Dehydrating and drying all-in-one machine
By designing a driving mechanism and clamping unit in the silicon wafer drying equipment, the rotation of the silicon wafer and the uniform contact between the hot air on both sides is solved, and the problem of long drying time in the prior art is significantly improved.
Patent Information
- Application Number
- CN202421260565.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-04
- Publication Date
- 2025-03-07
- Estimated Expiration
- 2034-06-04
AI Technical Summary
In the prior art, one side of the silicon wafer cannot effectively contact hot air, resulting in a long drying time.
A dehydration and drying integrated machine is designed. By setting up a driving mechanism, a clamping unit No. 1, clamping unit No. 2 and a pneumatic mechanism, both sides of the silicon wafer are in a suspended state and rotated during the drying process to ensure that both sides can be effectively contacted with hot air.
Through this design, the drying speed of the silicon wafer is significantly improved and the drying time is shortened.
Smart Images
Figure CN222578834U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of silicon wafer surface drying, in particular to a dehydration and drying integrated machine. Background Art
[0002] After the silicon wafer is formed, it needs to undergo grinding, chamfering and polishing operations. After the above operations are completed, the silicon wafer needs to be cleaned to remove impurities attached to the surface of the silicon wafer, and then dried to remove attached water.
[0003] In the prior art, during the drying operation, since one side of the silicon wafer cannot be effectively exposed to hot air, it is necessary to increase the drying time. To complete the drying in one step, the required drying time is relatively long. Utility Model Content
[0004] The purpose of the utility model is to provide a dehydration and drying all-in-one machine in order to solve the problems raised in the above background technology.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a dehydration and drying machine, comprising a first cover body and a second cover body, the first cover body and the second cover body are symmetrically arranged in an upper and lower manner, a plurality of through holes are equidistantly provided on the edges of the mating surfaces of the first cover body and the second cover body, a steam hole is provided inside the second cover body and penetrates to the top of the second cover body, a driving mechanism is installed on the top of the first cover body, a clamping unit No. 1 connected to the driving mechanism is connected to the inner wall of the first cover body, a clamping unit No. 2 is connected to the inner wall of the second cover body, the clamping unit No. 1 and the clamping unit No. 2 are used to clamp silicon wafers, an air pressure mechanism connected to the clamping unit No. 2 is connected to the first cover body, and the downwardly moving first cover body is used to squeeze the air pressure mechanism.
[0006] As a further solution of the utility model: cylinders are fixedly installed on both sides of the outer periphery of the first cover body, and the cylinders are used to drive the first cover body to move up and down.
[0007] As a further solution of the utility model: the driving mechanism includes a driving motor installed above the first cover body, the output end of the driving motor is connected to a driving gear, and the outer periphery of the driving gear is meshed with a driven gear.
[0008] As a further solution of the utility model: the No. 1 clamping unit includes a rotating shaft installed at the bottom center of the driven gear, the bottom of the rotating shaft penetrates into the inner cavity of the first cover body, and the rotating shaft is rotatably connected to the first cover body through a bearing, and a second rubber clamping plate is fixedly connected to the bottom center of the rotating shaft.
[0009] As a further solution of the utility model: a connecting hole is opened on the inner wall of the second cover body, a supporting ring is fixedly connected to the inner periphery of the connecting hole, and the top surface of the supporting ring is lower than the bottom end of the inner wall of the second cover body.
[0010] As a further solution of the utility model: the second clamping unit includes a sleeve fixedly mounted on the bottom end of the inner wall of the connecting hole, the inner wall of the sleeve is slidably connected to a second piston rod, the top center of the second piston rod is connected to a first rubber clamping plate through a rotating rod, the rotating rod is rotatably connected to the top center of the second piston rod, and the first rubber clamping plate is fixedly connected to the top of the rotating rod;
[0011] A piston plate in the shape of a regular polygon is formed below the outer periphery of the second piston rod, and a second return spring is connected between the top of the piston plate and the top end of the inner wall of the sleeve.
[0012] As a further solution of the utility model: the pneumatic mechanism includes a piston groove opened at the bottom end of the inner wall of the second cover body, the bottom end of the inner wall of the piston groove is connected to a first return spring, and the inner wall of the piston groove is slidably connected to a first piston rod, the bottom end of the first piston rod is fixedly connected to the top of the first return spring, the bottom end of the second cover body is connected to a connecting pipe, and the interior of the second cover body is provided with circular holes aligned with the two ends of the connecting pipe, and the circular holes are respectively connected to the piston groove and the inner cavity of the sleeve.
[0013] As a further solution of the utility model: a conduit is fixedly connected inside the through hole on the second cover body, the input end of the conduit is connected to an annular tube, the input end of the annular tube is connected to an electric heater through a pipeline, and the input end of the electric heater is connected to an air pump through a pipeline.
[0014] Compared with the prior art, the beneficial effects of the utility model are:
[0015] 1. By setting up a driving mechanism, a No. 1 clamping unit, a No. 2 clamping unit and an air pressure mechanism, both sides of the silicon wafer can be suspended in the air and rotated during the drying process, which can further improve the drying speed of the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a schematic diagram of the structure of the utility model;
[0017] Figure 2 This is a structural schematic diagram of another viewing angle of the utility model;
[0018] Figure 3 It is a schematic diagram of the internal structure of the utility model;
[0019] Figure 4For the utility model Figure 3 A partial enlarged view of point A in the middle.
[0020] In the figure: 1, first cover body; 2, second cover body; 3, through hole; 4, conduit; 5, annular tube; 6, cylinder; 7, steam hole; 8, driving motor; 9, driving gear; 10, driven gear; 11, rotating shaft; 12, first piston rod; 13, connecting hole; 14, supporting ring; 15, sleeve; 16, first rubber clamping plate; 17, second rubber clamping plate; 18, connecting tube; 19, piston groove; 20, first return spring; 21, second return spring; 22, second piston rod. DETAILED DESCRIPTION
[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0022] See also Figure 1 to Figure 4 In the embodiment of the utility model, a dehydration and drying integrated machine includes a first cover body 1 and a second cover body 2, the first cover body 1 and the second cover body 2 are symmetrically arranged in an upper and lower manner, a plurality of through holes 3 are equidistantly opened in the circumferential direction at the edges of the joint surfaces of the first cover body 1 and the second cover body 2, a steam hole 7 penetrating to the top of the second cover body 2 is opened inside the second cover body 2, a driving mechanism is installed on the top of the first cover body 1, a No. 1 clamping unit connected to the driving mechanism is connected to the inner wall of the first cover body 1, a No. 2 clamping unit is connected to the inner wall of the second cover body 2, and the No. 1 clamping unit is connected to the inner wall of the second cover body 2. The unit and the second clamping unit are used to clamp the silicon wafer. The first cover body 1 is connected to a pneumatic mechanism connected to the second clamping unit. The downwardly moving first cover body 1 is used to squeeze the pneumatic mechanism. A conduit 4 is fixedly connected to the inside of the through hole 3 on the second cover body 2. The input end of the conduit 4 is connected to a ring tube 5. The input end of the ring tube 5 is connected to an electric heater through a pipeline. The input end of the electric heater is connected to an air pump through a pipeline. Cylinders 6 are fixedly installed on both sides of the outer periphery of the first cover body 1. The cylinders 6 are used to drive the first cover body 1 to move up and down.
[0023] In this embodiment: first, the silicon wafer is placed in the second cover body 2, and then the cylinder 6 is started. The cylinder 6 drives the first cover body 1 to move downward. During the downward movement of the first cover body 1, the second clamping unit and the driving mechanism are driven to move downward synchronously, and in the process of moving downward, they will be squeezed with the air pressure mechanism. The air pressure mechanism is forced to compress the gas, prompting the second clamping unit to move upward, and lift up the placed silicon wafer. When the second cover body 2 falls completely, the first clamping unit and the second clamping unit clamp the silicon wafer, and then the driving mechanism is started. The driving mechanism drives the first clamping unit to rotate, and the first clamping unit and the second clamping unit cooperate to drive the silicon wafer to rotate, and the air pump is started synchronously. The air pump conveys air through the electric heater. After the air is heated, it enters the annular tube 5 through the pipeline and is then ejected from the conduit 4. The ejected hot air dries the surface of the silicon wafer, and in conjunction with the rotation of the silicon wafer, the silicon wafer can be quickly dried. The water vapor generated during the drying process is discharged through the steam hole 7. A conduit can be installed at the top of the steam hole 7 to guide the water vapor to a preset position.
[0024] Please refer to Figure 1 and Figure 2 The driving mechanism includes a driving motor 8 installed above the first cover body 1 , the output end of the driving motor 8 is connected to a driving gear 9 , and the outer periphery of the driving gear 9 is meshed with a driven gear 10 .
[0025] In this embodiment: after the first cover body 1 and the second cover body 2 are docked, the drive motor 8 is started, and the operation of the drive motor 8 drives the driving gear 9 to rotate, and the driving gear 9 rotates to drive the driven gear 10 to rotate, and the driven gear 10 rotates to drive the No. 1 clamping unit to rotate.
[0026] Please refer to Figure 1 and Figure 2 The first clamping unit includes a rotating shaft 11 installed at the bottom center of the driven gear 10, the bottom of the rotating shaft 11 penetrates into the inner cavity of the first cover body 1, and the rotating shaft 11 is rotatably connected to the first cover body 1 through a bearing, and a second rubber clamping plate 17 is fixedly connected to the bottom center of the rotating shaft 11.
[0027] In this embodiment: during the docking process between the first cover body 1 and the second cover body 2, the bottom end of the second rubber clamping plate 17 is flush with the bottom of the first cover body 1, and at the same time, the pneumatic mechanism pushes the No. 2 clamping mechanism to move upward, and the No. 2 clamping mechanism moving upward cooperates with the No. 1 clamping mechanism to effectively clamp the silicon wafer. When the driving mechanism is running, the driven gear 10 drives the rotating shaft 11 to rotate, and the rotating shaft 11 drives the second rubber clamping plate 17 to rotate, thereby achieving the purpose of driving the silicon wafer to rotate, and the larger water droplets attached to the silicon wafer are thrown out under the centrifugal force of rotation, which is more conducive to the drying operation.
[0028] Please refer to Figure 1 and Figure 3 A connecting hole 13 is opened on the inner wall of the second cover body 2 , and a supporting ring 14 is fixedly connected to the inner periphery of the connecting hole 13 , and the top surface of the supporting ring 14 is lower than the bottom end of the inner wall of the second cover body 2 .
[0029] In this embodiment: when placing the silicon wafer inside the device, align the outer periphery of the silicon wafer with the inner periphery of the connecting hole 13, and then lower it. At this time, the support ring 14 supports the bottom edge of the silicon wafer, and the second clamping unit is located at the lower center of the silicon wafer. This design does not require calibration when placing the silicon wafer, and is more efficient when placing it.
[0030] Please refer to Figure 1 , Figure 3 and Figure 4 The pneumatic mechanism includes a piston groove 19 provided at the bottom end of the inner wall of the second cover body 2, the bottom end of the inner wall of the piston groove 19 is connected to a first return spring 20, and the inner wall of the piston groove 19 is slidably connected to a first piston rod 12, the bottom end of the first piston rod 12 is fixedly connected to the top of the first return spring 20, the bottom end of the second cover body 2 is connected to a connecting pipe 18, and the inside of the second cover body 2 is provided with circular holes aligned with the two ends of the connecting pipe 18, and the circular holes are respectively connected to the inner cavities of the piston groove 19 and the sleeve 15, and the second clamping unit includes A sleeve 15 is fixedly installed on the bottom end of the inner wall of the connecting hole 13, and the inner wall of the sleeve 15 is slidably connected to the second piston rod 22 up and down. The top center of the second piston rod 22 is connected to the first rubber clamping plate 16 through a rotating rod. The rotating rod is rotatably connected to the top center of the second piston rod 22, and the first rubber clamping plate 16 is fixedly connected to the top of the rotating rod; a regular polygonal piston plate is formed below the outer periphery of the second piston rod 22, and a second return spring 21 is connected between the top of the piston plate and the top of the inner wall of the sleeve 15.
[0031] In this embodiment: during the downward movement of the first cover body 1, the first cover body 1 will contact the top of the first piston rod 12 and squeeze the first piston rod 12 downward. The first piston rod 12 subjected to the squeezing force moves downward along the piston groove 19 and squeezes the first return spring 20. At this time, the gas in the inner cavity of the piston groove 19 and the connecting pipe 18 is compressed, and the compressed gas acts on the bottom of the polygonal piston plate. Under the action of the air pressure, the piston plate drives the second piston rod 22 to move upward, and the second piston rod 22 moving upward drives the first rubber clamping plate 16 to move upward, and the first rubber clamping plate 16 moving upward pushes the silicon wafer to move upward;
[0032] Until the first cover body 1 and the second cover body 2 are in contact with each other, the first rubber clamping plate 16 squeezes the silicon wafer and makes it contact with the second rubber clamping plate 17. When the second rubber clamping plate 17 rotates, the silicon wafer is driven to rotate under the action of friction force, and the silicon wafer drives the first rubber clamping plate 16 to rotate.
[0033] What is described above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.
Claims
1. A dehydration and drying machine, comprising a first cover body (1) and a second cover body (2), wherein the first cover body (1) and the second cover body (2) are symmetrically arranged in an upper and lower direction, a plurality of through holes (3) are equidistantly provided at the edges of the butt joint surfaces of the first cover body (1) and the second cover body (2), and a steam hole (7) is provided inside the second cover body (2) and penetrates to the top of the second cover body (2), characterized in that: A driving mechanism is installed at the top of the first cover body (1); a first clamping unit connected to the driving mechanism is connected to the inner wall of the first cover body (1); a second clamping unit is connected to the inner wall of the second cover body (2); the first clamping unit and the second clamping unit are used to clamp the silicon wafer; a pneumatic mechanism connected to the second clamping unit is connected to the first cover body (1); the first cover body (1) moving downward is used to press the pneumatic mechanism.
2. The dehydration and drying integrated machine according to claim 1, characterized in that: Cylinders (6) are fixedly mounted on both sides of the outer periphery of the first cover body (1), and the cylinders (6) are used to drive the first cover body (1) to move up and down.
3. The dehydration and drying integrated machine according to claim 2, characterized in that: The driving mechanism comprises a driving motor (8) mounted above the first cover body (1); an output end of the driving motor (8) is connected to a driving gear (9); and a driven gear (10) is meshed on the outer periphery of the driving gear (9).
4. The dehydration and drying integrated machine according to claim 3, characterized in that: The first clamping unit comprises a rotating shaft (11) mounted at the center of the bottom end of the driven gear (10), the bottom of the rotating shaft (11) penetrates into the inner cavity of the first cover body (1), and the rotating shaft (11) is rotatably connected to the first cover body (1) via a bearing, and a second rubber clamping plate (17) is fixedly connected to the center of the bottom end of the rotating shaft (11).
5. The dehydration and drying integrated machine according to claim 4, characterized in that: The inner wall of the second cover body (2) is provided with a connection hole (13), the inner periphery of the connection hole (13) is fixedly connected with a support ring (14), and the top end surface of the support ring (14) is lower than the bottom end of the inner wall of the second cover body (2).
6. The dehydration and drying integrated machine according to claim 5, characterized in that: The second clamping unit comprises a sleeve (15) fixedly mounted on the bottom end of the inner wall of the connecting hole (13); the inner wall of the sleeve (15) is slidably connected to a second piston rod (22) up and down; the top center of the second piston rod (22) is connected to a first rubber clamping plate (16) via a rotating rod; the rotating rod is rotatably connected to the top center of the second piston rod (22); and the first rubber clamping plate (16) is fixedly connected to the top of the rotating rod; A piston plate in the form of a regular polygon is formed below the outer periphery of the second piston rod (22), and a second return spring (21) is connected between the top of the piston plate and the top end of the inner wall of the sleeve (15).
7. The dehydration and drying integrated machine according to claim 6, characterized in that: The pneumatic mechanism comprises a piston groove (19) formed at the bottom end of the inner wall of the second cover body (2), the bottom end of the inner wall of the piston groove (19) being connected to a first return spring (20), and the inner wall of the piston groove (19) being slidably connected to a first piston rod (12) up and down, the bottom end of the first piston rod (12) being fixedly connected to the top of the first return spring (20), the bottom end of the second cover body (2) being connected to a connecting pipe (18), the interior of the second cover body (2) being provided with circular holes aligned with the two ends of the connecting pipe (18), the circular holes being respectively connected to the inner cavities of the piston groove (19) and the sleeve (15).
8. The dehydration and drying integrated machine according to claim 7, characterized in that: A conduit (4) is fixedly connected inside the through hole (3) on the second cover body (2); the input end of the conduit (4) is connected to an annular tube (5); the input end of the annular tube (5) is connected to an electric heater via a pipeline; and the input end of the electric heater is connected to an air pump via a pipeline.