Thermal field integrated crucible edge of single crystal furnace

Abstract

The utility model discloses a single crystal furnace thermal field integrated crucible edge which comprises a single crystal furnace body and a crucible edge main body, the crucible edge main body is positioned in the middle of the bottom end of the single crystal furnace body, a crucible core is arranged in the middle of the crucible edge main body, a support rod is arranged at the position of the crucible core at the bottom of the crucible edge main body, and an internal thread structure is arranged at the position of the crucible core. An external thread structure is arranged on the outer wall of the top end of the supporting rod, a limiting assembly is integrally formed in the position, located at the bottom of the external thread structure, of the supporting rod, and the graphite crucible support and the CC crucible edge are integrally formed in the crucible edge body. According to the thermal field integrated crucible edge for the single crystal furnace, the number of thermal field parts is optimized and reduced, meanwhile, the space utilization rate in the single crystal furnace can be greatly improved, the height of a quartz crucible is increased, the feeding amount is increased, the per unit yield is improved, the non-silicon cost is reduced, the blocking of a crucible support to heat of a bottom heater in the material melting process is reduced, and the material melting efficiency is improved; the safety of the material melting process is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of Czochralski single crystals, in particular to a single crystal furnace thermal field integrated crucible. Background Art

[0002] The single crystal furnace thermal field integrated crucible is a structure for supporting the bottom of the single crystal furnace. The existing single crystal silicon production is mainly carried out in a single crystal furnace using the Czochralski method. During the Czochralski single crystal pulling process, the quartz crucible carries the molten silicon liquid formed by the polycrystalline silicon raw material. Since the quartz crucible is in a soft state at high temperature, the outside of the quartz crucible needs to be protected by a crucible. Traditional thermal field design generally uses a CC crucible and a graphite crucible support combination design as a carrier of the quartz crucible, and then assembles the thermal field with a graphite support rod. With the continuous development of science and technology, people have higher and higher requirements for the manufacturing process of the single crystal furnace thermal field integrated crucible.

[0003] The existing single crystal furnace thermal field integrated crucible has certain disadvantages when in use. The number of thermal field components is relatively large, and the space utilization rate in the single crystal furnace is low, which is not conducive to maximizing the height of the quartz crucible and the full crucible feeding amount, improving the unit yield and reducing the non-silicon cost; the bottom heater is a horizontal plane heating element, and the wall thickness of the graphite crucible support is designed to be thicker considering the load-bearing strength and safety. During the material-making process, the graphite crucible support isolates the thermal radiation of the bottom heating to the quartz crucible, and the heat conduction energy transmission efficiency is much lower than the thermal radiation, which is not conducive to improving the material-making efficiency. At the same time, the temperature distribution uniformity of the bottom of the thermal field during the material-making process of the traditional thermal field design is not good, which is not conducive to improving the safety of the material-making process, and cannot more effectively avoid the production accidents caused by the damage and silicon leakage of the quartz crucible due to the secondary crystallization of silicon materials; the traditional thermal field design has more gaps at the joints between the crucible and the crucible support, and the crucible at the gap is more susceptible to oxidation and corrosion, which is not conducive to extending the service life of the crucible and reducing costs. At the same time, due to corrosion damage at the gap, it is more likely to cause the quartz crucible to be damaged and leak silicon, increasing the risk of production accidents. For this reason, we propose a single crystal furnace thermal field integrated crucible. Utility Model Content

[0004] Technical problems solved: In view of the deficiencies in the prior art, the utility model provides a single crystal furnace thermal field integrated crucible bond, which can greatly improve the space utilization rate in the single crystal furnace while optimizing and reducing the number of thermal field components, increase the height of the quartz crucible to increase the feeding amount, improve the unit output and reduce the non-silicon cost, reduce the heat barrier of the crucible support to the bottom heater during the sintering process, improve the sintering efficiency, and improve the safety of the sintering process. Compared with the traditional thermal field design, the gap at the joint between the crucible bond and the crucible support is greatly reduced, thereby slowing down the corrosion damage rate of the crucible bond at the gap, extending the service life of the crucible bond, and greatly reducing the possibility of quartz crucible breakage and silicon leakage due to corrosion damage at the gap, reducing the risk of production accidents, and can effectively solve the problems in the background technology.

[0005] Technical solution: To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a single crystal furnace thermal field integrated crucible, including a single crystal furnace body and a crucible main body, the crucible main body is positioned in the middle of the bottom end of the single crystal furnace body, a crucible core is arranged in the middle of the crucible main body, a support rod is installed at the bottom of the crucible main body at the position of the crucible core, an internal thread structure is provided at the position of the crucible core, an external thread structure is provided on the top outer wall of the support rod, and a limiting component is integrally formed at the position of the support rod at the bottom of the external thread structure.

[0006] Preferably, the Ganbang main body includes a graphite sheet, a CC composite sheet, a nylon sheet, a glass fiber sheet and an acrylic resin sheet, the glass fiber sheet is located on the surface of the acrylic resin sheet, the nylon sheet is located on the surface of the glass fiber sheet, the CC composite sheet is located on the surface of the nylon sheet, and the graphite sheet is located on the surface of the CC composite sheet.

[0007] Preferably, the graphite crucible support and the CC crucible are integrally formed inside the crucible body.

[0008] Preferably, the crucible core serves as a support body of the crucible body and is further assembled with a supporting rod.

[0009] Preferably, the top of the support rod is assembled with the middle part of the brace body through an external thread structure and an internal thread structure, and is limited by a limiting assembly.

[0010] Preferably, the graphite sheet, CC composite sheet, nylon sheet, glass fiber sheet and acrylic resin sheet are integrally formed by die-casting.

[0011] Beneficial effects: Compared with the prior art, the utility model provides a single crystal furnace thermal field integrated crucible bond, which has the following beneficial effects: the single crystal furnace thermal field integrated crucible bond can greatly improve the space utilization rate in the single crystal furnace while optimizing and reducing the number of thermal field components, increase the height of the quartz crucible to increase the feeding amount, improve the unit yield and reduce the non-silicon cost, reduce the heat barrier of the crucible support to the heat of the bottom heater during the material processing, improve the material processing efficiency, improve the material processing process safety, have higher heat conduction efficiency and more uniform temperature distribution, avoid production accidents caused by damage to the quartz crucible and silicon leakage due to secondary crystallization of silicon material, and compared with the traditional thermal field design, greatly reduce the gap between the crucible bond and the crucible support assembly connection, thereby slowing down the corrosion damage rate of the crucible bond at the gap, extending the service life of the crucible bond while greatly reducing the possibility of damage and silicon leakage of the quartz crucible due to corrosion damage at the gap, thereby reducing the risk of production accidents. The entire single crystal furnace thermal field integrated crucible bond has a simple structure and is easy to operate, and the effect of use is better than that of the traditional method. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 The utility model is a schematic diagram of the overall structure of a single crystal furnace thermal field integrated crucible.

[0013] Figure 2 It is a schematic structural diagram of the overall disassembly of a single crystal furnace heat field integrated crucible of the utility model.

[0014] Figure 3 It is a structural schematic diagram of a crucible main body in a single crystal furnace heat field integrated crucible of the utility model.

[0015] Figure 4 This is a schematic structural diagram of the exploded main body of a single crystal furnace heat field integrated crucible in the utility model.

[0016] Figure 5 This is a structural schematic diagram of an enlarged view of point A in a single crystal furnace heat field integrated crucible according to the utility model.

[0017] In the figure: 1. Single crystal furnace body; 2. Crusher body; 3. Support rod; 4. Crusher core; 5. Graphite sheet; 6. CC composite sheet; 7. Nylon sheet; 8. Glass fiber sheet; 9. Acrylic resin sheet; 10. Internal thread structure; 11. Limiting assembly; 12. External thread structure. DETAILED DESCRIPTION

[0018] The technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings and specific embodiments, but those skilled in the art will understand that the embodiments described below are part of the embodiments of the utility model, rather than all of the embodiments, and are only used to illustrate the utility model, and should not be considered as limiting the scope of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the utility model. If the specific conditions are not specified in the embodiments, they are carried out according to conventional conditions or conditions recommended by the manufacturer. If the manufacturer is not specified for the reagents or instruments used, they are all conventional products that can be purchased commercially.

[0019] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0020] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0021] like Figure 1-5 As shown, a single crystal furnace thermal field integrated crucible, comprising a single crystal furnace body 1 and a crucible body 2, the crucible body 2 is positioned at the middle of the bottom end of the single crystal furnace body 1, a crucible core 4 is arranged in the middle of the crucible body 2, a supporting rod 3 is installed at the bottom of the crucible body 2 at the position of the crucible core 4, an internal thread structure 10 is provided at the position of the crucible core 4, an external thread structure 12 is provided on the top outer wall of the supporting rod 3, and a limited position component 11 is integrally formed at the position of the bottom of the external thread structure 12 on the supporting rod 3, which can greatly improve the space utilization rate in the single crystal furnace while optimizing and reducing the number of thermal field components, increase the height of the quartz crucible to increase the feeding amount, improve the unit yield and reduce the non-silicon cost, reduce the heat barrier of the crucible support to the bottom heater during the material processing, improve the material processing efficiency, improve the material processing safety, and greatly reduce the gap between the crucible and the crucible support assembly joint compared with the traditional thermal field design, thereby slowing down the corrosion damage rate of the crucible at the gap, extending the service life of the crucible, and greatly reducing the possibility of quartz crucible breakage and silicon leakage due to corrosion damage at the gap, thereby reducing the risk of production accidents.

[0022] Preferably, the Ganbang main body 2 includes a graphite sheet 5, a CC composite sheet 6, a nylon sheet 7, a glass fiber sheet 8 and an acrylic resin sheet 9, the glass fiber sheet 8 is located on the surface of the acrylic resin sheet 9, the nylon sheet 7 is located on the surface of the glass fiber sheet 8, the CC composite sheet 6 is located on the surface of the nylon sheet 7, and the graphite sheet 5 is located on the surface of the CC composite sheet 6.

[0023] Preferably, the graphite crucible support and the CC crucible are integrally formed inside the crucible body 2 .

[0024] Preferably, the crucible core 4 serves as a support body of the crucible body 2 and is further assembled with the supporting rod 3 .

[0025] Preferably, the top of the support rod 3 is assembled with the middle of the crucible body 2 through the external thread structure 12 and the internal thread structure 10 , and is limited by the limiting assembly 11 .

[0026] Preferably, the graphite sheet 5, the CC composite sheet 6, the nylon sheet 7, the glass fiber sheet 8 and the acrylic resin sheet 9 are integrally formed by die-casting.

[0027] Working principle: The utility model includes a single crystal furnace body 1, a crucible body 2, a support rod 3, a crucible core 4, a graphite sheet 5, a CC composite sheet 6, a nylon sheet 7, a glass fiber sheet 8, an acrylic resin sheet 9, an internal thread structure 10, a limit assembly 11, and an external thread structure 12;

[0028] Cancel the traditional graphite crucible support design;

[0029] Taking advantage of the strength of CC materials, the graphite crucible support and CC crucible are integrated into one design;

[0030] The crucible core is further assembled with the supporting rod as the CC crucible support body;

[0031] ① While optimizing and reducing the number of thermal field components, the space utilization rate in the single crystal furnace can be greatly improved, the height of the quartz crucible can be increased to increase the feed amount, the unit yield can be increased, and the non-silicon cost can be reduced;

[0032] ② Reduce the heat barrier of the crucible support to the bottom heater during the process of material processing, improve the material processing efficiency, and improve the safety of the material processing process (higher heat conduction efficiency during the material processing, more uniform temperature distribution at the bottom of the thermal field, and avoid production accidents caused by damage to the quartz crucible and silicon leakage due to secondary crystallization of silicon material);

[0033] ③ Compared with the traditional thermal field design, the gap between the crucible and the crucible support is greatly reduced, thereby slowing down the corrosion damage rate of the crucible at the gap, extending the service life of the crucible, and greatly reducing the possibility of quartz crucible breakage and silicon leakage due to corrosion damage at the gap, thereby reducing the risk of production accidents.

[0034] It should be noted that, in this article, relational terms such as first and second (number one, number two), etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0035] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. The technicians in this industry should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model will have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. A single crystal furnace thermal field integrated crucible, comprising a single crystal furnace body (1) and a crucible body (2), characterized in that: The crucible body (2) is positioned at the middle of the bottom end of the single crystal furnace body (1); a crucible core (4) is arranged in the middle of the crucible body (2); a support rod (3) is installed at the bottom of the crucible body (2) at the position of the crucible core (4); an internal thread structure (10) is provided at the position of the crucible core (4); an external thread structure (12) is provided on the top outer wall of the support rod (3); and a limiting component (11) is integrally formed at the position of the support rod (3) at the bottom of the external thread structure (12).

2. The single crystal furnace thermal field integrated crucible according to claim 1, characterized in that: The crucible body (2) comprises a graphite sheet (5), a CC composite sheet (6), a nylon sheet (7), a glass fiber sheet (8) and an acrylic resin sheet (9), wherein the glass fiber sheet (8) is located on the surface of the acrylic resin sheet (9), the nylon sheet (7) is located on the surface of the glass fiber sheet (8), the CC composite sheet (6) is located on the surface of the nylon sheet (7), and the graphite sheet (5) is located on the surface of the CC composite sheet (6).

3. The single crystal furnace thermal field integrated crucible according to claim 1, characterized in that: The graphite crucible support and the CC crucible are integrally formed inside the crucible body (2).

4. The single crystal furnace thermal field integrated crucible according to claim 1, characterized in that: The crucible core (4) serves as a support body for the crucible body (2) and is further assembled with the supporting rod (3).

5. The single crystal furnace thermal field integrated crucible according to claim 1, characterized in that: The top of the support rod (3) is assembled with the middle of the crucible body (2) through an external thread structure (12) and an internal thread structure (10), and is limited in position by a limiting assembly (11).

6. The single crystal furnace thermal field integrated crucible according to claim 2, characterized in that: The graphite sheet (5), CC composite sheet (6), nylon sheet (7), glass fiber sheet (8) and acrylic resin sheet (9) are integrally formed by die-casting.

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