Machine head quick-change mechanism, material suction assembly and semiconductor processing equipment

Abstract

The utility model discloses a machine head quick-change mechanism, a material suction assembly and semiconductor processing equipment. The machine head quick-change mechanism comprises a fixed base and a machine head assembly seat, a clamping groove is formed in the bottom of the fixed base, a through hole communicated with the clamping groove is formed in the fixed base, an installation base is arranged at the position, matched with the through hole, of the fixed base, a movable cavity is formed in the installation base, a limiting base is movably installed in the movable cavity, and a limiting part is arranged at the end of the limiting base and extends into the clamping groove. A rotating operation shaft penetrating through the movable cavity is rotationally mounted on the mounting base, an eccentric wheel is arranged on the rotating operation shaft and located in the movable cavity, an elastic assembly connected with the limiting base is mounted above the eccentric wheel and abuts against the eccentric wheel, and a limiting column is arranged at the top of the machine head assembling base and can move along the clamping groove; and the limiting seat is inserted into the through hole and is locked and matched through the limiting part of the limiting seat. According to the utility model, the replacement convenience of the machine head can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a machine head quick-change mechanism, a material suction component and semiconductor processing equipment. Background Art

[0002] Most of the existing vacuum mechanisms for sucking products are integrated, and the suction plate cannot be replaced. Only the suction nozzle on the suction plate can be replaced. Although this can achieve the function of sucking different products, due to the limited installation position of the suction nozzle, the types of products that can be sucked are still relatively small, and it cannot meet the suction of products of various shapes and sizes. In order to make the vacuum suction mechanism meet the suction of products of various shapes and sizes, the mode of replacing the vacuum suction mechanism as a whole is usually adopted. This causes the position of the vacuum suction mechanism to change every time it is assembled, so that the position coordinates of the suction nozzle need to be recalibrated. Moreover, when there are many types of products, the cost of configuring multiple vacuum suction mechanisms is also very high. At the same time, replacing the vacuum suction mechanism is also more troublesome, time-consuming and labor-intensive. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a head quick-change mechanism, a material suction component and a semiconductor processing device, which can improve the convenience of head replacement.

[0004] On the one hand, the embodiment of the utility model provides a machine head quick change mechanism, comprising:

[0005] A fixed base, with a card slot provided at the bottom, a through hole connected to the card slot provided on the fixed base, a mounting seat provided on the fixed base and at a position adapted to the through hole, a movable cavity provided in the mounting seat, a limited seat movably installed in the movable cavity, a limited portion provided at the end of the limited seat and extending into the card slot, a rotating operating shaft penetrating the movable cavity is rotatably installed on the mounting seat, an eccentric wheel is provided on the rotating operating shaft and located in the movable cavity, an elastic component connected to the limited seat is installed above the eccentric wheel, and the elastic component abuts against the eccentric wheel;

[0006] The machine head assembly seat has a limiting column on the top, which can move along the slot and is inserted into the through hole and is locked with the limiting part of the limiting seat.

[0007] According to some embodiments of the utility model, the elastic component includes a connecting plate, a movable plate and an elastic member, the connecting plate is connected to the limit seat, the connecting plate is provided with a first air avoidance hole, the movable plate is provided with a guide column, the guide column is movably passed through the first air avoidance hole, and the elastic member is installed on the guide column and respectively abuts against the connecting plate and the movable plate.

[0008] According to some embodiments of the utility model, the movable plate is provided with a second air avoidance hole, a rolling member is rotatably installed in the second air avoidance hole, and the eccentric wheel is in contact with the rolling member.

[0009] According to some embodiments of the utility model, a self-locking recess adapted to the rolling element is provided on the outer wall of the eccentric wheel.

[0010] According to some embodiments of the present utility model, a limiting guide hole is provided on the limiting seat, and the rotating operating shaft passes through the limiting guide hole.

[0011] According to some embodiments of the utility model, a limiting member is provided on the fixed base and at the end of the slot, and a positioning column is provided on the head assembly seat and adapted to the position of the slot, and the positioning column can abut against the limiting member.

[0012] According to some embodiments of the utility model, a first airway through hole is provided on the fixed base, a second airway through hole is provided on the head assembly base, the first airway through hole is adapted to the second airway through hole, and one of the first airway through hole and the second airway through hole is provided with a seal.

[0013] According to some embodiments of the present invention, the sealing member is provided with a tapered guide side wall, and the other of the first airway through hole and the second airway through hole is provided with a guide surface matched with the tapered guide side wall.

[0014] On the other hand, an embodiment of the utility model provides a suction component, including a suction nozzle module and the above-mentioned head quick-change mechanism, and the suction nozzle module is installed on the head assembly base.

[0015] On the other hand, an embodiment of the present invention provides a semiconductor processing equipment, including the above-mentioned suction assembly.

[0016] The embodiments of the present invention have at least the following beneficial effects:

[0017] The head assembly seat can be moved along the slot to the position of the through hole through the limit column, and the eccentric wheel is driven to rotate by rotating the operating shaft to abut the elastic component, thereby driving the limit seat to move upward through the elastic component, and then the limit column of the head assembly seat is locked by the limit part at the end of the limit seat. When the head assembly seat needs to be replaced, the limit column can be unlocked by rotating the rotating operating shaft, so that the head assembly seat and the head installed on the head assembly seat can be replaced as a whole, which is conducive to improving the convenience of head replacement.

[0018] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0020] Figure 1 This is a structural schematic diagram of the machine head quick-change mechanism of an embodiment of the utility model;

[0021] Figure 2 for Figure 1 The schematic cross-sectional view of the structure of the machine head quick change mechanism at the AA position is shown;

[0022] Figure 3 for Figure 1 One of the exploded structural diagrams of the machine head quick change mechanism is shown;

[0023] Figure 4 for Figure 1 The second exploded structural diagram of the machine head quick change mechanism is shown;

[0024] Figure 5 for Figure 1 The structural schematic diagram of the elastic component of the quick-change mechanism of the machine head is shown;

[0025] Figure 6 for Figure 3 The middle circle shows a partial enlarged schematic diagram of position B.

[0026] Reference numerals:

[0027] The nozzle module 10, the fixed base 100, the slot 101, the through hole 102, the first airway hole 103, the mounting seat 110, the limit seat 120, the limit part 121, the limit guide hole 122, the rotating operating shaft 130, the eccentric wheel 140, the self-locking recess 141, the elastic component 150, the connecting plate 151, the movable plate 152, the second air avoidance hole 1521, the rolling element 1522, the elastic element 153, the limit element 160, the sealing element 170, the head assembly seat 200, the second airway hole 201, the limit column 210, and the positioning column 220. DETAILED DESCRIPTION

[0028] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0029] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0030] In the description of the present utility model, "several" means one or more, "multiple" means more than two, greater than, less than, and exceeding are understood as not including the number itself, and "above", "below", and "within" are understood as including the number itself. If there is a description of "first", "second", etc., it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0031] In the description of the present invention, unless otherwise clearly defined, words such as “setting”, “installation”, and “connection” should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above words in the present invention based on the specific content of the technical solution.

[0032] With the rapid development of modern technology, the semiconductor industry has begun to continuously achieve major technological breakthroughs. More and more semiconductor chips and integrated circuit boards have entered the era of standardized, automated, and intelligent production. More and more automated equipment has replaced the original production model in the modern manufacturing industry. Improving production efficiency is the common goal of every enterprise. In production, the material tray is transported by a conveyor line, and the material tray carries a variety of materials to be processed. During the transportation process, the machine head needs to grab different types of products, so it is necessary to frequently change the type of suction nozzle of the machine head. In the related art, the suction nozzle assembly generally needs to be fixed by screw locking or other means. The existing sealed vacuum suction nozzle needs to be replaced when in use, but the repeated replacement of the suction nozzle for a long time will cause the sealing of the suction nozzle connection to decrease, and the existing device has complex operating steps and long operation time when replacing the suction nozzle. To this end, the present embodiment discloses a machine head quick-change mechanism, a suction assembly, and semiconductor processing equipment, which can improve the convenience of machine head replacement.

[0033] This embodiment provides a semiconductor processing device, including a suction assembly, which includes a suction nozzle module 10 and a quick-change mechanism for the head. Figure 1 and Figure 2 The machine head quick change mechanism includes a fixed base 100 and a machine head assembly base 200. The bottom of the fixed base 100 is provided with a slot 101, such as a T-slot, please refer to Figure 3 and Figure 4The fixed base 100 is provided with a through hole 102 connected to the card slot 101, and a mounting seat 110 is provided on the fixed base 100 and adapted to the through hole 102. A movable cavity is provided in the mounting seat 110, and a limited seat 120 is movably installed in the movable cavity. A limited portion 121 is provided at the end of the limited seat 120 and extends into the card slot 101. A rotating operating shaft 130 penetrating the movable cavity is rotatably installed on the mounting seat 110, and an eccentric wheel 140 is provided on the rotating operating shaft 130 and located in the movable cavity. An elastic component 150 connected to the limited seat 120 is installed above the eccentric wheel 140, and the elastic component 150 is in contact with the eccentric wheel 140. A limited column 210 is provided on the top of the head assembly seat 200, and the limited column 210 can move along the card slot 101 to a position corresponding to the through hole 102, and is locked and matched through the limited portion 121 of the limited seat 120. Exemplarily, the limiting portion 121 of the limiting seat 120 is L-shaped and symmetrically distributed on both sides, and the limiting column 210 is configured as a T-shaped structure adapted to the L-shaped structure to facilitate locking of the limiting portion 121 .

[0034] When in use, the nozzle module 10 is mounted on the head assembly seat 200, wherein the number of the nozzle modules 10 can be one or more. Under normal conditions, the fixed base 100 is fixedly mounted on an external mechanism, such as a mobile module, and is used as an assembly basis for the head assembly seat 200. When the head assembly seat 200 needs to be mounted on the fixed base 100, the head assembly seat 200 moves to the position of the through hole 102 along the slot 101 of the fixed base 100 through the limiting column 210, and is contacted and connected with the limiting portion 121 of the limiting seat 120. At this time, the eccentric wheel 140 is driven to rotate by rotating the operating shaft 130, so that the eccentric wheel 140 abuts against the elastic component 150, thereby driving the limiting seat 120 to move upward through the elastic component 150, and the limiting seat 120 is lifted upward by the limiting cooperation between the limiting portion 121 and the limiting column 210, and then the head assembly seat 200 is locked. When the head assembly seat 200 needs to be replaced, continue to rotate or reverse the rotating operating shaft 130 to allow the eccentric wheel 140 to remove the pressure on the elastic component 150, so that the limit seat 120 is reset under the action of gravity, and then the lock between the limit seat 120 and the limit column 210 is released. In this way, the head assembly seat 200 and the head (such as the nozzle module 10) installed on the head assembly seat 200 can be replaced as a whole, which is beneficial to improving the convenience of head replacement.

[0035] Please refer to Figure 3 , Figure 4 and Figure 5The elastic component 150 includes a connecting plate 151, a movable plate 152 and an elastic member 153 (such as a disc spring). The connecting plate 151 is connected to the limit seat 120. The connecting plate 151 is provided with a first air-avoiding hole. The movable plate 152 is provided with a guide column, which is movably arranged in the first air-avoiding hole. The elastic member 153 is installed on the guide column and abuts against the connecting plate 151 and the movable plate 152 respectively. When the eccentric wheel 140 rotates, the eccentric wheel 140 can abut against the movable plate 152, thereby compressing the elastic member 153 through the movable plate 152 to transmit the pressure to the connecting plate 151, and then drive the limit seat 120 to move upward through the connecting plate 151.

[0036] Please refer to Figure 5 The movable plate 152 is provided with a second air avoidance hole 1521, and a rolling member 1522 is rotatably installed in the second air avoidance hole 1521. Exemplarily, the rolling member 1522 can be a rolling wheel, a ball or a roller. Since the elastic component 150 has elastic force and under the action of gravity, the lower end of the elastic component 150 is in continuous contact with the eccentric wheel 140. When the eccentric wheel 140 rotates, there will be friction between the eccentric wheel 140 and the elastic component 150. After long-term use, the eccentric wheel 140 or the elastic component 150 will be worn. Therefore, by arranging the rolling member 1522 so that the eccentric wheel 140 abuts against the rolling member 1522, the sliding friction during the rotation of the eccentric wheel 140 can be converted into rolling friction, thereby reducing the wear of the eccentric wheel 140 and the elastic component 150, which is conducive to improving the service life.

[0037] Please continue to refer to Figure 5 A self-locking recess 141 adapted to the rolling element 1522 is provided on the outer wall of the eccentric wheel 140. The shape of the self-locking recess 141 is adapted to the shape of the rolling element 1522. For example, the self-locking recess 141 is set as an arc-shaped recess or a spherical crown-shaped recess. When the eccentric wheel 140 is rotated into place, the rolling element 1522 can be embedded in the self-locking recess 141, thereby preventing the eccentric cam from continuing to rotate, thereby realizing self-locking of the eccentric wheel 140 and the rotating operating shaft 130.

[0038] Please refer to Figure 3 or Figure 4 A limit guide hole 122 is provided on the limit seat 120, and the rotating operating shaft 130 is passed through the limit guide hole 122. For example, the limit guide hole 122 can be an oblong hole or a rectangular hole, etc. During the rising or falling movement of the limit seat 120, the limit guide hole 122 and the rotating operating shaft 130 can cooperate to achieve the function of motion limiting and guiding, which is beneficial to improving the reliability of the movement.

[0039] Please refer to Figure 4, a limit member 160 is provided on the fixed base 100 and at the end of the card slot 101, and a positioning column 220 is provided on the head assembly seat 200 and at a position adapted to the card slot 101, and the positioning column 220 can abut against the limit member 160. Exemplarily, the limit member 160 can be a limit plate, a limit block, a screw or a latch installed at the end of the card slot 101. During the installation process of the head assembly seat 200 and the fixed base 100, the positioning column 220 can move along the card slot 101, and when it moves to a predetermined position, the positioning column 220 abuts against the limit member 160, thereby preventing the head assembly seat 200 from moving forward to prompt that the installation is in place, and the locking operation can be performed by rotating the operating shaft 130, which is conducive to improving the convenience of use.

[0040] Please refer to Figure 3 , Figure 4 and Figure 6 , a first airway through hole 103 is provided on the fixed base 100, a second airway through hole 201 is provided on the head assembly seat 200, the first airway through hole 103 is adapted to the second airway through hole 201, and a seal 170 is provided on one of the first airway through hole 103 and the second airway through hole 201. Exemplarily, the seal 170 can be a sealing ring. In some application examples, the seal 170 is installed in the first airway through hole 103. When the head assembly seat 200 is locked on the fixed base 100, the positions of the first airway through hole 103 and the second airway through hole 201 are adapted to form a vacuum airway, so that the vacuum source is connected to the nozzle module 10 through the vacuum airway. The seal 170 can seal the gap between the first airway through hole 103 and the second airway through hole 201, thereby improving the vacuum effect. In other application examples, the seal 170 can be installed in the second airway through hole 201.

[0041] In some other application examples, the seal 170 is provided with a conical guide side wall, and the other side of the first air duct hole 103 and the second air duct hole 201 is provided with a guide surface adapted to the conical guide side wall. When the head assembly seat 200 is close to the fixed base 100, the guide surface cooperates with the conical guide side wall of the seal 170, thereby wrapping the seal 170 in the space formed by the first air duct hole 103 and the second air duct hole 201, thereby improving the vacuum effect of the vacuum air duct.

[0042] The head assembly seat 200 can be moved along the slot 101 to a position corresponding to the through hole 102 through the limiting column 210, and the eccentric wheel 140 is driven to rotate by rotating the operating shaft 130 to abut against the elastic component 150, thereby driving the limiting seat 120 to move upward through the elastic component 150, and then the limiting column 210 of the head assembly seat 200 is locked through the limiting part 121 at the end of the limiting seat 120. When the head assembly seat 200 needs to be replaced, the limiting column 210 can be unlocked by rotating the operating shaft 130 in the opposite direction, so that the head assembly seat 200 and the head installed on the head assembly seat 200 can be replaced as a whole, which is conducive to improving the convenience of head replacement.

[0043] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A quick-change mechanism for a machine head, characterized in that: include: A fixed base (100) is provided with a card slot (101) at the bottom, a through hole (102) connected to the card slot (101) is provided on the fixed base (100), a mounting seat (110) is provided at a position on the fixed base (100) and adapted to the through hole (102), a movable cavity is provided in the mounting seat (110), a limited position seat (120) is movably installed in the movable cavity, and a limited position seat (120) is provided at an end thereof. The positioning portion (121) extends into the card slot (101); a rotating operating shaft (130) penetrating the active cavity is rotatably mounted on the mounting seat (110); an eccentric wheel (140) is arranged on the rotating operating shaft (130) and located in the active cavity; an elastic component (150) connected to the limiting seat (120) is mounted above the eccentric wheel (140); and the elastic component (150) is in contact with the eccentric wheel (140); A machine head assembly seat (200) is provided with a limiting column (210) on the top, the limiting column (210) being movable along the slot (101) and inserted into the through hole (102) and being locked with the limiting portion (121) of the limiting seat (120).

2. The quick-change mechanism for the machine head according to claim 1, characterized in that: The elastic component (150) comprises a connecting plate (151), a movable plate (152) and an elastic member (153); the connecting plate (151) is connected to the limiting seat (120); a first air avoidance hole is provided on the connecting plate (151); a guide column is provided on the movable plate (152); the guide column is movably inserted into the first air avoidance hole; the elastic member (153) is mounted on the guide column and abuts against the connecting plate (151) and the movable plate (152) respectively.

3. The quick-change mechanism for the machine head according to claim 2, characterized in that: The movable plate (152) is provided with a second air avoidance hole (1521), a rolling member (1522) is rotatably mounted in the second air avoidance hole (1521), and the eccentric wheel (140) is in contact with the rolling member (1522).

4. The quick-change mechanism for the machine head according to claim 3, characterized in that: A self-locking recess (141) adapted to the rolling element (1522) is provided on the outer wall of the eccentric wheel (140).

5. The quick-change mechanism for the machine head according to claim 1, characterized in that: The limiting seat (120) is provided with a limiting guide hole (122), and the rotating operation shaft (130) is passed through the limiting guide hole (122).

6. The quick-change mechanism for the machine head according to claim 1, characterized in that: A limiting member (160) is provided on the fixed base (100) at the end of the slot (101), and a positioning column (220) is provided on the machine head assembly seat (200) at a position adapted to the slot (101), and the positioning column (220) can abut against the limiting member (160).

7. The quick-change mechanism for the handpiece according to claim 1 or 6, characterized in that: The fixed base (100) is provided with a first airway through hole (103), the head assembly base (200) is provided with a second airway through hole (201), the first airway through hole (103) is adapted to the second airway through hole (201), and one of the first airway through hole (103) and the second airway through hole (201) is provided with a sealing member (170).

8. The quick-change mechanism for the machine head according to claim 7, characterized in that: The sealing member (170) is provided with a tapered guide side wall, and the other of the first airway through hole (103) and the second airway through hole (201) is provided with a guide surface matching the tapered guide side wall.

9. A suction component, characterized in that: It comprises a nozzle module (10) and a machine head quick-change mechanism according to any one of claims 1 to 8, wherein the nozzle module (10) is mounted on the machine head assembly seat (200).

10. A semiconductor processing equipment, characterized in that: Comprising the suction assembly as described in claim 9.

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