Diffusion furnace tail gas treatment system and diffusion furnace
By designing a diffusion furnace exhaust treatment system, including exhaust gas pre-cooling device, cooling bottle and coolant adsorption bottle, the problem of B2O3 blocking of pipelines is solved, the battery cell preparation efficiency is improved, and the maintenance process is simplified.
Patent Information
- Application Number
- CN202420651465.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-29
- Publication Date
- 2025-03-07
- Estimated Expiration
- 2034-03-29
AI Technical Summary
In the process of preparing TOPCon batteries using diffusion process, the intermediate product of the boron diffusion process B2O3 can easily block the pipeline in the exhaust gas treatment device of the diffusion furnace, resulting in abnormal pump speed of the pumping device and affecting the preparation efficiency of the battery cell.
A diffusion furnace exhaust gas treatment system is designed, including exhaust gas pre-cooling device, cooling bottle and coolant adsorption bottle. The exhaust gas pre-cooling device reduces the exhaust gas temperature through pre-cooling. The cooling bottle dissolves the intermediate products in the exhaust gas through the coolant, and the coolant adsorption bottle removes the coolant steam in the exhaust gas by adsorption.
It effectively reduces the risk of exhaust gas blocking the pipeline, reduces the probability of abnormal pump speed in the air pump device, improves the preparation efficiency of the battery cell, and is easy to maintain. Just replace the coolant and coolant adsorbent substances.
Smart Images
Figure CN222578960U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of solar cells, and in particular to a diffusion furnace tail gas treatment system and a diffusion furnace. Background Art
[0002] TOPCon cell (tunneling oxide passivated contact cell) technology is one of the mainstream technical routes for N-type solar cells. Compared with other technical routes, the solar cells prepared by this technical route have higher photoelectric conversion efficiency. Therefore, major battery manufacturers are continuously expanding the production of TOPCon cells, and the efficiency of battery preparation is also rising steadily.
[0003] The diffusion process is a key process in the preparation of TOPCon cells. For example, the boron diffusion process is a key process that affects the efficiency of the cell when preparing TOP Con cells. The main principle of the boron diffusion process is that BCl3 (BBr3) is oxidized to boron oxide (B2O3), and B2O3 reacts with Si to generate B. Driven by the concentration difference at high temperature, B diffuses from the surface of the silicon wafer to the inside of the silicon substrate. However, the intermediate product of the boron diffusion process, B2O3, is a white waxy solid, which can easily clog the pipeline in the exhaust gas treatment device of the diffusion furnace during the boron diffusion process, thereby causing abnormal pump speed of the exhaust device, and ultimately affecting the preparation efficiency of the battery cell. Utility Model Content
[0004] The embodiments of the present application provide a diffusion furnace exhaust gas treatment system and a diffusion furnace to solve the problem that the pipeline in the diffusion furnace exhaust gas treatment device is easily blocked during the existing process of preparing TOPCon batteries using a diffusion process.
[0005] One aspect of an embodiment of the present application provides a diffusion furnace tail gas treatment system, the system comprising:
[0006] An exhaust gas precooling device, used for precooling the exhaust gas output from the diffusion furnace, the exhaust gas precooling device comprising an exhaust gas precooling pipeline, one end of which is connected to the exhaust gas output pipeline of the diffusion furnace;
[0007] A cooling bottle for containing a coolant, the cooling bottle being connected to a first air inlet pipe and a first air outlet pipe, one end of the first air inlet pipe being connected to the other end of the exhaust gas pre-cooling pipeline, the other end of the first air inlet pipe being immersed in the coolant in the cooling bottle, and one end of the first air outlet pipe extending into the cooling bottle and being located above the coolant;
[0008] A coolant adsorption bottle for containing coolant adsorption material, the coolant adsorption bottle is connected with a second air inlet pipe and a second air outlet pipe, one end of the second air inlet pipe is connected to the other end of the first air outlet pipe, the other end of the second air inlet pipe extends into the coolant adsorption material in the coolant adsorption bottle, one end of the second air outlet pipe extends into the coolant adsorption bottle and is located above the coolant adsorption material, and the other end of the second air outlet pipe is connected to the exhaust pipe.
[0009] Optionally, the exhaust gas pre-cooling pipeline is wound around the cooling bottle.
[0010] Optionally, the exhaust gas pre-cooling device further comprises a water storage container, the water storage container is filled with water, and the exhaust gas pre-cooling pipeline is immersed in the water in the water storage container.
[0011] Optionally, the first air inlet pipe is communicated with the first air outlet pipe, and a one-way valve is provided between the first air inlet pipe and the first air outlet pipe to prevent coolant from flowing into the first air inlet pipe.
[0012] Optionally, the first air inlet pipe is arranged near the bottom of the cooling bottle, and the first air outlet pipe is arranged near the top of the cooling bottle.
[0013] Optionally, the second air inlet pipe is arranged near the bottom of the coolant adsorption bottle, and the first air outlet pipe is arranged near the top of the coolant adsorption bottle.
[0014] Optionally, the exhaust gas pre-cooling pipeline, the cooling bottle and the coolant adsorption bottle are all made of quartz.
[0015] Optionally, the coolant is water or tail gas absorption liquid.
[0016] Optionally, the coolant adsorbing material is filter cotton.
[0017] Optionally, the filter cotton is made of glass fiber, synthetic fiber or non-woven fabric.
[0018] Optionally, the cooling bottle is provided with a coolant filling port and a coolant discharge port.
[0019] One aspect of an embodiment of the present application further provides a diffusion furnace with an exhaust gas treatment function, including a diffusion furnace and the above-mentioned diffusion furnace exhaust gas treatment system.
[0020] In the diffusion furnace tail gas treatment system in the embodiment of the present application, after the tail gas outputted by the diffusion furnace enters the tail gas pre-cooling device, the high-temperature tail gas is pre-cooled by the tail gas pre-cooling device, thereby reducing the tail gas temperature; thereafter, the tail gas enters the cooling bottle and contacts the coolant, thereby dissolving the intermediate products (such as B2O3) in the tail gas through the coolant, and further cooling the tail gas; finally, the coolant vapor in the tail gas is removed by the coolant adsorbent in the coolant adsorption bottle, thereby achieving effective removal of the intermediate products in the tail gas, reducing the risk of tail gas blocking the pipeline, thereby reducing the probability of abnormal pump speed in the exhaust device, and improving the preparation efficiency of the battery cell. In addition, the diffusion furnace tail gas treatment system in the embodiment of the present application is easy to maintain, and only the coolant and the coolant adsorbent need to be replaced. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] The accompanying drawings exemplarily illustrate the embodiments and constitute a part of the specification, and together with the text description of the specification, are used to explain the exemplary implementation of the embodiments. The embodiments shown are for illustrative purposes only and do not limit the scope of the claims. In all drawings, the same reference numerals refer to similar but not necessarily identical elements.
[0022] Figure 1 It is a structural schematic diagram of the utility model.
[0023] In the figure: 1. exhaust gas pre-cooling device; 10. exhaust gas pre-cooling pipeline; 2. cooling bottle; 20. first air inlet pipe; 21. first air outlet pipe; 22. one-way valve; 3. coolant adsorption bottle; 30. second air inlet pipe; 31. second air outlet pipe. DETAILED DESCRIPTION
[0024] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.
[0025] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.
[0026] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
[0027] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.
[0028] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
[0029] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.
[0030] In the description of this application, "several" means more than one, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.
[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art to which the present application belongs. The terms used herein in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.
[0032] The following will be combined Figure 1 The embodiments of the present application are described in detail. However, it will be appreciated by those skilled in the art that, in the embodiments of the present application, many technical details are provided in order to better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solution claimed in the present application can be implemented.
[0033] See also Figure 1 An embodiment of the present application provides a diffusion furnace exhaust gas treatment system, including an exhaust gas pre-cooling device 1, a cooling bottle 2 for containing coolant, and a coolant adsorption bottle 3 for containing coolant adsorption material.
[0034] The tail gas pre-cooling device 1 is used to pre-cool the tail gas output from the diffusion furnace, thereby reducing the temperature of the tail gas.
[0035] In this embodiment, the exhaust gas pre-cooling device 1 comprises an exhaust gas pre-cooling pipeline 10, and one end of the exhaust gas pre-cooling pipeline 10 is connected to the exhaust gas output pipeline of the diffusion furnace.
[0036] It should be noted that the length of the exhaust gas pre-cooling pipeline 10 can be as long as possible to achieve a better pre-cooling effect.
[0037] In an optional embodiment, in order to achieve a better pre-cooling effect, the exhaust gas pre-cooling in one embodiment, the exhaust gas pre-cooling pipe 10 can be a pipe made of quartz material. In another embodiment, the exhaust gas pre-cooling pipe 10 can also be a pipe made of high temperature resistant and corrosion resistant plastic material. The exhaust gas pre-cooling pipe 10 is wound around the cooling bottle 2, so as to further pre-cool the exhaust gas through the cooling bottle.
[0038] In one embodiment, in order to increase the contact area between the exhaust gas and the exhaust gas pre-cooling pipe 10 , the exhaust gas pre-cooling pipe 10 may be wound around the cooling bottle 2 in a spiral manner.
[0039] In an optional embodiment, in order to achieve a better pre-cooling effect, the exhaust gas pre-cooling device 1 further includes a water storage container, the water storage container is filled with water, and the exhaust gas pre-cooling pipeline 10 is immersed in the water in the water storage container.
[0040] In this embodiment, the exhaust gas pre-cooling pipe 10 is directly immersed in the water in the water storage container to achieve pre-cooling of the exhaust gas, thereby achieving a better cooling effect.
[0041] It should be noted that, in other embodiments, the exhaust gas pre-cooling pipe 10 may also be wound around the cooling bottle 2, and then the cooling bottle 2 is placed in the water storage container to achieve pre-cooling of the exhaust gas.
[0042] The cooling bottle 2 is used to further cool the exhaust gas on the one hand, and to dissolve the intermediate products in the exhaust gas on the other hand, such as dissolving the boron oxide (B2O3) in the exhaust gas. The cooling bottle 2 is connected to a first air inlet pipe 20 and a first air outlet pipe 21, one end of the first air inlet pipe 20 is connected to the other end of the exhaust gas pre-cooling pipeline 10, the other end of the first air inlet pipe 20 is immersed in the coolant in the cooling bottle 2, and one end of the first air outlet pipe 21 extends into the cooling bottle 21 and is located above the coolant.
[0043] In one embodiment, the cooling bottle 2 may be made of quartz. In another embodiment, the cooling bottle 2 may also be made of a plastic material that is resistant to high temperatures, corrosion, and has high transparency.
[0044] In an optional embodiment, in order to allow the exhaust gas to fully contact the coolant, the first air inlet pipe 20 is arranged near the bottom of the cooling bottle 2, and the first air outlet pipe 21 is arranged near the top of the cooling bottle 2.
[0045] In an optional embodiment, the coolant is water or tail gas absorption liquid.
[0046] The tail gas absorption liquid is a solution used to dissolve and absorb the intermediate products in the tail gas. The specific type of the tail gas absorption liquid can be determined according to the type of the intermediate products in the tail gas, and its specific type is not limited in this embodiment.
[0047] For example, when the intermediate product in the tail gas is boron oxide, the coolant may be water, weak acid, or the like.
[0048] In an optional embodiment, the first air inlet pipe 20 is communicated with the first air outlet pipe 21 , and a one-way valve is provided between the first air inlet pipe 20 and the first air outlet pipe 21 to prevent the coolant from flowing into the first air inlet pipe.
[0049] In this embodiment, the first air inlet pipe 20 is connected to the first air outlet pipe 21, and a one-way valve 22 is provided between the first air inlet pipe 20 and the first air outlet pipe 21 to prevent the coolant from flowing into the first air inlet pipe. In this way, when the exhaust device is exhausting air, the one-way conduction function of the one-way valve can make the first air inlet pipe 20 and the first air outlet pipe 21 independent and non-conductive, and the tail gas will flow into the cooling bottle 2 through the first air inlet pipe 20, and after being cooled by the coolant and dissolving the intermediate products in the tail gas, it will be discharged to the coolant adsorption bottle 3 through the first air outlet pipe 21; when there is an abnormal situation that the air pressure in the diffusion furnace is low, so that the air pressure of the first air inlet pipe 20 is lower than the air pressure of the first air outlet pipe 21, the one-way conduction function of the one-way valve can be used to make the first air inlet pipe 20 and the first air outlet pipe 21 conduct, and then the atmosphere can be input into the diffusion furnace through the first air outlet pipe 21, so that the air pressure in the diffusion furnace returns to normal.
[0050] In an optional embodiment, in order to facilitate the addition and replacement of coolant, the cooling bottle 2 is provided with a coolant filling port and a coolant drain port.
[0051] The coolant filling port can be arranged near the top of the cooling bottle 2 , and the coolant discharging port can be arranged near the bottom of the cooling bottle 2 .
[0052] The coolant adsorption bottle 3 is used to remove the coolant vapor in the exhaust gas to prevent the coolant vapor from entering the exhaust device and damaging the exhaust device. The coolant adsorption bottle 3 is connected to a second air inlet pipe 30 and a second air outlet pipe 32. One end of the second air inlet pipe 30 is connected to the other end of the first air outlet pipe 21. The other end of the second air inlet pipe 30 extends into the coolant adsorption material in the coolant adsorption bottle 3. One end of the second air outlet pipe 31 extends into the coolant adsorption bottle 3 and is located above the coolant adsorption material. The other end of the second air outlet pipe 31 is connected to the exhaust pipe.
[0053] In one embodiment, the coolant adsorption bottle 3 may be made of quartz. In another embodiment, the coolant adsorption bottle 3 may also be made of a plastic material that is resistant to high temperature and corrosion and has high transparency.
[0054] In an optional embodiment, in order to allow the exhaust gas to fully contact the coolant adsorption material, the second air inlet pipe 30 is arranged near the bottom of the coolant adsorption bottle 3, and the second air outlet pipe 31 is arranged near the top of the coolant adsorption bottle 3.
[0055] In an optional embodiment, the coolant adsorbent is filter cotton.
[0056] The coolant adsorbing substance is a substance used to adsorb coolant vapor in the exhaust gas. Since filter cotton has a good adsorption effect, the coolant adsorbing substance can be filter cotton.
[0057] In an optional embodiment, the filter cotton is made of glass fiber, synthetic fiber or non-woven fabric.
[0058] In the embodiment, the tail gas treatment system of the diffusion furnace, after the tail gas outputted by the diffusion furnace enters the tail gas pre-cooling device, pre-cools the high-temperature tail gas through the tail gas pre-cooling device, thereby reducing the tail gas temperature; thereafter, the tail gas enters the cooling bottle and contacts the coolant, thereby dissolving the intermediate products (e.g., B2O3) in the tail gas through the coolant, and further cooling the tail gas; finally, the coolant vapor in the tail gas is removed by the coolant adsorbent in the coolant adsorption bottle, thereby achieving effective removal of the intermediate products in the tail gas, reducing the risk of tail gas blocking the pipeline, thereby reducing the probability of abnormal pump speed in the exhaust device, and improving the preparation efficiency of the battery cell. In addition, the tail gas treatment system of the diffusion furnace in the embodiment of the present application is easy to maintain, and only the coolant and the coolant adsorbent need to be replaced.
[0059] In order to further understand the technical solution in the present application, the principles in the embodiments of the present application are described in detail below:
[0060] The tail gas discharged from the diffusion furnace enters the tail gas pre-cooling pipeline 10 through the tail gas output pipeline, and the tail gas is pre-cooled in the pre-cooling pipeline 10 first, so as to prevent the high-temperature tail gas from directly entering the cooling bottle and contacting with the coolant, causing a large amount of coolant to evaporate. After passing through the tail gas pre-cooling pipeline 10, the tail gas is passed into the coolant through the first air inlet pipe 20 connected to the cooling bottle 2, and the intermediate products in the tail gas are dissolved and absorbed by the coolant, and the tail gas is further cooled. Then, the tail gas treated with the coolant enters the coolant adsorbent in the coolant adsorption bottle 3 through the first air outlet pipe 21 and the second air inlet pipe 30, and the coolant vapor in the tail gas is removed by the coolant adsorbent, so as to prevent the coolant vapor from entering the exhaust device and damaging the exhaust device. Finally, after the tail gas is adsorbed by the coolant adsorbent, it enters the final exhaust pipeline through the second air outlet pipe 31, the tail gas discharge pipe, the filter device adsorption and the exhaust device for discharge.
[0061] An embodiment of the present application provides a diffusion furnace with an exhaust gas treatment function, including a diffusion furnace and the above-mentioned diffusion furnace exhaust gas treatment system.
[0062] In this embodiment, the tail gas output by the diffusion furnace enters the diffusion furnace tail gas treatment system for treatment.
[0063] It should be noted that the above are only preferred embodiments of the present application, and the patent protection scope of the present application is not limited thereto. Any equivalent structure or equivalent process transformation made using the contents of the specification and drawings of the present application, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.
Claims
1. A diffusion furnace tail gas treatment system, characterized in that: The system comprises: An exhaust gas precooling device, used for precooling the exhaust gas output from the diffusion furnace, the exhaust gas precooling device comprising an exhaust gas precooling pipeline, one end of which is connected to the exhaust gas output pipeline of the diffusion furnace; A cooling bottle for containing a coolant, the cooling bottle being connected to a first air inlet pipe and a first air outlet pipe, one end of the first air inlet pipe being connected to the other end of the exhaust gas pre-cooling pipeline, the other end of the first air inlet pipe being immersed in the coolant in the cooling bottle, and one end of the first air outlet pipe extending into the cooling bottle and being located above the coolant; A coolant adsorption bottle for containing coolant adsorption material, the coolant adsorption bottle is connected with a second air inlet pipe and a second air outlet pipe, one end of the second air inlet pipe is connected to the other end of the first air outlet pipe, the other end of the second air inlet pipe extends into the coolant adsorption material in the coolant adsorption bottle, one end of the second air outlet pipe extends into the coolant adsorption bottle and is located above the coolant adsorption material, and the other end of the second air outlet pipe is connected to the exhaust pipe.
2. The diffusion furnace tail gas treatment system according to claim 1, characterized in that: The tail gas pre-cooling pipeline is wound around the cooling bottle.
3. The diffusion furnace tail gas treatment system according to claim 1, characterized in that: The tail gas pre-cooling device further comprises a water storage container, the water storage container is filled with water, and the tail gas pre-cooling pipeline is immersed in the water in the water storage container.
4. The diffusion furnace tail gas treatment system according to claim 1, characterized in that: The first air inlet pipe is communicated with the first air outlet pipe, and a one-way valve is provided between the first air inlet pipe and the first air outlet pipe to prevent coolant from flowing into the first air inlet pipe.
5. The diffusion furnace tail gas treatment system according to any one of claims 1 to 4, characterized in that: The first air inlet pipe is arranged near the bottom of the cooling bottle, and the first air outlet pipe is arranged near the top of the cooling bottle.
6. The diffusion furnace tail gas treatment system according to any one of claims 1 to 4, characterized in that: The second air inlet pipe is arranged near the bottom of the coolant adsorption bottle, and the first air outlet pipe is arranged near the top of the coolant adsorption bottle.
7. The diffusion furnace tail gas treatment system according to any one of claims 1 to 4, characterized in that: The tail gas pre-cooling pipeline, the cooling bottle and the coolant adsorption bottle are all made of quartz.
8. The diffusion furnace tail gas treatment system according to any one of claims 1 to 4, characterized in that: The cooling liquid is water or tail gas absorption liquid.
9. The diffusion furnace tail gas treatment system according to any one of claims 1 to 4, characterized in that: The coolant adsorbing material is filter cotton.
10. The diffusion furnace tail gas treatment system according to claim 9, characterized in that: The filter cotton is made of glass fiber, synthetic fiber or non-woven fabric.
11. The diffusion furnace tail gas treatment system according to any one of claims 1 to 4, characterized in that: The cooling bottle is provided with a cooling liquid filling port and a cooling liquid discharging port.
12. A diffusion furnace with tail gas treatment function, characterized in that: It comprises a diffusion furnace and a diffusion furnace tail gas treatment system as claimed in any one of claims 1 to 11.