Fixing and protecting device for batch feeding of wafers
By designing a batch loading fixing and protection device of wafers including the left cover plate, the right cover plate and the upper cover plate, the ESD problem and wafer scratch problems caused by the iron ring collision during semiconductor wafer handling are solved, and stable fixing and protection of the iron ring and wafer are achieved.
Patent Information
- Application Number
- CN202420495344.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-14
- Publication Date
- 2025-03-11
- Estimated Expiration
- 2034-03-14
AI Technical Summary
During the handling of semiconductor wafers, collisions between the iron rings may lead to electrostatic discharge (ESD) problems, and when manually extracting the wafer, the wafer is easily touched by the iron ring and scratched.
A wafer batch loading fixing and protection device is designed, including the left cover plate, the right cover plate and the upper cover plate. Through structures such as fixed connections and limit grooves, the iron ring and the wafer remain stable during the loading and unloading process, and prevent the iron rings from colliding with each other.
It effectively prevents collisions between the iron rings, avoids electrostatic discharge problems, and prevents the iron ring from hitting the wafer when manually extracting the wafer, avoiding scratches.
Smart Images
Figure CN222600941U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor wafer loading equipment, in particular to a wafer batch loading fixing and protection device. Background Art
[0002] After the wafer is ground and thinned on the back, it needs to be transferred to the iron ring for fixation and placed in the jammer for batch loading and unloading and transportation. During the transportation process, the iron rings will collide with each other, causing ESD problems; during the manual extraction of the wafer, the wafer may be hit by the iron ring next to it and cause scratches.
[0003] When the plug is placed in the equipment, the fixing device is in a horizontal state, which can support the iron ring and the wafer so that they do not collide with each other. After unloading, the fixing device is in the left and right direction, and there is no fixing device at the bottom, so the iron ring and the wafer on the iron ring cannot be fixed. Utility Model Content
[0004] The purpose of the utility model is to provide a wafer batch loading fixing and protection device to solve the problems raised in the above background technology.
[0005] Technical Solution
[0006] The utility model provides the following technical solutions: a wafer batch loading fixing and protection device, comprising a left cover plate, a right cover plate and an upper cover plate, the left cover plate and the right cover plate are respectively located at the bottom end of the upper cover plate, and are respectively located at both sides of the bottom end of the upper cover plate, the left cover plate is fixedly connected to the upper cover plate, the right cover plate is fixedly connected to the upper cover plate, a lower support plate is fixedly installed at the bottom ends of the left cover plate and the right cover plate, a first positioning block, a second positioning block and a third positioning block are respectively fixedly installed at the bottom ends of the lower support plate, the second positioning block and the third positioning block are respectively located at the left and right sides of the first positioning block, and a wafer body is arranged at the top end of the lower support plate.
[0007] Preferably, a left protection lock is movably installed on the front of the left cover plate, and a right protection lock is movably installed on the front of the right cover plate, and the left protection lock and the right protection lock are respectively located on the left and right sides of the wafer body.
[0008] Preferably, a left limiting groove is provided on the inner side of the left cover plate, a right limiting groove is provided on the inner side of the right cover plate, and a first rear limiting groove and a second rear limiting groove are respectively provided between the upper cover plate and the lower support plate.
[0009] Preferably, the right limiting groove, the left limiting groove, the first rear limiting groove and the second rear limiting groove are all located around the wafer body.
[0010] Beneficial Effects
[0011] Compared with the prior art, the utility model provides a wafer batch loading fixing and protection device, which has the following beneficial effects:
[0012] 1. The wafer batch loading fixing and protection device can protect the wafers in the iron ring by opening the right protection lock and the left protection lock and placing the iron ring along the same serial number limit groove.
[0013] 2. When the wafer body of the wafer batch loading fixing and protection device is loaded into the equipment, the right limit groove, the left limit groove, the first rear limit groove and the second rear limit groove are limited together, making the iron ring and the wafer more stable; after unloading, the right protection lock and the left protection lock are in the left and right directions, and there is a fixing device at the bottom to fix the iron ring and the wafer body on the iron ring, so that the iron rings will not collide with each other to eliminate ESD problems; when manually extracting the wafer body, the iron ring next to it is fixed and will not touch the wafer, avoiding scratches. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation to the present invention.
[0015] Figure 1 This is a front view of the overall structure of the utility model;
[0016] Figure 2 This is a bottom view of the overall structure of the utility model;
[0017] Figure 3 It is a schematic diagram of the first rear limit groove and the second rear limit groove of the utility model.
[0018] In the figure: 1. left cover plate; 2. right cover plate; 3. upper cover plate; 4. lower support plate; 5. first positioning block; 6. second positioning block; 7. right limit slot; 8. right protection lock; 9. left protection lock; 10. left limit slot; 11. third positioning block; 12. wafer body; 13. first rear limit slot; 14. second rear limit slot. DETAILED DESCRIPTION
[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0020] Example:
[0021] See also Figure 1-Figure 3A wafer batch loading fixing and protection device comprises a left cover plate 1, a right cover plate 2 and an upper cover plate 3, the left cover plate 1 and the right cover plate 2 are respectively located at the bottom end of the upper cover plate 3, and are respectively located at both sides of the bottom end of the upper cover plate 3, the left cover plate 1 is fixedly connected to the upper cover plate 3, the right cover plate 2 is fixedly connected to the upper cover plate 3, a lower support plate 4 is fixedly installed at the bottom ends of the left cover plate 1 and the right cover plate 2, a first positioning block 5, a second positioning block 6 and a third positioning block 11 are respectively fixedly installed at the bottom ends of the lower support plate 4, the second positioning block 6 and the third positioning block 11 are respectively located at the left and right sides of the first positioning block 5, and a wafer body 12 is arranged at the top of the lower support plate 4.
[0022] The right protection lock 8 and the left protection lock 9 are both used to protect the iron ring and the wafer body 12 from falling out.
[0023] The left cover plate 1, the right cover plate 2, the upper cover plate 3 and the lower support plate 4 are used to connect and support the outer shell of the entire device.
[0024] The left limiting groove 10 and the right limiting groove 7 are used to limit the iron ring.
[0025] The first rear limiting groove 13 and the second rear limiting groove 14 are used to limit the iron ring and also to support the housing of the overall device.
[0026] The first positioning block 5 , the second positioning block 6 and the third positioning block 11 are used to position the plug when wafers are loaded onto the equipment in batches, so as to ensure that the plug is in the accurate loading area of the equipment.
[0027] In this embodiment, a left protection lock 9 is movably installed on the front of the left cover plate 1 , and a right protection lock 8 is movably installed on the front of the right cover plate 2 . The left protection lock 9 and the right protection lock 8 are respectively located on the left and right sides of the wafer body 12 .
[0028] In this embodiment, a left limit groove 10 is provided on the inner side of the left cover plate 1, a right limit groove 7 is provided on the inner side of the right cover plate 2, and a first rear limit groove 13 and a second rear limit groove 14 are provided between the upper cover plate 3 and the lower support plate 4, respectively.
[0029] In this embodiment, the right limiting groove 7 , the left limiting groove 10 , the first rear limiting groove 13 and the second rear limiting groove 14 are all located around the wafer body 12 .
[0030] Working principle of this embodiment:
[0031] Open the right protection lock 8 and the left protection lock 9, and put the iron ring into the limiting groove along the same serial number to protect the wafer in the iron ring.
[0032] If they are not the same serial number limit slots, the iron ring cannot be fully inserted, which can prevent mistakes.
[0033] When the wafer body 12 is loaded into the equipment, there are four limit positions, namely the right limit groove 7, the left limit groove 10, the first rear limit groove 13 and the second rear limit groove 14, which make the iron ring and the wafer more stable; after unloading, the right protection lock 8 and the left protection lock 9 are in the left and right directions, and there are two fixing devices at the bottom to fix the iron ring and the wafer body 12 on the iron ring, so that the iron rings will not collide with each other to eliminate ESD problems; when the wafer body 12 is manually extracted, the iron ring next to it is fixed and will not touch the wafer, avoiding scratches.
Claims
1. A wafer batch loading fixing and protection device, comprising a left cover plate (1), a right cover plate (2) and an upper cover plate (3), characterized in that: The left cover plate (1) and the right cover plate (2) are respectively located at the bottom end of the upper cover plate (3) and are respectively located at both sides of the bottom end of the upper cover plate (3); the left cover plate (1) and the upper cover plate (3) are fixedly connected, and the right cover plate (2) and the upper cover plate (3) are fixedly connected; a lower support plate (4) is fixedly installed at the bottom ends of the left cover plate (1) and the right cover plate (2); a first positioning block (5), a second positioning block (6) and a third positioning block (11) are respectively fixedly installed at the bottom ends of the lower support plate (4); the second positioning block (6) and the third positioning block (11) are respectively located at the left and right sides of the first positioning block (5); and a wafer body (12) is arranged at the top end of the lower support plate (4); A left protection lock (9) is movably mounted on the front of the left cover plate (1), and a right protection lock (8) is movably mounted on the front of the right cover plate (2). The left protection lock (9) and the right protection lock (8) are respectively located on the left and right sides of the wafer body (12).
2. The wafer batch loading, fixing and protecting device according to claim 1, characterized in that: A left limit groove (10) is provided on the inner side of the left cover plate (1), a right limit groove (7) is provided on the inner side of the right cover plate (2), and a first rear limit groove (13) and a second rear limit groove (14) are respectively provided between the upper cover plate (3) and the lower support plate (4).
3. A wafer batch loading, fixing and protecting device according to claim 2, characterized in that: The right limiting groove (7), the left limiting groove (10), the first rear limiting groove (13) and the second rear limiting groove (14) are all located around the wafer body (12).