Perovskite evaporation equipment

Abstract

The perovskite evaporation equipment comprises a base plate frame, two opposite clamping blocks are clamped to the outer side of the base plate frame, the clamping blocks are fixedly connected with the base plate frame through bolts, the sides, away from each other, of the two clamping blocks are fixedly connected with one end of a rotating rod, and the other ends of the two clamping blocks are fixedly connected with the other end of the rotating rod. The two rotating rods are rotatably mounted on the two outer sides of the top cover, a mounting cavity is formed in the center of the substrate frame, the mounting cavity is used for clamping and mounting a perovskite substrate, dust removal films are pasted on the top end face and the bottom end face of the perovskite substrate, the number of the dust removal films is two, and pull films are arranged on the sides, away from each other, of the two dust removal films. The perovskite substrate is mounted in the mounting cavity of the substrate frame, the rotating rod can be rotated to drive the perovskite substrate to rotate, double-sided coating can be realized without opening a top cover of the evaporation equipment again, and perovskite is put into the vacuum evaporation equipment for dust removal, so that the dust removal effect is better.

Description

Technical Field

[0001] The utility model relates to the technical field of perovskite evaporation, in particular to perovskite evaporation equipment. Background Art

[0002] In recent years, perovskite materials have received more attention as a new type of solar cell material. They have the characteristics of low cost, wide spectral absorption range, adjustable direct band gap, high absorption coefficient, adjustable components, and long carrier diffusion distance. Therefore, they have very broad development prospects in the battery field.

[0003] The evaporation equipment is an experimental and production equipment used in the field of thin film preparation. It is widely used in the preparation of perovskite thin film batteries. Some perovskites need to be coated with thin films on both sides during coating, but the existing evaporation equipment can only coat one side, and the other side needs to open the evaporation equipment to turn over the perovskite substrate. Because the evaporation equipment needs to be in a vacuum state when working, opening the evaporation equipment requires repeated vacuuming operations, which increases the amount of operations. In addition, the surface of the perovskite needs to be dusted before coating to avoid dust adhering to the perovskite surface during coating, affecting the quality of the perovskite product after coating.

[0004] To this end, we propose a perovskite evaporation device. Utility Model Content

[0005] The main purpose of the utility model is to provide a perovskite evaporation device. By installing the perovskite substrate in the installation cavity of the substrate rack, the perovskite substrate can be driven to rotate by rotating the rotating rod, and double-sided coating can be achieved without reopening the top cover of the evaporation device. The perovskite is placed in a vacuum evaporation device for dust removal, and the dust removal effect will be better, which can effectively solve the problems in the background technology.

[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0007] A perovskite evaporation device, comprising a substrate frame, wherein a clamping block is clamped on the outer side of the substrate frame, wherein the clamping block is provided at two locations opposite to each other, wherein the clamping block is fixedly connected to the substrate frame by bolts, wherein the two sides of the clamping blocks at the two locations away from each other are fixedly connected to one end of a rotating rod, wherein the two rotating rods are rotatably mounted on the outer sides of a top cover;

[0008] An installation cavity is opened at the center of the substrate frame, and the installation cavity is used for the perovskite substrate to be clamped and installed. The top end surface and the bottom end surface of the perovskite substrate are both pasted with dust removal films. The dust removal films are provided at two locations, and a pulling film is provided on the side of the two dust removal films away from each other.

[0009] Furthermore, a storage box is fixedly connected to one side of the top cover, the interior of the storage box is communicated with the interior of the top cover, and an electric cylinder is fixedly installed on a side of the storage box away from the top cover.

[0010] Furthermore, the output end of the electric cylinder passes through the storage box and is fixedly connected to one end of a piston push rod. The piston push rod is located inside the storage box, and the other end of the piston push rod is fixedly connected to one end of a pull rope.

[0011] Furthermore, the pull rope is provided at two locations, and one end of the pull rope at the two locations away from the piston push rod is fixedly connected to the pull films of the two dust removal films respectively.

[0012] Furthermore, the top cover is buckled on the top of the evaporation equipment shell, a heating device is fixedly installed on the inner bottom of the evaporation equipment shell, a crucible is provided on the top of the heating device, and a vacuum tube is fixedly plugged into the bottom of the evaporation equipment shell.

[0013] Compared with the prior art, the utility model has the following beneficial effects: by installing the perovskite substrate in the installation cavity of the substrate rack, the perovskite substrate can be driven to rotate by rotating the rotating rod, and double-sided coating can be achieved without reopening the top cover of the evaporation equipment, and the perovskite can be placed in a vacuum evaporation equipment for dust removal, which will have a better dust removal effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the three-dimensional structure of a perovskite evaporation device of the utility model.

[0015] Figure 2 It is a schematic diagram of the planar structure of a perovskite evaporation device of the utility model.

[0016] Figure 3 This is a schematic diagram of the three-dimensional structure of a substrate frame of a perovskite evaporation device of the utility model.

[0017] Figure 4 This is a schematic diagram of the three-dimensional structure of a piston push rod of a perovskite evaporation device of the utility model.

[0018] In the figure: 1. evaporation equipment housing; 2. rotating rod; 3. top cover; 4. storage box; 5. electric cylinder; 6. vacuum tube; 7. heating device; 8. crucible; 9. perovskite substrate; 10. dust removal film; 11. substrate rack; 12. bolt; 13. block; 14. installation cavity; 15. pull rope; 16. piston push rod; 17. film pulling. DETAILED DESCRIPTION

[0019] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0020] like Figure 1-4 As shown, a perovskite evaporation device includes a substrate frame 11, a clamping block 13 is clamped on the outer side of the substrate frame 11, and the clamping block 13 is arranged at two opposite locations. The clamping block 13 is fixedly connected to the substrate frame 11 by a bolt 12, and the two sides of the clamping blocks 13 that are far away from each other are fixedly connected to one end of a rotating rod 2. The two rotating rods 2 are rotatably installed on the outer sides of a top cover 3, and a sealing ring should be provided at the connection between the rotating rod 2 and the top cover 3 to prevent air circulation;

[0021] A mounting cavity 14 is provided at the center of the substrate frame 11. The mounting cavity 14 is used for the perovskite substrate 9 to be clamped and installed. The caliber of the mounting cavity 14 is adapted to the diameter of the perovskite substrate 9. The perovskite substrate 9 can be attached to the side of the perovskite substrate 9 and the inner side of the mounting cavity 14 by means of Velcro or other adhesives, and can be reinforced and connected with the substrate frame 11. The top and bottom surfaces of the perovskite substrate 9 are both attached with a dust removal film 10. The dust removal film 10 is provided at two locations. A pulling film 17 is provided on the side of the two dust removal films 10 that are away from each other. The dust removal film 10 can be torn off the surface of the perovskite substrate 9 by pulling the pulling film 17.

[0022] A storage box 4 is fixedly connected to one side of the top cover 3, the interior of the storage box 4 is communicated with the interior of the top cover 3, and an electric cylinder 5 is fixedly installed on the side of the storage box 4 away from the top cover 3; the output end of the electric cylinder 5 passes through the storage box 4 and is fixedly connected to one end of a piston push rod 16, the piston push rod 16 is located inside the storage box 4, and the other end of the piston push rod 16 is fixedly connected to one end of a pull rope 15;

[0023] The pull rope 15 is provided at two locations, and one end of the pull rope 15 away from the piston push rod 16 is fixedly connected to the pull film 17 of the two dust removal films 10 respectively. After the dust removal film 10 is torn off, it will be taken to the storage box 4 by the piston push rod 16 for storage; the top cover 3 is buckled on the top of the evaporation equipment shell 1, and a heating device 7 is fixedly installed on the inner bottom of the evaporation equipment shell 1, and a crucible 8 is provided on the top of the heating device 7, and a vacuum tube 6 is fixedly inserted at the bottom of the evaporation equipment shell 1.

[0024] It should be noted that the utility model is a perovskite evaporation device. First, the perovskite substrate 9 is inserted into the mounting cavity 14 of the substrate frame 11, and the coating material is placed in the crucible 8. Then, one end of the two pull ropes 15 is respectively tied to the holes of the pull film 17 of the dust removal film 10 at two locations, and the other ends of the two pull ropes 15 are all tied to the end of the piston push rod 16 away from the electric cylinder 5. The top cover 3 is sealed and buckled on the top of the evaporation device housing 1. The air in the evaporation device housing 1 including the top cover 3 and the storage box 4 is completely evacuated through the vacuum machine connected to the vacuum tube 6 to achieve a vacuum environment. Then, The external power supply starts the electric cylinder 5, and the electric cylinder 5 drives the piston push rod 16 to shrink toward the inside of the storage box 4, thereby driving the dust removal film 10 to be torn off the surface of the perovskite substrate 9, thereby achieving dust removal on the surface of the perovskite substrate 9. Finally, the heating device 7 is started to heat and evaporate the coating material in the crucible 8, and the surface of the perovskite substrate 9 directly above the crucible 8 is coated. When one side of the perovskite substrate 9 is coated, the substrate rack 11 and the perovskite substrate 9 are rotated 180° by rotating the rotating rod 2, so that the other side of the perovskite substrate 9 is directly above the crucible 8, thereby achieving double-sided coating.

[0025] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A perovskite evaporation device, comprising a substrate frame (11), characterized in that: A clamping block (13) is clamped on the outer side of the substrate frame (11), and the clamping block (13) is arranged at two locations opposite to each other. The clamping block (13) is fixedly connected to the substrate frame (11) by means of a bolt (12), and the two sides of the clamping blocks (13) that are away from each other are fixedly connected to one end of the rotating rod (2), and the two rotating rods (2) are rotatably mounted on the outer sides of the top cover (3); An installation cavity (14) is provided at the center of the substrate frame (11), and the installation cavity (14) is used for the perovskite substrate (9) to be clamped and installed. The top end surface and the bottom end surface of the perovskite substrate (9) are both adhered with a dust removal film (10), and the dust removal film (10) is provided at two locations, and a pulling film (17) is provided on the side of the two dust removal films (10) that are away from each other.

2. A perovskite evaporation device according to claim 1, characterized in that: A storage box (4) is fixedly connected to one side of the top cover (3); the interior of the storage box (4) is communicated with the interior of the top cover (3); and an electric cylinder (5) is fixedly mounted on the side of the storage box (4) away from the top cover (3).

3. A perovskite evaporation device according to claim 2, characterized in that: The output end of the electric cylinder (5) passes through the storage box (4) and is fixedly connected to one end of a piston push rod (16); the piston push rod (16) is located inside the storage box (4); and the other end of the piston push rod (16) is fixedly connected to one end of a pull rope (15).

4. A perovskite evaporation device according to claim 3, characterized in that: The pull rope (15) is provided at two locations, and one end of the pull rope (15) at the two locations away from the piston push rod (16) is fixedly connected to the pull films (17) of the two dust removal films (10) respectively.

5. The perovskite evaporation device according to claim 1, characterized in that: The top cover (3) is buckled onto the top of the evaporation equipment housing (1); a heating device (7) is fixedly installed on the inner bottom of the evaporation equipment housing (1); a crucible (8) is provided on the top of the heating device (7); and a vacuum tube (6) is fixedly plugged into the bottom of the evaporation equipment housing (1).

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