Cleaning tool

Abstract

The utility model relates to a cleaning tool. The cleaning tool comprises a base, a bearing seat and a plurality of supporting pieces. The bearing seat is arranged on the base, the bearing seat is provided with a containing groove and a liquid drainage hole communicated with the containing groove, the containing groove is located in the side, away from the base, of the bearing seat and comprises a cleaning space, and the liquid drainage hole penetrates through the side, facing the base, of the bearing seat; the multiple supporting pieces are arranged in the containing groove at intervals and arranged around the cleaning space. By the adoption of the cleaning tool, cleaning liquid is injected into the containing groove, after the clamp and the chip are taken down, the clamp is supported on the multiple supporting pieces, and the chip is located on the side facing the containing groove and located in the cleaning space. And at the moment, the chip is immersed in the cleaning liquid in the accommodating groove, so that the polishing liquid on the surface of the chip is cleaned, the residue of the polishing liquid is reduced, and the pollution of the chip is avoided. And meanwhile, the chip is placed downwards, and the polishing solution is cleaned, so that the polishing solution is prevented from entering the clamp to damage the clamp, the use reliability of the clamp is ensured, and the service life of the clamp is prolonged.

Description

Technical Field

[0001] The present application belongs to the technical field of chip polishing process, and in particular, relates to a cleaning tool. Background Art

[0002] In the chip thinning process of infrared focal plane detectors, CMP (Chemical Mechanical Polishing) is a very important process. In order to ensure the flatness of the chip surface after polishing, polishing liquid needs to be continuously added during the polishing process. Currently, after polishing, the chip is usually placed face up, and the polishing liquid remains on the chip surface, which causes the chip to be contaminated. Utility Model Content

[0003] Based on the above problems, the present application provides a cleaning tool that can clean the surface of a chip and avoid chip contamination.

[0004] The technical solution proposed in this application is:

[0005] A cleaning tool, comprising:

[0006] Base;

[0007] A bearing seat, arranged on the base, and having a receiving groove and a drainage hole connected with the receiving groove, wherein the receiving groove is located on a side of the bearing seat away from the base, and the receiving groove includes a cleaning space, and the drainage hole penetrates a side of the bearing seat toward the base;

[0008] A plurality of support members are arranged at intervals in the accommodating groove and are arranged around the cleaning space.

[0009] Furthermore, the bottom wall of the accommodating groove is also provided with a closing protrusion, and the closing protrusion and the bottom wall of the accommodating groove are combined to form the cleaning space, and the plurality of supporting members are arranged at intervals around the closing protrusion.

[0010] Furthermore, the closed protrusion is an annular protrusion.

[0011] Furthermore, a supporting surface is provided on the supporting member, and a distance between the supporting surface and the bottom wall of the accommodating groove is greater than or equal to a height of the closed protrusion protruding from the bottom wall of the accommodating groove.

[0012] Furthermore, a notch is formed at one end of the support member facing the closed protrusion, and the notch has a positioning surface and the support surface which are connected to each other, and the support surface is parallel to the bottom wall of the accommodating groove.

[0013] Furthermore, the accommodating tank further comprises an installation space, the installation space is arranged around the cleaning space, a plurality of the supporting members are arranged in the installation space at intervals, and the drainage hole is communicated with the installation space.

[0014] Furthermore, the bearing seat is provided with a plurality of drainage holes, and the plurality of drainage holes are arranged at intervals around the cleaning space.

[0015] Furthermore, the base is provided with a liquid storage tank, the bearing seat is connected to the liquid storage tank of the base, and the liquid discharge hole is arranged toward the liquid storage tank.

[0016] Furthermore, it also includes a connecting column, one end of which is connected to the bottom wall of the liquid storage tank, and the other end is connected to the supporting seat.

[0017] Furthermore, the orthographic projection of the bearing seat on the base is located in the liquid storage tank.

[0018] Compared with the prior art, the beneficial effects of this application are:

[0019] The cleaning fixture is used to inject cleaning liquid into the receiving tank. After the fixture and the chip are removed, the fixture is supported on multiple supports, and the chip is located on the side facing the receiving tank and in the cleaning space. At this time, the chip is immersed in the cleaning liquid in the receiving tank to clean the polishing liquid on the surface of the chip, reduce the residual polishing liquid, and thus avoid chip contamination. At the same time, the chip is placed downward, and the polishing liquid is cleaned, so it is also avoided that the polishing liquid enters the interior of the fixture and causes damage to it, ensuring the reliability of the fixture and extending the service life of the fixture.

[0020] In addition, the drainage hole can discharge the cleaning liquid after cleaning to the base, avoiding the accumulation of waste liquid in the receiving tank, ensuring the purity of the cleaning liquid, and further ensuring the cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings are used to provide further understanding of the present application and constitute a part of the specification. They are used to explain the present application together with the embodiments of the present application and do not constitute a limitation of the present application.

[0022] Figure 1 A schematic diagram of the structure of a cleaning tool provided in one embodiment of the present application;

[0023] Figure 2 for Figure 1 The enlarged structural diagram of point A in the cleaning tool is shown.

[0024] Description of labels:

[0025] 100, cleaning tool; 110, base; 120, bearing seat; 130, support member; 121, accommodating groove; 122, drainage hole; 121a, cleaning space; 111, liquid storage tank; 140, connecting column; 121b, installation space; 150, closing protrusion; 131, supporting surface; 132, positioning surface. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0027] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0028] In order to facilitate understanding of the technical solution of the present application, the problems existing in the existing CMP process are explained here: At present, after polishing, the chip is usually placed facing upward. Since there is residual polishing liquid on the surface of the chip, the polishing liquid is easy to flow into the fixture and cause damage to the fixture. At the same time, the residual polishing liquid will also contaminate the chip, affecting the use of the chip.

[0029] like Figure 1 As shown, an embodiment of the present application provides a cleaning tool 100, including a base 110, a bearing seat 120 and a plurality of supporting members 130. The bearing seat 120 is disposed on the base 110, and the bearing seat 120 has a receiving groove 121 and a drainage hole 122 connected to the receiving groove 121, the receiving groove 121 is located on the side of the bearing seat 120 away from the base 110, and the receiving groove 121 includes a cleaning space 121a. The drainage hole 122 penetrates the side of the bearing seat 120 facing the base 110. A plurality of supporting members 130 are arranged at intervals in the receiving groove 121, and are arranged around the cleaning space 121a to support the fixture.

[0030] The cleaning tool described above is used to inject cleaning liquid into the receiving groove 121. After the fixture and the chip are removed, the fixture is supported on multiple support members 130, and the chip is located on the side facing the receiving groove 121 and in the cleaning space 121a. At this time, the chip is immersed in the cleaning liquid in the receiving groove 121 to clean the polishing liquid on the surface of the chip, reduce the residual polishing liquid, and thus avoid chip contamination. At the same time, the chip is placed downward, and the polishing liquid is cleaned, so it is also avoided that the polishing liquid enters the interior of the fixture and causes damage to it, ensuring the reliability of the fixture and extending the service life of the fixture.

[0031] In addition, the drain hole 122 can drain the cleaning liquid after cleaning to the base 110, so as to avoid the accumulation of waste liquid in the receiving groove 121, thereby ensuring the purity of the cleaning liquid and further ensuring the cleaning effect.

[0032] It should be explained that in this embodiment, the cleaning liquid is pure water. In addition, the above cleaning is not limited to completely removing the polishing liquid on the chip surface; the cleaning can be to wash away part of the polishing liquid, and the remaining residual polishing liquid is also diluted, which will not pollute the chip and will not damage the fixture.

[0033] In one embodiment, a liquid storage tank 111 is provided on one side of the base 110 facing the supporting seat 120 , and a liquid discharge hole 122 corresponds to the liquid storage tank 111 to discharge the cleaning liquid used to clean the chip into the liquid storage tank 111 to prevent the contaminated cleaning liquid from accumulating in the containing tank 121 .

[0034] Specific to Figure 1 In the illustrated embodiment, the base 110 and the liquid storage tank 111 are both cylindrical. The base 110 has a diameter of 200 mm and a height of 20 mm; the liquid storage tank 111 has a diameter of 180 mm and a depth of 10 mm.

[0035] In one embodiment, the cleaning tool also includes a connecting column 140, one end of which is connected to the bottom wall of the liquid storage tank 111, and the other end is connected to the supporting seat 120, and is connected to the side of the supporting seat 120 facing the base 110, thereby fixing the supporting seat 120 and the base 110.

[0036] Specific to Figure 1 In the illustrated embodiment, the connecting column 140 is cylindrical and connected to the center of the liquid storage tank 111. The connecting column 140 has a diameter of 60 mm and a height of 100 mm.

[0037] In one embodiment, the orthographic projection of the support seat 120 on the base 110 is located in the liquid storage tank 111, thereby ensuring that the liquid discharged from the drainage hole 122 can flow into the liquid storage tank 111 and preventing the waste liquid from flowing outside and contaminating the work surface.

[0038] It is understandable that in this embodiment, the drainage hole 122 and the connecting column 140 are staggered, so as to ensure that the drainage hole 122 corresponds to the liquid storage tank 111. At the same time, in order to avoid liquid splashing, the drainage hole 122 can be opened at the connection between the connecting column 140 and the supporting seat 120, so that the liquid flows down along the surface of the connecting column 140.

[0039] In one embodiment, the bearing seat 120 and the receiving groove 121 are both cylindrical, and the bearing seat 120, the connecting column 140 and the base 110 are coaxially arranged. The bearing seat 120 has a diameter of 150 mm and a height of 30 mm, and the receiving groove 121 has a diameter of 130 mm and a depth of 20 mm. Furthermore, the diameter of the drainage hole 122 is 4 mm.

[0040] In one embodiment, the support base 120 is provided with a plurality of drainage holes 122, and the plurality of drainage holes 122 are arranged at intervals around the cleaning space 121a to improve drainage efficiency. Figure 1 In the illustrated embodiment, there are four drainage holes 122 , which are evenly spaced around the cleaning space 121 a .

[0041] In one embodiment, the accommodating tank 121 further includes an installation space 121 b , which is disposed around the cleaning space 121 a , a plurality of support members 130 are arranged at intervals in the installation space 121 b , and the drainage hole 122 is in communication with the installation space 121 b .

[0042] It should be noted that the above-mentioned spaces are named according to their functions. For example, the cleaning space 121a means that the chip is located in the cleaning space 121a for cleaning, and the installation space 121b is for the installation of the support member 130. Both are part of the space of the accommodating groove 121 and are interconnected, so that the cleaning liquid in the cleaning space 121a can flow into the installation space 121b and then be discharged through the drain hole 122.

[0043] In one embodiment, the bottom wall of the receiving groove 121 is further provided with a closed protrusion 150, and the closed protrusion 150 and the bottom wall of the receiving groove 121 enclose the above-mentioned cleaning space 121a, and a plurality of support members 130 are arranged at intervals around the closed protrusion 150. When cleaning the chip, the fixture is supported on the support member 130, and the chip protruding from the fixture is immersed in the cleaning space 121a in the middle of the closed protrusion 150 to achieve chip cleaning.

[0044] For further information, please also refer to Figure 2The support member 130 is provided with a support surface 131 for supporting the clamp, and the distance between the support surface 131 and the bottom wall of the receiving groove 121 is equal to the height of the closed protrusion 150 protruding from the bottom wall of the receiving groove 121. In this way, the closed protrusion 150 can also play a certain supporting role. In addition, after the cleaning liquid is filled into the closed protrusion 150, the clamp is still supported on the top of the closed protrusion 150, which can ensure that the chip enters the cleaning liquid as much as possible to ensure the cleaning effect.

[0045] It is understandable that after the chip enters, the cleaning liquid will overflow from the cleaning space 121a, and the overflowed cleaning liquid will flow into the installation space 121b from the gap between the fixture and the closed protrusion 150. In addition, it should be noted that the amount of polishing liquid remaining on the chip surface is much less than the amount of cleaning liquid in the cleaning space 121a, that is, less polishing liquid enters the cleaning space after cleaning, so there is no need to replace the cleaning liquid after each cleaning, but when the amount of cleaning liquid is less, cleaning liquid can be injected into the cleaning space 121a.

[0046] Specific to Figure 1 In the illustrated embodiment, the closing protrusion 150 is an annular protrusion having a thickness of 1 mm and a height of 7 mm and is coaxially arranged with the bearing seat 120 .

[0047] In other embodiments, the distance between the support surface 131 and the bottom wall of the accommodating groove 121 may also be greater than the height of the closing protrusion 150 protruding from the bottom wall of the accommodating groove 121, but in this case, it is necessary to ensure that the chip can be immersed in the cleaning liquid in the cleaning space 121a.

[0048] In one embodiment, a notch is formed at one end of the support member 130 facing the closed protrusion 150, and the notch includes a positioning surface 132 and a supporting surface 131 connected to each other, the supporting surface 131 is parallel to the bottom wall of the receiving groove 121, and the positioning surface 132 is set at an angle to the support member 130, so as to position the fixture supported by the supporting surface 131. Furthermore, the positioning surface 132 is perpendicular to the supporting surface 131.

[0049] Specific to Figure 1 In the embodiment shown, the length of the support member 130 is 20 mm, the width is 2 mm, and the height is 10 mm. The notch is located at the top of one end of the support member 130, and the length of the notch along the height direction of the support member 130 is 3 mm, and the length along the length direction of the support member 130 is 1.5 mm. It can be seen that the distance between the support surface 131 and the bottom wall of the accommodating groove 121 is 7 mm, which is the same as the height of the protrusion of the closed protrusion 150. Of course, in other embodiments, the support surface 131 can also be directly the top surface of the support member 130, that is, the end of the support member 130 does not have a notch, and the support is directly provided by the top surface of the support member 130, and the specific form is not limited here.

[0050] At the same time, it can be determined that the diameter of the closing protrusion 150 can be set according to actual conditions, as long as it ensures that the chip can be immersed in the cleaning space 121a.

[0051] In order to facilitate understanding of the technical solution of this application, Figure 1 The use of the cleaning tool in the above embodiment is described as follows:

[0052] The cleaning liquid is injected into the cleaning space 121a between the closed protrusions 150. After the chip polishing is completed, the fixture is removed, and then the fixture is placed on the support surface 131 and positioned by the positioning surface 132. The chip is immersed in the cleaning liquid in the cleaning space 121a, and then the fixture is removed from the cleaning tool.

[0053] It should be noted that after a large amount of cleaning liquid is accumulated in the liquid storage tank 111 , the cleaning liquid accumulated in the cleaning tool can be poured into the discharge position, and the cleaning tool can be cleaned.

[0054] Although the embodiments of the present application have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A cleaning tool, characterized in that: include: Base; A bearing seat, arranged on the base, and having a receiving groove and a drainage hole connected with the receiving groove, wherein the receiving groove is located on a side of the bearing seat away from the base, and the receiving groove includes a cleaning space, and the drainage hole penetrates a side of the bearing seat toward the base; A plurality of support members are arranged at intervals in the accommodating groove and are arranged around the cleaning space.

2. The cleaning tool according to claim 1, characterized in that: The bottom wall of the accommodating groove is further provided with a closing protrusion, and the closing protrusion and the bottom wall of the accommodating groove are combined to form the cleaning space, and a plurality of the supporting members are arranged around the closing protrusion at intervals.

3. The cleaning tool according to claim 2, characterized in that: The closed protrusion is an annular protrusion.

4. The cleaning tool according to claim 2, characterized in that: The support member is provided with a support surface, and the distance between the support surface and the bottom wall of the accommodating groove is greater than or equal to the height of the closed protrusion protruding from the bottom wall of the accommodating groove.

5. The cleaning tool according to claim 4, characterized in that: A notch is formed at one end of the support member facing the closed protrusion. The notch has a positioning surface and the support surface which are connected to each other. The support surface is parallel to the bottom wall of the accommodating groove.

6. The cleaning tool according to any one of claims 1 to 5, characterized in that: The accommodating tank further comprises an installation space, the installation space is arranged around the cleaning space, a plurality of the supporting members are arranged in the installation space at intervals, and the drainage hole is communicated with the installation space.

7. The cleaning tool according to any one of claims 1 to 5, characterized in that: The bearing seat is provided with a plurality of drainage holes, and the plurality of drainage holes are arranged at intervals around the cleaning space.

8. The cleaning tool according to any one of claims 1 to 5, characterized in that: The base is provided with a liquid storage tank, the bearing seat is connected to the liquid storage tank of the base, and the liquid discharge hole is arranged toward the liquid storage tank.

9. The cleaning tool according to claim 8, characterized in that: It also includes a connecting column, one end of which is connected to the bottom wall of the liquid storage tank, and the other end is connected to the supporting seat.

10. The cleaning tool according to claim 8, characterized in that: The orthographic projection of the bearing seat on the base is located in the liquid storage tank.

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