Electronic imaging platform levelness rapid measuring and adjusting system

Abstract

The utility model relates to the technical field of electron microscopes, and discloses an electronic imaging platform levelness rapid measurement and adjustment system, which comprises a glass carrying platform main body, a horizontal movement module, a height measurement module, an objective lens and an adjustment control module, wherein the horizontal moving module and the height measuring module are fixedly connected together, are arranged above the glass carrying platform main body, and are respectively connected with the adjustment control module; and the adjustment control module calculates the adjustment amount of the fine adjustment screw according to the difference value between the height values of the detection points and adjusts the fine adjustment screw according to the adjustment amount, so that the glass carrying platform main body reaches the level. According to the utility model, the levelness of the glass carrying platform can be rapidly and accurately measured and adjusted, the assembly period is greatly shortened, and the production efficiency and the product precision are improved; the automation degree is high, manpower dependence and personal errors are reduced, and calibration of the optical equipment is more accurate and reliable.

Description

Technical Field

[0001] The utility model relates to the technical field of optical instruments, in particular to a system for quickly measuring and adjusting the horizontality of an electronic imaging platform. Background Art

[0002] Electron microscopy is a high-resolution imaging technology based on electron beam imaging. Compared with optical microscopy, it has higher resolution and stronger penetration ability. Electron microscopes are mainly composed of three parts: the lens barrel, vacuum device and power cabinet. During the assembly and use of optical components, the levelness of the electronic imaging platform such as the glass slide has an important influence on the accuracy and clarity of the observation results. Therefore, it is crucial to ensure the precise level of the glass slide, which directly affects the performance and accuracy of the optical system. Traditional methods usually rely on manual measurement and adjustment using a level gauge. The process is cumbersome and susceptible to human error, low efficiency, and unsuitable for modern high-precision and mass production needs.

[0003] Therefore, there is an urgent need to provide a system for quickly measuring and adjusting the levelness of an electronic imaging platform to solve the problems raised in the above background technology. Utility Model Content

[0004] The purpose of the utility model is to provide a system for quickly measuring and adjusting the levelness of an electronic imaging platform to solve the problems raised in the above background technology. The system has a high degree of automation, significantly improved accuracy, higher efficiency, and meets the requirements of modern production.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A system for quickly measuring and adjusting the horizontality of a glass slide platform in an electron microscope assembly comprises: a glass slide platform body, a horizontal movement module, a height measurement module, an objective lens, and an adjustment control module; wherein the horizontal movement module and the height measurement module are fixedly connected together and installed above the glass slide platform body, and are respectively connected to the adjustment control module;

[0007] The glass-carrying platform body has detection points respectively arranged at four corner positions on its upper surface;

[0008] The horizontal movement module is used to drive the objective lens to automatically move to above the detection point of the glass carrier platform body;

[0009] The height measurement module is used to detect the height values ​​of the detection points in sequence;

[0010] The adjustment control module includes an operation controller, a fixing screw and a fine-tuning screw;

[0011] There are two fine-tuning screws, which are respectively installed at two adjacent corners of the four corners of the lower surface of the glass-carrying platform body;

[0012] The fixing screw is fixedly mounted on the lower surface of the glass-carrying platform body at a position in the middle of a line connecting the other two corners, the two fine-tuning screws and the fixing screw are fixedly mounted on the mounting surface, and a line connecting the positions of the two fine-tuning screws and the fixing screw forms a triangle;

[0013] The operation controller is used to calculate the adjustment amount of the fine-tuning screw according to the difference between the height values ​​of the detection points and adjust the fine-tuning screw according to the adjustment amount to make the glass carrier platform body reach the level.

[0014] As a further solution of the utility model: the horizontal movement module includes: an X-direction driving mechanism and a Y-direction driving mechanism, which are used to drive the objective lens to move in the X direction and the Y direction respectively, so that the objective lens automatically moves in the horizontal direction above the four detection points of the glass carrier platform body 1.

[0015] As a further solution of the utility model: the height measurement module is installed below the horizontal movement module, and includes a Z-direction driving mechanism and a high-sensitivity travel switch sensor integrated at the lower end of the Z-direction driving mechanism; glass slides are placed on the detection points, and when the travel switch sensors move in sequence and contact the four glass slides, the operation controller controls the Z-direction driving mechanism to stop moving downward and measures and records the Z-axis distance of the glass slide, thereby obtaining the height values ​​of the four detection points.

[0016] As a further solution of the present invention: the X-direction driving mechanism and the Y-direction driving mechanism are both driving mechanisms controlled by servo motors.

[0017] As a further solution of the present invention: the Z-direction driving mechanism is a driving mechanism controlled by a servo motor.

[0018] As a further solution of the utility model: the adjustment control module further includes an automatic stepping screwdriver, and the automatic stepping screwdriver is electrically connected to the operation controller;

[0019] The operation controller automatically calculates the direction and number of turns that each fine-tuning screw needs to be adjusted according to the difference between the height values ​​of the four detection points and the pitch of the fine-tuning screw, and controls the automatic stepping screwdriver to drive each fine-tuning screw to adjust the number of turns in the direction that needs to be adjusted so that the glass carrier platform body reaches the level.

[0020] Compared with the prior art, the beneficial effects of the utility model are:

[0021] This utility model can realize the rapid and accurate measurement and adjustment of the horizontality of the electronic imaging platform, greatly shorten the assembly cycle, improve production efficiency and product precision. The high degree of automation reduces the dependence on manpower and reduces human errors, making the calibration of optical equipment more accurate and reliable, and is suitable for large-scale production and maintenance of high-end optical systems. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the electronic imaging platform level rapid measurement and adjustment system;

[0023] Figure 2 It is a module schematic diagram of the system for rapid level measurement and adjustment of the electronic imaging platform;

[0024] Figure 3 Schematic diagram of the principle of the rapid measurement and adjustment system for the levelness of the electronic imaging platform.

[0025] In the figure: 1. Glass carrier platform body; 2. Horizontal moving module; 21. X-direction driving mechanism; 22. Y-direction driving mechanism; 3. Height measurement module; 31. Z-direction driving mechanism; 32. High-sensitivity travel switch sensor; 4. Objective lens; 5. Adjustment control module; 51. Operation controller; 52. Fixing screw; 53. Fine-tuning screw; 54. Automatic stepping screwdriver; 6. Detection point. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0027] In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0028] See also Figure 1-Figure 3 The utility model provides a system for quickly measuring and adjusting the horizontality of an electronic imaging platform, comprising: a glass carrier platform body 1, a horizontal movement module 2, a height measurement module 3, an objective lens 4, and an adjustment control module 5; wherein the horizontal movement module 2 and the height measurement module 3 are fixedly connected together and installed above the glass carrier platform body 1, and are respectively connected to the adjustment control module 5;

[0029] The glass-carrying platform body 1 has detection points 6 respectively arranged at four corner positions on its upper surface; preferably, one detection point 6 is arranged at each of the four corner positions of the platform.

[0030] The horizontal moving module 2 is used to drive the objective lens to automatically move to above the detection point of the glass platform body 1; preferably, in some embodiments, the horizontal moving module 2 includes: an X-direction driving mechanism 21 and a Y-direction driving mechanism 22, which are used to drive the objective lens to move in the X direction and the Y direction respectively, so that the objective lens 4 automatically moves horizontally to above the four detection points of the glass platform body 1. The system is designed with precise X-direction and Y-direction driving mechanisms, which can automatically move the objective lens to above the detection points at the four corners of the glass platform.

[0031] The height measurement module 3 is used to detect the height values ​​of the four detection points 6 in sequence; preferably, in some embodiments, the height measurement module 3 is installed below the horizontal movement module 2, and includes a Z-direction driving mechanism 31 and a high-sensitivity travel switch sensor 32 integrated at the lower end of the Z-direction driving mechanism; a glass slide is placed on the detection point, and when the travel switch sensor 32 moves in sequence (including horizontal movement and lifting movement) and contacts the glass slide, the operation controller 51 controls the Z-direction driving mechanism 31 to stop moving downward and measures and records the Z-axis distance of the glass slide, thereby obtaining the height values ​​of the four detection points 6. In this way, the Z-axis distance of the glass slide can be accurately measured, and the Z-axis height values ​​of the four corners can be automatically recorded, thereby indirectly reflecting the horizontal state of the glass slide platform.

[0032] The adjustment control module 5 includes: an operation controller 51, a fixing screw 52 and a fine-tuning screw 53; two fine-tuning screws 53 are respectively installed at two adjacent corners of the four corners of the lower surface of the glass-carrying platform body 1; the fixing screw 52 is fixedly installed at the middle position of the line connecting the other two corners on the lower surface of the glass-carrying platform body 1, and the two fine-tuning screws 53 and the fixing screw 52 are fixedly installed on the installation surface, and the line connecting the positions of the two fine-tuning screws 53 and the fixing screw 52 forms a triangle, which can ensure that the glass-carrying platform body 1 is stably supported and the horizontality is adjustable;

[0033] The operation controller 51 calculates the adjustment amount of the fine-tuning screw 53 according to the difference between the height values ​​of the detection points 6 at the four corners and adjusts the fine-tuning screw 53 according to the adjustment amount to make the glass-carrying platform body 1 reach the level. According to the above algorithm, the operation controller 51 can quickly calculate the horizontal deviation of the glass-carrying platform, avoiding the tediousness and potential errors of traditional manual calculation; and then automatically or manually adjusts each fine-tuning screw 53 in the corresponding direction by a predetermined number of circles based on the calculated adjustment amount parameters to achieve the horizontal adjustment of the glass-carrying platform body 1.

[0034] According to the above embodiment, the horizontality of the electronic imaging platform can be quickly and accurately measured and adjusted, which greatly shortens the assembly cycle and improves production efficiency and product accuracy; the high degree of automation reduces manpower dependence and human errors, making the calibration of optical equipment more accurate and reliable, and suitable for large-scale production and maintenance of high-end optical systems.

[0035] Furthermore, the X-direction driving mechanism 21 , the Y-direction driving mechanism 22 and the Z-direction driving mechanism 31 are all driving mechanisms controlled by servo motors, and the accuracy and repeatability of movement are ensured through precise servo motor control.

[0036] Preferably, in some embodiments, the adjustment control module 5 also includes an automatic stepping screwdriver 54, which is electrically connected to the operation controller 51; the operation controller 51 automatically calculates the direction and number of turns that each fine-tuning screw 53 needs to be adjusted according to the difference between the height values ​​of the four detection points 6 and the pitch of the fine-tuning screw 53, and then the engineer aligns the automatic stepping screwdriver 54 with the corresponding fine-tuning screw, presses the start button on the screwdriver, and controls the automatic stepping screwdriver 54 to adjust the fixed number of turns according to the program. Specifically, the operation controller 51 drives each fine-tuning screw 53 to adjust the corresponding number of turns in the direction to be adjusted as needed, and performs precise adjustment to make the glass carrier platform body 1 reach the level. According to the above algorithm, once the operation controller 51 calculates the inclination of the platform, it will automatically calculate the direction and number of turns that each fine-tuning screw needs to be adjusted based on the height difference of the four corners and the pitch of the fine-tuning screw, and automatically adjust each fine-tuning screw 53 to a predetermined position based on the calculated adjustment direction, number of turns and other parameters. The screwdriver will adjust the fixed number of turns according to the program for precise adjustment, and then adjust the next screw, repeating the above measurement and adjustment process until the horizontality of the glass carrier platform meets the standard.

[0037] The working principle of the utility model is: when in use, the operation method of the electronic imaging platform horizontality rapid measurement and adjustment system includes: S1: adjusting the control module 5 to move the objective lens 4 to the set detection point through the X-direction driving mechanism 21 and the Y-direction driving mechanism 22; S2: then detecting the Z-axis height, lowering the Z-axis until the travel switch sensor 32 contacts the slide on the detection point 6 and is triggered, and the operation controller 51 controls the Z-direction driving mechanism 31 to stop moving downward and measures and records the current Z-axis value of the slide, thereby obtaining the height values ​​of the four detection points. (Repeat steps S1 and S2 three times until all the detection points are measured); S3: then calculate the adjustment amount, and calculate the adjustment direction and number of turns of the two fine-tuning screws 53 according to the difference and pitch of the Z axis at the four detection points; S4: then aim the automatic stepping screwdriver at the first fine-tuning screw 53, start the button, and start automatic adjustment; S5: then adjust the other fine-tuning screw 53; then repeat steps S1 and S2 to automatically determine whether the flatness is qualified. If the error meets the requirements, the adjustment is completed. If it does not meet the requirements, adjust again until it fully meets the requirements.

[0038] The above specific implementation methods of the utility model do not constitute a limitation on the protection scope of this application. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of this application should be included in the protection scope of this application.

Claims

1. The electronic imaging platform level rapid measurement and adjustment system is characterized by: include: A glass carrier platform body (1), a horizontal movement module (2), a height measurement module (3), an objective lens (4), and an adjustment control module (5); wherein the horizontal movement module (2) and the height measurement module (3) are fixedly connected together and installed above the glass carrier platform body (1), and are respectively connected to the adjustment control module (5); The glass-carrying platform body (1) has detection points (6) respectively arranged at four corner positions on its upper surface; The horizontal movement module (2) is used to drive the objective lens (4) to automatically move to above the detection point of the glass carrier platform body (1); The height measurement module (3) is used to detect the height values ​​of the detection points (6) in sequence; The adjustment control module (5) comprises an operation controller (51), a fixing screw (52) and a fine-tuning screw (53); The number of the fine-tuning screws (53) is two, and they are respectively installed at two adjacent corner positions among the four corners of the lower surface of the glass-carrying platform body (1); The fixing screw (52) is fixedly mounted on the lower surface of the glass-carrying platform body (1) at a position in the middle of a line connecting the other two corners; the two fine-tuning screws (53) and the fixing screw (52) are fixedly mounted on the mounting surface, and a line connecting the positions of the two fine-tuning screws (53) and the fixing screw (52) forms a triangle; The operation controller (51) is used to calculate the adjustment amount of the fine-tuning screw (53) according to the difference between the height values ​​of the detection points and adjust the fine-tuning screw (53) according to the adjustment amount so that the glass carrier platform body (1) reaches a horizontal level.

2. The electronic imaging platform level rapid measurement and adjustment system according to claim 1, characterized in that: The horizontal movement module (2) comprises: an X-direction driving mechanism (21) and a Y-direction driving mechanism (22), which are used to drive the objective lens (4) to move in the X-direction and the Y-direction respectively, so that the objective lens (4) automatically moves in the horizontal direction to above four detection points of the glass carrier platform body (1).

3. The electronic imaging platform level rapid measurement and adjustment system according to claim 2, characterized in that: The height measurement module (3) is installed below the horizontal movement module (2), and comprises a Z-direction drive mechanism (31) and a high-sensitivity travel switch sensor (32) integrated at the lower end of the Z-direction drive mechanism; glass slides are placed on the detection points (6), and when the travel switch sensor moves in sequence and contacts four of the glass slides, the operation controller (51) controls the Z-direction drive mechanism (31) to stop moving downward and measures and records the Z-axis distance of the glass slides, thereby obtaining the height values ​​of the four detection points (6).

4. The electronic imaging platform level rapid measurement and adjustment system according to claim 2, characterized in that: The X-direction driving mechanism (21) and the Y-direction driving mechanism (22) are both driving mechanisms controlled by servo motors.

5. The electronic imaging platform level rapid measurement and adjustment system according to claim 3, characterized in that: The Z-direction driving mechanism (31) is a driving mechanism controlled by a servo motor.

6. The electronic imaging platform levelness rapid measurement and adjustment system according to claim 1, characterized in that: The adjustment control module (5) further comprises an automatic stepping screwdriver (54), wherein the automatic stepping screwdriver (54) is electrically connected to the operation controller (51); The operation controller (51) automatically calculates the direction and number of turns that each of the fine-tuning screws (53) needs to be adjusted according to the difference between the height values ​​of the four detection points and the pitch of the fine-tuning screws (53), and controls the automatic stepping screwdriver (54) to drive each of the fine-tuning screws (53) to adjust the number of turns according to the direction that needs to be adjusted, so that the glass carrier platform body (1) reaches a horizontal level.

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