High-purity acid-base chemical branch valve box

Abstract

The utility model discloses a valve distributing box for high-purity acid-base chemicals. The branch valve box comprises a cabinet body, a control box, a liquid supply pipeline and a waste discharge pipeline, wherein the control box is arranged at the top of the cabinet body; a power supply and a controller are mounted in the control box; a valve panel is arranged in the cabinet body, the valve panel is used for fixing a liquid supply pipeline and a waste discharge pipeline, the liquid supply pipeline comprises a main path and a plurality of branch paths connected with the main path, and a first stop valve is arranged on the main path; a pneumatic valve and a diaphragm valve are arranged on each branch, and the pneumatic valves are connected with the controller; and the waste discharge pipeline is communicated with the liquid supply pipeline, and a second stop valve is arranged on the waste discharge pipeline. The branch valve box is simple and reasonable in structure, compact and small in size, complete in function, high in reliability and good in safety; the branch valve box is suitable for distributing one path of high-purity acid and alkali chemicals into multiple paths for conveying, and safe, stable and efficient conveying work of the high-purity acid and alkali chemicals can be achieved.

Description

Technical Field

[0001] The utility model belongs to the technical field of flow diversion and conveying equipment, and particularly relates to a high-purity acid and alkali chemical valve box. Background Art

[0002] Semiconductor manufacturing refers to the process of wafer manufacturing and chip production based on semiconductor design drawings. The wafer manufacturing process mainly includes wafer growth, wafer cleaning, thin film deposition, photoresist coating, photolithography, etching, degumming, ion implantation, thin film deposition and other links, which require the participation of high-purity acid and alkali chemicals such as cleaning solution, etching solution, developer solution and polishing solution.

[0003] At present, in practical applications, when using one of the above-mentioned high-purity acid and alkali chemicals, it is necessary to divert one high-purity acid and alkali chemical into multiple channels for transportation; the existing technology does not have targeted diversion equipment for the transportation process of these high-purity acid and alkali chemicals. When used on site, it is necessary to manually operate the switch of the high-purity acid and alkali chemical transportation pipeline to control its transportation process, which increases the risk of misoperation caused by human factors, poses serious problems to the safety of operators and product production, and increases the safety risk factor; it is impossible to achieve efficient diversion and transportation of high-purity acid and alkali chemicals.

[0004] Therefore, how to provide a valve box device suitable for the diversion of high-purity acid and alkali chemicals to facilitate pipeline distribution, achieve safe, stable and efficient diversion and transportation of high-purity acid and alkali chemicals, and improve work efficiency; is a technical problem that technical personnel in this field urgently need to solve. Utility Model Content

[0005] In view of this, the utility model provides a high-purity acid and alkali chemical valve box that solves at least some of the above-mentioned technical problems. The valve box has a simple and reasonable structure, a compact size, complete functions, high reliability and good safety; it is easy to realize pipeline distribution, suitable for the diversion of high-purity acid and alkali chemicals from one channel to multiple channels for transportation, meeting the existing supply of high-purity acid and alkali chemicals and realizing safe, stable and efficient diversion and transportation.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A high-purity acid and alkali chemical valve box, the valve box comprising: a cabinet, a control box, a liquid supply pipeline and a waste discharge pipeline, wherein:

[0008] The control box is arranged on the top of the cabinet; a power supply and a controller are installed inside the control box; a valve panel is arranged inside the cabinet, and the valve panel is used to fix the liquid supply pipeline and the waste discharge pipeline, the liquid supply pipeline includes a main pipeline and a plurality of branches connected to the main pipeline, and the main pipeline is provided with a first cut-off valve; each branch is provided with a pneumatic valve and a diaphragm valve, and the pneumatic valve is connected to the controller; the waste discharge pipeline is connected to the liquid supply pipeline, and the waste discharge pipeline is provided with a second cut-off valve.

[0009] Preferably, the valve panel is provided with a plurality of through holes, and the valve panel is fixedly connected to the side wall inside the cabinet by passing bolts through the through holes.

[0010] Preferably, a valve bracket is provided on the valve panel, and the liquid supply pipeline and the waste discharge pipeline are fixed by the valve bracket.

[0011] Preferably, an observation panel is provided on the front of the cabinet.

[0012] Preferably, the valve distribution box further comprises: a cabinet support, the cabinet support is fixedly connected to the cabinet; and a plurality of feet are arranged at the bottom of the cabinet support.

[0013] Preferably, the valve box further comprises: an air inlet and an air valve communicated with the interior of the cabinet, for forming a negative pressure inside the cabinet.

[0014] Preferably, the valve manifold box further comprises: a differential pressure gauge, one end of which extends into the interior of the cabinet and the other end of which is outside the cabinet, for displaying the pressure difference between the interior and exterior of the cabinet.

[0015] Preferably, the control box is provided with an EMO emergency stop button connected to the controller.

[0016] Preferably, a liquid leakage detection device is further provided inside the cabinet, and the liquid leakage detection device is communicatively connected with the controller.

[0017] Preferably, a dangerous goods label is also affixed to the valve box.

[0018] Compared with the prior art, the beneficial effects of the present invention include at least:

[0019] (1) The utility model provides a high-purity acid and alkali chemical valve box, which has a simple and reasonable structure, complete functions, high reliability and good safety; it is easy to realize pipeline distribution, suitable for the diversion of one-way transportation of high-purity acid and alkali chemicals into multiple-way transportation, which helps to realize the safe, stable and efficient transportation of high-purity acid and alkali chemicals and improves work efficiency.

[0020] (2) The utility model provides a high-purity acid and alkali chemical valve box, in which the valve components on the valve panel are fixed by valve brackets, which reduces the size of the dead angle and the gap size between the components, thereby reducing the size of the valve panel, and further making the structure of the cabinet compact and small. In addition, it is designed with waste pipes, observation panels, differential pressure gauges, leakage detection devices and emergency stop buttons, so that the functions of the valve box are more complete and the safety is better.

[0021] Other features and advantages of the utility model will be described in the following description, and partly become apparent from the description, or understood by implementing the utility model. The purpose and other advantages of the utility model can be realized and obtained by the structures particularly pointed out in the written description and the drawings.

[0022] The technical solution of the utility model is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention.

[0024] Figure 1 The utility model provides a schematic diagram of the front view structure of a high-purity acid and alkali chemical valve box.

[0025] Figure 2 This is a schematic diagram of the valve panel structure provided by the utility model.

[0026] Figure 3 The utility model provides a schematic diagram of the top view of a high-purity acid and alkali chemical valve box.

[0027] Figure 4 The utility model provides a schematic diagram of the right side structure of a high-purity acid and alkali chemical valve box.

[0028] Figure 5 The utility model provides a schematic diagram of the side structure of a high-purity acid and alkali chemical valve box.

[0029] Among them, 1-cabinet; 2-control box; 3-liquid supply pipeline; 4-waste discharge pipeline; 5-valve panel; 6-chemical inlet; 7-chemical outlet; 8-first shut-off valve; 9-pneumatic valve; 10-diaphragm valve; 11-second shut-off valve; 12-through hole; 13-valve bracket; 14-observation panel; 15-cabinet bracket; 16-foot; 17-air inlet; 18-air valve; 19-differential pressure gauge; 20-EMO emergency stop button; 21-hazardous goods label; 22-leakage detection device. DETAILED DESCRIPTION

[0030] In order to make the technical means, creative features, objectives and effects achieved by the utility model easy to understand, the utility model is further explained below in conjunction with specific implementation methods.

[0031] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front", "rear", "inner" and "outer" indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0032] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] See also Figures 1 to 5 As shown, the embodiment of the utility model provides a high-purity acid and alkali chemical valve box, which mainly includes: a cabinet 1, a control box 2, a liquid supply pipeline 3 and a waste discharge pipeline 4, wherein:

[0034] The control box 2 is arranged on the top of the cabinet 1; a power supply and a controller are installed inside the control box 2, the power supply is used to power the controller, the controller is a PLC controller, and is used to control the opening and closing of the valve on the liquid supply pipeline 3; a valve panel 5 is arranged inside the cabinet 2, and the valve panel 5 is used to fix the liquid supply pipeline 3 and the waste discharge pipeline 4. Preferably, the length of the valve panel 5 is 650mm and the width is 500mm, which is small enough and compact in structure; see Figure 2 and Figure 3As shown, in this embodiment, the liquid supply pipeline 4 includes a main route and four branches connected to the main route, and a chemical inlet 6 and four chemical outlets 7 are correspondingly arranged on the top of the cabinet 1; one chemical can be diverted into four output routes; in this embodiment, a first shut-off valve 8 is arranged on the main route to control the on and off of the main route; each branch is provided with a pneumatic valve 9 and a diaphragm valve 10, and the pneumatic valve 9 is respectively connected to the PLC controller control, and receives the opening and closing commands through the signal line to control the opening and closing of each branch; the waste discharge pipeline 4 is connected to the liquid supply pipeline 3, and the waste discharge pipeline 4 is provided with a second shut-off valve 11 at the bottom of the cabinet 1, and the second shut-off valve 11 is opened when the waste liquid is discharged to allow the waste liquid to flow out from the discharge port; the first shut-off valve 8 and the second shut-off valve 11 can be manual shut-off valves or electric shut-off valves. In this embodiment, based on cost and ease of use, the preferred first shut-off valve 8 is a normally open manual shut-off valve, and the second shut-off valve 11 is a normally closed manual shut-off valve.

[0035] In one embodiment, see Figure 2 As shown, a through hole 12 is provided at each of the four corners or two corners of the valve panel 5, and bolts are passed through the through holes 12 to fix the valve panel 5 to the side wall inside the cabinet 1. A valve bracket 13 is provided on the valve panel 5, and the liquid supply pipeline 3 and the waste discharge pipeline 4 are fixed by the valve bracket 13; all valve components on the valve panel 5 can be installed by the valve bracket 13 and nuts to reduce the size of the dead angle and the gap size between the components, so that the size of the valve panel is greatly reduced, and then the size of the cabinet is greatly reduced; good reliability and high safety.

[0036] In one embodiment, an observation panel 14 is disposed on the front of the cabinet 1 , and the observation panel 14 is made of transparent PVC or tempered glass, so that the situation inside the cabinet 1 can be clearly observed through the observation panel 14 .

[0037] In one embodiment, the cabinet 1 is a rectangular parallelepiped structure made of PP material; for better support and easy observation, a cabinet bracket 15 is also provided, and the cabinet bracket 15 is fixedly connected to the lower end of the cabinet 1; the cabinet bracket 15 is an integrally welded bracket; see Figure 5 As shown, four feet 16 are further provided at the bottom of the cabinet support 15 to improve stability and load-bearing capacity.

[0038] As a further optimization of this embodiment, combined with Figure 1 and Figure 3As shown, the valve box also includes: an air inlet 17 and an air valve 18 connected to the interior of the cabinet 1; the air inlet 17 is a one-way air inlet, and the air valve 18 is connected to the reserved port of the corresponding factory system exhaust duct, which is used to form a negative pressure inside the cabinet 1. The cabinet 1 is under negative pressure, and air can be automatically introduced through the air inlet 17, and then the air circulation in the cabinet is completed through the exhaust duct connected to the air valve 18. The interior of the cabinet 1 maintains a negative pressure state, so that when a leak occurs, the toxic gas and other harmful gases volatilized by high-purity acid and alkali chemicals will not be discharged, but will be drawn away from the air valve 18, and will not spread to the outside of the cabinet 1 to cause greater disasters. In this embodiment, a differential pressure gauge 19 is also provided on the cabinet 1, one end of the differential pressure gauge 19 extends into the interior of the cabinet 1, and the other end is outside the cabinet 1, which can display the pressure difference between the inside and outside of the cabinet 1, so that the staff can obtain the internal and external pressure difference value of the equipment.

[0039] In one embodiment, see Figure 1 As shown, the control box 2 is provided with an EMO emergency stop button 20 connected to the controller. In an emergency, the EMO emergency stop button 20 can be used to control all four branches to stop output, thereby improving safety.

[0040] In one embodiment, see Figure 1 As shown, a dangerous goods label 21 is also attached to the valve box to display information such as the type and degree of danger of the high-purity acid and alkali chemicals diverted and transmitted by the valve box.

[0041] In one embodiment, see Figure 5 As shown, a liquid leakage detection device 22 is also provided inside the cabinet 1. The liquid leakage detection device 22 is communicatively connected with the controller for detecting liquid leakage, and can send data wirelessly or wiredly through the controller to the factory's monitoring center for early warning to improve safety.

[0042] It should be noted that the shape and structure of the product protected by the utility model; the valve control and other functions of the control box described in the above embodiments can be obtained from the instructions of the relevant products or the prior art, which are existing public technical means and are not within the scope of protection of the utility model; in addition, the specific selection of each component on the valve box is selected and set according to the actual scene requirements, without specific limitation, and will not be repeated here.

[0043] From the description of the above embodiments, those skilled in the art can know that the utility model provides a high-purity acid and alkali chemical valve box, which has a simple and reasonable structure, complete functions, high reliability and good safety; it is easy to realize pipeline distribution, suitable for high-purity acid and alkali chemicals to be diverted and transported in multiple ways, which is conducive to meeting the supply of high-purity acid and alkali chemicals and helps to realize the safe, stable and efficient transportation of high-purity acid and alkali chemicals. In the high-purity acid and alkali chemical valve box, the valve components on the valve panel are fixed by valve brackets, which reduces the size of the dead angle and the size of the gap between the components, so that the size of the valve panel is reduced, and then the size of the cabinet is reduced, and the structure is compact and small. In addition, a waste discharge pipeline is designed to make the function of the valve box more complete and the safety better. The high-purity acid and alkali chemical valve box is connected to the PLC controller by setting pneumatic valves on the branches, receiving opening and closing commands through signal lines, and controlling the opening and closing of each branch. It can realize the automatic opening and closing of multi-branch transportation of high-purity acid and alkali chemicals, has a high degree of intelligence, and reduces the risk of human error. In addition, an EMO emergency shutdown button is added, which can quickly stop working in an emergency, and has better safety.

[0044] The above are only preferred embodiments of the present invention. It should be noted that a person skilled in the art can make several improvements and modifications without departing from the principles of the present invention.

[0045] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A high-purity acid and alkali chemical valve box, characterized in that: The valve box includes: a cabinet, a control box, a liquid supply pipeline and a waste discharge pipeline, wherein: The control box is arranged on the top of the cabinet; a power supply and a controller are installed inside the control box; a valve panel is arranged inside the cabinet, and the valve panel is used to fix the liquid supply pipeline and the waste discharge pipeline, the liquid supply pipeline includes a main pipeline and a plurality of branches connected to the main pipeline, and the main pipeline is provided with a first cut-off valve; each branch is provided with a pneumatic valve and a diaphragm valve, and the pneumatic valve is connected to the controller; the waste discharge pipeline is connected to the liquid supply pipeline, and the waste discharge pipeline is provided with a second cut-off valve.

2. A high-purity acid and alkali chemical valve box according to claim 1, characterized in that: The valve panel is provided with a plurality of through holes, and the valve panel is fixedly connected to the side wall inside the cabinet by bolts passing through the through holes.

3. A high-purity acid and alkali chemical valve box according to claim 1, characterized in that: The valve panel is provided with a valve bracket, and the liquid supply pipeline and the waste discharge pipeline are fixed by the valve bracket.

4. A high-purity acid and alkali chemical valve box according to claim 1, characterized in that: An observation panel is arranged on the front of the cabinet.

5. A high-purity acid and alkali chemical valve box according to claim 1, characterized in that: The valve distribution box further comprises: a cabinet support, the cabinet support is fixedly connected to the cabinet; a plurality of footings are arranged at the bottom of the cabinet support.

6. A high-purity acid and alkali chemical valve box according to claim 1, characterized in that: The valve distribution box also includes: an air inlet and an air valve communicated with the interior of the cabinet, which are used to form a negative pressure inside the cabinet.

7. A high-purity acid and alkali chemical valve box according to claim 1, characterized in that: The valve manifold box further comprises: a differential pressure gauge, one end of which extends into the interior of the cabinet and the other end of which is outside the cabinet, for displaying the pressure difference between the interior and exterior of the cabinet.

8. The high-purity acid and alkali chemical valve box according to claim 1, characterized in that: The control box is provided with an EMO emergency stop button connected to the controller.

9. A high-purity acid and alkali chemical valve box according to claim 1, characterized in that: A liquid leakage detection device is also provided inside the cabinet, and the liquid leakage detection device is communicatively connected with the controller.

10. A high-purity acid and alkali chemical valve box according to claim 1, characterized in that: The valve box is also labeled with dangerous goods.

Images