Pipeline dredging device

Abstract

The utility model provides a pipeline dredging device which comprises a driving unit, a transmission part and a cleaning part, a transmission shaft is arranged at the end of the driving unit, a connector is arranged at the end of the cleaning part, the first end of the transmission part is connected with the transmission shaft, the second end of the transmission part is connected with the connector, the driving unit drives the transmission part to rotate, and the transmission part transmits rotating torque to the cleaning part. The cleaning piece is driven to rotate. The pipeline dredging device provided by the utility model is low in cost, convenient to mount and high in universality, greatly reduces the maintenance frequency of equipment, does not need to change the original equipment structure, and does not affect the production schedule.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a pipeline clearing device. Background Art

[0002] In the production process of the semiconductor industry, chemical reactions caused by the mixing of various gases will generate by-products. The accumulation of by-products frequently leads to blockage of the intake pipe, and in severe cases, it will cause the main equipment to shut down and cause losses. Currently, there are two main ways to clean it: Method 1: compare the pressure difference between the intake and exhaust of the intake pipe through on-site inspections, determine the equipment maintenance cycle according to the deviation range of the set standard value, and manually clean the blocked by-products; Method 2: The original manufacturer transforms the on-site equipment, which requires the modification of multiple devices, programmable logic controllers, and fixed installation of pipeline dredging devices to achieve the purpose of cleaning.

[0003] However, the above method 1 has the problem that the equipment maintenance frequency is too frequent, which is time-consuming, labor-intensive, costly and difficult to control. There are many occasional alarm events and accidental downtime often occurs. The second method has the problem that the equipment modification is large, affects production, is costly, and is fixedly installed on the modified equipment. Even the same model of equipment cannot be used interchangeably and has no universality. Therefore, it is necessary to design a pipeline dredging device that is easy to install, has strong universality, and does not require changing the structure of the original equipment. Utility Model Content

[0004] In view of the shortcomings of the prior art mentioned above, the purpose of the present application is to provide a pipeline clearing device to solve the problems in the prior art such as manual cleaning of blockages resulting in too frequent equipment maintenance, many occasional alarm events, easy downtime, and equipment modification affecting production, high cost, and lack of universality.

[0005] An embodiment of the present application provides a pipe clearing device, including a driving unit, a transmission member and a cleaning member, wherein the end of the driving unit is configured with a transmission shaft, the end of the cleaning member is configured with a connecting head, the first end of the transmission member is connected to the transmission shaft, and the second end of the transmission member is connected to the connecting head, the driving unit drives the transmission member to rotate, and the transmission member transfers the rotational torque to the cleaning member, driving the cleaning member to rotate.

[0006] In some embodiments, a control unit is included, the control unit is electrically connected to the driving unit, and the control unit controls the start and stop and the operating frequency of the driving unit.

[0007] In some embodiments, the control unit comprises an industrial control computer board.

[0008] In some embodiments, the driving unit includes a solenoid valve and a swing cylinder; the solenoid valve includes an air inlet, a first air outlet, and a second air outlet; the swing cylinder includes a first air chamber, a second air chamber, a first air pipe, a second air pipe, and the transmission shaft;

[0009] The air inlet is connected to an air source, the first air outlet is connected to the first air chamber through the first air pipe, and the second air outlet is connected to the second air chamber through the second air pipe, so that the solenoid valve controls the rotation direction of the transmission shaft.

[0010] In some embodiments, the solenoid valve is a two-position five-way solenoid valve.

[0011] In some embodiments, the driving unit includes a pressure regulating valve, which is disposed between the air inlet of the solenoid valve and the air source, and is used to adjust the flow rate of the compressed gas entering the swing cylinder.

[0012] In some embodiments, the driving unit is a reduction motor, and the control unit is a time relay.

[0013] In some embodiments, the transmission member is a universal joint.

[0014] In some embodiments, the cleaning member is a scraper, and the scraper includes a scraper body and the connecting head, and the connecting head is fixedly disposed on one end of the scraper body.

[0015] In some embodiments, a snap fastener is included, the end of the driving device is configured with a connecting piece, the pipeline to be cleared is configured with an interface, the connecting piece is matched and connected with the interface, and the snap fastener is used to tighten the connection between the connecting piece and the interface to install the pipeline clearing device on the pipeline.

[0016] As described above, the pipeline clearing device of the present application has the following beneficial effects: easy installation, strong versatility, no need to change the structure of the original equipment, and low manufacturing cost, will not affect production, and can greatly reduce the frequency of equipment maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The following figures describe in detail the exemplary embodiments disclosed in this application. The same reference numerals represent similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only for the purpose of illustration and description, and are not intended to limit the scope of this application. Other embodiments may also accomplish the inventive intent in this application. It should be understood that the drawings are not drawn to scale.

[0018] in:

[0019] Figure 1is a schematic diagram of a pipeline dredging device module according to some embodiments of the present application;

[0020] Figure 2 is an exploded schematic diagram of a pipeline dredging device according to some embodiments of the present application;

[0021] Figure 3 yes Figure 2 The schematic diagram of the module of the pipeline dredging device with a pressure regulating valve added is shown;

[0022] Figure 4 yes Figure 3 The module schematic diagram of the pipeline dredging device with a control unit added is shown;

[0023] Figure 5 It is a schematic diagram of a flange installation of a pipeline dredging device according to some embodiments of the present application;

[0024] Figure 6 yes Figure 5 An exploded schematic diagram of the pipeline dredging device shown;

[0025] Figure 7 yes Figure 5 Schematic diagram of the application of the pipeline clearing device shown. DETAILED DESCRIPTION

[0026] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the content in the present application. It will be apparent to those skilled in the art that various local modifications to the disclosed embodiments are apparent, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the embodiments shown, but to the widest scope consistent with the claims.

[0027] Local Scrubber (adsorption-type exhaust gas treatment equipment) can treat almost all small-flow exhaust gases and is a commonly used exhaust gas treatment equipment in semiconductor factories. Adsorption-type treatment uses porous solid adsorbents to treat mixed gases, so that one or more components contained in them are adsorbed on the solid surface to achieve the purpose of separation. However, when the Local Scrubber is working, chemical reactions will produce by-products due to the mixing of various gases. The accumulation of by-products frequently causes blockage of the intake pipe, and in severe cases, it will cause the main equipment to shut down and cause losses.

[0028] like Figure 1As shown, the embodiment of the present application provides a pipeline dredging device, including a driving unit 1, a transmission member 2 and a cleaning member 3. The end of the driving unit 1 is configured with a transmission shaft, the end of the cleaning member 3 is configured with a connector, the first end of the transmission member 2 is connected to the transmission shaft, and the second end of the transmission member 2 is connected to the connector. The driving unit 1 drives the transmission member 2 to rotate, and the transmission member 2 transmits a rotational torque to the cleaning member 3, driving the cleaning member 3 to rotate. Specifically, when the pipeline dredging device is extended into the pipeline to remove the obstruction, the driving unit 1 is connected to the transmission member 2, and the transmission member 2 transmits a torque and drives the cleaning member 3 to scrape the attachments on the pipeline wall to clean the pipeline.

[0029] The technical solution of the present application is described in detail below with reference to the embodiments and drawings.

[0030] Embodiment 1

[0031] Combination Figure 1 and Figure 2 As shown, an embodiment of the present application provides a pipe clearing device, including a driving unit 1, a transmission member 2 and a cleaning member 3. The end of the driving unit 1 is provided with a transmission shaft 111, the end of the cleaning member 3 is provided with a connecting head 301, the first end 201 of the transmission member 2 is connected to the transmission shaft 111, the second end 202 of the transmission member 2 is connected to the connecting head 301, the driving unit 1 drives the transmission member 2 to rotate, the transmission member 2 transmits the rotational torque to the cleaning member 3, and drives the cleaning member 3 to rotate.

[0032] In some embodiments, the driving unit 1 includes a solenoid valve 12 and a swing cylinder 11. The solenoid valve 12 includes an air inlet 121, a first air outlet 122, and a second air outlet 123. The air inlet 121 is connected to an air source (not shown). The swing cylinder 11 includes a first air chamber (not shown), a second air chamber (not shown), a first air pipe 113, a second air pipe 114, and a transmission shaft 111. The first air outlet 122 is connected to the first air chamber through the first air pipe 113, and the second air outlet 123 is connected to the second air chamber through the second air pipe 114, so that the solenoid valve 12 controls the rotation direction of the transmission shaft 111 of the swing cylinder 11. In some embodiments, the solenoid valve 12 is a two-position five-way solenoid valve, and also includes a first exhaust port 124 and a second exhaust port 125. After power is turned on, two air outlet passages can be formed inside the two-position five-way solenoid valve 12. The two air outlet passages work alternately and respectively deliver compressed air to the first air chamber of the swing cylinder 11 through the first air outlet 122 via the first air pipe 113, or deliver compressed air to the second air chamber of the swing cylinder 11 through the second air outlet 123 via the second air pipe 114. Specifically, compressed air flows from the air source into the solenoid valve 12 through the air inlet 121, and is delivered to the swing cylinder 11 through the solenoid valve 12. A movable barrier (not shown) is provided between the first air chamber and the second air chamber, and the transmission shaft 111 is fixedly connected to the barrier. The movable barrier can make the transmission shaft 111 rotate forward or reverse. When compressed air flows into the first air chamber of the swing cylinder 11 from the first air pipe 113, and the gas in the second air chamber flows out of the swing cylinder 11 from the second air pipe 114, the barrier between the first air chamber and the second air chamber in the swing cylinder 11 is pushed from the first air chamber to the second air chamber, pushing the transmission shaft 111 to rotate in the forward direction (for example, the rotation range is 270°), and the compressed air is discharged from the second exhaust port 125. Conversely, when compressed air flows into the second air chamber of the swing cylinder 11 from the second air pipe 114, and the gas in the first air chamber flows out of the swing cylinder 11 from the first air pipe 113, the barrier in the swing cylinder 11 is pushed from the second air chamber to the first air chamber, pushing the transmission shaft 111 to rotate in the reverse direction (for example, the rotation range is 270°), and the compressed air is discharged from the first exhaust port 124.

[0033] like Figure 3As shown, in some embodiments, the drive unit 1 includes a pressure regulating valve 4. The pressure regulating valve 4 is arranged between the air inlet 121 of the solenoid valve 12 and the air source, and is used to adjust the flow rate of the compressed gas entering the swing cylinder 11. When the gas flow rate is small, the swing cylinder 11 is inflated very slowly, and it takes a long time to swing to the limit position; when the gas flow rate is large, the swing cylinder 11 is inflated very quickly, and it only takes a short time to swing to the limit position. Specifically, the pressure regulating valve 4 can control the rotation amplitude of the transmission shaft 111 of the swing cylinder 11. When the swing period of the swing cylinder 11 is fixed, the gas flow through the pressure regulating valve 4 determines the rotation amplitude of the transmission shaft 111. For example, when the swing period of the swing cylinder 11 is T, the gas flow of the pressure regulating valve 4 is V, and the rotation amplitude of the transmission shaft 111 is D; when the swing period T remains unchanged and the gas flow rate becomes V / n (n is a positive integer), the rotation amplitude of the transmission shaft 111 becomes D / n.

[0034] like Figure 2 and Figure 3 As shown, in some embodiments, the cleaning member 3 is a scraper 30, and the scraper 30 includes a scraper body 301 and a connector 302, and one end of the scraper body 301 is fixedly provided with the connector 302. The shape of the scraper body 301 can be a U-shape as shown in the figure, or it can be other shapes (for example, a rectangle), which can match the shape of the pipeline to be cleaned. The material of the scraper 30 can be stainless steel. It should be noted that the shape and material of the scraper 30 are not limited, as long as it can achieve the purpose of removing the blockage.

[0035] In some embodiments, the transmission member 2 is a universal joint 20. The first end 201 of the universal joint 20 is matched and connected with the end of the transmission shaft 111 of the swing cylinder 11, and the second end 202 of the universal joint 20 is matched with the connector 302 of the scraper 30 and connected to the end of the connector 302 away from the scraper body 301. The function of the universal joint 20 is to transmit torque and change the direction of torque.

[0036] In some embodiments, CDA (compressed air) is used to drive the swing cylinder 11 through the solenoid valve 12, and the swing cylinder 11 is connected to the universal joint 20 to drive the scraper 30 to remove the blockage.

[0037] Combination Figure 2 and Figure 4As shown, in some embodiments, a control unit 5 is included, the control unit 5 is electrically connected to the drive unit 1, and the control unit 5 controls the start and stop and the working frequency of the drive unit 1 (the number of minutes the drive unit 1 works per hour and the number of times the drive shaft 111 of the drive unit 1 reciprocates per minute during operation). In some embodiments, the control unit 5 includes a PLC industrial control board (industrial control computer board, not shown). The PLC industrial control board controls the real-time air outlet passage of the solenoid valve 12 through a program to make the swing cylinder 11 reciprocate to drive the drive shaft 111 to reciprocate, and drives the scraper 30 to scrape the wall of the intake pipe 6 through the universal joint 20, thereby cleaning the blockage in the intake pipe 6. It should be noted that the intake pipe 6 can be any other pipeline that needs to be cleaned.

[0038] Specifically, the PLC industrial control board can be connected to a 24V power supply of the device (not shown), and the PLC industrial control board is preset to output a cyclic on / off signal for 3 to 5 minutes every hour, and control the solenoid valve 12 to alternately switch the two outlet passages for 3 to 5 minutes;

[0039] Compressed air is connected from the air source, and the compressed air enters the two air chambers of the swing cylinder 11 through the two air outlet passages of the solenoid valve 12, and drives the swing cylinder 11 to reciprocate, and the transmission shaft 111 of the swing cylinder 11 completes forward / reverse reciprocating rotation;

[0040] The universal joint 20 is connected to the transmission shaft 111 of the swing cylinder 11, and the rotation torque is transmitted through the universal joint 20, while changing the direction of movement;

[0041] The scraper 30 is connected to the universal joint 30 and reciprocates with the transmission shaft 111 of the swing cylinder 11 to clean the blockage in the intake pipe 6 .

[0042] like Figures 4 to 6As shown, in some embodiments, the pipeline dredging device also includes a buckle (not shown). The end of the drive unit 1 is configured with a connector 5, and the pipeline 6 to be dredged is configured with an interface 61. The connector 5 is matched and connected with the interface. The buckle is used to tighten the connection between the connector 5 and the interface 61, and the pipeline dredging device is installed on the pipeline. For example, the connector 5 can be a flange, which is fixedly installed at the end of the drive unit 1 by screws 51, and the interface 61 can be the original spray port of the equipment. Various gases are mixed and chemically reacted to generate by-products that are soluble in water. PCW (cooling water system) is used to spray inside the pipeline so that the by-products are dissolved in water and flow into the water tank together (not shown). The spray port is set in the pipeline 6 for regular water spraying to clean the pipeline 6 (for example, regular water spraying for half an hour). However, long-term water spraying will produce water mist, which is easy to condense dust and cause the pipeline 6 to be blocked. Usually, the connection between the water inlet pipe and other components is easy to block. In this case, there is no need to change any structure of the original equipment, and the pipeline dredging device of the present application only needs to be installed at the spray port through a buckle. There is a groove on the spray port, where a sealing ring (not shown) can be placed. Install the swing cylinder 11 on the flange 5, match the flange 5 with the spray port, and then use a circular buckle that matches the shape of the flange / spray port connection to lock it. The pipeline dredging device of the present application can be used universally on the same model of equipment; it can also be used for different models of equipment as long as the pipeline structure is the same.

[0043] The swing cylinder 11 of the pipeline dredging device is driven by compressed air, and the electromagnetic valve 12 is connected to the rotating cylinder 11 through the first air pipe 113 and the second air pipe 114. After the compressed air is connected, the electromagnetic valve 12 switches and controls the rotation direction of the transmission shaft 111 of the swing cylinder 11, so that the transmission shaft 111 of the swing cylinder 11 repeatedly rotates in the forward and reverse directions. When installing the pipeline dredging device, it can be directly installed at the spray port through the bayonet buckle. The middle of the buckle faces the flange and the connection between the spray port with a matching groove, which can be tightly fitted together, and then the buckle is tightened with screws.

[0044] Embodiment 2

[0045] In some embodiments, the driving unit 1 of the pipeline dredging device is a reduction motor, and the control unit 5 is a time relay. Specifically, in some embodiments, the size of the reduction motor is adapted to the intake pipe 6. In some embodiments, the reduction motor is a DC micro reduction motor, and the speed of the reduction motor is 20-50 rpm. In some embodiments, a reduction device can be installed on the high-speed motor to meet the speed requirements of the motor. In Example 1, the swing cylinder has a maximum rotation range limit, for example, 270°. In this embodiment, there is no limit on the maximum rotation range when using a micro reduction motor, and it can rotate 360° uninterruptedly, and there is no need for a solenoid valve and a PLC industrial control board. It only needs to configure a time relay to control the working cycle of the micro reduction motor (that is, the alternating on / off of the power supply of the micro reduction motor).

[0046] The beneficial effects that may be brought about by the embodiments of the present application include but are not limited to: the pipe dredging device of the present application is flexible to use, can be installed on any pipeline, has strong versatility, and can be used interchangeably with equipment of the same model or structure. The disassembly and assembly of the pipe dredging device of the present application is very convenient and fast, and will not affect production. Therefore, the pipe dredging device of the present application is easy to maintain, has a low manufacturing cost, and can greatly reduce the frequency of equipment maintenance.

[0047] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other beneficial effects that may be obtained.

[0048] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this application. Such modifications, improvements and corrections are suggested in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this application.

[0049] It should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "fix" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a rotating connection or a sliding connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood in combination with specific circumstances.

[0050] In addition, when terms such as "first", "second", and "third" are used in the specification of this application to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relationship between the features, the relative importance, or implicitly indicating the number of features indicated.

[0051] In addition, the present specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or stereograms. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but should include deviations in shapes caused by, for example, manufacturing. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the regions of the device nor to limit the scope of the exemplary embodiments.

[0052] At the same time, the present application uses specific words to describe the embodiments of this specification. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in the present application does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0053] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more embodiments of the invention, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, figure or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.

[0054] Finally, it should be understood that the embodiments described in this application are only used to illustrate the principles of the embodiments of the present application. Other variations may also fall within the scope of the present application. Therefore, as an example and not a limitation, the alternative configurations of the embodiments of the present application may be considered to be consistent with the teachings of the present application. Accordingly, the embodiments of the present application are not limited to the embodiments explicitly introduced and described in the present application.

Claims

1. A pipeline dredging device, characterized in that: It includes a driving unit, a transmission member and a cleaning member, wherein the end of the driving unit is configured with a transmission shaft, the end of the cleaning member is configured with a connecting head, the first end of the transmission member is connected to the transmission shaft, and the second end of the transmission member is connected to the connecting head, the driving unit drives the transmission member to rotate, and the transmission member transfers the rotational torque to the cleaning member, driving the cleaning member to rotate.

2. The pipeline dredging device according to claim 1, characterized in that: A control unit is included, the control unit is electrically connected to the driving unit, and the control unit controls the start and stop and the operating frequency of the driving unit.

3. The pipeline dredging device according to claim 2, characterized in that: The control unit includes an industrial control computer board.

4. The pipeline dredging device according to claim 1, characterized in that: The driving unit includes a solenoid valve and a swing cylinder; The solenoid valve comprises an air inlet, a first air outlet and a second air outlet; The swing cylinder comprises a first air chamber, a second air chamber, a first air pipe, a second air pipe and the transmission shaft; The air inlet is connected to an air source, the first air outlet is connected to the first air chamber through the first air pipe, and the second air outlet is connected to the second air chamber through the second air pipe, so that the solenoid valve controls the rotation direction of the transmission shaft.

5. The pipeline clearing device according to claim 4, characterized in that: The solenoid valve is a two-position five-way solenoid valve.

6. The pipeline clearing device according to claim 4, characterized in that: The driving unit comprises a pressure regulating valve, which is arranged between the air inlet of the solenoid valve and the air source and is used for adjusting the flow rate of the compressed gas entering the swing cylinder.

7. The pipeline clearing device according to claim 2, characterized in that: The driving unit is a reduction motor, and the control unit is a time relay.

8. The pipeline dredging device according to claim 1, characterized in that: The transmission member is a universal joint.

9. The pipeline clearing device according to claim 1, characterized in that: The cleaning member is a scraper, and the scraper comprises a scraper body and the connecting head, and the connecting head is fixedly arranged on one end of the scraper body.

10. The pipeline clearing device according to claim 1, characterized in that: It includes a snap buckle, the end of the driving unit is configured with a connecting piece, the pipeline to be cleared is configured with an interface, the connecting piece is matched and connected with the interface, and the snap buckle is used to tighten the connection between the connecting piece and the interface to install the pipeline clearing device on the pipeline.

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