High-stability single crystal furnace hydraulic clamp
By designing a hydraulically driven single-crystal furnace hydraulic clamp, the efficient clamping of single-crystal silicon is achieved by combining the sleeve rod and the half gear, the problems of risk and low efficiency when removing single-crystal silicon crystal rods in the prior art are solved, and higher stability and operational safety are achieved.
Patent Information
- Application Number
- CN202420637715.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-29
- Publication Date
- 2025-03-18
- Estimated Expiration
- 2034-03-29
AI Technical Summary
When removing the single crystal silicon crystal rod in the existing single crystal furnace, the operation risk is high, the crystal rod is prone to breaking, and the manual operation efficiency is low.
A high-stability single-crystal furnace hydraulic clamp is designed, using hydraulic telescopic rod driving sleeve rod and half gear to achieve efficient clamping of single-crystal silicon, and adjust the clamping block spacing through bidirectional threaded rod and slider.
The stability and removal efficiency of single crystal silicon crystal rods are improved, the risk of fracture is reduced, and the safety and practicality of operation are improved by automatically adjusting the clamping force.
Smart Images

Figure CN222631618U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of clamping a single crystal furnace, and more specifically, particularly relates to a high-stability hydraulic clamp for a single crystal furnace. Background Art
[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas environment and grows dislocation-free single crystals using the Czochralski method.
[0003] Based on the above, the inventors have discovered the following problems: the current method for taking out a single crystal silicon ingot from a single crystal furnace is generally for an operator to wear gloves and use pliers to clamp out the ingot. However, this method of operation is not only dangerous, but the breaking strength and tensile strength of the single crystal silicon ingot are both relatively low, and the ingot shakes to a certain extent during the descent process, so the ingot is prone to breakage, and manual operation is relatively arbitrary and inefficient.
[0004] Therefore, in view of this, the existing structure and defects are studied and improved, and a high-stability single crystal furnace hydraulic clamp is provided, in order to achieve a more practical purpose. Utility Model Content
[0005] In order to solve the above technical problems, the utility model provides a high-stability single crystal furnace hydraulic clamp to solve the problem of poor stability and low efficiency of current manual clamping of single crystal silicon.
[0006] The purpose and effect of the high-stability single crystal furnace hydraulic clamp of the utility model are achieved by the following specific technical means:
[0007] A high-stability hydraulic clamp for a single crystal furnace comprises a mounting plate, one side of the mounting plate is provided with a hydraulic telescopic rod, the output end of the hydraulic telescopic rod passes through the mounting plate and is connected to a group of sleeve rods through a connecting piece, one end of the sleeve rod is sleeved with a vertical rod, and two sides of the mounting plate are provided with slide grooves, one of the slide grooves is provided with a bidirectional threaded rod, the other slide groove is provided with a sliding rod, the sliding rod and the bidirectional threaded rod are sleeved with a slider, one side of the slider is provided with a moving block, the moving block is provided with a clamping assembly, and the clamping assembly is connected to the vertical rod.
[0008] Furthermore, the clamping assembly includes a chamber opened inside the moving block, a group of half gears are provided in the chamber, the half gears are installed inside the chamber through an axle rod and a bearing seat, a rack is provided on one side of the half gear, and a clamping block is provided on one side of the rack.
[0009] Furthermore, the half gear is meshed with the rack.
[0010] Furthermore, a fixing rod is provided at the bottom of a group of the half gears, which is offset from the axis, and the fixing rod is sleeved with a T-shaped moving block, and the T-shaped moving block is connected to the vertical rod.
[0011] Further, the chamber is provided with a moving groove 1 and a moving groove 2, the moving groove 1 is provided with two groups of card blocks 1, the card blocks 1 are connected to the rack, the moving groove 2 is provided with a group of card blocks 2, the card blocks 2 are connected to the T-shaped moving block.
[0012] Furthermore, a rotating disk is provided on the top of the bidirectional threaded rod.
[0013] Compared with the prior art, the utility model has the following beneficial effects:
[0014] 1. The hydraulic telescopic rod is started, causing the output end to move back, driving the sleeve rod to move. With the cooperation of the vertical rod, T-shaped moving block and half gear, the rack meshing with the half gear is brought close to achieve the clamping function. Conversely, the clamping can be released. The clamping block is a set of symmetrical semicircular arc blocks, which can better clamp the single crystal silicon and improve stability.
[0015] 2. By rotating the turntable, the bidirectional threaded rod is driven to rotate, and the two sets of sliders can move closer or farther in the slide groove, so as to adjust the distance between the clamping blocks as needed and improve practicality. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 The utility model is a three-dimensional schematic diagram of a high-stability single crystal furnace hydraulic clamp.
[0017] Figure 2 The utility model is a three-dimensional schematic diagram of a high-stability single crystal furnace hydraulic clamp clamping assembly.
[0018] Figure 3 It is a side sectional view of a high-stability single crystal furnace hydraulic clamp clamping assembly of the utility model.
[0019] Figure 4 The utility model is a side sectional view of a high-stability hydraulic clamp for a single crystal furnace.
[0020] In the figure, the corresponding relationship between the component names and the figure numbers is as follows:
[0021] 1. Mounting plate; 2. Hydraulic telescopic rod; 3. Moving block; 101. Slide groove; 102. Bidirectional threaded rod; 103. Sliding rod; 104. Sliding block; 105. Turntable; 201. Connector; 202. Sleeve rod; 203. Vertical rod; 301. Chamber; 302. Half gear; 303. Rack; 304. Clamping block; 305. Fixed rod; 306. T-shaped moving block; 307. Moving groove one; 308. Moving groove two; 309. Block one; 310. Block two. DETAILED DESCRIPTION
[0022] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.
[0023] In the description of the present invention, unless otherwise specified, "multiple" means two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.
[0024] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0025] Example:
[0026] As attached Figure 1 To Attachment Figure 4 As shown:
[0027] The utility model provides a high-stability hydraulic clamp for a single crystal furnace, comprising a mounting plate 1, a hydraulic telescopic rod 2 is arranged on one side of the mounting plate 1, the output end of the hydraulic telescopic rod 2 passes through the mounting plate 1 and is connected to a group of sleeve rods 202 through a connecting piece 201, one end of the sleeve rod 202 is sleeved with a vertical rod 203, and both sides of the mounting plate 1 are provided with slide grooves 101, one of the slide grooves 101 is provided with a bidirectional threaded rod 102, the other slide groove 101 is provided with a slide rod 103, the slide rod 103 and the bidirectional threaded rod 102 are sleeved with a slider 104, a moving block 3 is arranged on one side of the slider 104, a clamping assembly is arranged in the moving block 3, and the clamping assembly is connected to the vertical rod 203.
[0028] Among them, the clamping assembly includes a chamber 301 opened inside the moving block 3, a group of half gears 302 are provided in the chamber 301, the half gears 302 are installed inside the chamber 301 through an axle rod and a bearing seat, a rack 303 is provided on one side of the half gear 302, and a clamping block 304 is provided on one side of the rack 303.
[0029] The half gear 302 is meshed with the rack 303 .
[0030] Among them, a fixing rod 305 is provided at the bottom of a group of the half gears 302, which is offset from the axis. The fixing rod 305 is equipped with a T-shaped moving block 306. The T-shaped moving block 306 is connected to the vertical rod 203. The hydraulic telescopic rod 2 is started, so that the output end moves back, driving the sleeve rod 202 to move. With the cooperation of the vertical rod 203, the T-shaped moving block 306 and the half gear 302, the rack 303 meshing with the half gear 302 is brought close to achieve the clamping function. Otherwise, the clamping can be released. The clamping block 304 is a symmetrical group of semicircular arc blocks, which can better clamp the single crystal silicon and improve stability.
[0031] Among them, the chamber 301 is provided with a moving groove 1 307 and a moving groove 2 308, the moving groove 1 307 is provided with two groups of block 1 309, the block 1 309 is connected to the rack 303, and the moving groove 2 308 is provided with a group of block 2 310, the block 2 310 is connected to the T-shaped moving block 306.
[0032] Among them, a turntable 105 is provided on the top of the bidirectional threaded rod 102. By rotating the turntable 105, the bidirectional threaded rod 102 is driven to rotate, and the two sets of sliders 104 can move closer or farther in the slide groove 101, thereby achieving the effect of adjusting the distance between the clamping blocks 304 as needed, thereby improving practicality.
[0033] The specific usage and function of this embodiment are as follows:
[0034] First, check the integrity of the device, then install the device on a horizontal plane, then start the hydraulic telescopic rod 2, so that the output end moves back, driving the sleeve rod 202 to move, and with the cooperation of the vertical rod 203, the T-shaped moving block 306 and the half gear 302, the rack 303 meshing with the half gear 302 is brought close to achieve the clamping function, otherwise the clamping can be released, and the clamping block 304 is a symmetrical set of semicircular arc blocks, which can better clamp the single crystal silicon and improve stability. If single crystal silicon of different lengths needs to be clamped and the spacing between the clamping blocks 304 needs to be adjusted, the turntable 105 is rotated to drive the bidirectional threaded rod 102 to rotate, and the two sets of sliders 104 can move closer or farther in the slide groove 101, thereby achieving the effect of adjusting the spacing between the clamping blocks 304 as needed, thereby improving practicality.
[0035] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific purposes.
Claims
1. A high-stability single crystal furnace hydraulic clamp, comprising a mounting plate (1), characterized in that: A hydraulic telescopic rod (2) is provided on one side of the mounting plate (1), and an output end of the hydraulic telescopic rod (2) passes through the mounting plate (1) and is connected to a set of sleeve rods (202) through a connecting piece (201), and a vertical rod (203) is sleeved on one end of the sleeve rod (202), and slide grooves (101) are provided on both sides of the mounting plate (1), wherein a bidirectional threaded rod (102) is provided in one of the slide grooves (101), and a slide rod (103) is provided in the other slide groove (101), and a slider (104) is sleeved on the slide rod (103) and the bidirectional threaded rod (102), and a moving block (3) is provided on one side of the slider (104), and a clamping assembly is provided in the moving block (3), and the clamping assembly is connected to the vertical rod (203).
2. A high-stability single crystal furnace hydraulic clamp as claimed in claim 1, characterized in that: The clamping assembly comprises a chamber (301) opened inside the moving block (3), a group of half gears (302) are arranged in the chamber (301), the half gears (302) are installed inside the chamber (301) through a shaft and a bearing seat, a rack (303) is arranged on one side of the half gears (302), and a clamping block (304) is arranged on one side of the rack (303).
3. A high-stability single crystal furnace hydraulic clamp as claimed in claim 2, characterized in that: The half gear (302) is meshed with the rack (303).
4. A high-stability single crystal furnace hydraulic clamp as claimed in claim 3, characterized in that: A fixing rod (305) is provided at the bottom of a group of the half gears (302) at a position deviating from the axis, and the fixing rod (305) is sleeved with a T-shaped moving block (306), and the T-shaped moving block (306) is connected to the vertical rod (203).
5. A high-stability single crystal furnace hydraulic clamp as claimed in claim 4, characterized in that: The chamber (301) is provided with a moving groove 1 (307) and a moving groove 2 (308); the moving groove 1 (307) is provided with two groups of card blocks 1 (309); the card blocks 1 (309) are connected to the rack (303); the moving groove 2 (308) is provided with a group of card blocks 2 (310); the card blocks 2 (310) are connected to the T-shaped moving block (306).
6. A high-stability single crystal furnace hydraulic clamp as claimed in claim 1, characterized in that: A rotating disk (105) is provided on the top of the bidirectional threaded rod (102).