Double-source evaporation coating equipment

Abstract

The utility model discloses double-source evaporation coating equipment which comprises a first heating part, a second heating part, a coating part, a resistance heating machine, a thickness detector, an ice water machine and a vacuum pump, the first heating part comprises a first sealing sleeve, a first sliding rail, a first heat pipe, a first heat core and a first heat insulation sleeve; the second heating part comprises a second sealing sleeve, a second sliding rail, a second heat pipe, a second heat core and a second heat insulation sleeve; the film coating part comprises a vacuum tank body, a vacuum pipe, a first throttle valve, a second throttle valve, a rotating part and a pressure release valve; compared with single-source evaporation coating equipment, the double-source evaporation coating equipment provided by the utility model has the advantages that the double-source heating part capable of independently performing temperature control adjustment is provided; the evaporation speeds of different evaporation materials can be independently and accurately adjusted, and the consistency of the coating process is ensured; a modularized cooling system is arranged, so that the equipment cost is reduced; and the automatic pressure protection function is achieved, and the equipment safety is enhanced.

Description

Technical Field

[0001] The utility model relates to the field of coating equipment, in particular to dual-source evaporation coating equipment. Background Art

[0002] The development of coating technology began in the 19th century, and was initially used to prepare protective films on the surface of optical components. With the advancement of technology, coating technology gradually changed from coating in chemical solutions and vapors to vacuum coating, especially after the emergence of oil diffusion pumps and mechanical pump exhaust systems in the 1930s, vacuum evaporation and sputtering became the main processes for preparing optical thin films.

[0003] In the 20th century, with the development of electron beam evaporation coating (EB-PVD) technology, the coating process has made significant progress in material utilization efficiency, film structure and morphology control. EB-PVD technology heats the material to evaporate through the heat source of a high-energy electron beam, and then deposits it on the substrate in a vacuum environment to form a thin film. This technology not only improves the deposition rate, but also shows great application potential in many industrial fields such as aerospace, cutting tools and semiconductors.

[0004] However, with the continuous improvement of industrial demand and the increasing refinement of product performance, the traditional single-source evaporation coating technology can no longer meet the market demand for composite film layers and multifunctional films. Therefore, dual-source medium-frequency evaporation coating technology came into being. The dual-source medium-frequency evaporation coating equipment of the utility model adopts two independent evaporation sources, which can provide different materials respectively. By controlling the power and switching time of the two evaporation sources, the alternating deposition of different materials is achieved, thereby forming a composite film layer with specific functions and performance. Utility Model Content

[0005] In view of the above problems, the utility model provides a dual-source evaporation coating equipment, including: a first heating part, a second heating part, a coating part, a resistance heating machine, a thickness detector, a water chiller, and a vacuum pump; the first heating part includes: a first sealing sleeve, a first slide rail, a first heat pipe, a first heat core, and a first thermal insulation sleeve; the second heating part includes: a second sealing sleeve, a second slide rail, a second heat pipe, a second heat core, and a second thermal insulation sleeve; the hot end of the resistance heating machine is fixedly connected to the first sealing sleeve, the second sealing sleeve, the first heat core, and the second heat core; the hot end of the resistance heating machine is fixedly connected to the first heat core and the second heat core; the cold end of the water chiller is fixedly connected to the first thermal insulation sleeve and the second thermal insulation sleeve; the coating The thickness detector comprises: a vacuum tank body, a vacuum tube, a first throttle valve, a second throttle valve, a rotating part, and a pressure relief valve; the detection end of the thickness detector is fixedly connected to the inner side of the vacuum tank body; the control ends of the first throttle valve and the second throttle valve are connected to the thickness detector; the rotating part comprises: a supporting platform for supporting a substrate; a rotating disk for supporting the supporting platform, a stepper motor, a mounting seat for installing the motor, and a coupling for connecting the stepper motor and the rotating disk; the vacuum tank body is airtightly connected to the vacuum tube; the vacuum tube is airtightly connected to the vacuum pump; the first throttle valve is airtightly connected to the first heat pipe and the vacuum tank body; the second throttle valve is airtightly connected to the first heat pipe and the vacuum tank body.

[0006] In this technical solution, the user places the substrate on the carrier and closes the vacuum tank; turns on the vacuum pump, and the vacuum pump draws a vacuum into the vacuum tank through the vacuum tube; places the evaporation material on the first heat pipe and the second heat pipe respectively, and seals the first heat pipe and the second heat pipe; inserts the first heat pipe and the second heat pipe into the first heating part and the second heating part along the guide rail; turns on the resistance heater, and the first heat core and the second heat core begin to heat the evaporation material in the first heat pipe and the second heat pipe; when the evaporation temperature is reached, the first throttle valve and the second throttle valve are opened in turn according to demand; the evaporation material flows along the first diverter plate and the second diverter plate to the vacuum tank, and the substrate begins to be coated; the rotating disk is driven by the stepping motor to move at a uniform speed, which is beneficial to the uniformity of the coating in the vacuum tank; but when the thickness of the substrate reaches the preset value of the thickness detector, the thickness detector controls the first throttle valve and the second throttle valve to close, thereby controlling the power and switching time of the two evaporation sources to achieve composite film coating.

[0007] In a specific embodiment, the first heating part and the second heating part both adopt independent temperature control systems.

[0008] In this technical solution, the independent temperature control system allows the temperatures of the first heating part and the second heating part to be adjusted independently and accurately. The user can adjust the heating temperature according to the characteristics of different materials and coating requirements, thereby ensuring the uniformity and consistency of different evaporating materials during the coating process.

[0009] In a specific embodiment, the resistance heater is equipped with an intelligent temperature feedback sensor.

[0010] In this technical solution, the intelligent temperature feedback sensor can monitor and record each temperature change curve, and classify and archive the temperature change curve according to the material; and intelligently control the heating temperature through the temperature change curve, so as to ensure the uniform evaporation of the evaporating material during the coating process.

[0011] In a specific embodiment, the ice water machine is modularly connected.

[0012] In this technical solution, the water chiller can be connected to the coating equipment according to user needs; the water chiller has multiple cold ends, which can be added or reduced according to actual production needs to save costs.

[0013] In a specific embodiment, the pressure relief valve is provided with an automatic pressure switch.

[0014] In this technical solution, the automatic pressure switch of the pressure relief valve can automatically exhaust and relieve pressure to protect the vacuum tank body when the pressure in the vacuum tank body is in an abnormal state, which is beneficial to improving the safety of the equipment; on the other hand, when the pressure in the vacuum tank body is in an abnormal state, it is not conducive to the coating process. The automatic pressure switch is also beneficial to the equipment to save the evaporating material and reduce energy loss.

[0015] In a specific embodiment, a muffler valve is also provided at one end of the communication device of the pressure relief valve.

[0016] In this technical solution, the silencer valve can eliminate most of the noise in the pressure relief valve working chamber, which is beneficial to improving the quietness of the equipment during operation.

[0017] The beneficial effects of the utility model are as follows: compared with single-source evaporation coating equipment, it provides a dual-source heating part that can independently perform temperature control and adjustment; it can independently and accurately adjust the evaporation speed of different evaporating materials to ensure the consistency of the coating process; it has an intelligent temperature feedback sensor that can automatically monitor and record the temperature change curve of the evaporating material during coating to ensure uniform evaporation of the evaporating material; it has a modular cooling system to reduce equipment costs; it has an automatic pressure protection function to enhance equipment safety; the pressure relief valve is equipped with a silencer to increase the quietness of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a front view of the overall structure of a dual-source evaporation coating device in a specific implementation of the utility model;

[0019] Figure 2 It is a cross-sectional view of a first heating part, a second heating part and a coating part of a dual-source evaporation coating device in a specific implementation of the utility model;

[0020] Figure 3 It is a schematic diagram of the structure of the coating part of a dual-source evaporation coating device in a specific implementation of the utility model;

[0021] Figure 4 It is a schematic diagram of the movement trajectory of evaporation material in a dual-source evaporation coating device in a specific implementation of the utility model. DETAILED DESCRIPTION

[0022] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0023] like Figure 1-Figure 4In the first embodiment of the utility model, a dual-source evaporation coating device is provided, comprising: a first heating part 100, a second heating part 200, a coating part 300, a resistance heating machine 400, a thickness detector 500, a chiller 600, and a vacuum pump 700; the first heating part 100 comprises: a first sealing sleeve 101, a first slide rail 102, a first heat pipe 103, a first heat core 104, and a first insulation sleeve 105; the second heating part 200 comprises: a second sealing sleeve 201, a second slide rail 20 2, the second heat pipe 203, the second heat core 204, the second heat insulation sleeve 205; the hot end of the resistance heating machine 400 is fixedly connected to the first sealing sleeve 101, the second sealing sleeve 201, the first heat core 104, the second heat core 204; the hot end of the resistance heating machine 400 is fixedly connected to the first heat core 104, the second heat core 204; the cold end of the ice machine 600 is fixedly connected to the first heat insulation sleeve 105, the second heat insulation sleeve 205; the coating part 300 includes The thickness detector 500 includes: a vacuum tank 301, a vacuum tube 302, a first throttle valve 303, a second throttle valve 304, a rotating part 305, and a pressure relief valve 306; the detection end of the thickness detector 500 is fixedly connected to the inner side of the vacuum tank 301; the control ends of the first throttle valve 303 and the second throttle valve 304 are connected to the thickness detector 500; the rotating part 305 includes: a carrier 3051 for carrying the substrate; a rotating disk 3052 for carrying the carrier 3051, a stepper A motor 3053, a mounting base 3054 for mounting the motor, and a coupling 3055 for connecting the stepper motor 3053 and the rotating disk 3052; the vacuum tank body 301 is airtightly connected to the vacuum tube 302; the vacuum tube 302 is airtightly connected to the vacuum pump 700; the first throttle valve 303 is airtightly connected to the first heat pipe 103 and the vacuum tank body 301; the second throttle valve 304 is airtightly connected to the first heat pipe 103 and the vacuum tank body 301.

[0024] In this embodiment, the user places the substrate on the carrier 3051, closes the vacuum tank 301, turns on the vacuum pump 700, and the vacuum pump 700 evacuates the vacuum tank 301 through the vacuum tube 302; places the evaporating material on the first heat pipe 103 and the second heat pipe 203, respectively, and seals the first heat pipe 103 and the second heat pipe 203; inserts the first heat pipe 103 and the second heat pipe 203 into the first heating part 100 and the second heating part 200 along the guide rail; turns on the resistance heating machine 400, and the first heat core 104 and the second heat core 204 begin to heat the first heat pipe 103 and the second heat pipe 203. The evaporating material is heated; when the evaporation temperature is reached, the first throttle valve 303 and the second throttle valve 304 are opened in turn according to the demand; the evaporating material flows along the first diverter plate and the second diverter plate to the vacuum tank body 301, and the substrate begins to be coated; the rotating disk 3052 is driven by the stepping motor 3053 to move at a uniform speed, which is beneficial to the uniformity of the coating in the vacuum tank body 301; but when the thickness of the substrate reaches the preset value of the thickness detector 500, the thickness detector 500 controls the first throttle valve 303 and the second throttle valve 304 to be closed, thereby controlling the power and switching time of the two evaporation sources to achieve composite film coating.

[0025] In this embodiment, the first heating part 100 and the second heating part 200 both use independent temperature control systems;

[0026] Furthermore, the independent temperature control system allows the temperatures of the first heating part 100 and the second heating part 200 to be independently and accurately adjusted. The user can adjust the heating temperature according to the characteristics of different materials and coating requirements, thereby ensuring the uniformity and consistency of different evaporating materials during the coating process.

[0027] In this embodiment, the resistance heater 400 is equipped with an intelligent temperature feedback sensor;

[0028] Furthermore, the intelligent temperature feedback sensor can monitor and record each temperature change curve, and classify and archive the temperature change curve according to the material; and intelligently control the heating temperature through the temperature change curve, so as to ensure the uniform evaporation of the evaporating material during the coating process.

[0029] Preferably, the temperature feedback sensor in this embodiment is a thermocouple sensor;

[0030] In this embodiment, the ice water machine 600 is modularly connected;

[0031] Furthermore, the water chiller 600 can be connected to the coating device according to user needs; the water chiller 600 has multiple cold ends, which can be used to increase or reduce the cold ends according to actual production needs to save costs.

[0032] In this embodiment, the pressure relief valve 306 is provided with an automatic pressure switch;

[0033] Furthermore, the automatic pressure switch of the pressure relief valve 306 can automatically exhaust and release pressure to protect the vacuum tank body 301 when the pressure in the vacuum tank body 301 is in an abnormal state; for example: when the evaporating material is mixed with other substances not used for coating, gas may be generated during the heating process, increasing the pressure inside the vacuum tank body; this is beneficial to improving the safety of the equipment; on the other hand, when the pressure in the vacuum tank body 301 is in an abnormal state, it is also not conducive to the coating process, and the automatic pressure switch is also beneficial for the equipment to save the evaporating material and save energy loss.

[0034] In this embodiment, a muffler valve 3056 is further provided at one end of the connecting device of the pressure relief valve 306. The muffler valve 3056 can eliminate most of the noise in the working room of the pressure relief valve 306, which is beneficial to improving the quietness of the device during operation.

[0035] The preferred specific embodiments of the utility model are described in detail above. It should be understood that ordinary technicians in this field can make many modifications and changes based on the concept of the utility model without creative work. Therefore, all technical solutions that can be obtained by technicians in this technical field based on the concept of the utility model through logical analysis, reasoning or limited experiments on the basis of the existing technology should be within the scope of protection determined by the claims.

Claims

1. A dual-source evaporation coating device, characterized in that: include: First heating unit, second heating unit, coating unit, resistance heating machine, thickness detector, ice machine, vacuum pump; The first heating part includes: a first sealing sleeve, a first slide rail, a first heat pipe, a first heat core, and a first insulation sleeve; the second heating part includes: a second sealing sleeve, a second slide rail, a second heat pipe, a second heat core, and a second insulation sleeve; the hot end of the resistance heating machine is fixedly connected to the first sealing sleeve, the second sealing sleeve, the first heat core, and the second heat core; the hot end of the resistance heating machine is fixedly connected to the first heat core and the second heat core; the cold end of the ice machine is fixedly connected to the first insulation sleeve and the second insulation sleeve; the coating part includes: a vacuum tank, a vacuum tube, a first throttle valve, a second throttle valve, a rotating part, and a pressure relief valve ; The detection end of the thickness detector is fixedly connected to the inner side of the vacuum tank body; the control ends of the first throttle valve and the second throttle valve are connected to the thickness detector; the rotating part includes: a supporting platform for supporting the substrate; a rotating disk for supporting the supporting platform, a stepper motor, a mounting seat for installing the motor, and a coupling for connecting the stepper motor and the rotating disk; the vacuum tank body is airtightly connected to the vacuum tube; the vacuum tube is airtightly connected to the vacuum pump; the first throttle valve is airtightly connected to the first heat pipe and the vacuum tank body; the second throttle valve is airtightly connected to the first heat pipe and the vacuum tank body.

2. A dual-source evaporation coating device as claimed in claim 1, characterized in that: The first heating part and the second heating part both adopt independent temperature control systems.

3. A dual-source evaporation coating device as claimed in claim 1, characterized in that: The resistance heating machine is equipped with an intelligent temperature feedback sensor.

4. A dual-source evaporation coating device as claimed in claim 1, characterized in that: The ice water machine is modularly connected.

5. The dual-source evaporation coating device according to claim 1, characterized in that: The pressure relief valve is provided with an automatic pressure switch.

6. The dual-source evaporation coating device according to claim 1, characterized in that: A silencer valve is also provided at one end of the communication device of the pressure relief valve.

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