direction F2. F2 shown in the figure may be an example of the second direction F2 mentioned above. F3 shown in the figure may be an example of the third direction F3 mentioned above.

[0049] Preferably, if Figure 1 As shown, the connection hole can be provided on the support column 131 .

[0050] Preferably, if Figure 1 and Figure 2 As shown, the side of the clamp 132 facing the placement platform 121 is parallel to the placement platform 121, and the placement platform 121 can be parallel to the plane determined by the second direction F2 and the third direction F3, so as to ensure the clamping stability of the graphite part 11 by both the placement platform 121 and the clamp 132.

[0051] Preferably, if Figure 1 and Figure 2 As shown, the support column 131 and the clamping jaw 132 may be integrally formed to further improve the clamping stability of the clamping jaw 132 .

[0052] Preferably, the size of the clamping jaw 132 in the first direction F1 is greater than or equal to one third of the size of the graphite part 11 in the first direction F1 , so as to further ensure the clamping strength of the clamping jaw 132 .

[0053] Preferably, if Figure 1 and Figure 2 As shown, in the first direction F1 , the upper end of the clamping claw 132 is aligned with the upper end of the support column 131 to save space occupied by the clamping portion.

[0054] In an embodiment, Figure 3As shown, the number of the above-mentioned clamping parts can be multiple, and the multiple clamping parts are arranged at intervals along the circumference of the graphite part 11 to ensure the clamping stability of the graphite part 11.

[0055] like Figure 3 An example is shown in which the graphite cup includes two clamping parts. The two clamping parts can be arranged opposite to each other at two sides of the graphite part 11 along the second direction F2.

[0056] Preferably, the second direction F2 can be perpendicular to the extension direction of the slit of the slit device 2 of the ion implanter described below, so that the influence of the current on the external threaded connection column 133 during ion sputtering can be effectively avoided. In other words, the extension direction of the slit of the slit device 2 can be parallel to the third direction F3.

[0057] Preferably, if Figure 1 and Figure 3 As shown, the graphite portion 11 may be in the shape of a disc.

[0058] The embodiment of the second aspect of the present application further provides an ion implanter, comprising the Faraday cup 1 described in any of the above embodiments, and thus having all the beneficial technical effects of the Faraday cup 1, which will not be described in detail herein.

[0059] Preferably, although not shown in the figures, the ion implanter may include a vacuum chamber and a sealing plate 3 for sealing the vacuum chamber.

[0060] Preferably, if Figure 5 As shown, the ion implanter may further include a slit device 2. The Faraday cup 1 and the slit device 2 may be fixed to a side of the sealing plate 3 facing the inside of the vacuum chamber, and the Faraday cup 1 and the slit device 2 are arranged opposite to each other.

[0061] Preferably, if Figure 5 As shown, the above-mentioned ion implanter may further include an electric control module 5 disposed on the other side of the sealing plate 3 to facilitate the electric control connection of the ion implanter.

[0062] Preferably, if Figure 5 As shown, the above-mentioned ion implanter may further include a handle 4 disposed on the other side of the sealing plate 3 to facilitate opening and closing the vacuum chamber of the ion implanter.

[0063] It should be noted that the above-mentioned vacuum chamber, sealing plate 3, gap device 2 and electric control module 5 are all existing equipment in the art and will not be described in detail here.

[0064] Optionally, the ion implanter may be a Varian implanter.

[0065] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A Faraday cup, characterized in that: It comprises a placement part, a graphite part and a clamping part, wherein the placement part is used to place the graphite part, a clamping gap for clamping the graphite part is formed between at least a part of the clamping part and the placement part, and the clamping part and the placement part are movably connected to increase or reduce the size of the clamping gap.

2. The Faraday cup according to claim 1, characterized in that: The clamping portion is detachably connected to the placement portion.

3. The Faraday cup according to claim 1, characterized in that: The placement part is provided with a placement platform for supporting the graphite part, and the clamping part is connected to the placement platform.

4. The Faraday cup according to claim 3, characterized in that: The clamping portion comprises: A support column extending along a first direction, one end of the support column being connected to the placement portion; A clamping claw is fixedly arranged at the other end of the pillar, and a clamping gap is formed between the placement platform and the clamping claw.

5. The Faraday cup according to claim 4, characterized in that: The side surface of the clamp facing the placement platform is parallel to the placement platform, and the first direction is perpendicular to the placement platform.

6. The Faraday cup according to claim 2, characterized in that: The clamping portion further includes an external thread connection column. The clamping portion is provided with a connection hole penetrating the clamping portion. The external thread connection column penetrates the connection hole and is threadedly connected to the placement portion.

7. The Faraday cup according to claim 4, characterized in that: The support column and the clamping jaw are both integrally formed.

8. The Faraday cup according to any one of claims 1 to 7, characterized in that: There are multiple clamping parts, and the multiple clamping parts are arranged at intervals along the circumference of the graphite part.

9. The Faraday cup according to claim 1, characterized in that: It also includes a metal sleeve, and the placement part is embedded in the metal sleeve.

10. An ion implanter, characterized in that: A Faraday cup comprising the method according to any one of claims 1 to 9.

Images