Film coating device with uniform film coating function

Abstract

The utility model relates to the technical field of vacuum coating, and discloses a coating device capable of coating uniformly, which comprises a coating chamber, the left part of the front end of the coating chamber is rotatably connected with a sealing door, the bottom end of the coating chamber is provided with a heating assembly, and the left side and the right side in the coating chamber are fixedly connected with sliding rails at the top end of the heating assembly; two first mounting holes are formed in the upper ends and the lower ends of the two sliding rails at equal intervals, a reflecting plate is slidably connected between the sliding rails, and second mounting holes are formed in the positions, between the two adjacent first mounting holes in the same side, of the left end and the right end of the reflecting plate. According to the utility model, the motor I is driven to turn over the substrate frame, so that the two surfaces of the substrate can be conveniently coated, the upper surface and the lower surface of the substrate in the coating chamber can be uniformly coated by matching with the motor II, and the screws are separated from or connected with the mounting holes II in the reflecting plate by rotating the screws, so that the aim of dismounting or mounting the reflecting plate is fulfilled.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a coating device with uniform coating. Background Art

[0002] Coating equipment is a device dedicated to the preparation of thin films on the surface of substrates. It operates in a vacuum environment and uses methods such as physical vapor deposition (PVD) or chemical vapor deposition (CVD) to convert the coating material from solid to gas, and then deposit it onto the surface of the substrate to form a thin film.

[0003] In the process of using physical vapor deposition film equipment, the material to be plated needs to be placed in an evaporation source and heated to evaporate or sublimate into gaseous atoms or molecules. Subsequently, these gaseous particles are transmitted to the surface of the substrate and condensed on the substrate to form a thin film. After the coating is completed, the vacuum chamber is gradually restored to atmospheric pressure and finally the substrate is taken out.

[0004] However, in actual applications, some physical vapor deposition film equipment on the market is affected by the uniformity of coating during the evaporation coating process due to the inconsistent distance between each substrate holder and the target material. In addition, some equipment can only coat one side of the substrate, which requires manual flipping and repeating the operation, thereby reducing work efficiency. Moreover, the reflector in the coating device is fixed and inconvenient to disassemble and replace. Therefore, a coating device with uniform coating is proposed to solve the above problems. Utility Model Content

[0005] In order to make up for the above shortcomings, the utility model provides a coating device with uniform coating, aiming to improve the problems in the prior art of uneven coating of substrates on substrate racks, only single-side coating of substrates and inconvenient replacement of reflective plates.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a coating device with uniform coating, comprising a coating chamber, a sealing door is rotatably connected to the left front end of the coating chamber, a heating assembly is arranged at the bottom end of the coating chamber, slide rails are fixedly connected to the top end of the heating assembly on the left and right sides of the interior of the coating chamber, two mounting holes 1 are equidistantly provided at the upper and lower ends of the two slide rails, a reflecting plate is slidably connected between the slide rails, mounting holes 2 are provided between the two adjacent mounting holes 1 on the same side at the left and right ends of the reflecting plate, four mounting holes 2 are fixed to the two adjacent mounting holes 1 on the same side by screws, a fixing piece is fixedly connected to the left inner end of the coating chamber, two fixed rotating assemblies are arranged in the middle part of the coating chamber, substrate assemblies are arranged at the upper and lower ends between the two fixed rotating assemblies, the fixed rotating assembly on the left side is rotatably connected to the fixing piece, a motor 2 is fixedly connected to the middle part of the right side of the coating chamber, a rotating shaft 2 is fixedly connected to the output end of the motor 2, and the left end of the rotating shaft 2 is fixedly connected to the fixed rotating assembly on the right side.

[0007] As a further description of the above technical solution: the heating assembly includes a heating chamber, the bottom end of the heating chamber is fixedly connected to the inner bottom end of the coating chamber, the inner bottom end of the heating chamber is fixedly connected to a heating plate, the interior of the heating chamber is slidably connected to the top of the heating plate with a target material tray, and a plurality of through holes are opened at the top of the heating chamber.

[0008] As a further description of the above technical solution: the fixed rotating component includes a movable block, the upper and lower ends of the movable block are provided with placement grooves, the interior of the movable block is provided with sliding grooves at the front end of the placement grooves, the upper and lower ends of the front side of the movable block are rotatably connected with adjusting parts, and the end of the adjusting part is connected to a slider with an internal thread of the sliding groove on the same side.

[0009] As a further description of the above technical solution: the upper and lower ends of the right side of the movable block on the right side are fixedly connected with a horizontal plate, the right ends of the two horizontal plates are fixedly connected with a vertical plate on the side away from each other, the left sides of the vertical plates are fixedly connected with a cylinder, the output ends of the cylinders are fixedly connected with motor 1, and the motor 1 is slidably connected to the horizontal plate, the right end of the movable block on the right side is provided with a through groove at the output end of motor 1, the output end of motor 1 is fixedly connected with a rotating shaft 1, the left end of the rotating shaft 1 passes through the through groove on the same side and is fixedly connected with an external thread block, and the external thread block is threadedly connected to the substrate assembly on the same side.

[0010] As a further description of the above technical solution: the left side of the movable block on the left is fixedly connected with a rotating shaft, the rotating shaft is rotatably connected to the fixing member, and the right end of the movable block on the right is fixedly connected to the left end of the second rotating shaft.

[0011] As a further description of the above technical solution: the substrate assembly includes a substrate frame, the middle parts of the left and right sides of the substrate frame are rotatably connected with connecting blocks, the middle part of the right end of the substrate frame is fixedly connected with a connecting shaft, and the right end of the connecting shaft passes through the right connecting block and is fixedly connected with an internal thread block.

[0012] As a further description of the above technical solution: the inner side of the internal thread block is threadedly connected to the outer side of the adjacent external thread block on the same side, and the connecting blocks are both fitted with the opposite side of the adjacent sliding blocks.

[0013] As a further description of the above technical solution: an air pump is fixedly connected to the middle of the top of the coating chamber, an output end of the air pump is fixedly connected to an air pipe, and the end of the air pipe is located inside the coating chamber.

[0014] The utility model has the following beneficial effects:

[0015] 1. In the utility model, the second driving motor drives the two movable blocks to rotate synchronously, so that the positions of the upper and lower substrate racks are interchanged, and then the first motor is cooperated to rotate a single substrate rack to flip the substrate on the substrate rack, so that both sides of the substrates on the two substrate racks are evenly coated. By rotating the corresponding adjusting parts and cooperating with the cylinder, the first motor is driven to move to the right and the first motor is driven to rotate in the opposite direction to disengage the internal thread block from the external thread block, so that the substrate rack can be easily removed from the movable block, which is convenient for operation.

[0016] 2. In the utility model, the screw is rotated to disengage the screw from the second mounting hole on the reflective plate, and then the reflective plate is pulled forward to separate the reflective plate from the slide rail. The rear end of the reflective plate is slid to the rear end of the slide rail, and the second mounting hole on the reflective plate is aligned with the adjacent first mounting hole. The reflective plate and the slide rail are then fixed by screws, thereby facilitating the installation and removal of the reflective plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A three-dimensional schematic diagram of a coating device with uniform coating proposed by the utility model;

[0018] Figure 2 This is a disassembled diagram of a substrate frame and a fixed rotating assembly of a coating device with uniform coating proposed by the utility model;

[0019] Figure 3 This is a cross-sectional view of the right side active block of a coating device with uniform coating proposed by the utility model;

[0020] Figure 4 It is a right side cross-sectional view of a heating component of a coating device with uniform coating proposed by the utility model;

[0021] Figure 5 This is a relationship diagram between a slide rail and a reflector of a coating device with uniform coating proposed by the utility model.

[0022] Legend:

[0023] 1. Coating chamber; 2. Sealed door; 3. Air pump; 4. Air pipe; 5. Heating chamber; 6. Through hole; 7. Target tray; 8. Heating plate; 9. Slide rail; 10. Reflector; 11. Mounting hole 1; 12. Mounting hole 2; 13. Screw; 14. Fixing piece; 15. Movable block; 16. Rotating shaft; 17. Placement slot; 18. Slide slot; 19. Adjusting piece; 20. Slider; 21. Substrate rack; 22. Connecting block; 23. Connecting shaft; 24. Internal thread block; 25. Horizontal plate; 26. Vertical plate; 27. Cylinder; 28. Motor 1; 29. ​​Rotating shaft 1; 30. Through slot; 31. External thread block; 32. Rotating shaft 2; 33. Motor 2. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] Reference Figure 1 , Figure 2 and Figure 5 The utility model provides an embodiment: a coating device with uniform coating, comprising a coating chamber 1, a sealing door 2 is rotatably connected to the left front end of the coating chamber 1, a heating component is arranged at the bottom end of the coating chamber 1, slide rails 9 are fixedly connected to the top of the heating component on the left and right sides of the coating chamber 1, two mounting holes 11 are evenly spaced at the upper and lower ends of the two slide rails 9, a reflecting plate 10 is slidably connected between the slide rails 9, and mounting holes 12 are arranged between the two adjacent mounting holes 11 on the same side at the left and right ends of the reflecting plate 10, The four mounting holes 12 are all fixed to the two adjacent mounting holes 11 on the same side by screws 13. A fixing part 14 is fixedly connected to the inner left end of the coating chamber 1. Two fixed rotating components are arranged in the middle of the coating chamber 1. Substrate components are arranged at the upper and lower ends between the two fixed rotating components. The left fixed rotating component is rotatably connected to the fixing part 14. A motor 33 is fixedly connected to the middle of the right side of the coating chamber 1. A rotating shaft 32 is fixedly connected to the output end of the motor 33. The left end of the rotating shaft 32 is fixedly connected to the fixed rotating component on the right side.

[0026] The substrate assembly is fixed by two fixed rotating components, the sealing door 2 is closed, and then the target material is evaporated into particles by the heating component. These particles move to the bottom side of the substrate on the lower substrate assembly to form a thin film, and then the lower substrate assembly is flipped by the fixed rotating component, and the other side of the substrate on the lower substrate assembly is coated. Then the motor 2 33 is driven to make the rotating shaft 2 32 drive the two fixed rotating components to rotate, thereby exchanging the positions of the upper and lower substrate assemblies, and repeating the above operation to make the substrates on the two substrate assemblies uniformly coated. After the coating is completed, the screw 13 can be rotated to disengage the screw 13 from the mounting hole 2 12 on the reflector 10, and then the reflector 10 can be pulled forward to separate the reflector 10 from the slide rail 9, thereby realizing the disassembly of the reflector 10, and the reflector 10 allows particles to pass.

[0027] Reference Figure 1 and Figure 4 The heating assembly includes a heating chamber 5, the bottom end of the heating chamber 5 is fixedly connected to the inner bottom end of the coating chamber 1, the inner bottom end of the heating chamber 5 is fixedly connected to a heating plate 8, the inside of the heating chamber 5 is slidably connected to the top of the heating plate 8 with a target tray 7, and the top of the heating chamber 5 is opened with a plurality of through holes 6.

[0028] The target material is placed inside the target material tray 7 and heated by the heating plate 8. The particles formed by the evaporation of the target material are discharged through the through hole 6, then pass through the reflection plate 10, and finally float to the bottom of the substrate to coat the substrate.

[0029] Reference Figure 1-Figure 3 The fixed rotating assembly includes a movable block 15, and a placement groove 17 is provided at both upper and lower ends of the movable block 15. A slide groove 18 is provided inside the movable block 15 at the front end of the placement groove 17. The upper and lower ends of the front side of the movable block 15 are rotatably connected with an adjusting member 19. The end of the adjusting member 19 is connected to a slider 20 with internal threads of the slide groove 18 on the same side. The upper and lower ends of the right side of the right movable block 15 are fixedly connected with a horizontal plate 25. The right ends of the two horizontal plates 25 are fixedly connected with a vertical plate 26 on the side away from each other. The left side of the vertical plate 26 is fixedly connected with a cylinder 27. The output of the cylinder 27 The output ends are fixedly connected with motor 1 28, and motor 1 28 is slidably connected to the horizontal plate 25. The right end of the right movable block 15 is provided with a through slot 30 at the output end of the motor 1 28, and the output end of the motor 1 28 is fixedly connected with a rotating shaft 1 29. The left end of the rotating shaft 1 29 passes through the through slot 30 on the same side and is fixedly connected with an external thread block 31, and the external thread block 31 is threadedly connected to the substrate assembly on the same side. The left side of the left movable block 15 is fixedly connected with a rotating shaft 16, and the rotating shaft 16 is rotatably connected to the fixing member 14. The right end of the right movable block 15 is fixedly connected to the left end of the rotating shaft 2 32.

[0030] The adjusting member 19 is rotated to move the slider 20 backward, so that the slider 20 passes through the rear side of the placement groove 17, limiting the movement of the components inside the placement groove 17. The cylinder 27 drives the motor 1 28 to move to the left while driving the motor 1 28 to rotate so that the external thread block 31 is threadedly connected with the adjacent substrate assembly. Then, the motor 1 28 can be driven to flip a single substrate assembly. The motor 2 33 can be driven to rotate the two movable blocks 15, so that the positions of the two substrate assemblies are interchanged synchronously.

[0031] Reference Figure 2 and Figure 3 The substrate assembly includes a substrate frame 21, and the middle parts of the left and right sides of the substrate frame 21 are rotatably connected with connecting blocks 22. The middle part of the right end of the substrate frame 21 is fixedly connected with a connecting shaft 23. The right end of the connecting shaft 23 passes through the right connecting block 22 and is fixedly connected with an internal thread block 24. The inner side of the internal thread block 24 is threadedly connected with the outer side of the adjacent external thread block 31 on the same side, and the connecting blocks 22 are all in contact with the opposite side of the adjacent slider 20.

[0032] The connecting blocks 22 on both sides of the substrate rack 21 are respectively placed at the bottom of the placement groove 17 on the same side, and then the two upper adjusting members 19 are rotated to allow the slider 20 to pass through the rear side of the placement groove 17 to limit the movement of the adjacent connecting blocks 22, thereby fixing the substrate rack 21, and then the external thread block 31 is threadedly connected with the internal thread block 24 to facilitate the rotation of the substrate rack 21.

[0033] Reference Figure 1 An air pump 3 is fixedly connected to the middle of the top of the coating chamber 1 , an output end of the air pump 3 is fixedly connected to an air pipe 4 , and the end of the air pipe 4 is located inside the coating chamber 1 .

[0034] The air in the coating chamber 1 is extracted through the air pipe 4 by the air pump 3 to achieve the vacuum environment required for coating, which is convenient for coating the substrate.

[0035] Working principle: First, place the connecting blocks 22 on both sides of the substrate rack 21 at the bottom of the upper placement groove 17 respectively, rotate the two upper adjustment members 19 to make the slider 20 pass through the rear side of the placement groove 17, then the cylinder 27 drives the motor 1 28 to move to the left while driving the motor 1 28 to rotate so that the external thread block 31 is threadedly connected with the internal thread block 24, and then drive the motor 2 33 to turn the movable block 15 up and down, repeat the above operation, and then place the target material in the target material tray 7, close the sealing door 2, and then form a vacuum inside the coating chamber 1 through the air pump 3 and the air pipe 4, and then heat the target material through the heating plate 8 to make The evaporated particles are attached to the bottom of the substrate on the bottom substrate rack 21 through the through hole 6 and the reflecting plate 10, and then the bottom motor 1 28 is driven to flip the bottom substrate rack 21, so that the other side of the substrate on the bottom substrate rack 21 is coated, and then the motor 2 33 is driven to rotate the movable block 15 to turn the upper substrate rack 21 to the lower side, and the above operation is repeated to make the substrate uniformly coated. After the coating is completed, the screw 13 can be rotated to disengage the screw 13 from the mounting hole 2 12 on the reflecting plate 10, and then the reflecting plate 10 can be pulled forward to separate the reflecting plate 10 from the slide rail 9, thereby realizing the removal of the reflecting plate 10.

[0036] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A coating device for uniform coating, comprising a coating chamber (1), characterized in that: The left front end of the coating chamber (1) is rotatably connected to a sealing door (2), a heating assembly is arranged at the bottom end of the coating chamber (1), and slide rails (9) are fixedly connected to the top of the heating assembly on both left and right sides of the coating chamber (1), and two mounting holes (11) are equidistantly provided at the upper and lower ends of the two slide rails (9), and a reflecting plate (10) is slidably connected between the slide rails (9), and mounting holes (12) are provided between the two adjacent mounting holes (11) on the same side at the left and right ends of the reflecting plate (10), and the four mounting holes (12) are all fixedly provided with screws (1 3) is fixed to two adjacent mounting holes (11) on the same side, a fixing part (14) is fixedly connected to the inner left end of the coating chamber (1), two fixed rotating components are arranged in the middle of the coating chamber (1), substrate components are arranged at the upper and lower ends between the two fixed rotating components, the fixed rotating component on the left side is rotatably connected to the fixing part (14), a motor (33) is fixedly connected to the middle of the right side of the coating chamber (1), the output end of the motor (33) is fixedly connected to a rotating shaft (32), and the left end of the rotating shaft (32) is fixedly connected to the fixed rotating component on the right side.

2. A coating device with uniform coating according to claim 1, characterized in that: The heating assembly comprises a heating chamber (5), the bottom end of the heating chamber (5) is fixedly connected to the inner bottom end of the coating chamber (1), the inner bottom end of the heating chamber (5) is fixedly connected to a heating plate (8), the interior of the heating chamber (5) is slidably connected to the top end of the heating plate (8) with a target material tray (7), and the top end of the heating chamber (5) is provided with a plurality of through holes (6).

3. A coating device with uniform coating according to claim 1, characterized in that: The fixed rotating assembly comprises a movable block (15), the upper and lower ends of the movable block (15) are provided with placement grooves (17), the interior of the movable block (15) is provided with a slide groove (18) at the front end of the placement groove (17), the upper and lower ends of the front side of the movable block (15) are rotatably connected with an adjusting member (19), and the end of the adjusting member (19) is threadedly connected with a slider (20) inside the slide groove (18) on the same side.

4. A coating device with uniform coating according to claim 3, characterized in that: The upper and lower ends of the right side of the movable block (15) are fixedly connected to a horizontal plate (25), the right ends of the two horizontal plates (25) are fixedly connected to a vertical plate (26) on the side away from each other, the left side of the vertical plate (26) is fixedly connected to a cylinder (27), the output end of the cylinder (27) is fixedly connected to a motor 1 (28), the motor 1 (28) is slidably connected to the horizontal plate (25), the right end of the movable block (15) on the right side is provided with a through groove (30) at the output end of the motor 1 (28), the output end of the motor 1 (28) is fixedly connected to a rotating shaft 1 (29), the left end of the rotating shaft 1 (29) passes through the through groove (30) on the same side and is fixedly connected to an external thread block (31), and the external thread block (31) is threadedly connected to the substrate assembly on the same side.

5. The coating device with uniform coating according to claim 3, characterized in that: The left side of the movable block (15) on the left side is fixedly connected with a rotating shaft (16), and the rotating shaft (16) is rotatably connected to the fixing member (14). The right end of the movable block (15) on the right side is fixedly connected to the left end of the second rotating shaft (32).

6. The coating device with uniform coating according to claim 1, characterized in that: The substrate assembly comprises a substrate frame (21), the middle parts of the left and right sides of the substrate frame (21) are rotatably connected to connecting blocks (22), the middle part of the right end of the substrate frame (21) is fixedly connected to a connecting shaft (23), and the right end of the connecting shaft (23) passes through the right connecting block (22) and is fixedly connected to an internal thread block (24).

7. A coating device with uniform coating according to claim 6, characterized in that: The inner side of the internal thread block (24) is threadedly connected to the outer side of the adjacent external thread block (31) on the same side, and the connecting blocks (22) are both fitted with the opposite side of the adjacent sliding blocks (20).

8. The film coating device with uniform film coating according to claim 1, characterized in that: An air pump (3) is fixedly connected to the middle of the top of the coating chamber (1), an output end of the air pump (3) is fixedly connected to an air pipe (4), and the end of the air pipe (4) is located inside the coating chamber (1).

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