Air injection pipeline for uniform flowing of air flow and Malangori drying machine

Abstract

The utility model discloses an air injection pipeline used for uniform flow of airflow and a Malangori drying machine, the air injection pipeline comprises double spray pipes including an outer pipe and an inner pipe, and the outer pipe is sleeved outside the inner pipe; one end of the inner pipe is provided with an air inlet, and the other end is a sealed end; two ends of the outer pipe are sealed; a buffer area is arranged between the outer wall of the inner pipe and the inner wall of the outer pipe; a plurality of first air outlet holes are formed in the outer pipe; a plurality of second air outlet holes are formed in the inner pipe; the diameter of the first air outlet hole is gradually increased in the direction from the air inlet to the sealing end; and gas in the double spray pipes sequentially passes through the second air outlet hole, the buffer area and the first air outlet hole and then is sprayed out. According to the utility model, the plurality of first air outlet holes with gradually increased diameters are arranged, so that the gas can form gradient acceleration and diffusion in the pipeline, the flowing state of the gas flow in the pipeline is effectively improved, and the non-uniform phenomenon caused by local high-speed or low-speed flowing is avoided; and stable and uniform distribution of the air flow in the whole pipeline length is realized.

Description

Technical Field

[0001] The utility model relates to the field of wafer manufacturing, in particular to an air jet pipeline for uniform air flow and a Marangoni dryer. Background Art

[0002] In the current semiconductor manufacturing process, especially in the wafer drying stage, the isopropyl alcohol (IPA) drying method is commonly used. This method is based on the Marangoni effect principle, that is, atomized IPA and nitrogen mixed gas is quickly sprayed from a double nozzle structure to the wafer surface to quickly remove and evaporate the moisture on the wafer surface to achieve efficient drying. The existing double nozzle structure design usually includes a main pipe with a smaller inner diameter embedded in the outer sleeve, and small holes with a diameter of about 1 mm are evenly distributed on the pipe wall between the two to ensure uniform gas spraying.

[0003] However, the existing dual-nozzle design faces certain limitations and challenges. Although the size of the outlet holes is uniform, in actual use, the simulation results show that the gas ejected by the nozzle does not achieve ideal uniformity, which directly affects the drying uniformity of the wafer surface. The main reason is that the pressure distribution of each outlet hole is not balanced, resulting in significant differences in the speed of gas outflow at different positions.

[0004] Specifically, the gas flow rate at the first outlet hole close to the air inlet is larger, while the flow rate at the end hole far from the air inlet is relatively small. As a result, the gas that arrives at the wafer surface first has fully contacted it and completed the initial drying, while the gas that arrives later fails to fully interact with the wafer surface, which can easily cause insufficient drying in some areas, leaving moisture traces on the wafer surface or inducing the generation of particles, seriously affecting the cleanliness of the wafer and the quality of subsequent processes. Utility Model Content

[0005] In view of the above problems existing in the prior art, an air jet duct and a Marangoni dryer for uniform air flow are provided.

[0006] The specific technical solution is as follows: an air jet duct for uniform air flow, wherein the air jet duct comprises a double nozzle, the double nozzle comprises an outer tube and an inner tube, the outer tube is sleeved on the outside of the inner tube;

[0007] One end of the inner tube is provided with an air inlet, and the other end of the inner tube is a sealed end;

[0008] Both ends of the outer tube are sealed;

[0009] A buffer zone is provided between the outer wall of the inner tube and the inner wall of the outer tube;

[0010] The outer tube is provided with a plurality of first air outlet holes;

[0011] The inner tube is provided with a plurality of second air outlet holes;

[0012] Along the direction from the air inlet to the sealing end, the diameter of the first air outlet gradually increases;

[0013] The gas in the double nozzles is ejected through the second gas outlet, the buffer zone and the first gas outlet in sequence.

[0014] Preferably, the diameter of the first air outlet hole closest to the air inlet is 0.9 mm;

[0015] The diameter of the first air outlet hole closest to the sealing end is 1.3 mm.

[0016] Preferably, the inner tube and the outer tube are arranged on the same axis.

[0017] Preferably, in a direction perpendicular to the axis, the first air outlet holes and the second air outlet holes are arranged alternately.

[0018] Preferably, a plurality of the first air outlet holes are arranged along the length direction of the outer tube, a plurality of the second air outlet holes are arranged along the length direction of the inner tube, and the first air outlet holes and the corresponding second air outlet holes are on the same plane perpendicular to the axial direction.

[0019] Preferably, the air outlet directions of the first air outlet and the corresponding second air outlet are opposite.

[0020] Preferably, the length of the inner tube is the same as the length of the outer tube.

[0021] Preferably, a buffer zone is provided between the outer wall of the inner tube and the inner wall of the outer tube.

[0022] A Marangoni dryer, comprising an air jet duct as described in any one of the above.

[0023] The above technical solution has the following advantages or beneficial effects:

[0024] In the utility model, by arranging a plurality of first air outlet holes with gradually increasing diameters on the jet pipe, the gas entering the air inlet can form a gradient acceleration and diffusion in the pipe, thereby effectively improving the flow state of the airflow in the pipe, avoiding the uneven phenomenon caused by local high-speed or low-speed flow, and achieving a smooth and uniform distribution of the airflow over the entire length of the pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The embodiments of the present invention will be described more fully with reference to the attached drawings, which are however only used for illustration and description and are not intended to limit the scope of the present invention.

[0026] Figure 1 This is a schematic diagram of the overall structure of an air jet duct for uniform air flow in a preferred embodiment of the utility model;

[0027] Figure 2 This is a schematic diagram of the airflow in the jet duct in a preferred embodiment of the present invention. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0030] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but they are not intended to limit the present invention.

[0031] In a preferred embodiment of the present utility model, there is provided an air jet duct for uniform air flow, wherein: Figure 1 and Figure 2 As shown, the jet pipe includes a double nozzle, and the double nozzle includes an outer tube 4 and an inner tube 5, and the outer tube 4 is sleeved on the outside of the inner tube 5;

[0032] One end of the inner tube 5 is provided with an air inlet 1, and the other end of the inner tube 5 is a sealing end 2;

[0033] Both ends of the outer tube 4 are sealed;

[0034] A buffer zone is provided between the outer wall of the inner tube 5 and the inner wall of the outer tube 4;

[0035] The outer tube 4 is provided with a plurality of first air outlet holes 3;

[0036] The inner tube 5 is provided with a plurality of second air outlet holes 6;

[0037] Along the direction from the air inlet 1 to the sealing end 2, the diameter of the first air outlet 3 gradually increases;

[0038] The gas in the double nozzles passes through the second gas outlet 6, the buffer zone and the first gas outlet 3 in sequence and then is ejected.

[0039] Specifically, in the prior art, since the first air outlet holes 3 on the air jet pipe are evenly arranged, the pressure distribution on each first air outlet hole 3 is uneven, resulting in significant differences in the outflow speed of gas at different positions.

[0040] Specifically, the gas flow rate at the first outlet 3 near the air inlet 1 is relatively large, while the gas flow rate at the end first outlet 3 far from the air inlet 1 is relatively small. As a result, the gas that arrives at the wafer surface first has fully contacted it and completed the initial drying, while the gas that arrives later fails to fully interact with the wafer surface, which easily causes insufficient drying in some areas, leaving moisture traces on the wafer surface or inducing the generation of particles, seriously affecting the cleanliness of the wafer and the quality of subsequent processes.

[0041] In the above embodiment, the jet pipe as a whole presents a double nozzle structure with one end open and the other end closed. One end is provided with an air inlet 1 for receiving external gas, and the other end is a sealed end 2 to ensure that the gas can only leave the pipe through a preset channel.

[0042] Along the direction from the air inlet 1 to the sealing end 2, a plurality of first air outlet holes 3 with gradually increasing diameters are orderly arranged on the side wall of the double nozzle. These first air outlet holes 3 are distributed according to scientifically calculated sizes, and the specific increase can be changed according to actual conditions;

[0043] Furthermore, the diameter can be increased in the following ways:

[0044] Embodiment 1, increase according to an arithmetic sequence: on the jet pipe, the diameter of the first air outlet 3 is set to an initial value D0, and then the diameter of each first air outlet 3 increases by a fixed increment d, that is, the diameter of the second first air outlet 3 is D0+d, the diameter of the third first air outlet 3 is D0+2d, and so on, until the last row of first air outlet holes 3 at the sealing end 2.

[0045] Example 2: Increase in geometric sequence: Set the diameter of the first first air outlet 3 as the base value Q, and the diameters of the subsequent first air outlets 3 increase according to a fixed proportional factor r, that is, the diameter of the second first air outlet 3 is Qr, and the diameter of the third first air outlet 3 is Qr 2 , and then gradually increases according to the exponential law until the required maximum diameter is reached.

[0046] Embodiment 3, increasing according to a linear function: the diameter of the first air outlet 3 increases along the linear function f(L) along the pipeline length L, for example, f(L)=kL+b, where k is the diameter growth coefficient, b is the initial diameter offset, and as the pipeline length L increases, the diameter of the first air outlet 3 also increases linearly.

[0047] Embodiment 4, increasing according to a nonlinear function: a nonlinear function g(x) is used to design the diameter increase according to the pipeline length or other variables, such as a quadratic function, a cubic function, an exponential function, etc.

[0048] For example, g(x) = ax 2 +bx+c, where x represents a variable along the pipeline, and a, b, and c are constants, so that the diameter of the first air outlet 3 increases according to a nonlinear rule as the variable x changes.

[0049] Embodiment 5, random growth: a series of allowable diameter increment ranges or probability distributions are set, and the diameter increment of each first air outlet 3 along the pipeline direction is selected according to a predefined random rule to achieve an overall trend of gradual increase, but the specific increment value varies at different positions, reflecting the random characteristics.

[0050] Specifically, in the above embodiment, the double nozzle is mainly composed of two parts, namely the outer tube 4 and the inner tube 5. The outer tube 4 is sleeved on the outer side of the inner tube 5 in a surrounding manner, forming an inner and outer double-layer structure, which increases the functionality and flexibility of the jet pipeline.

[0051] The outer tube 4 is provided with a plurality of first air outlet holes 3 with gradually increasing diameters along its axial direction, especially on the path from the air inlet 1 to the sealing end 2. These first air outlet holes 3 are directly opened on the wall of the outer tube 4 and arranged according to a preset spacing and increasing diameter rule.

[0052] It ensures that when the airflow flows out of the pipeline, it can gradually accelerate along the length of the pipeline, thereby achieving uniform distribution and effective utilization of the airflow.

[0053] The design of the double-duct structure not only enhances the airflow control capability, but also helps to reduce energy consumption and noise and improve work efficiency.

[0054] Specifically, in the above embodiment, the inner tube 5 is used as the main gas transmission channel, and one end of the inner tube 5 is provided with a gas inlet 1 for connecting the gas source and introducing the gas into the pipeline. The other end is sealed to prevent gas leakage from this end, ensuring that all gas must be discharged through a specially designed gas outlet structure.

[0055] The outer tube 4 is tightly assembled around the inner tube 5, and both ends are also strictly sealed to ensure the airtightness of the entire pipeline system. Such a design can not only effectively isolate the influence of the external environment on the internal airflow, but also provide a basic condition for setting the first air outlet 3 with a gradually increasing diameter on the wall of the outer tube 4.

[0056] Through this ingenious double-layer pipe structure, the inner tube 5 carries the main flow of gas and transmits it to the outer tube 4, while the outer tube 4 releases the gas evenly and accurately through the first gas outlet holes 3 with gradually varying diameters on its wall, thereby achieving the purpose of optimizing the gas flow distribution.

[0057] Specifically, in the above embodiment, the buffer zone is located between the outer wall of the inner tube 5 and the inner wall of the outer tube 4, forming a certain space interval.

[0058] The inner tube 5 and the outer tube 4 are arranged concentrically, and the buffer zone therebetween has a certain thickness, serving as a transition zone for the airflow between the inner and outer tubes 4, and plays a role in regulating pressure and stabilizing flow.

[0059] When the gas enters from the air inlet 1 of the inner tube 5 and escapes outward through the second air outlet 6 on the wall of the inner tube 5, the airflow will be buffered and redistributed in the buffer zone, and then evenly ejected through the first air outlet 3 with gradually increasing diameter on the wall of the outer tube 4.

[0060] The buffer zone realizes effective regulation of air flow velocity and pressure, thereby improving the uniformity and control accuracy of the overall air flow distribution.

[0061] Specifically, in the above embodiment, the second air outlet holes 6 are arranged on the circumferential wall surface of the inner tube 5 and are distributed evenly or according to a specific rule along the entire length of the inner tube 5, so that the gas can be evenly ejected from different positions and angles during transmission inside the inner tube 5.

[0062] The gas first enters the inner tube 5 through the gas inlet 1 , is discharged from the second gas outlet 6 on the inner tube 5 , enters the buffer zone, and is then sprayed onto the wafer surface through the first gas outlet 3 .

[0063] In a preferred embodiment of the present utility model, the diameter of the first air outlet 3 closest to the air inlet 1 is 0.9 mm;

[0064] The diameter of the first air outlet hole 3 closest to the sealing end 2 is 1.3 mm.

[0065] Specifically, in the above embodiment, first, a series of first air outlet holes 3 with gradually increasing diameters are provided on the wall of the outer tube 4 along the direction from the air inlet 1 to the sealing end 2. Among them, the diameter of the first row of first air outlet holes 3 adjacent to the air inlet 1 is designed to be 0.9 mm. Such a diameter setting takes into account the pressure and flow velocity characteristics of the gas when it first enters the pipeline, and strives to initially achieve good guidance and dispersion of the airflow at the source.

[0066] As the airflow moves along the pipeline, the diameter of the last row of first air outlet holes 3 increases to 1.3 mm near the sealing end 2. This design strategy is intended to cope with the pressure drop and flow rate slowdown that may occur during the transmission of the airflow in the pipeline. By increasing the diameter of the first air outlet holes 3, the gas output of the terminal first air outlet holes 3 is coordinated with the front end, thereby achieving uniform distribution of the airflow over the entire length of the pipeline.

[0067] In the above embodiment, the problem of uneven airflow in the traditional air jet duct caused by the constant size of the first air outlet 3 is effectively solved, and the airflow control accuracy and energy utilization efficiency are greatly improved.

[0068] In a preferred embodiment of the present invention, in a direction perpendicular to the axis, the first air outlet holes 3 and the second air outlet holes 6 are arranged alternately.

[0069] Specifically, in the above embodiment, the first air outlet holes 3 and the second air outlet holes 6 are arranged in a staggered manner in a direction perpendicular to the pipeline axis.

[0070] In a preferred embodiment of the present invention, a plurality of first air outlet holes are arranged along the length direction of the outer tube, a plurality of second air outlet holes are arranged along the length direction of the inner tube, and the first air outlet holes and the corresponding second air outlet holes are on the same plane perpendicular to the axial direction.

[0071] In a preferred embodiment of the present invention, the first air outlet 3 and the corresponding second air outlet 6 have air outlet directions opposite to each other.

[0072] Specifically, in the above embodiment, the first air outlet 3 is perpendicular to the inner tube 5, in order to make the flow rate and flow distribution of the gas more uniform; after the gas is ejected through the first air outlet 3, it is buffered in the buffer zone between the outer wall of the inner tube 5 and the inner wall of the outer tube 4, and then ejected through the vertical second air outlet 6. Since the second air outlet 6 is also arranged perpendicular to the outer tube 4, the flow of the gas is smoother and the generation of turbulence is reduced.

[0073] Furthermore, in the above embodiment, the first air outlet 3 and the corresponding second air outlet 6 are arranged in a manner that the diameter of the double nozzle is upward, the first air outlet 3 and the second air outlet 6 are arranged opposite to each other, and the relative arrangement angles of the first air outlet 3 and the second air outlet 6 only need to be staggered so that the gas can be buffered in the buffer zone;

[0074] Furthermore, the first gas outlet 3 and the second gas outlet 6 can be arranged at multiple angles according to actual conditions to adjust the ejection direction of the gas.

[0075] Such a staggered layout design helps to achieve multi-dimensional airflow distribution, allowing the gas to be ejected from the different first air outlets 3 of the inner and outer tubes 4 in a more uniform and three-dimensional manner, effectively improving problems such as local airflow unevenness or excessive scouring that may be caused by single-direction air outlet.

[0076] In a preferred embodiment of the present invention, the length of the inner tube 5 is the same as the length of the outer tube 4 .

[0077] Specifically, in the above embodiment, the length of the inner tube 5 is the same as that of the outer tube 4 , and only the diameter of the inner tube 5 is smaller than the diameter of the outer tube 2 . In other configurations, the inner tube 5 is the same as that of the outer tube 4 .

[0078] A Marangoni dryer, comprising any one of the above-mentioned jet ducts.

[0079] The above are only preferred embodiments of the present invention, and do not limit the implementation mode and protection scope of the present invention. Those skilled in the art should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the description and illustrations of the present invention should be included in the protection scope of the present invention.

Claims

1. An air jet duct for uniform air flow, characterized in that: The jet pipe comprises a double nozzle, the double nozzle comprises an outer tube and an inner tube, and the outer tube is sleeved on the outside of the inner tube; One end of the inner tube is provided with an air inlet, and the other end of the inner tube is a sealed end; Both ends of the outer tube are sealed; A buffer zone is provided between the outer wall of the inner tube and the inner wall of the outer tube; The outer tube is provided with a plurality of first air outlet holes; The inner tube is provided with a plurality of second air outlet holes; Along the direction from the air inlet to the sealing end, the diameter of the first air outlet gradually increases; The gas in the double nozzles is ejected through the second gas outlet, the buffer zone and the first gas outlet in sequence.

2. The jet duct according to claim 1, characterized in that: The diameter of the first air outlet hole closest to the air inlet is 0.9 mm; The diameter of the first air outlet hole closest to the sealing end is 1.3 mm.

3. The jet duct according to claim 1, characterized in that: The inner tube and the outer tube are arranged on the same axis.

4. The jet duct according to claim 1, characterized in that: In a direction perpendicular to the axis, the first air outlet holes and the second air outlet holes are arranged alternately.

5. The air injection duct according to claim 4, characterized in that: A plurality of the first air outlet holes are arranged along the length direction of the outer tube, a plurality of the second air outlet holes are arranged along the length direction of the inner tube, and the first air outlet holes and the corresponding second air outlet holes are on the same plane perpendicular to the axial direction.

6. The air injection duct according to claim 1, characterized in that: The first air outlet hole and the corresponding second air outlet hole have air outlet directions opposite to each other.

7. The air injection duct according to claim 1, characterized in that: The length of the inner tube is the same as the length of the outer tube.

8. A Marangoni dryer, characterized in that: The invention comprises an air jet duct as described in any one of claims 1 to 7.

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