Air-cooled water chiller for temperature control of semiconductor production equipment

Abstract

An air-cooled water chiller for temperature control of semiconductor production equipment comprises a water chiller body, a temperature sensor, a cooling water tank and a water pump, the water chiller body is formed by assembling a shell, a compressor, a finned heat exchanger, a heat dissipation device, a drying filter, an expansion valve and a water tank type evaporator, and the cooling water tank is arranged on one side of the shell; a temperature controller is arranged on the cooling water tank, a temperature sensor is arranged in the cooling water tank, an air outlet of the compressor is communicated with an air inlet of the finned heat exchanger through a pipeline, a heat dissipation device is arranged at the bottom end of the finned heat exchanger, and a water outlet of the finned heat exchanger is communicated with a water inlet of the drying filter through a pipeline. A water outlet of the drying filter is communicated with a water inlet of the water tank type evaporator, and an expansion valve is arranged on a pipeline between the drying filter and the water tank type evaporator. The temperature sensor is arranged in the water tank, the temperature of cooling water can be detected in real time, and the running power of the heat dissipation device is adjusted according to the temperature.

Description

Technical Field

[0001] The utility model relates to the field of water chillers, in particular to an air-cooled water chiller for temperature control of semiconductor production equipment. Background Art

[0002] Modern ultra-precision manufacturing, processing, and measuring instruments have strict requirements on the working environment, especially for ultra-large-scale integrated circuit manufacturing equipment represented by lithography machines. The high integration makes conventional heat dissipation methods far from meeting the requirements. At the same time, the lithography quality of the projection lens, the positioning accuracy of the moving parts, and the measurement accuracy of the measuring device are all particularly sensitive to changes in environmental parameters, especially temperature. Therefore, the control of environmental parameters, especially temperature, has become a key technology. The high-precision circulating chiller temperature control system is an important component to ensure the good working condition of ultra-precision instruments and equipment such as step-scan lithography machines, micro-nano coordinate measuring machines, and scanning probe microscopes.

[0003] At present, a Chinese patent with the authorization announcement number CN219367839U discloses an air-cooled chiller, which includes: a refrigerant circulation system, which includes a compressor, a condenser, a throttle valve and an evaporator connected in sequence, so that the refrigerant circulates therein; a water cooling system, in which part of the pipeline of the water cooling system is arranged close to the evaporator, so that the part of the pipeline and the evaporator exchange heat; a water cooling pipeline, one end of which is connected to the pipeline of the water cooling system, and the other end is arranged at the condenser, so that the water in the water cooling system is sprayed to the condenser. This application connects the water cooling pipeline with the pipeline of the water cooling system, which can avoid the problem of water cooling pipeline blockage on the one hand, and on the other hand, will not cause the heat exchange fins of the condenser to be covered, affecting the heat exchange rate of the condenser, which can greatly improve the heat dissipation rate of the condenser, and thus improve the working efficiency of the chiller.

[0004] The above-mentioned prior art solution has the following defects: although the heat dissipation is accelerated by spraying condensed water on the finned heat exchanger, its temperature control accuracy is low and cannot meet the requirements of manufacturing, processing and measurement of ultra-precision instruments. Utility Model Content

[0005] The purpose of the utility model is to provide an air-cooled ice water machine for temperature control of semiconductor production equipment to solve the problems existing in the above-mentioned prior art.

[0006] The above technical objectives of the utility model are achieved through the following technical solutions:

[0007] An air-cooled water chiller for temperature control of semiconductor production equipment comprises a water chiller body, a temperature sensor, a cooling water tank and a water pump, wherein the water chiller body is assembled from a housing, a compressor, a fin-type heat exchanger, a heat dissipation device, a drying filter, an expansion valve and a water tank-type evaporator;

[0008] A cooling water tank is provided on one side of the housing, and a temperature controller is provided on the cooling water tank. The temperature controller includes a controller body and a temperature sensor. The temperature sensor is provided inside the cooling water tank, and the temperature sensor is electrically connected to the controller body through an electric wire.

[0009] The compressor is arranged at the inner bottom end of the shell, the air outlet of the compressor is communicated with the air inlet of the finned heat exchanger through a pipeline, the finned heat exchanger is arranged at the inner top end of the shell, a heat dissipation device is arranged at the bottom end of the finned heat exchanger, the water outlet of the finned heat exchanger is communicated with the water inlet of the drying filter through a pipeline, the water outlet of the drying filter is communicated with the water inlet of the water box evaporator, an expansion valve is arranged on the pipeline between the drying filter and the water box evaporator, and the air outlet of the water box evaporator is communicated with the air inlet of the compressor through a pipeline;

[0010] The cooling water inlet of the water tank type evaporator is connected to the water outlet of the water pump through a pipeline, and the water inlet of the water pump is connected to the water outlet of the cooling water tank through a pipeline.

[0011] By adopting the above technical solution, only multiple fans need to be set up to complete the heat dissipation, and no additional circulation pipelines and water towers are required, which can effectively reduce the initial cost and save floor space. By setting a temperature sensor in the cooling water tank, the temperature of the cooling water returning to the equipment can be detected to ensure that its temperature remains within a constant range. If the distance between the chiller body and the device to be cooled is too far, an insulation layer with a built-in heating resistor can be laid on the return cooling water pipe, and a temperature sensor can be added to the water inlet of the device. This can further ensure that the temperature control accuracy of the water-using device is met. The temperature sensor uses PT100 with a detection accuracy of up to ±0.5 degrees Celsius. It has a long service life and can adapt to the temperature and meet the needs of the air cooler.

[0012] In a further embodiment, the finned heat exchanger is composed of a plurality of base tubes and heat dissipation fins, and a plurality of heat dissipation fins are welded and fixed on the base tubes.

[0013] By adopting the above technical solution, the main function of these heat dissipation fins is to allow the wind blown out by the fan to blow through the base tube in a vortex shape, thereby accelerating the heat dissipation efficiency. The heat dissipation fins use the skin effect and proximity effect of high-frequency current to heat the outer surface of the steel strip and the steel pipe until it is plastic or melted, and the welding is completed under a certain pressure of the wrapped steel strip. The welding rate of this welding method is as high as over 95%, and it is anti-corrosion, wear-resistant, and anti-dust, and has outstanding heat dissipation performance and service life.

[0014] In a further embodiment, a dust filter is provided outside the fin heat exchanger.

[0015] By adopting the above technical solution, although high-frequency welded fins are used, if too much dust accumulates on the fins, it will still affect the heat dissipation efficiency and cause unnecessary trouble. Therefore, a layer of dust filter is installed outside the heat exchanger to prevent dust from accumulating on the fin tubes.

[0016] In a further embodiment, a plurality of ventilation slots are arranged on both sides of the shell, a partition plate is arranged in parallel at a middle position of the inner side of the shell, and a plurality of heat dissipation devices are arranged on the partition plate.

[0017] By adopting the above technical solution, the heat dissipation device is vertically arranged on the partition plate and parallel to the heat exchanger, so that the wind can be ensured to blow from bottom to top, forming vortices through the heat dissipation fins, and the heat exchange efficiency is higher.

[0018] In a further embodiment, the plurality of heat dissipation devices are each composed of a motor and a fan.

[0019] By adopting the above technical solution, the fan occupies a small area and does not require an external cooling tower and additional pipelines. Although the efficiency is slightly lower than that of a water-cooled chiller, it can be compensated by setting up multiple ones.

[0020] In a further embodiment, the cooling water tank comprises a shell and a float switch, and the float switch is detachably mounted on the inner top end of the cooling water tank.

[0021] By adopting the above technical solution, the float switch as a liquid level controller has a simple structure, is easy to use, does not require power supply and has no complicated circuits, is smaller in size than a general mechanical switch, and has a longer service life.

[0022] In summary, the utility model has the following beneficial effects:

[0023] 1. By setting the temperature sensor in the water tank, the real-time data sensed can be input into the temperature sensor, thereby adjusting the fan operation efficiency, controlling the cooling water temperature, and improving the temperature control accuracy;

[0024] 2. The arrangement of the base tube and the heat dissipation fins can increase the contact area between the circulating fluid and the air, thereby improving the heat dissipation efficiency;

[0025] 3. The ventilation slots on both sides of the shell can increase the air exchange rate inside the chiller, thereby increasing the heat exchange rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0027] Figure 2 It is a schematic diagram of the structure of the interior of the ice water machine body in the utility model;

[0028] Figure 3 It is a schematic diagram of the structure inside the finned heat exchanger in the utility model.

[0029] In the figure, 1. chiller body; 11. shell; 111. partition plate; 12. compressor; 13. finned heat exchanger; 131. base pipe; 132. cooling fin; 133. dust filter; 14. heat dissipation device; 141. motor; 142. fan; 15. drying filter; 16. water tank evaporator; 17. expansion valve; 2. temperature controller; 21. controller body; 22. temperature sensor; 3. cooling water tank; 31. shell; 32. float switch; 4. water pump. DETAILED DESCRIPTION

[0030] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0031] The same parts are denoted by the same reference numerals. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to the attached Figure 1 In the description of this specification, the words "bottom" and "top", "inside" and "outside" refer to directions toward or away from a particular component geometry, respectively. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this specification, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0032] Example:

[0033] like Figure 1-3As shown, an air-cooled chiller for temperature control of semiconductor production equipment includes a chiller body 1, a temperature sensor 22, a cooling water tank 3 and a water pump 4. The chiller body 1 is assembled from a shell 11, a compressor 12, a finned heat exchanger 13, a heat sink 14, a drying filter 15, an expansion valve 17 and a water tank evaporator 16. A cooling water tank 3 is arranged on one side of the shell 11. A temperature controller 2 is arranged on the cooling water tank 3. The temperature controller 2 includes a controller body 21 and a temperature sensor 22. The temperature sensor 22 is arranged inside the cooling water tank 3. The temperature sensor 22 is electrically connected to the controller body 21 through an electric wire. The cooling water tank 3 includes a shell 31 and a float switch 32. The float switch 32 is detachably mounted on the inner top of the cooling water tank 3. The efficiency of the heat sink 14 is controlled by the temperature controller 2. The cooling water temperature can be adjusted by adjusting the speed of the motor 141. The temperature sensor 22 arranged in the cooling water tank 3 transmits real-time temperature data to the temperature sensor 22, which greatly improves the temperature control accuracy.

[0034] like Figure 1-3 As shown, the compressor 12 is arranged at the inner bottom end of the shell 11, the air outlet of the compressor 12 is connected with the air inlet of the finned heat exchanger 13 through a pipeline, the finned heat exchanger 13 is arranged at the inner top end of the shell 11, the bottom end of the finned heat exchanger 13 is provided with a heat sink 14, a plurality of ventilation slots are arranged on both sides of the shell 11, the finned heat exchanger 13 is composed of a plurality of base tubes 131 and heat dissipation fins 132, a plurality of heat dissipation fins 132 are welded and fixed on the base tube 131, a dust filter 133 is arranged outside the finned heat exchanger 13, a partition plate 111 is arranged in parallel at the middle position of the inner side of the shell 11, a plurality of heat dissipation devices 14 are arranged on the partition plate 111, and the plurality of heat dissipation devices 14 are composed of a motor 141 and a fan 142, the water outlet of the finned heat exchanger 13 is connected with the water inlet of the drying filter 15 through a pipeline, The water outlet of the drying filter 15 is connected with the water inlet of the water box evaporator 16, and an expansion valve 17 is arranged on the pipeline between the drying filter 15 and the water box evaporator 16. The air outlet of the water box evaporator 16 is connected with the air inlet of the compressor 12 through a pipeline, and the cooling water inlet of the water box evaporator 16 is connected with the water outlet of the water pump 4 through a pipeline, and the water inlet of the water pump 4 is connected with the water outlet of the cooling water tank 3 through a pipeline. The condenser of the air-cooled chiller is the finned heat exchanger 13. The heat dissipation fins 132 arranged on the base tube 131 make the air blown up by the fan move in a vortex shape, which can make the heat exchange efficiency higher, and the dustproof filter 133 can protect the finned tube from accumulating too much dust and affecting the heat dissipation efficiency. The ventilation grooves on both sides of the shell 11 can speed up the air flow speed in the chiller body 1 and improve the heat dissipation efficiency.

[0035] Specific implementation process:

[0036] After the device that needs cooling water is connected to the air-cooled chiller, the water pump 4 starts to work, pumping the cooling water with waste heat into the water tank evaporator 16 of the chiller body 1. The high-pressure circulating fluid stored in the liquid storage tank drops in pressure after passing through the expansion valve, and begins to evaporate when entering the evaporator. The waste heat carried by the cooling water is exchanged during the evaporation process, and then the cooling water is continuously transported to the water tank by the water pump 4. When the water level in the water tank reaches a certain height, the float switch 32 moves, and the cooling water returns to the external device, while the circulating fluid in the evaporator is vaporized. The gas is then transported into the compressor 12 along the pipeline. The compressor 12 then inputs the high-temperature and high-pressure gas into the finned heat exchanger 13. The temperature is transferred from the base tube 131 to the fins through the finned heat exchanger 13. The motor 141 arranged on the partition plate also drives the fan 142 on the rotating shaft to rotate. The dry and cold air blown out passes through the finned tube in a vortex shape, taking away the heat in the gas and turning it into a high-pressure liquid. Next, the high-pressure liquid enters the evaporator through the expansion valve 17. The expansion valve 17 causes the liquid pressure to drop sharply, so that the liquid begins to evaporate, and this cycle repeats.

[0037] In the embodiments disclosed in the present invention, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense. For example, "connect" can be a fixed connection, a detachable connection, or an integral connection; "connect" can be a direct connection or an indirect connection through an intermediate medium. For those skilled in the art, the specific meanings of the above terms in the embodiments disclosed in the present invention can be understood according to specific circumstances.

[0038] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. An air-cooled water chiller for temperature control of semiconductor production equipment, comprising a water chiller body (1), a temperature sensor (22), a cooling water tank (3) and a water pump (4), characterized in that: The ice machine body (1) is assembled from a shell (11), a compressor (12), a finned heat exchanger (13), a heat dissipation device (14), a drying filter (15), an expansion valve (17) and a water tank evaporator (16); A cooling water tank (3) is provided on one side of the housing (11); a temperature controller (2) is provided on the cooling water tank (3); the temperature controller (2) comprises a controller body (21) and a temperature sensor (22); a temperature sensor (22) is provided inside the cooling water tank (3); the temperature sensor (22) is electrically connected to the controller body (21) via an electric wire; The compressor (12) is arranged at the inner bottom end of the shell (11); the air outlet of the compressor (12) is connected to the air inlet of the finned heat exchanger (13) through a pipeline; the finned heat exchanger (13) is arranged at the inner top end of the shell (11); a heat dissipation device (14) is arranged at the bottom end of the finned heat exchanger (13); the water outlet of the finned heat exchanger (13) is connected to the water inlet of the drying filter (15) through a pipeline; the water outlet of the drying filter (15) is connected to the water inlet of the water box evaporator (16); an expansion valve (17) is arranged on the pipeline between the drying filter (15) and the water box evaporator (16); the air outlet of the water box evaporator (16) is connected to the air inlet of the compressor (12) through a pipeline; The cooling water inlet of the water tank type evaporator (16) is connected to the water outlet of the water pump (4) through a pipeline, and the water inlet of the water pump (4) is connected to the water outlet of the cooling water tank (3) through a pipeline.

2. The air-cooled water chiller for temperature control of semiconductor production equipment according to claim 1, characterized in that: The finned heat exchanger (13) is composed of a plurality of base tubes (131) and heat dissipation fins (132), and the plurality of heat dissipation fins (132) are welded and fixed on the base tube (131).

3. The air-cooled water chiller for temperature control of semiconductor production equipment according to claim 2, characterized in that: A dustproof filter (133) is arranged outside the finned heat exchanger (13).

4. The air-cooled water chiller for temperature control of semiconductor production equipment according to claim 1, characterized in that: A plurality of ventilation slots are arranged on both sides of the shell (11), a partition plate (111) is arranged in parallel at the middle position of the inner side of the shell (11), and a plurality of heat dissipation devices (14) are arranged on the partition plate (111).

5. The air-cooled water chiller for temperature control of semiconductor production equipment according to claim 4, characterized in that: The multiple heat dissipation devices (14) are each composed of a motor (141) and a fan (142).

6. The air-cooled water chiller for temperature control of semiconductor production equipment according to claim 1, characterized in that: The cooling water tank (3) comprises a housing (31) and a float switch (32), and the float switch (32) is detachably mounted on the inner top end of the cooling water tank (3).

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