Tail gas emission device

Abstract

The utility model provides a tail gas emission device which comprises an anti-backflow pipeline, a condenser and a pressure control valve, the anti-backflow pipeline is used for being connected to a negative pressure pumping device through an exhaust pipeline, the gas inlet end of the condenser is used for being connected to a process chamber through a first pipeline, and the gas outlet end of the condenser is connected to the anti-backflow pipeline through a second pipeline. And the pressure control valve is arranged on the second pipeline. Thus, the anti-backflow pipeline is arranged between the exhaust pipeline and the pressure control valve, the condensation effect on water vapor can be improved, the amount of condensed water in the exhaust pipeline is reduced, the anti-backflow pipeline plays a role in preventing the condensed water from flowing backwards, and the situation that the pressure control of the pressure control valve is unstable due to the fact that the condensed water flows backwards into the pressure control valve is avoided. Furthermore, the situation that hydrochloric acid is generated in the pressure control valve, and consequently the pressure control valve is corroded is avoided. In addition, the anti-backflow pipeline can also prevent foreign matters from directly falling into the pressure control valve through the exhaust pipeline and the second pipeline to influence the action of the pressure control valve.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a tail gas emission device. Background Art

[0002] Figure 1 Schematic diagram of the exhaust gas emission device in the prior art. Figure 1 As shown, the exhaust gas emission device is applied to the wet oxygen oxidation process, and the exhaust gas emission device includes a condenser 30, a pressure control valve 60 and a water collector 90. The condenser 30 is connected to the process chamber 10 through the first pipeline 20, and the condenser 30 is connected to the negative pressure extraction device 80 through the exhaust pipeline 70. The pressure control valve 60 is arranged on the exhaust pipeline 70. The condenser 30 and the pressure control valve 60 are also connected to the water collector 90 through pipelines respectively. The pressure control valve 60 is used to adjust the opening and closing degree of the exhaust pipeline 70, and the negative pressure extraction device 80 sucks the exhaust pipeline 70.

[0003] In the exhaust gas discharge device as described above, the condenser 30 condenses the process exhaust gas containing a large amount of water vapor discharged from the process chamber 10, and the process exhaust gas treated by the condenser 30 is discharged into the exhaust gas treatment device of the factory through the exhaust pipeline 70, so as to perform reaction treatment on the process exhaust gas. The condensed water generated by the entire exhaust gas discharge device is discharged into the water collector 90 through the pipeline corresponding to the pressure control valve 60 and the pipeline corresponding to the condenser 30.

[0004] However, when verifying a large flow rate and a long time of wet oxygen process, a lot of water vapor is generated, and the condenser 30 cannot condense all the water vapor, and the tail gas is discharged upward, which will cause the following effects:

[0005] 1. A large amount of condensed water forms in the pipeline above the pressure control valve 60. The drainage port of the pressure control valve 60 itself is small, and the condensed water cannot be discharged in time, which affects the action of the pressure control valve 60 and causes the pressure control function of the pressure control valve 60 to fail;

[0006] 2. In the process chamber, HCL gas is generated during the DCE (dichloroethylene) reaction step. The condensed water that is not discharged in time in the pipeline combines with the HCL gas to produce hydrochloric acid, causing the pressure control valve 60 to be corroded;

[0007] 3. Foreign matter may directly fall into the pressure control valve 60 through the exhaust pipe 70 , affecting the operation of the pressure control valve 60 . Utility Model Content

[0008] The purpose of the utility model is to provide an exhaust gas emission device to solve the problems in the prior art that condensed water generated in the exhaust pipeline of the exhaust gas emission device is easy to flow back into the pressure control valve and affect the operation of the pressure control valve, and foreign matter may directly fall into the pressure control valve.

[0009] In order to solve the above technical problems, the utility model provides an exhaust gas emission device, which includes:

[0010] An anti-backflow pipeline, wherein the anti-backflow pipeline is used to be connected to the negative pressure extraction device through the exhaust pipeline;

[0011] A condenser, wherein an air inlet end of the condenser is connected to the process chamber through a first pipeline, and an air outlet end of the condenser is connected to the anti-backflow pipeline through a second pipeline;

[0012] A pressure control valve is arranged on the second pipeline.

[0013] Optionally, the anti-backflow pipeline includes a first anti-backflow pipe section and a second anti-backflow pipe section that are connected to each other, the first anti-backflow pipe section is connected to the second pipeline, and the first anti-backflow pipe section and the second pipeline are arranged at an angle; the second anti-backflow pipe section is connected to the exhaust pipeline, and the second anti-backflow pipe section and the exhaust pipeline are arranged at an angle.

[0014] Optionally, the angle between the first anti-backflow pipe section and the second pipeline is less than 90°.

[0015] Optionally, the first anti-backflow pipe section and the second anti-backflow pipe section are parallel.

[0016] Optionally, the anti-backflow pipeline also includes a third anti-backflow pipe section, and the third anti-backflow pipe section has a liquid outlet, a first connecting port and a second connecting port arranged in sequence along its own extension direction, the first connecting port is connected to the first anti-backflow pipe section, and the second connecting port is connected to the second anti-backflow pipe section.

[0017] Optionally, at least two of the third anti-backflow pipe section, the second pipeline and the exhaust pipeline are parallel to each other.

[0018] Optionally, the liquid outlet is located at an end of the third anti-backflow pipe section, and the first connecting port and the second connecting port are both located on a side wall of the third anti-backflow pipe section.

[0019] Optionally, the exhaust gas emission device further includes a water collector, and the discharge end of the condenser, the pressure control valve and the liquid outlet are respectively connected to the water collector through pipelines.

[0020] Optionally, the water collector is a water-sealed structure.

[0021] Optionally, a valve is provided on the pipeline between the liquid outlet and the water collector.

[0022] Optionally, the exhaust gas emission device further comprises a box body, and the anti-backflow pipeline is arranged in the box body.

[0023] In summary, in the exhaust gas emission device provided by the utility model, the exhaust gas emission device includes an anti-backflow pipeline, a condenser and a pressure control valve. The anti-backflow pipeline is used to be connected to the negative pressure extraction device through the exhaust pipeline, the air inlet end of the condenser is used to be connected to the process chamber through the first pipeline, the air outlet end of the condenser is connected to the anti-backflow pipeline through the second pipeline, and the pressure control valve is arranged on the second pipeline. In this way, the utility model can increase the condensation effect on water vapor and reduce the amount of condensed water in the exhaust pipeline by configuring the anti-backflow pipeline between the exhaust pipeline and the pressure control valve, and the anti-backflow pipeline plays an anti-backflow role on the condensed water, avoiding the condensed water from backflowing into the pressure control valve to cause the pressure control valve to be unstable, thereby avoiding the occurrence of hydrochloric acid in the pressure control valve causing the pressure control valve to be corroded. In addition, the anti-backflow pipeline can also prevent foreign matter from falling directly into the pressure control valve through the exhaust pipeline and the second pipeline and affecting the action of the pressure control valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Those skilled in the art should understand that the drawings provided are for a better understanding of the present invention and do not constitute any limitation on the scope of the present invention.

[0025] Figure 1 is a schematic diagram of an exhaust emission device in the prior art;

[0026] Figure 2 is a schematic diagram of an exhaust emission device according to an embodiment of the utility model;

[0027] Figure 3 This is a structural diagram of a backflow prevention structure of an embodiment of the utility model;

[0028] Figure 4 It is a simplified view of the backflow prevention structure of one embodiment of the utility model.

[0029] In the attached figure:

[0030] 10-process chamber; 20-first pipeline; 30-condenser; 40-second pipeline; 50-anti-backflow pipeline; 51-first anti-backflow pipe section; 52-second anti-backflow pipe section; 53-third anti-backflow pipe section; 531-first connecting port; 532-second connecting port; 533-liquid outlet; 60-pressure control valve; 70-exhaust pipeline; 80-negative pressure extraction device; 90-water collector; 100-box body. DETAILED DESCRIPTION

[0031] In order to make the purpose, advantages and features of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing is different, and sometimes different scales are used.

[0032] As used in the present invention, the singular forms "one", "an" and "the" include plural objects, the term "or" is usually used to include the meaning of "and / or", the term "several" is usually used to include the meaning of "at least one", and the term "at least two" is usually used to include the meaning of "two or more". In addition, the terms "first", "second" and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second" and "third" may explicitly or implicitly include one or at least two of the features, "one end" and "the other end" and "the proximal end" and "the distal end" generally refer to two corresponding parts, which not only include the endpoints, and the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. In addition, as used in the present invention, an element disposed on another element generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements may be direct or indirect through an intermediate element, and cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, an element may be in any orientation such as inside, outside, above, below or on one side of another element, unless otherwise clearly indicated in the content. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] Figure 2 Schematic diagram of an exhaust gas emission device according to an embodiment of the present invention. Figure 2An embodiment of the utility model schematically provides an exhaust gas emission device applied to a wet oxygen oxidation process, the exhaust gas emission device includes a condenser 30, a pressure control valve 60 and an anti-backflow pipeline 50, the air inlet end of the condenser 30 is connected to the process chamber 10 through a first pipeline 20, the air outlet end of the condenser 30 is connected to the anti-backflow pipeline 50 through a second pipeline 40, the anti-backflow pipeline 50 is connected to a negative pressure extraction device 80 of the factory service through an exhaust pipeline 70, and the pressure control valve 60 is arranged on the second pipeline 40. The negative pressure extraction device 80 extracts negative pressure on the exhaust pipeline 70, and the pressure control valve 60 is used to adjust the pressure of the pipelines above itself (the exhaust pipeline 70 and the anti-backflow pipeline 50).

[0034] As in the exhaust gas discharge device described above, the condenser 30 condenses the process exhaust gas containing a large amount of water vapor discharged from the process chamber 10, and the process exhaust gas treated by the condenser 30 is then discharged into the exhaust gas treatment device of the factory through the second pipeline 40, the anti-backflow pipeline 50 and the exhaust pipeline 70 in sequence, thereby performing acid neutralization treatment on the process exhaust gas. Compared with the prior art, the utility model can increase the condensation effect on water vapor and reduce the amount of condensed water in the exhaust pipeline 70 by configuring the anti-backflow pipeline 50 between the exhaust pipeline 70 and the pressure control valve 60, and the anti-backflow pipeline 50 plays an anti-backflow role on the condensed water, preventing the condensed water from backflowing into the pressure control valve 60, causing the pressure control valve 60 to be unstable, thereby also preventing the pressure control valve 60 from being corroded by the generation of hydrochloric acid in the pressure control valve 60. Furthermore, the backflow prevention pipeline 50 can also prevent foreign matter from directly falling into the pressure control valve 60 through the exhaust pipeline 70 and the second pipeline 40 and affecting the operation of the pressure control valve 60 .

[0035] Furthermore, the exhaust gas emission device also includes a water collector 90, and the discharge end of the condenser 30, the pressure control valve 60 and the anti-backflow pipeline 50 (specifically the liquid outlet 533 of the anti-backflow pipeline 50) are respectively connected to the water collector 90 through pipelines, so as to collect the condensed water generated by the entire exhaust gas emission device. Preferably, the water collector 90 is a water-tight structure to ensure the air tightness of the entire pipeline, so that the pressure control valve 60 can control the pressure more stably. Optionally, a valve can be set on the pipeline between the anti-backflow pipeline 50 (the liquid outlet 533 of the anti-backflow pipeline 50) and the water collector 90 to control the opening and closing of the pipeline.

[0036] Figure 3 This is a structural diagram of the anti-backflow structure of an embodiment of the utility model. Figure 4 This is a simplified diagram of the backflow prevention structure of an embodiment of the utility model. Figure 3 and Figure 4The backflow prevention pipeline 50 includes a first backflow prevention pipe section 51 and a second backflow prevention pipe section 52 that are connected. The first backflow prevention pipe section 51 is connected to the second pipeline 40, and the first backflow prevention pipe section 51 and the second pipeline 40 are arranged at an angle, that is, the first backflow prevention pipe section 51 is arranged tilted relative to the second pipeline 40, and the tilt angle can be, for example, 30°, 45°, 60°. Of course, the first backflow prevention pipe section 51 can also be perpendicular to the second pipeline 40. Preferably, the first backflow prevention pipe section 51 is tilted downward, that is, the angle between the first backflow prevention pipe section 51 and the second pipeline 40 is less than 90°. In other words, the angle between the first backflow prevention pipe section 51 and the second pipeline 40 is less than 90°, which can further prevent condensate from backflowing into the pressure control valve 60. The second anti-backflow pipe section 52 is connected to the exhaust pipe 70, and the second anti-backflow pipe section 52 and the exhaust pipe 70 are arranged at an angle, that is, the second anti-backflow pipe section 52 is arranged tilted relative to the exhaust pipe 70, and the tilt angle can be, for example, 30°, 45°, 60°. Of course, the second anti-backflow pipe section 52 can also be perpendicular to the exhaust pipe 70. In one embodiment, the angle between the second anti-backflow pipe section 52 and the exhaust pipe 70 can be greater than 90° ( Figure 4 As shown). Optionally, the first anti-backflow pipe section 51 and the second anti-backflow pipe section 52 are parallel. The first anti-backflow pipe section 51 is inclined relative to the second pipeline 40, and the second anti-backflow pipe section 52 is inclined relative to the exhaust pipeline 70. While guiding the process tail gas, the condensation effect of water vapor can also be improved. The first anti-backflow pipe section 51 is inclined downward to ensure that the condensed water is not easy to flow to the second pipeline 40, thereby preventing the condensed water from backflowing and preventing the condensed water from backflowing into the pressure control valve 60. In addition, the inclined direction of the first anti-backflow pipe section 51 and the second anti-backflow pipe section 52 can prevent foreign matter from falling into the pressure control valve 60.

[0037] Further, the anti-backflow pipeline 50 also includes a third anti-backflow pipe section 53, and the third anti-backflow pipe section 53 has a liquid outlet 533, a first connection port 531 and a second connection port 532 arranged in sequence along its own extension direction, the first connection port 531 is connected to the first anti-backflow pipe section 51, and the second connection port 532 is connected to the second anti-backflow pipe section 52, and in actual application, the liquid outlet 533, the first connection port 531 and the second connection port 532 are arranged in sequence from bottom to top. This embodiment does not limit the shape of the third anti-backflow pipe section 53, for example, it can be a straight line, and at least two of the third anti-backflow pipe section 53, the second pipeline 40 and the exhaust pipeline 70 are parallel to each other, and the third anti-backflow pipe section 53 can also be an arc. The setting of the liquid outlet 533 can discharge the condensed water generated by the condensation of the anti-backflow pipeline 50 to the outside of the anti-backflow pipeline 50, specifically, the condensed water is discharged into the water collector 90 through the pipeline corresponding to the liquid outlet 533. In one embodiment, the liquid outlet 533 is located at the end of the third anti-backflow pipe segment 53, the second connecting port 532 is located on the side wall of the third anti-backflow pipe segment 53, and the first connecting port 531 is also located on the side wall of the third anti-backflow pipe segment 53. In actual application, the liquid outlet 533 is located at the bottom of the third anti-backflow pipe segment 53, and the first connecting port 531 and the second connecting port 532 are both located on the side of the third anti-backflow pipe segment 53.

[0038] Furthermore, the exhaust gas emission device also includes a box body 100 , and the backflow prevention pipeline 50 is arranged in the box body 100 , that is, the first backflow prevention pipe section 51 , the second backflow prevention pipe section 52 and the third backflow prevention pipe section 53 are all located in the box body 100 .

[0039] Although the utility model is disclosed as above with preferred embodiments, the above embodiments are not intended to limit the utility model. For any technician familiar with the art, without departing from the scope of the technical solution of the utility model, the above disclosed technical content can be used to make many possible changes and modifications to the technical solution of the utility model, or modified into equivalent embodiments with equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the utility model without departing from the content of the technical solution of the utility model still falls within the scope of protection of the technical solution of the utility model.

Claims

1. An exhaust gas emission device, characterized in that: include: An anti-backflow pipeline, wherein the anti-backflow pipeline is used to be connected to the negative pressure extraction device through the exhaust pipeline; A condenser, wherein an air inlet end of the condenser is connected to the process chamber through a first pipeline, and an air outlet end of the condenser is connected to the anti-backflow pipeline through a second pipeline; A pressure control valve is arranged on the second pipeline.

2. The exhaust gas emission device according to claim 1, characterized in that: The backflow prevention pipeline includes a first backflow prevention pipe section and a second backflow prevention pipe section that are connected to each other. The first backflow prevention pipe section is connected to the second pipeline, and the first backflow prevention pipe section and the second pipeline are arranged at an angle; the second backflow prevention pipe section is connected to the exhaust pipeline, and the second backflow prevention pipe section and the exhaust pipeline are arranged at an angle.

3. The exhaust gas emission device according to claim 2, characterized in that: The angle between the first anti-backflow pipe section and the second pipeline is less than 90°.

4. The exhaust gas emission device according to claim 2, characterized in that: The first anti-backflow pipe section and the second anti-backflow pipe section are parallel.

5. The exhaust gas emission device according to claim 2, characterized in that: The anti-backflow pipeline also includes a third anti-backflow pipe section, which has a liquid outlet, a first connecting port and a second connecting port arranged in sequence along its own extension direction, the first connecting port is connected to the first anti-backflow pipe section, and the second connecting port is connected to the second anti-backflow pipe section.

6. The exhaust gas emission device according to claim 5, characterized in that: At least two of the third backflow prevention pipe section, the second pipeline and the exhaust pipeline are parallel to each other.

7. The exhaust gas emission device according to claim 5, characterized in that: The liquid outlet is located at the end of the third anti-backflow pipe section, and the first connecting port and the second connecting port are both located on the side wall of the third anti-backflow pipe section.

8. The exhaust gas emission device according to claim 5, characterized in that: The tail gas emission device further comprises a water collector, and the liquid discharge end of the condenser, the pressure control valve and the liquid outlet are respectively connected to the water collector through pipelines.

9. The exhaust gas emission device according to claim 8, characterized in that: The water collector is a water-tight structure.

10. The exhaust gas emission device according to claim 8, characterized in that: A valve is arranged on the pipeline between the liquid outlet and the water collector.

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