Wafer bracket suitable for Malangori drying machine

Abstract

The utility model relates to the technical field of wafer processing, in particular to a wafer bracket suitable for a Malangori drying machine, which comprises a base arranged on the side surface of the Malangori drying machine; the lifting modules are arranged on the side face of the base in the vertical direction; rotating shaft mounting seats of the linear rocker modules are mounted on the movable devices of the lifting modules, and the rotating shaft mounting seats of the linear rocker modules are pushed by the lifting modules to reciprocate in the vertical direction; and at least one group of wafer racks, rocker arm structures of the wafer racks are fixedly connected with the linear rocker module, the wafer racks are driven by the linear rocker module to move, and wafers are placed on the wafer racks. By means of the arrangement, the distance between the wafer frame and the rotating shaft can be changed in the Malangori drying process, so that the wafer frame is closer to a spraying area, and the efficiency that residual liquid falls off the surface of the wafer is improved through swinging.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a wafer bracket suitable for a Marangoni dryer. Background Art

[0002] The Marangoni drying method is a method that utilizes a solvent with a lower surface tension than the bath fluid (such as isopropyl alcohol (IPA) vapor), which is introduced into the fluid meniscus formed as the substrate is lifted from the bath. The solvent vapor dissolves into the fluid meniscus, forming a surface tension gradient. The presence of the surface tension gradient causes the bath fluid to flow away from the low surface tension area at the tip of the drying meniscus and leave the substrate, leaving the substrate dry with almost no streaks, spots, and residual traces. Chinese patent CN201980079388.X discloses a typical processing method and equipment for Marangoni drying of wafers.

[0003] In this type of equipment, the wafer is vertically immersed in the rinse tank and lifted by a lifting device through the spray area of ​​the spray bar assembly to achieve the Marangoni drying process. The lifting method includes vertical lifting as described in the above patent, and also includes a method of using a swing mechanism to make the wafer pass through the spray area. Figure 1 A typical swing device is shown, which is installed on the side of the dryer and includes a swing arm A1 and a linear motor A2. The swing arm A1 is provided with a fixed shaft connected to the side plate of the dryer, and the linear motor A2 is connected to the upper end of the swing arm A1, thereby driving the swing arm A1 to swing around the shaft. A wafer holder A3 is provided at the lower end of the swing arm A1 for placing wafers. During the drying process, the linear motor A2 reciprocates, driving the swing arm A1 to swing around the shaft, thereby driving the wafer at the other end to swing through the spray area. During the Marangoni drying process, the residual liquid is accelerated to leave the wafer surface through the swing.

[0004] However, in actual implementation, the inventor discovered that when a swing mechanism is used to lift the wafer, since the bottom end point of the wafer is located at the far end of the swing arm, it is often located on the edge of the spray area during the swinging process, resulting in poor drying effect. Utility Model Content

[0005] In view of the above problems existing in the prior art, a wafer holder suitable for a Marangoni dryer is provided.

[0006] The specific technical solutions are as follows:

[0007] A wafer carrier suitable for a Marangoni dryer, comprising a base, wherein the base is mounted on a side of the Marangoni dryer;

[0008] At least one set of lifting modules, wherein the lifting modules are arranged on the side of the base along the vertical direction;

[0009] At least one set of linear rocker modules, wherein the rotary shaft mounting seat of the linear rocker module is mounted on the movable device of the lifting module, and the rotary shaft mounting seat of the linear rocker module reciprocates in the vertical direction under the push of the lifting module;

[0010] At least one group of wafer racks, the rocker arm structure of the wafer rack is fixedly connected to the linear rocker module, the wafer rack moves under the drive of the linear rocker module, and the wafer is placed on the wafer rack.

[0011] On the other hand, the lifting module comprises:

[0012] A slider guide rail, the slider guide rail is arranged on the side of the base along the vertical direction and is fixedly connected to the base by bolts;

[0013] The cross section of the slider guide rail is in an I-shape;

[0014] The clamping portion of the movable device cooperates with the slider guide rail to slidably connect the movable device to the slider guide rail.

[0015] On the other hand, the linear rocker module is composed of a linear drive device and the shaft mounting seat;

[0016] The linear drive device comprises:

[0017] A linear device panel, wherein the linear device panel is fixed to a side of the base;

[0018] A single-axis robot, the single-axis robot is arranged on the linear device panel in a horizontal direction, and the moving part of the single-axis robot points to the side;

[0019] An adapter plate, the adapter plate being fixed on the moving component in a vertical direction to provide a vertical surface parallel to the base;

[0020] At least one set of slide groove structures, wherein the slide groove structures are fixed on the vertical surface of the adapter plate in the vertical direction, and the sliding components of the slide groove structures are connected to the roll axis of the rocker arm structure;

[0021] The rotating shaft of the rocker arm structure is connected to the rotating shaft mounting seat.

[0022] On the other hand, the shaft mounting seat comprises:

[0023] A shell, the shell is fixedly connected to the lifting module, and a rotating shaft opening is provided on a side of the shell facing the rocker arm structure;

[0024] A rotating shaft bearing is fixed in the rotating shaft opening and connected to the rotating shaft head on the rocker arm structure so that the rotating shaft head rotates in the rotating shaft bearing.

[0025] On the other hand, the chute structure comprises:

[0026] A slide plate, the slide plate is vertically fixed on the vertical surface of the adapter plate, and a sliding groove is provided in the middle of the slide plate along the vertical direction;

[0027] A rocker shaft is disposed on the inner side of the bottom end of the rocker, and the rocker shaft passes through and is fixed on the linear device panel, so that the rocker can rotate freely around the rocker shaft;

[0028] A rocker bearing is disposed on the inner side surface of the top end point of the rocker, a rocker guide shaft is fixed in the rocker bearing, and the rocker guide shaft passes through the rocker bearing and penetrates into the sliding groove;

[0029] When the single-axis robot drives the adapter plate to reciprocate, the sliding groove abuts against the rocker guide shaft and causes the rocker guide shaft to slide along the sliding groove;

[0030] The rocker guide shaft also passes through the rocker bearing to reach the outer side of the rocker and is inserted into the roll bearing on the rocker arm structure.

[0031] On the other hand, the single-axis robot comprises:

[0032] A robot linear module, the robot linear module is arranged on the linear device panel along the horizontal direction, and the moving component is arranged on the robot linear module;

[0033] A servo motor, wherein the servo motor is installed in the robot linear module, and the servo motor drives the moving part to move;

[0034] A plurality of position sensors are distributed on the robot linear module.

[0035] On the other hand, the side surface of the rocker arm structure is an "X"-shaped structure, and the first side of the "X"-shaped structure is respectively connected to the linear drive device and the rotating shaft mounting seat;

[0036] A horizontally placed bracket is arranged at the far end point of the second side of the X-shaped structure, and the wafer is accommodated above the bracket.

[0037] In another aspect, the bracket comprises:

[0038] A bracket bottom plate, the bracket bottom plate is fixedly connected to the rocker arm structure, and the bracket bottom plate is horizontally arranged;

[0039] A wafer rack, wherein the wafer rack is fixed above the bracket bottom plate;

[0040] The wafer rack comprises at least one pair of wafer clamping grooves in the side-view direction. The wafer clamping grooves are respectively located on two sides of the wafer rack in the top-view direction, and the wafer clamping grooves are vertically arranged.

[0041] On the other hand, the wafer rack is H-shaped in a top view direction;

[0042] The wafer rack is provided with a pair of wafer clamping grooves at upper and lower sides in a top-view direction, respectively.

[0043] The above technical solution has the following advantages or beneficial effects:

[0044] In view of the problem that the swing arm mechanism in the prior art will always keep the bottom of the wafer at the edge of the spray area, resulting in poor drying effect, in this solution, a lifting module and a linear rocker module are respectively set in the wafer holder, wherein the linear rocker module can reciprocate in the height direction under the push of the lifting module, and the linear rocker module itself can drive the swing arm mechanism to swing along an arc. Through the above arrangement, the wafer rack can change the distance relative to the rotating shaft during the Marangoni drying process, so as to be closer to the spray area, and the efficiency of residual liquid falling off the wafer surface can be improved by swinging. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] The embodiments of the present invention will be described more fully with reference to the attached drawings, which are however only used for illustration and description and are not intended to limit the scope of the present invention.

[0046] Figure 1 It is a schematic diagram of background technology;

[0047] Figure 2 It is an overall schematic diagram of an embodiment of the utility model;

[0048] Figure 3 This is a schematic diagram of a lifting module and a rotating shaft mounting seat in an embodiment of the utility model;

[0049] Figure 4 This is a schematic diagram of a linear rocker module in an embodiment of the utility model;

[0050] Figure 5 This is a side view of a linear rocker module in an embodiment of the utility model;

[0051] Fig. 6A This is a schematic diagram of the first direction swing of the linear rocker module in the embodiment of the utility model;

[0052] Figure 6B It is a vertical schematic diagram of a linear rocker module in an embodiment of the utility model;

[0053] Figure 6C This is a schematic diagram of the second direction swing of the linear rocker module in the embodiment of the utility model;

[0054] Figure 7 It is a schematic diagram of a wafer rack in an embodiment of the present utility model. DETAILED DESCRIPTION

[0055] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0056] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0057] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but they are not intended to limit the present invention.

[0058] The utility model includes:

[0059] A wafer carrier suitable for use with a Marangoni dryer, such as Figure 2 As shown, it includes a base 1, which is installed on the side of the Marangoni dryer;

[0060] At least one set of lifting modules 2, the lifting modules 2 are arranged on the side of the base 1 along the vertical direction;

[0061] At least one set of linear rocker modules 3, the shaft mounting seat 31 of the linear rocker module 3 is mounted on the movable device 21 of the lifting module, and the shaft mounting seat 31 of the linear rocker module 3 reciprocates in the vertical direction under the push of the lifting module 2;

[0062] At least one group of wafer racks 4 , the rocker structure 41 of the wafer rack 4 is fixedly connected to the linear rocker module 3 , the wafer rack 4 moves under the drive of the linear rocker module 3 , and the wafer is placed on the wafer rack 4 .

[0063] Specifically, in view of the problem that the swing arm mechanism in the prior art will always make the bottom of the wafer at the edge of the spray area, resulting in poor drying effect, in this embodiment, a lifting module 2 and a linear rocker module 3 are respectively set in the wafer holder. Among them, the lifting module 2 is set on the side of the base 1 in the vertical direction, and it has a movable device 21. The rotating shaft mounting seat 31 part of the linear rocker module 3 can reciprocate in the height direction under the push of the movable device 21. In addition, the linear rocker module 3 itself can drive the swing arm mechanism to swing along the arc. On this basis, the structure of the linear rocker module 3 is improved so that it can change the height position of the rocker structure 41 under the drive of the lifting module 2. Through the above-mentioned setting, the wafer rack can change the distance relative to the rotating shaft during the Marangoni drying process, so as to be closer to the spray area, and the efficiency of residual liquid falling off the wafer surface is improved by swinging.

[0064] In one embodiment, Figure 3 As shown, the lifting module 2 includes:

[0065] The slider guide rail 22 is arranged on the side of the base in the vertical direction and is fixedly connected to the base 1 by bolts;

[0066] The cross section of the slider guide rail 22 is in an I-shape;

[0067] The clamping portion of the movable device 21 cooperates with the slider rail 22 to slidably connect the movable device 21 to the slider rail.

[0068] Specifically, in order to push the rocker structure 41 in the height direction, in this embodiment, a corresponding lifting module 2 is set at a relatively lower position on the side of the base 1. Among them, the slider guide 22 is set on the side of the base in the vertical direction, and is fixedly connected to the base 1 by bolts. The cross-section of the slider guide 22 is I-shaped to cooperate with the clamping part of the movable device 21, so that the movable device 21 can be fixed on the slider guide 22 and reciprocate in the height direction under the drive of the linear motor on the slider guide. Among them, the movable device 21 is fixedly connected to the shaft mounting seat 31 of the linear rocker module 3, and the shaft mounting seat corresponds to the rotation axis of the rocker structure 41.

[0069] In one embodiment, the linear rocker module 3 is composed of a linear drive device and a shaft mounting seat 31;

[0070] like Figure 4 As shown, the linear drive device includes:

[0071] A linear device panel 321, the linear device panel 321 is fixed to the side of the base 1;

[0072] A single-axis robot 322, which is arranged on the linear device panel 321 in a horizontal direction, and a moving part of the single-axis robot 322 is directed to the side;

[0073] The adapter plate 323 is fixed on the moving component in a vertical direction to provide a vertical surface parallel to the base;

[0074] At least one set of slide groove structures 33, the slide groove structures 33 are fixed on the vertical surface of the adapter plate 323 along the vertical direction, and the rocker 34 on the slide groove structure 33 is connected to the roll axis of the rocker arm structure 41;

[0075] The rotating shaft of the rocker arm structure 41 is connected to the rotating shaft mounting seat 31 .

[0076] Specifically, in order to realize the swing of the rocker arm structure 41 around the axis, and to add the function of reciprocating motion in the height direction on this basis, in this embodiment, the linear rocker arm module 3 is improved, and on the basis of the shaft mounting seat 31 being installed on the lifting module 2, a set of adapter plates 323 are additionally added to the moving parts of the single-axis robot 322. The single-axis robot 322 itself can only reciprocate in a straight line, and in this embodiment, it is horizontally installed on the linear device panel 321. At this time, in order to adapt to the rocker arm structure 41 driven by the lifting module 2 and displaced in the height direction, an adapter plate 323 is also provided. The adapter plate 323 is vertically arranged, and a set of slide groove structures 33 are opened on it. The rocker 34 on the slide groove structure 33 is connected to the roll axis of the rocker arm structure 41. When the rotating shaft part of the rocker arm structure 41 moves under the up and down pushing action of the lifting module 2, the roll axis part can cooperate with the slide groove structure 33 to slide up and down in the slide groove structure 33; at the same time, when the slide groove structure 33 is driven by the adapter plate and the single-axis robot to reciprocate in the horizontal direction, the structure of its lateral part is against the roll bearing, thereby realizing the push on the roll axis part, so as to apply a horizontal lateral force component to the rocker arm structure, and cooperate with the rotating shaft to make the rocker arm structure 41 rotate in a circular arc around the rotating shaft.

[0077] In one embodiment, the shaft mounting seat 31 includes:

[0078] A housing 311, the housing 311 is fixedly connected to the lifting module 2, and a rotating shaft opening 312 is provided on the side of the housing 311 facing the rocker structure 41;

[0079] The rotating shaft bearing 313 is fixed in the rotating shaft opening 312 and connected to the rotating shaft head 42 on the rocker arm structure 41 so that the rotating shaft head 42 rotates in the rotating shaft bearing.

[0080] Specifically, in order to enable the rocker arm structure 41 to rotate around the rotating shaft, in this embodiment, after the rotating shaft mounting base 31 is installed on the lifting module 2, a rotating shaft opening 312 is opened on the shell 311, and a rotating shaft bearing is fixed inside the shell 311, so that the rotating shaft of the rocker arm structure 41 can rotate freely on the rotating shaft mounting base 31 through the rotating shaft bearing.

[0081] In one embodiment, Figure 5 As shown, the slide groove structure 33 includes:

[0082] A slide plate 331, the slide plate 331 is vertically fixed on the vertical surface of the adapter plate 323, and a slide groove 332 is provided in the middle of the slide plate 331 along the vertical direction;

[0083] A rocker shaft 341 is disposed on the inner side of the bottom end of the rocker 34. The rocker shaft 341 passes through and is fixed on the linear device panel 321, so that the rocker 34 can rotate freely around the rocker shaft 341.

[0084] A rocker bearing 342 is disposed on the inner side surface of the top end point of the rocker 34, a rocker guide shaft is fixed in the rocker bearing 342, and a rocker guide shaft 343 passes through the rocker bearing 342 and penetrates into the sliding groove 332;

[0085] When the single-axis robot 322 drives the adapter plate 323 to reciprocate, the sliding groove 332 abuts against the rocker guide shaft 343 and causes the rocker guide shaft to slide along the sliding groove;

[0086] The rocker guide shaft 343 also passes through the rocker bearing 342 to reach the outer side of the rocker 34 and is inserted into the roll bearing on the rocker arm structure 41 .

[0087] Specifically, when it is necessary to input a lateral force component to the rocker structure 41 to drive the rocker structure 41 to swing around the axis, in this embodiment, a slide plate 331 is firstly provided on the vertical surface of the adapter plate 323, and a slide groove 332 is provided in the middle of the slide plate 331 along the vertical direction, and the slide groove 332 can accommodate the rocker guide shaft 343 to slide up and down in the slide groove 332 and provide horizontal limit and force transmission. Subsequently, a rocker 34 is fixed on the linear device panel 321 through a rocker shaft 341, and the rocker shaft 341 is a fixed structure on the linear device panel 321, and the other end thereof penetrates into the bottom bearing on the rocker 34, so that the rocker 34 can rotate freely around the rocker shaft 341. Then, a rocker bearing 342 is installed on the top end of the rocker 34, the middle part of the rocker guide shaft 343 passes through the rocker bearing 342, and the first end of the rocker guide shaft 343 on the inner side of the rocker 34 passes through the sliding groove 332 to achieve the corresponding sliding reversing function; accordingly, the rocker guide shaft 343 passes through the rocker bearing 342, the second end located on the outer side of the rocker 34, and passes through the roll bearing on the rocker arm structure 41 to achieve the transmission of the force in the horizontal direction. Based on the above design, if Fig. 6A , Figure 6B and Figure 6C As shown, with the movement of the single-axis robot 322 and the linear drive device, the force acting on the single-axis robot 322 can be transmitted; at the same time, since the sliding groove 332 provides a certain degree of freedom for the rocker guide shaft 343 in the vertical direction, the rocker guide shaft 343 can move up and down without being affected by the lifting and lowering of the lifting module 2.

[0088] In one embodiment, as shown in FIG6 , the single-axis robot 322 includes:

[0089] A robot linear module 3221, which is arranged on a linear device panel 321 along a horizontal direction, and a moving part is arranged on the robot linear module 3221;

[0090] Servo motor: The servo motor is installed in the robot linear module, and the servo motor drives the moving parts to move;

[0091] Multiple position sensors, the position sensors are distributed on the robot linear module 3221.

[0092] Specifically, in order to realize the driving of the rocker arm structure 41, in this embodiment, a robot linear module 3221 is arranged horizontally on the linear device panel 321, which includes a set of linear guide rail structures and moving parts, and a servo motor is installed inside. The servo motor is installed in the robot linear module to drive the moving parts to move. In order to realize a more accurate control process, a position sensor can also be set to detect and determine the position of the moving parts. The driving and control process of the servo motor itself is a prior art.

[0093] In one embodiment, the side of the rocker arm structure 41 is in an "X" shape, and the first side of the "X" shape is respectively connected to the linear drive device 3 and the shaft mounting seat 31;

[0094] A horizontally placed bracket 42 is disposed at the far end of the second side of the X-shaped structure, and a wafer is accommodated above the bracket 42 .

[0095] Among them, the bottom end of the first side of the "J"-shaped structure is provided with a shaft head 42 and a matching shaft head bearing, and the first end of the shaft head 42 is inserted into the bearing part in the shaft mounting seat 31 to realize the input of the vertical force of the lifting module. At the same time; the top structure of the first side is provided with a roll bearing, which is passed through the rocker guide shaft 343 to provide horizontal force input.

[0096] In one embodiment, Figure 7 As shown, the bracket 43 includes:

[0097] A bracket bottom plate 431, the bracket bottom plate 431 is fixedly connected to the rocker structure 41, and the bracket bottom plate 431 is horizontally arranged;

[0098] Wafer rack 432, the wafer rack 432 is fixed above the bracket bottom plate 431;

[0099] The wafer rack 432 includes at least one pair of wafer clamping grooves 433 in the side view direction. The wafer clamping grooves 433 are respectively located on both sides of the wafer rack 432 in the top view direction. The wafer clamping grooves 433 are vertically arranged.

[0100] The wafer rack 432 is H-shaped in a top view;

[0101] The wafer rack 432 is provided with a pair of wafer clamping grooves 433 at upper and lower sides thereof in a top view.

[0102] Specifically, in order to achieve a better clamping effect on the wafer, in this embodiment, a bracket bottom plate 431 is horizontally arranged in the bracket 43, and an H-shaped wafer rack is arranged above it. A pair of wafer clamping grooves 433 are respectively arranged on the upper and lower sides of the wafer rack, thereby achieving effective storage of two vertically arranged wafers.

[0103] The above are only preferred embodiments of the present invention, and do not limit the implementation mode and protection scope of the present invention. Those skilled in the art should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the description and illustrations of the present invention should be included in the protection scope of the present invention.

Claims

1. A wafer holder suitable for a Marangoni dryer, characterized in that: comprising a base, the base being mounted on a side of the Marangoni dryer; At least one set of lifting modules, wherein the lifting modules are arranged on the side of the base along the vertical direction; At least one set of linear rocker modules, wherein the rotary shaft mounting seat of the linear rocker module is mounted on the movable device of the lifting module, and the rotary shaft mounting seat of the linear rocker module reciprocates in the vertical direction under the push of the lifting module; At least one group of wafer racks, the rocker arm structure of the wafer rack is fixedly connected to the linear rocker module, the wafer rack moves under the drive of the linear rocker module, and the wafer is placed on the wafer rack.

2. The wafer holder according to claim 1, characterized in that: The lifting module comprises: A slider guide rail, the slider guide rail is arranged on the side of the base along the vertical direction and is fixedly connected to the base by bolts; The cross section of the slider guide rail is in an I-shape; The clamping portion of the movable device cooperates with the slider guide rail to slidably connect the movable device to the slider guide rail.

3. The wafer holder according to claim 1, characterized in that: The linear rocker module is composed of a linear drive device and the rotating shaft mounting seat; The linear drive device comprises: A linear device panel, wherein the linear device panel is fixed to a side of the base; A single-axis robot, the single-axis robot is arranged on the linear device panel in a horizontal direction, and the moving part of the single-axis robot points to the side; An adapter plate, the adapter plate being fixed on the moving component in a vertical direction to provide a vertical surface parallel to the base; At least one set of slide groove structures, wherein the slide groove structures are fixed on the vertical surface of the adapter plate in the vertical direction, and the rocker on the slide groove structures is connected to the roll bearing of the rocker arm structure; The rotating shaft of the rocker arm structure is connected to the rotating shaft mounting seat.

4. The wafer holder according to claim 3, characterized in that: The rotating shaft mounting seat comprises: A shell, the shell is fixedly connected to the lifting module, and a rotating shaft opening is provided on a side of the shell facing the rocker arm structure; A rotating shaft bearing is fixed in the rotating shaft opening and connected to the rotating shaft head on the rocker arm structure so that the rotating shaft head rotates in the rotating shaft bearing.

5. The wafer holder according to claim 4, characterized in that: The chute structure comprises: A slide plate, the slide plate is vertically fixed on the vertical surface of the adapter plate, and a sliding groove is provided in the middle of the slide plate along the vertical direction; A rocker shaft is disposed on the inner side of the bottom end of the rocker, and the rocker shaft passes through and is fixed on the linear device panel, so that the rocker can rotate freely around the rocker shaft; A rocker bearing is disposed on the inner side surface of the top end point of the rocker, a rocker guide shaft is fixed in the rocker bearing, and the rocker guide shaft passes through the rocker bearing and penetrates into the sliding groove; When the single-axis robot drives the adapter plate to reciprocate, the sliding groove abuts against the rocker guide shaft and causes the rocker guide shaft to slide along the sliding groove; The rocker guide shaft also passes through the rocker bearing to reach the outer side of the rocker and is inserted into the roll bearing on the rocker arm structure.

6. The wafer holder according to claim 4, characterized in that: The single-axis robot comprises: A robot linear module, the robot linear module is arranged on the linear device panel along the horizontal direction, and the moving component is arranged on the robot linear module; A servo motor, wherein the servo motor is installed in the robot linear module, and the servo motor drives the moving part to move; A plurality of position sensors are distributed on the robot linear module.

7. The wafer holder according to claim 3, characterized in that: The side surface of the rocker arm structure is an "X"-shaped structure, and the first side of the "X"-shaped structure is respectively connected to the linear drive device and the rotating shaft mounting seat; A horizontally placed bracket is arranged at the far end point of the second side of the X-shaped structure, and the wafer is accommodated above the bracket.

8. The wafer holder according to claim 7, characterized in that: The bracket comprises: A bracket bottom plate, the bracket bottom plate is fixedly connected to the rocker arm structure, and the bracket bottom plate is horizontally arranged; A wafer rack, wherein the wafer rack is fixed above the bracket bottom plate; The wafer rack comprises at least one pair of wafer clamping grooves in the side-view direction. The wafer clamping grooves are respectively located on two sides of the wafer rack in the top-view direction, and the wafer clamping grooves are vertically arranged.

9. The wafer holder according to claim 8, characterized in that: The wafer rack is in an H shape when viewed from above; The wafer rack is provided with a pair of wafer clamping grooves at the upper and lower sides in the top view direction.

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