Device for controlling stability of helium-containing waste gas treatment system

Abstract

The utility model discloses a device for controlling the stability of a helium-containing waste gas treatment system, which comprises a treatment box and an exhaust pipe, and the exhaust pipe is vertically arranged above the treatment box; the exhaust mechanism comprises two second connecting pipes symmetrically penetrating through the top in the treatment box, the lower ends of the two second connecting pipes communicate with the interior of the treatment box, the exhaust pipe is a pipe body with the bottom sealed, and the bottom of the exhaust pipe communicates with two first connecting pipes; the other ends of the two first connecting pipes are respectively communicated with the corresponding second connecting pipes through pressure reducing valves; and the supporting mechanism is used for supporting the treatment box. When the device is used, the stability of subsequent waste gas treatment can be effectively controlled, in addition, when the pressure reducing valve part needs to be replaced, the whole waste gas treatment system does not need to stop working, and the working continuity is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of waste gas treatment, in particular to a device for controlling the stability of a helium-containing waste gas treatment system. Background Art

[0002] During the production process of the semiconductor industry, a large amount of helium-containing waste gas is discharged. In order to avoid the waste of helium in the waste gas, it is usually necessary to recycle it. Before recycling, it is usually necessary to use a filtering device to filter out other impurities in the waste gas.

[0003] Existing waste gas treatment systems are generally composed of a filter part and a gas absorption part. Since the waste gas enters the treatment system from the exhaust port at a high speed, a pressure reducing valve is generally installed between the exhaust port and the waste gas treatment system to control the stability of the subsequent waste gas treatment system. The pressure reducing valve is generally highly vulnerable to corrosion by the medium. When it needs to be replaced, the entire device cannot be used, and the waste gas remaining in the pipe where the valve is located is easy to diffuse when it is disassembled and replaced, affecting the surrounding environment. Utility Model Content

[0004] The purpose of the utility model is to solve the shortcomings of the prior art and to propose a device for controlling the stability of a helium-containing waste gas treatment system. When the device is in use, the stability of subsequent waste gas treatment can be effectively controlled. In addition, when the pressure reducing valve part needs to be replaced, the entire waste gas treatment system does not need to stop working, thereby ensuring the continuity of work.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A device for controlling the stability of a helium-containing waste gas treatment system comprises a treatment box and an exhaust pipe, wherein the exhaust pipe is vertically arranged above the treatment box; an exhaust mechanism, wherein the exhaust mechanism comprises two second connecting pipes symmetrically penetrating the top of the treatment box, wherein the lower ends of the two second connecting pipes are both connected to the inside of the treatment box, wherein the exhaust pipe is a tube body with a sealed bottom, wherein the bottom of the exhaust pipe is connected to two first connecting pipes, wherein the other ends of the two first connecting pipes are respectively connected to the corresponding second connecting pipes through a pressure reducing valve; and a supporting mechanism, wherein the supporting mechanism is used to support the treatment box.

[0007] Preferably, the supporting mechanism comprises a connecting ring fixedly connected to the outside of the processing box, and a plurality of supporting legs are fixedly connected to the lower end of the connecting ring.

[0008] Preferably, a first manual valve is installed at one end of each of the two first connecting pipes close to the exhaust pipe.

[0009] Preferably, a second manual valve is installed at the lower end portion of each of the two second connecting pipes.

[0010] Preferably, the two first connecting pipes are both connected to a one-way air inlet pipe, a third manual valve is installed in the two one-way air inlet pipes, a one-way valve is installed in the two one-way air inlet pipes, and the one-way flow direction of the two one-way valves is from top to bottom.

[0011] Preferably, the two second connecting pipes are connected to branch pipes, a fourth manual valve is installed in each branch pipe, an air pump is installed on the front side of the processing box, the air outlet end of the air pump extends into the processing box, and the other ends of the two branch pipes are commonly connected to the air inlet end of the air pump.

[0012] Compared with the prior art, the utility model has the following beneficial effects:

[0013] A pressure reducing valve is provided to control the stability of the subsequent waste treatment system, and through two pressure reducing valves that can be used interchangeably, when a problem occurs with the pressure reducing valve on one side, the other pressure reducing valve can be used to work, and the broken pressure reducing valve can be replaced without stopping the waste gas treatment operation, thereby ensuring the continuity of the overall waste gas detection. In addition, an air pump structure is provided to extract and treat the waste gas in the flow channel where the damaged pressure reducing valve is located before maintenance, so as to avoid the waste gas from diffusing and affecting the surrounding environment during removal and replacement. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the structure of a device for controlling the stability of a helium-containing waste gas treatment system proposed by the utility model;

[0015] Figure 2 for Figure 1 An enlarged schematic diagram of the upper part of FIG.

[0016] Figure 3 for Figure 1 Schematic diagram of the support mechanism.

[0017] In the figure: 1 processing box, 2 connecting ring, 3 supporting leg, 4 air pump, 5 exhaust pipe, 6 first connecting pipe, 7 second connecting pipe, 8 pressure reducing valve, 9 one-way air inlet pipe, 10 branch pipe. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0019] Reference Figure 1-Figure 3 , a device for controlling the stability of a helium-containing waste gas treatment system, comprising a treatment box 1 and an exhaust pipe 5, wherein the exhaust pipe 5 is vertically arranged above the treatment box 1;

[0020] The exhaust mechanism also includes two second connecting pipes 7 symmetrically passing through the top of the processing box 1, the lower ends of the two second connecting pipes 7 are connected to the inside of the processing box 1, the exhaust pipe 5 is a tube body with a bottom seal, the bottom of the exhaust pipe 5 is connected to two first connecting pipes 6, the other ends of the two first connecting pipes 6 are respectively connected to the corresponding second connecting pipes 7 through a pressure reducing valve 8, the ends of the two first connecting pipes 6 close to the exhaust pipe 5 are both equipped with a first manual valve, and the lower ends of the two second connecting pipes 7 are both equipped with a second manual valve;

[0021] The supporting mechanism is used to support the processing box 1. The supporting mechanism includes a connecting ring 2 fixedly connected to the outside of the processing box 1, and a plurality of supporting legs 3 are fixedly connected to the lower end of the connecting ring 2;

[0022] Among them, the two first connecting pipes 6 are both connected to the one-way air inlet pipe 9, and the third manual valve is installed in the two one-way air inlet pipes 9. The one-way valve is installed in the two one-way air inlet pipes 9, and the one-way flow direction of the two one-way valves is from top to bottom. The two second connecting pipes 7 are both connected to the branch pipe 10, and each branch pipe 10 is installed with a fourth manual valve. An air pump 4 is installed on the front side of the processing box 1, and the air outlet end of the air pump 4 extends into the processing box 1. The other ends of the two branch pipes 10 are commonly connected to the air inlet end of the air pump 4.

[0023] In the utility model, when in use, in the initial state, the first manual valve and the second manual valve on the left are both opened, the third manual valve and the fourth manual valve are closed, and the first manual valve, the second manual valve, the third manual valve and the fourth manual valve on the right are all closed. At this time, the exhaust gas is discharged from the exhaust pipe 5, and then discharged from the left channel, and finally enters the inside of the treatment box 1 from the second connecting pipe 7 on the left. Due to the setting of the pressure reducing valve 8, the stability of the subsequent waste treatment system can be controlled;

[0024] When the pressure reducing valve 8 on the left is damaged and needs to be replaced, open the first manual valve and the second manual valve on the right, close the first manual valve and the second manual valve on the left, start the air pump 4, and open the third manual valve and the fourth manual valve on the left at the same time. At this time, the air pump 4 will draw the waste gas remaining in the left flow channel into the treatment box 1, and then close the air pump 4 and the third manual valve and the fourth manual valve on the left, and inspect or replace the pressure reducing valve 8 on the left. Similarly, when there is a problem with the pressure reducing valve 8 on the right, repeat the above-mentioned similar operations.

[0025] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A device for controlling the stability of a helium-containing waste gas treatment system, characterized in that: include: A processing box (1) and an exhaust pipe (5), wherein the exhaust pipe (5) is vertically arranged above the processing box (1); An exhaust mechanism, the exhaust mechanism comprising two second connecting pipes (7) symmetrically penetrating the top of the processing box (1), the lower ends of the two second connecting pipes (7) being connected to the inside of the processing box (1), the exhaust pipe (5) being a tube body with a sealed bottom, the bottom of the exhaust pipe (5) being connected to two first connecting pipes (6), the other ends of the two first connecting pipes (6) being respectively connected to the corresponding second connecting pipes (7) via a pressure reducing valve (8); A supporting mechanism, the supporting mechanism is used to support the processing box (1).

2. The device for controlling the stability of a helium-containing waste gas treatment system according to claim 1, characterized in that: The supporting mechanism comprises a connecting ring (2) fixedly connected to the outside of the processing box (1), and a plurality of supporting legs (3) are fixedly connected to the lower end of the connecting ring (2).

3. The device for controlling the stability of a helium-containing waste gas treatment system according to claim 1, characterized in that: A first manual valve is installed at one end of each of the two first connecting pipes (6) close to the exhaust pipe (5).

4. The device for controlling the stability of a helium-containing waste gas treatment system according to claim 1, characterized in that: A second manual valve is installed at the lower end of each of the two second connecting pipes (7).

5. The device for controlling the stability of a helium-containing waste gas treatment system according to claim 1, characterized in that: The two first connecting pipes (6) are both connected to a one-way air intake pipe (9), a third manual valve is installed in the two one-way air intake pipes (9), and a one-way valve is installed in the two one-way air intake pipes (9), and the one-way flow direction of the two one-way valves is from top to bottom.

6. The device for controlling the stability of a helium-containing waste gas treatment system according to claim 1, characterized in that: The two second connecting pipes (7) are both connected to a branch pipe (10), and a fourth manual valve is installed in each of the branch pipes (10). An air pump (4) is installed on the front side of the processing box (1), and the air outlet end of the air pump (4) extends into the processing box (1). The other ends of the two branch pipes (10) are commonly connected to the air inlet end of the air pump (4).

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