High-temperature furnace

Abstract

The utility model provides a high-temperature furnace. The high-temperature furnace comprises a furnace body and a heat conduction pipe. The furnace body is internally provided with isolated and adjacent heating cavities and an air cavity surrounding the heating cavities; the heat conduction pipes are communicated with the air cavity of the furnace body and are respectively configured to be communicated with the air suction device. According to the high-temperature furnace, the gas cavity is formed in the periphery of the heating cavity, and the high-temperature gas in the gas cavity is exhausted through the heat conduction pipe, so that the cavity wall of the heating cavity on the inner side of the gas cavity is accelerated to take away heat in the heating cavity, the cooling efficiency of the heating cavity is improved, and the productivity is improved.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of cooling technology, and in particular to a high-temperature furnace. Background Art

[0002] In the photovoltaic semiconductor industry, the furnace is generally heated to about 1,000 degrees. The temperature needs to be reduced to about 700 to 800 degrees before the furnace can be opened. At present, it relies on natural heat dissipation. The furnace is equipped with an insulation layer. The heat in the heating chamber can only be transferred to the outer shell of the furnace through the insulation layer, resulting in low cooling efficiency. It takes about one or two hours to cool down to the temperature at which the furnace can be opened, which wastes a lot of waiting time and leads to low production capacity. Utility Model Content

[0003] In view of this, the present application provides a high-temperature furnace with high cooling efficiency.

[0004] The present application provides a high temperature furnace, which includes a furnace body and a heat pipe. The furnace body is provided with an isolated and adjacent heating cavity and an air cavity surrounding the heating cavity; the heat pipe is connected to the air cavity of the furnace body and is respectively configured to be connected to an air intake device.

[0005] The high-temperature furnace sets an air cavity on the periphery of the heating cavity and discharges the high-temperature gas in the air cavity through a heat pipe, which helps to speed up the cavity wall of the heating cavity inside the air cavity to take away the heat in the heating cavity, thereby improving the cooling efficiency of the heating cavity and facilitating the improvement of production capacity.

[0006] In a possible embodiment, the number of furnace bodies and heat pipes is multiple respectively; the high-temperature furnace also includes multiple conduction valves, each of which is arranged between the heat pipe and a corresponding air cavity, and is configured to conduct the heat pipe and the corresponding air cavity when in an open state, and to block the heat pipe and the corresponding air cavity when in a closed state.

[0007] In the above embodiment, each conduction valve controls the air cavity and heat pipe of a group of furnace bodies. Multiple conduction valves control the on-off of the air cavity and heat pipe of multiple groups of furnace bodies, without exhausting and dissipating heat at the same time, which is more conducive to the independent operation of each furnace body without interference.

[0008] In a possible implementation, the high temperature furnace further includes a main pipe connected to the air intake device, and one end of each of the plurality of heat conducting pipes away from the corresponding air cavity is connected to the main pipe.

[0009] In the above embodiment, the plurality of heat-conducting pipes are respectively connected to the main pipes, and the main pipes are connected to the air intake device, so that the plurality of heat-conducting pipes are connected to the same air intake device, which is conducive to cost saving.

[0010] In a possible implementation manner, at least one of the plurality of conduction valves is configured to be in a different state from the other conduction valves in the same period.

[0011] In the above embodiment, not all of the multiple conduction valves participate in the discharge of high-temperature gas, thereby reducing the impact of low air intake efficiency of the same air intake device on the cooling effect.

[0012] In a possible implementation, the main pipe and / or the heat conducting pipe comprises an inner pipe and an outer pipe; the outer pipe is sleeved on the outer circumference of the inner pipe; and the space between the inner pipe and the outer pipe is configured to be filled with coolant.

[0013] In the above embodiment, high-temperature gas is placed in the inner tube, and the space between the inner tube and the outer tube is configured to be filled with coolant. The coolant absorbs the heat of the high-temperature gas, cools the gas and then discharges it to the main tube; the coolant in the main tube continues to cool the gas and then discharges it to the outside to meet the temperature requirement of the exhaust gas.

[0014] In a possible implementation manner, the inner tube adopts a corrugated tube structure, and the outer tube adopts a corrugated tube structure.

[0015] In the above embodiment, the corrugations can increase the area of ​​the high-temperature gas contacting the tube wall of the inner tube and the outer tube, which can multiply the heat conduction efficiency and thus improve the cooling efficiency. The corrugated tube wall of the inner tube of the corrugated tube structure can quickly convert the high-temperature gas from laminar flow to turbulent flow, and the heat transfer coefficient of turbulent flow is much greater than that of laminar flow, so that the cooling efficiency of the high-temperature gas in the air cavity can be significantly improved.

[0016] In a possible implementation, the main pipe includes multiple branch pipes and joints, the branch pipes are connected to the heat conduction pipe through the joint, two adjacent branch pipes are connected through the joint, each heat conduction pipe is provided with a first liquid inlet and a first liquid outlet, and each branch pipe is provided with a second liquid inlet and a second liquid outlet.

[0017] In the above embodiment, each heat conducting pipe is provided with a first liquid inlet and a first liquid outlet. Each branch pipe is provided with a second liquid inlet and a second liquid outlet. The plurality of heat conducting pipes and the plurality of branch pipes of the main pipe circulate the coolant independently, shortening the length of the flow path of the coolant, reducing the heat accumulation of the coolant, and helping to improve the efficiency of the coolant in removing heat.

[0018] In a possible implementation, the first liquid outlet is located above the first liquid inlet along the vertical direction; and the second liquid outlet is located above the second liquid inlet along the vertical direction.

[0019] In the above embodiment, the cooling liquid is easily moved upward when heated, which is beneficial to accelerate the cooling liquid in the heat pipe to flow out from the first liquid outlet after absorbing heat, and accelerate the cooling liquid in the branch pipe to flow out from the second liquid outlet after absorbing heat, thereby facilitating the improvement of heat dissipation efficiency and the improvement of the cooling efficiency of the heating chamber.

[0020] In a possible implementation manner, the high temperature furnace further includes a finned heat sink, which is connected to the end of the main pipe away from the heat conducting pipe.

[0021] In the above embodiment, the finned heat sink further reduces the temperature of the gas, which helps to accelerate the cooling of the gas to the temperature required for discharge.

[0022] In a possible implementation, the high temperature furnace further includes a heating element and an insulation layer, which are arranged in the furnace body, the heating element is located on the outside of the air cavity away from the heating cavity, and the insulation layer is located on the outside of the heating element away from the air cavity.

[0023] In the above embodiment, the air cavity is in direct contact with the cavity wall of the heating cavity, and there is no need for indirect heat conduction through the heating element, which is conducive to improving the efficiency of heat conduction from the heating cavity to the air cavity, thereby improving the cooling efficiency of the heating cavity. The temperature of the heating element is directly conducted to the air cavity, and the gas in the air cavity takes away the heat, reducing the influence of the residual temperature of the heating element on the temperature in the heating cavity when the furnace body dissipates heat.

[0024] In a possible implementation manner, a conduction valve is provided between the heat conducting pipe and the corresponding branch pipe.

[0025] In the above embodiment, when the heat pipe is not connected to the corresponding heating chamber, the heating chamber may be in a heating process and is not subjected to a cooling process. The gas in the heat pipe absorbs the heat of the heating chamber, resulting in a higher temperature. The conduction valve arranged between the heat pipe and the branch pipe prevents the air suction device from extracting the gas in the heat pipe through the main pipe, thereby reducing the heat loss of the heat pipe being heated and the cooling effect on the heat pipe being radiated. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A three-dimensional schematic diagram of a high-temperature furnace provided in an embodiment of the present application.

[0027] Figure 2 for Figure 1 A three-dimensional schematic diagram of a high-temperature furnace shown in a side view.

[0028] Figure 3 for Figure 1 A partial enlarged schematic diagram of the high-temperature furnace at point A is shown.

[0029] Figure 4 for Figure 1 The timing diagram of the operation of multiple conduction valves of the high temperature furnace is shown.

[0030] Figure 5 for Figure 1 A schematic cross-sectional view of a heat pipe in a high-temperature furnace is shown.

[0031] Figure 6 for Figure 1 The high temperature furnace is shown in a three-dimensional schematic diagram from a top view.

[0032] Main component symbols

[0033] High temperature furnace 100

[0034] Furnace body 10

[0035] Heating chamber 101

[0036] Air cavity 103

[0037] Main body 11

[0038] Lumen 1101

[0039] Heat resistant pipe 13

[0040] Heat pipe 20

[0041] Inner tube 21

[0042] Outer tube 23

[0043] The first liquid inlet 201

[0044] First liquid outlet 203

[0045] Conductive valve 30

[0046] Supervisor 40

[0047] In charge of 41

[0048] The second liquid inlet 401

[0049] Second liquid outlet 403

[0050] Connector 43

[0051] Heating element 50

[0052] Insulation layer 60

[0053] Finned radiator 70

[0054] Silencer 80

[0055] Suction device 200

[0056] The following specific implementation methods will further illustrate the present application in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0057] In order to further illustrate the technical means and effects adopted by the present application to achieve the intended application purpose, the following is combined with the drawings and implementation methods. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments.

[0058] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0059] The present application provides a high temperature furnace, which includes a furnace body and a heat pipe. The furnace body is provided with an isolated and adjacent heating cavity and an air cavity surrounding the heating cavity; the heat pipe is connected to the air cavity of the furnace body and is respectively configured to be connected to an air intake device.

[0060] The high-temperature furnace sets an air cavity on the periphery of the heating cavity and discharges the high-temperature gas in the air cavity through a heat pipe, which helps to speed up the flow of gas in the air cavity, take away the heat in the heating cavity, and thus improve the cooling efficiency of the heating cavity, which is beneficial to improving production capacity.

[0061] In conjunction with the accompanying drawings, some embodiments of the present application are described in detail below. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0062] Please also see Figure 1 to Figure 2 One embodiment of the present application provides a high temperature furnace 100. The high temperature furnace 100 is used in the fields of metallurgy, semiconductors, photovoltaics, etc.

[0063] In one embodiment, the high temperature furnace 100 adopts a tubular furnace structure, but is not limited thereto.

[0064] The high temperature furnace 100 includes a furnace body 10 and a heat pipe 20. The furnace body 10 is used to accommodate a workpiece (not shown) and to heat the workpiece to a high temperature, for example, to 1000°C, 1100°C or 1200°C, etc. The present application does not limit the heating temperature.

[0065] A heating chamber 101 and an air chamber 103 are provided in the furnace body 10. The air chamber 103 surrounds the outside of the heating chamber 101 and is relatively independent of the heating chamber 101. The heating chamber 101 can be used as a sealed chamber for accommodating workpieces to perform heating and other process treatments on the workpieces. The temperature in the heating chamber 101 can be conducted to the air chamber 103. The heat pipe 20 is connected to the air chamber 103 of the furnace body 10 and is connected to the air suction device 200. The air suction device 200 can be a structure such as an exhaust fan or an exhaust fan that can guide gas to the outside.

[0066] In one embodiment, the air cavity 103 surrounds the heating cavity 101, which means that the air cavity 103 is substantially an annular cavity and continuously surrounds the outer periphery of the heating cavity 101. It can be understood that in another embodiment, the air cavity 103 may also intermittently surround the outer periphery of the heating cavity 101, for example, the air cavity 103 is divided into a plurality of sub-cavities (not shown), the plurality of sub-cavities are arranged around the heating cavity 101, the plurality of sub-cavities are respectively connected to the heat conducting pipe 20, the cavity walls of two adjacent air cavities 103 may be shared, and the two adjacent air cavities 103 may also be connected.

[0067] It should be noted that, except that the heating cavity 101 is a sealed cavity, other structures of the furnace body 10 do not need to be sealed, that is, the air cavity 103 is a non-sealed cavity, and the high-temperature gas in the air cavity 103 is discharged through the heat pipe 20, and the air outside the furnace body 10 can enter the air cavity 103 through the gap at the non-sealed connection of the furnace body 10. The air entering the air cavity 103 continues to take away the cavity wall temperature of the heating cavity 101, and is discharged through the heat pipe 20.

[0068] Compared with the natural heat dissipation in the prior art, when the air intake device 200 inhales air, the high-temperature gas in the air cavity 103 is discharged through the heat pipe 20, the temperature of the air cavity 103 is reduced, and the cavity wall temperature of the heating cavity 101 inside the air cavity 103 is reduced accordingly. The high-temperature furnace 100 is provided with the air cavity 103 on the periphery of the heating cavity 101, and the high-temperature gas in the air cavity 103 is discharged through the heat pipe 20, which is conducive to accelerating the cavity wall of the heating cavity 101 inside the air cavity 103 to take away the heat in the heating cavity 101, thereby improving the cooling efficiency of the heating cavity 101, and facilitating the improvement of production capacity.

[0069] In one embodiment, the number of furnace bodies 10 and heat pipes 20 is multiple. Multiple furnace bodies 10 operate independently. The high-temperature furnace 100 also includes multiple conduction valves 30. Each conduction valve 30 is arranged between a furnace body 10 and a heat pipe 20. The conduction valve 30 includes two states: an open state and a closed state. When the conduction valve 30 is in a closed state, it does not necessarily mean that the conduction valve 30 is in a non-working state. For example, the conduction valve 30 is connected to a control center (not shown) by telecommunication, and the conduction valve 30 is in a normal working state and switches between a closed state and an open state according to instructions issued by the control center. Of course, in one embodiment, when the conduction valve 30 is manually operated, the closed state of the conduction valve 30 is a non-working state, and the open state of the conduction valve 30 is a working state.

[0070] Each conduction valve 30 controls the air cavity 103 and the heat pipe 20 of a group of furnace bodies 10. The conduction valve 30 is configured to conduct the corresponding heat pipe 20 and the air cavity 103 when it is in an open state, and block the corresponding heat pipe 20 and the air cavity 103 when it is in a closed state. Multiple conduction valves 30 control the connection and disconnection of the air cavity 103 and the heat pipe 20 of multiple groups of furnace bodies 10, without exhausting and dissipating heat at the same time, which is more conducive to the independent operation of each furnace body 10 without interfering with each other.

[0071] In one embodiment, the number of the furnace body 10 , the number of the heat pipe 20 and the number of the conduction valve 30 are four, but the present invention is not limited thereto.

[0072] In one embodiment, the furnace body 10 is generally a tubular furnace structure. The furnace body 10 includes a main body 11 and a heat-resistant tube 13. The main body 11 is provided with an inner cavity 1101. The heat-resistant tube 13 is arranged in the inner cavity 1101, and the cavity wall of the inner cavity 1101 and the outer wall of the heat-resistant tube 13 are surrounded to form an air cavity 103. The heating cavity 101 is arranged in the heat-resistant tube 13. The heat-resistant tube 13 is a tubular structure made of a high-temperature resistant material such as a quartz tube or corundum.

[0073] The heat-resistant tube 13 is supported in the inner cavity 1101 of the main body 11. The main body 11 can be formed by assembling multiple shells, and there are gaps between the shells to facilitate the air with lower temperature outside the furnace body 10 to enter the air cavity 103, so that the heat of the heat-resistant tube 13 can be taken away by the air in the air cavity 103.

[0074] In other embodiments, the furnace body 10 may also be a tubular structure in other shapes such as square or elliptical.

[0075] See also Figure 3 In one embodiment, the high temperature furnace 100 further includes a heating element 50 and a heat-insulating layer 60. The heating element 50 and the heat-insulating layer 60 are arranged in the furnace body 10. The heat-insulating layer 60 is arranged between the heating element 50 and the cavity wall of the inner cavity 1101. The heat-insulating layer 60 isolates the heating element 50 from the cavity wall of the inner cavity 1101 of the main body 11, reduces the heat loss from the heating element 50 to the cavity wall of the inner cavity 1101 of the main body 11, so that the heat emitted by the heating element 50 is used by the heat-resistant tube 13 in the inner cavity 1101, which is conducive to improving the heat utilization rate of the heating element 50 for heating the workpiece.

[0076] In one embodiment, the heating element 50 is located on the outer side of the air cavity 103 away from the heating cavity 101, and the heat-insulating layer 60 is located on the outer side of the heating element 50 away from the air cavity 103. The air cavity 103 is in direct contact with the cavity wall of the heating cavity 101, and there is no need for indirect heat conduction through the heating element 50, which is conducive to improving the efficiency of heat conduction from the heating cavity 101 to the air cavity 103, thereby improving the cooling efficiency of the heating cavity 101. The temperature of the heating element 50 is directly conducted to the air cavity 103, and the gas in the air cavity 103 takes away the heat, which reduces the influence of the residual temperature of the heating element 50 on the temperature in the heating cavity 101 when the furnace body 10 dissipates heat.

[0077] It can be understood that in other embodiments, the heating element 50 can also be arranged on the cavity wall of the heating cavity 101, that is, the heating element 50 is arranged on the heat-resistant tube 13, and the air cavity 103 is located at the outer periphery of the heating element 50 away from the heating cavity 101. The air cavity 103 and the heating cavity 101 are heat-conducted through the heating element 50 and the cavity wall of the heating cavity 101. Compared with natural heat dissipation, extracting the high-temperature gas in the air cavity 103 can still improve the cooling efficiency.

[0078] In one embodiment, multiple heat pipes 20 are connected to the same air suction device 200, which is conducive to cost saving. The high temperature furnace 100 includes a main pipe 40. Multiple heat pipes 20 are connected in parallel and are respectively connected to the main pipe 40. Each heat pipe 20 guides the high temperature gas in the corresponding air cavity 103 to the main pipe 40, and is discharged through the air suction device 200.

[0079] At least one of the plurality of conduction valves 30 is configured to be in a different state from the other conduction valves 30 during the same period. Figure 4 The four zigzag lines represent the working states of the four conduction valves 30 . For example, in the bottom zigzag line, the horizontal line represents that the conduction valve 30 is in a closed state, and the raised zigzag line represents that the conduction valve 30 is in an open state. Figure 4 The three openings of each conduction valve 30 are illustrated, but the present invention is not limited thereto. It can be seen from the four zigzag lines that only one of the four conduction valves 30 is in an open state at the same time, and the air suction device 200 sucks the high-temperature gas of one heat pipe 20 each time, which is beneficial to improving the air suction efficiency, thereby improving the high-temperature gas discharge efficiency, and further improving the cooling efficiency.

[0080] It can be understood that in other embodiments, a part of the multiple on-valve 30 is configured to be in a different state from the other on-valve 30 in the same period of time, that is, the multiple on-valve 30 do not all participate in the discharge of high-temperature gas, thereby reducing the impact of the low air intake efficiency of the same air intake device 200 on the cooling effect.

[0081] See also Figure 5 , because the temperature of the gas discharged to the outside is required, for example, the temperature of the gas discharged to the outside is less than or equal to 70°C. In one embodiment, the high-temperature gas in the gas cavity 103 flows through the heat pipe 20 and the main pipe 40, and cooling measures are set in the heat pipe 20 and the main pipe 40. The heat pipe 20 and the main pipe 40 use double-layer pipes of the same structure. The double-layer pipe structure is introduced below using the heat pipe 20 as an example. The heat pipe 20 includes an inner layer pipe 21 and an outer layer pipe 23. The outer layer pipe 23 is sleeved on the outer periphery of the inner layer pipe 21.

[0082] The inner tube 21 contains high-temperature gas, and the space between the inner tube 21 and the outer tube 23 is configured to be filled with coolant. The coolant absorbs the heat of the high-temperature gas, cools the gas, and then discharges it to the main tube 40; the coolant in the main tube 40 continues to cool the gas and then discharges it to the outside.

[0083] In one embodiment, both the inner tube 21 and the outer tube 23 are of a corrugated tube structure, and the corrugations of the inner tube 21 and the outer tube 23 are substantially parallel to each other, so that the wall thickness of the radial cross section of the heat conducting tube 20 is uniform.

[0084] The corrugations can increase the heat transfer area of ​​the tube wall of the inner tube 21 and the outer tube 23 where the high temperature gas contacts. The inner tube wall of the inner tube 21 absorbs the heat of the high temperature gas, and the outer tube wall of the inner tube 21 transfers the heat to the coolant; the inner tube wall of the outer tube 23 absorbs the heat of the coolant, and the outer tube wall of the outer tube 23 contacts the cooler air outside to transfer the heat to the cooler air. When the area of ​​the tube wall of the inner tube 21 and the outer tube 23 of the corrugated tube structure is set to a multiple (e.g., 2-4 times) of the area of ​​the tube wall as a smooth surface, the heat conduction efficiency can be increased exponentially, thereby improving the cooling efficiency.

[0085] In addition, the corrugated tube wall of the inner tube 21 of the bellows structure allows the high-temperature gas to quickly convert from laminar flow to turbulent flow, and the heat transfer coefficient of turbulent flow is much greater than that of laminar flow, so that the cooling efficiency of the high-temperature gas in the air cavity 103 is significantly improved.

[0086] It is understandable that in other embodiments, the outer tube 23 may also adopt a smooth tube wall structure, thereby increasing the radial area of ​​the heat pipe 20, that is, increasing the unit area flow rate of the coolant in the heat pipe 20 to improve the cooling efficiency.

[0087] In some other embodiments, the heat pipe 20 and the main pipe 40 are single-layer pipes, and a shell structure (not shown) is arranged on the outside of the heat pipe 20 and the main pipe 40 and contains a coolant, so that the wall temperature of the heat pipe 20 and the main pipe 40 is lower than the high-temperature gas, thereby improving the heat resistance of the heat pipe 20 and the main pipe 40 and the cooling effect on the gas.

[0088] See also Figure 2 The main pipe 40 includes a plurality of branch pipes 41 and a joint 43. The branch pipe 41 is connected to the heat conducting pipe 20 through the joint 43. Every two adjacent branch pipes 41 are connected through the joint 43, so that the main pipe 40 forms a single channel. The joint 43 is a three-way joint 43. The four furnace bodies 10 are arranged roughly along the vertical direction, and the four heat conducting pipes 20 are arranged roughly along the vertical direction accordingly, wherein one of the three-way joints 43 for connecting the heat conducting pipe 20 located at the bottom with the branch pipe 41 is blocked. Alternatively, the heat conducting pipe 20 located at the bottom is connected to the branch pipe 41 through the joint 43 of the two-way joint 43 structure.

[0089] Each heat conducting tube 20 is provided with a first liquid inlet 201 and a first liquid outlet 203. Each branch tube 41 is provided with a second liquid inlet 401 and a second liquid outlet 403. The plurality of heat conducting tubes 20 and the plurality of branch tubes 41 of the main tube 40 circulate coolant independently, shortening the length of the flow path of the coolant, reducing the heat accumulation of the coolant, and helping to improve the efficiency of the coolant in removing heat.

[0090] It can be understood that in other embodiments, the main pipe 40 can also be a single-section pipeline, each heat pipe 20 is connected to the main pipe 40 through a joint 43 of a two-way joint 43 structure, and the main pipe 40 is provided with a second liquid inlet 401 and a second liquid outlet 403.

[0091] In another embodiment, the inner tubes 21 of the plurality of heat-conducting tubes 20 are respectively connected to the inner tubes 21 of the main tube 40, and the outer tubes 23 of the plurality of heat-conducting tubes 20 are respectively connected to the outer tubes 23 of the main tube 40, so that the plurality of heat-conducting tubes 20 and the main tube 40 share a channel for the flow of the coolant. By increasing the flow rate of the coolant, the efficiency of the coolant in taking away heat is increased, thereby improving the cooling efficiency of the heating chamber 101.

[0092] In one embodiment, the first liquid outlet 203 is located vertically above the first liquid inlet 201. The second liquid outlet 403 is located vertically above the second liquid inlet 401. The cooling liquid is easily moved upward when heated, which is conducive to accelerating the cooling liquid in the heat pipe 20 to flow out from the first liquid outlet 203 after absorbing heat, and accelerating the cooling liquid in the branch pipe 41 to flow out from the second liquid outlet 403 after absorbing heat, thereby facilitating the improvement of heat dissipation efficiency and the improvement of the cooling efficiency of the heating chamber 101.

[0093] In one embodiment, the first liquid outlet 203 is closer to the furnace body 10 than the first liquid inlet 201, and the cooler coolant introduced by the first liquid inlet 201 absorbs heat in the process of moving toward the furnace body 10, the coolant temperature rises, and the temperature difference with the heat pipe 20 close to the furnace body 10 gradually decreases, and the cooling effect is good. In addition, compared with the first liquid inlet 201 being close to the furnace body 10, the end of the furnace body 10 close to the heat pipe 20 is less likely to have a local high temperature, and the temperature resistance requirement for the material of the furnace body 10 is low, and the material selection of the furnace body 10 is easy.

[0094] It is understandable that in other embodiments, the first liquid outlet 203 may also be farther away from the furnace body 10 than the first liquid inlet 201 .

[0095] In another embodiment, the plurality of furnace bodies 10 are arranged in the horizontal direction, and the air suction device 200, the plurality of heat pipes 20, and the main pipe 40 may also be vertically distributed above the furnace body 10. Those skilled in the art may also set the layout of the plurality of furnace bodies 10, the heat pipes 20, the main pipe 40, and the air suction device 200 according to actual needs, and this application does not limit this.

[0096] It can be understood that in other embodiments, a conduction valve 30 can be set between the heat pipe 20 and the corresponding branch pipe 41. When the heat pipe 20 is not connected to the corresponding heating chamber 101, the heating chamber 101 may be in a heating process and is not subjected to a cooling process. The gas in the heat pipe 20 absorbs the heat of the heating chamber 101, resulting in a higher temperature. The conduction valve 30 set between the heat pipe 20 and the branch pipe 41 prevents the air suction device 200 from extracting the gas in the heat pipe 20 through the main pipe 40, thereby reducing the heat loss of the heat pipe 20 being heated and the cooling effect on the heat pipe 20 that is dissipating heat.

[0097] In one embodiment, please refer to Figure 6 The high temperature furnace 100 further includes a finned heat sink 70, which is disposed at the end of the main pipe 40 away from the heat conducting pipe 20. The finned heat sink 70 further reduces the temperature of the gas, which is helpful to accelerate the cooling of the gas to the required temperature for discharge. In other embodiments, the finned heat sink 70 can also be omitted, and the heat absorption of the coolant can be increased by increasing the length of the main pipe 40, for example, the main pipe 40 is set as a bent pipe, thereby further reducing the temperature of the gas.

[0098] In one embodiment, the high temperature furnace 100 further includes a muffler 80, which is configured to be installed at the exhaust port of the air suction device 200. The muffler 80 can reduce the noise generated by gas exhaust, and in other embodiments, the muffler 80 can also be omitted.

[0099] Compared with the natural heat dissipation in the prior art, when the air suction device 200 of the high temperature furnace 100 sucks air, the high temperature gas in the air cavity 103 is discharged through the heat conducting pipe 20, the temperature of the air cavity 103 is reduced, and the cavity wall temperature of the heating cavity 101 inside the air cavity 103 is reduced accordingly. The high temperature furnace 100 is provided with the air cavity 103 on the periphery of the heating cavity 101, and the high temperature gas in the air cavity 103 is discharged through the heat conducting pipe 20, which is conducive to accelerating the cavity wall of the heating cavity 101 inside the air cavity 103 to take away the heat in the heating cavity 101, thereby improving the cooling efficiency of the heating cavity 101, and facilitating the improvement of production capacity.

[0100] In addition, those skilled in the art should recognize that the above embodiments are only used to illustrate the present application and are not intended to be limiting of the present application. As long as they are within the spirit and scope of the present application, appropriate changes and modifications to the above embodiments are within the scope of the present application.

Claims

1. A high temperature furnace, comprising: A furnace body, wherein the furnace body is provided with an isolated and adjacent heating cavity and an air cavity surrounding the heating cavity; The heat conducting pipes are connected to the air cavity of the furnace body and are respectively configured to be connected to the air intake device.

2. The high temperature furnace according to claim 1, characterized in that: The number of the furnace body and the number of the heat conducting pipes are respectively multiple; The high temperature furnace further includes a plurality of conduction valves, each of which is disposed between the heat conduction pipe and a corresponding air cavity and configured to conduct the heat conduction pipe and the corresponding air cavity when in an open state, and to block the heat conduction pipe and the corresponding air cavity when in a closed state.

3. The high temperature furnace according to claim 2, characterized in that: The high temperature furnace further comprises a main pipe connected to the air intake device, and one end of each of the plurality of heat conducting pipes away from the corresponding air cavity is connected to the main pipe.

4. The high temperature furnace according to claim 3, characterized in that: At least one of the plurality of conduction valves is configured to be in a different state from the other conduction valves in the same period.

5. The high temperature furnace according to claim 3, characterized in that: The main pipe and / or the heat conducting pipe comprises an inner layer pipe and an outer layer pipe; the outer layer pipe is sleeved on the outer circumference of the inner layer pipe; A space between the inner tube and the outer tube is configured to be filled with a coolant.

6. The high temperature furnace according to claim 5, characterized in that: The inner tube adopts a corrugated tube structure, and the outer tube adopts a corrugated tube structure.

7. The high temperature furnace according to claim 3, characterized in that: The main pipe includes multiple branch pipes and joints, the branch pipes are connected to the heat conducting pipe through the joints, two adjacent branch pipes are connected through the joints, each heat conducting pipe is provided with a first liquid inlet and a first liquid outlet, and each branch pipe is provided with a second liquid inlet and a second liquid outlet.

8. The high temperature furnace according to claim 7, characterized in that: The first liquid outlet is located above the first liquid inlet along the vertical direction; the second liquid outlet is located above the second liquid inlet along the vertical direction.

9. The high temperature furnace according to claim 3, characterized in that: The high temperature furnace further comprises a finned radiator, which is connected to the end of the main pipe away from the heat conducting pipe.

10. The high temperature furnace according to any one of claims 1 to 9, characterized in that: The high temperature furnace further comprises a heating element and a heat preservation layer, wherein the heating element and the heat preservation layer are arranged in the furnace body, the heating element is located on the outer side of the air cavity away from the heating cavity, and the heat preservation layer is located on the outer side of the heating element away from the air cavity.

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