SPM waste liquid treatment device and waste water treatment agent recovery system

Abstract

The utility model provides an SPM waste liquid treatment device and a waste water treatment agent recovery system, the SPM waste liquid treatment device comprises an SPM waste liquid storage tank, an SPM waste liquid decomposition storage tank and a sunlight collection light guide part; the SPM waste liquid storage tank is provided with a conveying pump and a waste liquid conveying pipe, and the SPM waste liquid storage tank conveys SPM waste liquid to the SPM waste liquid decomposition storage tank through the conveying pump and the waste liquid conveying pipe; the sunlight collecting and guiding part is connected with the SPM waste liquid decomposition storage tank and transmits ultraviolet rays in sunlight to the SPM waste liquid decomposition storage tank; the SPM waste liquid decomposition storage tank is provided with a circulating reflux stirring part and a first exhaust port, the circulating reflux stirring part stirs the SPM waste liquid decomposition storage tank, and gas generated in the SPM waste liquid decomposition storage tank is exhausted through the first exhaust port.

Description

Technical Field

[0001] The utility model relates to the technical field of waste liquid treatment, in particular to a treatment device for SPM waste liquid and a recovery system for a wastewater treatment agent. Background Art

[0002] SPM (Sulfuric Peroxide Mixture) solution is used in the integrated circuit manufacturing process. The used SPM waste liquid can be used as a wastewater treatment agent after recycling, but before it is used as a wastewater treatment agent, H2O2 in the SPM waste liquid needs to be removed. Methods for removing H2O2 include natural decomposition, catalyst decomposition, enzyme decomposition, ultraviolet decomposition, etc., and ultraviolet decomposition is conventionally used in the industry. Ultraviolet decomposition often uses a contact ultraviolet device, that is, the SPM waste liquid will contact the quartz lamp of the ultraviolet device. Therefore, once hydrofluoric acid is mixed into the SPM waste liquid, the hydrofluoric acid will corrode the quartz lamp of the ultraviolet device, and then the quartz lamp needs to be replaced regularly, resulting in a certain amount of energy consumption. Therefore, contact ultraviolet devices are not suitable for corrosive SPM waste liquids.

[0003] How to design a UV device that does not contact SPM waste liquid has become a technical problem that needs to be solved urgently by those skilled in the art. Utility Model Content

[0004] In order to solve the above technical problems, an embodiment of the utility model provides a processing device for SPM waste liquid, including an SPM waste liquid storage tank, an SPM waste liquid decomposition storage tank and a sunlight collecting and guiding component; the SPM waste liquid storage tank is provided with a delivery pump and a waste liquid transmission pipe, and the SPM waste liquid storage tank transports the SPM waste liquid to the SPM waste liquid decomposition storage tank through the delivery pump and the waste liquid transmission pipe; the sunlight collecting and guiding component is connected to the SPM waste liquid decomposition storage tank, and transmits ultraviolet rays in the sunlight to the SPM waste liquid decomposition storage tank; the SPM waste liquid decomposition storage tank is provided with a circulating reflux stirring component and a first exhaust port, the circulating reflux stirring component stirs the SPM waste liquid decomposition storage tank, and the gas generated in the SPM waste liquid decomposition storage tank is discharged through the first exhaust port.

[0005] Preferably, the sunlight collecting and guiding component includes a light collector, a light guide tube and a connection interface; the light guide tube is arranged between the light collector and the connection interface, and the sunlight collecting and guiding component is connected to the SPM waste liquid decomposition tank through the connection interface; the light collector is arranged outdoors.

[0006] Preferably, the sunlight collecting and light-guiding component further comprises a rainproof component, and the rainproof component is arranged at the connection between the light collector and the light guide tube.

[0007] Preferably, the sunlight collecting and light-guiding component further comprises light-transmitting glass, and the light-transmitting glass is arranged at one end of the light-guiding tube located at the connecting interface, and the connecting interface is connected to the SPM waste liquid decomposition tank via a flange.

[0008] Preferably, the treatment device further comprises a UV light source, and the UV light source is arranged above the SPM waste liquid decomposition tank.

[0009] Preferably, the SPM waste liquid decomposition storage tank is provided with a transparent connecting window, and the UV light source is arranged at the transparent connecting window.

[0010] Preferably, the liquid level in the SPM waste liquid decomposition tank is maintained at a height of about 10-30 cm from the tank top.

[0011] Preferably, the SPM waste liquid storage tank is provided with a waste liquid collecting port and a second exhaust port, and the waste liquid collecting port collects the SPM waste liquid generated by the production process machine.

[0012] Another embodiment of the utility model provides a wastewater treatment agent recovery system, comprising the SPM waste liquid treatment device, catalytic reaction tank and H2SO4 storage tank described in the above embodiment; the SPM waste liquid decomposition storage tank in the SPM waste liquid treatment device is provided with a first drain pipe, the first drain pipe is connected to the catalytic reaction tank, the catalytic reaction tank is provided with a second drain pipe, and the second drain pipe is connected to the inlet of the H2SO4 storage tank.

[0013] Preferably, the catalytic reaction tank is provided with an enzyme input port.

[0014] Compared with the prior art, the technical solution of the embodiment of the utility model has the following beneficial effects:

[0015] The utility model collects sunlight through a sunlight collecting and guiding component and guides it into a SPM waste liquid decomposition tank, with the purpose of utilizing ultraviolet rays in sunlight to decompose H2O2 in the SPM waste liquid in the SPM waste liquid decomposition tank. In the SPM waste liquid treatment device provided by the utility model, the sunlight collecting and guiding component does not contact the SPM waste liquid, so even if hydrofluoric acid is mixed into the SPM waste liquid, the hydrofluoric acid will not corrode the sunlight collecting and guiding component, thereby reducing energy consumption.

[0016] Since the sunlight collecting and guiding component in the SPM waste liquid treatment device provided by the utility model does not contact the SPM waste liquid in the SPM waste liquid decomposition tank, the sunlight collecting and guiding component is a non-contact ultraviolet device and can be applied to corrosive SPM waste liquid.

[0017] Furthermore, since the utility model utilizes ultraviolet rays in sunlight to decompose the SPM waste liquid and decomposes H2O2 in the SPM waste liquid in the storage tank, the use of lamp tubes of the ultraviolet lamp source device is reduced, thereby reducing operating costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0019] Figure 1 It is a device for treating SPM waste liquid provided in Example 1 of the utility model;

[0020] Figure 2 It is a wastewater treatment agent recovery system provided in Example 1 of the utility model;

[0021] Description of reference numerals:

[0022] 1--SPM waste liquid storage tank;

[0023] 101--Second exhaust port;

[0024] 102--Waste liquid collection port;

[0025] 2--The first delivery pump;

[0026] 3--Waste liquid transmission pipe;

[0027] 4--SPM waste liquid decomposition storage tank;

[0028] 401--First exhaust port;

[0029] 402--Transparent connection window;

[0030] 5--The second delivery pump;

[0031] 6--Return pipe;

[0032] 7--Sunlight collecting and guiding components;

[0033] 701--Light collector;

[0034] 702--Rainproof components;

[0035] 703--Light guide tube;

[0036] 704--Translucent glass;

[0037] 8--flange;

[0038] 9--UV light source;

[0039] 10--The first liquid discharge pipe;

[0040] 11--Catalytic reaction tank;

[0041] 12--The second liquid discharge pipe;

[0042] 13--H2SO4 storage tank. DETAILED DESCRIPTION

[0043] As described in the background technology, when using ultraviolet decomposition method to remove H2O2 in SPM waste liquid, a contact ultraviolet device is often used, that is, the SPM waste liquid will contact the quartz lamp tube of the ultraviolet device. Therefore, once hydrofluoric acid is mixed into the SPM waste liquid, the hydrofluoric acid will corrode the quartz lamp tube of the ultraviolet device, and then the quartz lamp tube needs to be replaced regularly, resulting in a certain amount of energy consumption.

[0044] In order to solve the above technical problems, the utility model provides a processing device for SPM waste liquid, including an SPM waste liquid storage tank, an SPM waste liquid decomposition storage tank and a sunlight collecting and guiding component; the SPM waste liquid storage tank is provided with a delivery pump and a waste liquid transmission pipe, and the SPM waste liquid storage tank transports the SPM waste liquid to the SPM waste liquid decomposition storage tank through the delivery pump and the waste liquid transmission pipe; the sunlight collecting and guiding component is connected to the SPM waste liquid decomposition storage tank, and transmits ultraviolet rays in the sunlight to the SPM waste liquid decomposition storage tank; the SPM waste liquid decomposition storage tank is provided with a circulating reflux stirring component and a first exhaust port, the circulating reflux stirring component stirs the SPM waste liquid decomposition storage tank, and the gas generated in the SPM waste liquid decomposition storage tank is discharged through the first exhaust port.

[0045] The utility model collects sunlight through a sunlight collecting and guiding component and guides it into a SPM waste liquid decomposition tank, with the purpose of utilizing ultraviolet rays in sunlight to decompose H2O2 in the SPM waste liquid in the SPM waste liquid decomposition tank. In the SPM waste liquid treatment device provided by the utility model, the sunlight collecting and guiding component does not contact the SPM waste liquid, so even if hydrofluoric acid is mixed into the SPM waste liquid, the hydrofluoric acid will not corrode the sunlight collecting and guiding component, thereby reducing energy consumption.

[0046] Since the sunlight collecting and guiding component in the SPM waste liquid treatment device provided by the utility model does not contact the SPM waste liquid in the SPM waste liquid decomposition tank, the sunlight collecting and guiding component is a non-contact ultraviolet device and can be applied to corrosive SPM waste liquid.

[0047] Furthermore, since the utility model utilizes ultraviolet rays in sunlight to decompose the SPM waste liquid and decomposes H2O2 in the SPM waste liquid in the storage tank, the use of lamp tubes of the ultraviolet lamp source device is reduced, thereby reducing operating costs.

[0048] The utility model also provides a wastewater treatment agent recovery system, comprising the above-mentioned SPM waste liquid treatment device, a catalytic reaction tank and an H2SO4 storage tank; the SPM waste liquid decomposition storage tank in the SPM waste liquid treatment device is provided with a first drain pipe, the first drain pipe is connected to the catalytic reaction tank, the catalytic reaction tank is provided with a second drain pipe, and the second drain pipe is connected to the inlet of the H2SO4 storage tank.

[0049] The H2O2 in the SPM waste liquid in the SPM waste liquid decomposition tank is decomposed into H2O and O2 under ultraviolet irradiation, and O2 is discharged outside the SPM waste liquid decomposition tank. After being irradiated with ultraviolet rays during the day, the SPM waste liquid in the SPM waste liquid decomposition tank can be transported to the catalytic reaction tank of the wastewater treatment agent recovery system at night for the next step of decomposition. Specifically, the SPM waste liquid decomposed by the SPM waste liquid treatment device is transported to the catalytic reaction tank through the first discharge pipe, and generates an H2SO4 solution after a chemical reaction with the enzyme. The H2SO4 solution is transported to the H2SO4 storage tank through the second discharge pipe.

[0050] In order to make the above-mentioned purposes, features and beneficial effects of the utility model more obvious and easy to understand, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0051] Example 1

[0052] Please refer to Figure 1 The present embodiment provides a device for treating SPM waste liquid, comprising an SPM waste liquid storage tank 1, an SPM waste liquid decomposition storage tank 4 and a sunlight collecting and guiding component 7. The SPM waste liquid storage tank 1 is provided with a first delivery pump 2 and a waste liquid transmission pipe 3. The SPM waste liquid storage tank 1 is connected to the SPM waste liquid decomposition storage tank 4 through the waste liquid transmission pipe 3. The first delivery pump 2 is used to transport the SPM waste liquid in the SPM waste liquid storage tank 1 to the SPM waste liquid decomposition storage tank 4.

[0053] The sunlight collecting and guiding component 7 is connected to the SPM waste liquid decomposition tank 4, and is used to transmit the ultraviolet rays in the sunlight to the SPM waste liquid decomposition tank 4. The ultraviolet rays in the sunlight decompose the H2O2 in the SPM waste liquid in the SPM waste liquid decomposition tank 4 into H2O and O2. Since the SPM waste liquid decomposition tank 4 is provided with a first exhaust port 401, the O2 generated by the ultraviolet decomposition is discharged to the outside of the SPM waste liquid decomposition tank 4 through the first exhaust port 401.

[0054] Since the ultraviolet rays in the sunlight transmitted to the SPM waste liquid decomposition tank 4 through the sunlight collecting and guiding component 7 preferentially decompose the surface part of the SPM waste liquid in the SPM waste liquid decomposition tank 4, that is, the decomposition of the SPM waste liquid on the top is faster, and the decomposition is slower as it goes down. Therefore, in order to speed up the decomposition of H2O2 in the SPM waste liquid, this embodiment arranges a circulating reflux stirring component on the SPM waste liquid decomposition tank 4 to stir the SPM waste liquid in the SPM waste liquid decomposition tank 4, thereby realizing the accelerated decomposition of H2O2 in the SPM waste liquid.

[0055] The circulating reflux stirring component belongs to the mature technology in this field, therefore, the utility model does not limit the specific structure of the circulating reflux stirring component. As an embodiment, the circulating reflux stirring component includes a second delivery pump 5 and a reflux pipe 6, a reflux port is provided on the top cover of the SPM waste liquid decomposition storage tank 4, a drainage port is provided at the bottom end of the SPM waste liquid decomposition storage tank 4, and the drainage port is connected to the reflux port through the reflux pipe 6 outside the SPM waste liquid decomposition storage tank 4, and the SPM waste liquid at the bottom of the SPM waste liquid decomposition storage tank 4 is transported from the bottom end of the SPM waste liquid decomposition storage tank 4 to the top end of the SPM waste liquid decomposition storage tank 4 through the second delivery pump 5 and the reflux pipe 6, so as to achieve the stirring of the SPM waste liquid in the SPM waste liquid decomposition storage tank 4.

[0056] Since the intensity of ultraviolet light will decay with increasing distance, the SPM waste liquid in the SPM waste liquid decomposition tank 4 needs to maintain a constant high liquid level. Preferably, the liquid level in the SPM waste liquid decomposition tank 4 is maintained at a height of about 10-30 cm from the tank top.

[0057] Since the light guide lighting system has been widely used in the field of underground lighting to guide outdoor sunlight into the room, the sunlight collecting and guiding component 7 is a mature technology in the light guide lighting system, and therefore, the utility model does not limit the specific structure of the sunlight collecting and guiding component 7. A specific embodiment is given as follows. Of course, the utility model is not limited to the sunlight collecting and guiding component 7 described in this embodiment. Those skilled in the art can select an applicable sunlight collecting and guiding component 7 according to actual use requirements.

[0058] As an embodiment, the sunlight collecting and guiding component 7 includes a light collector 701, a light pipe 703 and a first connection interface. The light collector 701 can collect sunlight at different angles and ensure the collection of light in different time periods. The light pipe 703 is arranged between the light collector 701 and the first connection interface. After the sunlight enters the light pipe 703, a transmission efficiency of more than 95% can be achieved in the light pipe 703. The sunlight collecting and guiding component 7 is connected to the SPM waste liquid decomposition tank 4 through the first connection interface; the light collector 701 is arranged outdoors.

[0059] In order to prevent rainwater from entering the light guide tube 703, the sunlight collecting light guide component 7 further includes a rainproof component 702, which is arranged at the connection between the light collector 701 and the light guide tube 703. Specifically, the rainproof component 702 is sleeved on the outside of the tube opening of the light guide tube 703, and the light collector 701 is fixed on the rainproof component 702.

[0060] In order to prevent the acid gas in the SPM waste liquid in the SPM waste liquid decomposition tank 4 from volatilizing to the environment outside the SPM waste liquid decomposition tank 4, the SPM waste liquid decomposition tank 4 needs to be sealed. In order to ensure that the ultraviolet rays outside the SPM waste liquid decomposition tank 4 pass through the SPM waste liquid decomposition tank 4 and enter the SPM waste liquid decomposition tank 4, as an embodiment, the sunlight collection and light-guiding component 7 also includes a light-transmitting glass 704 such as quartz glass, and the light-transmitting glass 704 is arranged at one end of the light guide tube 703 located at the first connection interface, in order to ensure the transmittance of ultraviolet rays.

[0061] The top cover of the SPM waste liquid decomposition storage tank 4 is provided with a second connection interface, and the first connection interface is connected to the second connection interface of the SPM waste liquid decomposition storage tank 4 through a flange 8 .

[0062] When encountering continuous rainy weather, the sunlight collecting and guiding component 7 cannot provide sufficient sunlight, so a spare UV light source is needed to irradiate and decompose the SPM waste liquid in the SPM waste liquid decomposition tank 4. As an embodiment, the processing device further includes a UV light source 9, and the UV light source 9 is arranged above the SPM waste liquid decomposition tank 4.

[0063] In order to ensure that the light of the UV light source 9 outside the SPM waste liquid decomposition tank 4 can pass through the SPM waste liquid decomposition tank 4 and enter the SPM waste liquid decomposition tank 4, as an embodiment, the SPM waste liquid decomposition tank 4 is provided with a transparent connecting window 402, and the UV light source 9 is arranged at the transparent connecting window 402, so that the light of the UV light source 9 can pass through the transparent connecting window 402 and enter the SPM waste liquid decomposition tank 4.

[0064] The SPM waste liquid storage tank 1 is also provided with a waste liquid collection port 102 and a second exhaust port 101 , and the waste liquid collection port 102 collects the SPM waste liquid generated by the production process machine.

[0065] Example 2

[0066] Please refer to Figure 2 This embodiment provides a wastewater treatment agent recovery system, including the SPM waste liquid treatment device, the catalytic reaction tank 11 and the H2SO4 storage tank 13 described in the above-mentioned embodiment 1, the SPM waste liquid decomposition storage tank 4 in the SPM waste liquid treatment device is provided with a first drain pipe 10, the first drain pipe 10 is connected to the catalytic reaction tank 11, the catalytic reaction tank 11 is provided with a second drain pipe 12, and the second drain pipe 12 is connected to the inlet of the H2SO4 storage tank 13.

[0067] Furthermore, the catalytic reaction tank 11 is provided with an enzyme input port for inputting the enzyme.

[0068] The H2O2 in the SPM waste liquid in the SPM waste liquid decomposition tank 4 is decomposed into H2O and O2 under ultraviolet irradiation, and O2 is discharged to the outside of the SPM waste liquid decomposition tank 4 through the first exhaust port. After being irradiated with ultraviolet rays during the day, the SPM waste liquid in the SPM waste liquid decomposition tank 4 can be transported to the catalytic reaction tank 11 of the wastewater treatment agent recovery system at night for the next step of decomposition. Specifically, the SPM waste liquid decomposed by the SPM waste liquid treatment device is transported to the catalytic reaction tank 11 through the first drain pipe 10, and generates an H2SO4 solution after chemical reaction with the enzyme, and the H2SO4 solution is transported to the H2SO4 storage tank 13 through the second drain pipe 12.

[0069] Although the utility model is disclosed as above, the utility model is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the utility model. Therefore, the protection scope of the utility model shall be subject to the scope defined by the claims.

Claims

1. A device for treating SPM waste liquid, characterized in that: It includes an SPM waste liquid storage tank, an SPM waste liquid decomposition storage tank and a sunlight collecting and guiding component; the SPM waste liquid storage tank is provided with a delivery pump and a waste liquid transmission pipe, and the SPM waste liquid storage tank transports the SPM waste liquid to the SPM waste liquid decomposition storage tank through the delivery pump and the waste liquid transmission pipe; the sunlight collecting and guiding component is connected to the SPM waste liquid decomposition storage tank, and transmits the ultraviolet rays in the sunlight to the SPM waste liquid decomposition storage tank; the SPM waste liquid decomposition storage tank is provided with a circulating reflux stirring component and a first exhaust port, the circulating reflux stirring component stirs the SPM waste liquid decomposition storage tank, and the gas generated in the SPM waste liquid decomposition storage tank is discharged through the first exhaust port.

2. The processing device according to claim 1, characterized in that The sunlight collecting and guiding component includes a light collector, a light guide tube and a connection interface; the light guide tube is arranged between the light collector and the connection interface, and the sunlight collecting and guiding component is connected to the SPM waste liquid decomposition tank through the connection interface; the light collector is arranged outdoors.

3. The processing device according to claim 2, characterized in that The sunlight collecting and guiding component further comprises a rainproof component, and the rainproof component is arranged at the connection between the light collector and the light guiding tube.

4. The processing device according to claim 2, characterized in that The sunlight collecting and guiding component further comprises light-transmitting glass, and the light-transmitting glass is arranged at one end of the light-guiding tube located at the connecting interface, and the connecting interface is connected to the SPM waste liquid decomposition storage tank via a flange.

5. The processing device according to claim 1, characterized in that The processing device also includes a UV lamp source, and the UV lamp source is arranged above the SPM waste liquid decomposition storage tank.

6. The processing device according to claim 5, characterized in that The SPM waste liquid decomposition storage tank is provided with a transparent connection window, and the UV light source is arranged at the transparent connection window.

7. The processing device according to any one of claims 1 to 6, characterized in that: The liquid level in the SPM waste liquid decomposition storage tank is maintained at a height of 10-30 cm from the tank top.

8. The device according to claim 1, characterized in that The SPM waste liquid storage tank is provided with a waste liquid collecting port and a second exhaust port, and the waste liquid collecting port collects the SPM waste liquid generated by the production process machine.

9. A wastewater treatment agent recovery system, characterized in that: It comprises the SPM waste liquid treatment device as claimed in claim 1, a catalytic reaction tank and an H2SO4 storage tank; the SPM waste liquid decomposition storage tank in the SPM waste liquid treatment device is provided with a first drain pipe, the first drain pipe is connected to the catalytic reaction tank, the catalytic reaction tank is provided with a second drain pipe, and the second drain pipe is connected to the inlet of the H2SO4 storage tank.

10. The recovery system according to claim 9, characterized in that: The catalytic reaction tank is provided with an enzyme input port.

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