Vacuum obtaining assembly and vacuum system

Abstract

The utility model relates to the technical field of ultrahigh vacuum, in particular to a vacuum obtaining assembly and a vacuum system, and aims to solve the problem that an existing ultrahigh vacuum system is low in pump set capacity utilization rate. The vacuum obtaining assembly comprises a plurality of main bodies, a plurality of main pumps, a pre-pumping pump and a backing pump. The multiple main bodies are connected with the multiple main pumps in a one-to-one correspondence mode. And the plurality of main bodies are connected with the pre-pumping pump. And the pre-pumping pump is connected with the backing pump. According to the scheme, the pre-pumping pump and the backing pump are connected with the multiple main bodies at the same time, so that the pre-pumping pump and the backing pump can conduct pre-pumping on the multiple main bodies at the same time, and effective utilization of the capacity of the pump set can be effectively improved; and meanwhile, each main body is connected with the main pump, so that the problem that the utilization rate of the existing ultrahigh vacuum system to the capacity of the pump set is relatively low can be solved under the condition that the ultrahigh vacuum environment of the main body is not influenced.

Description

Technical Field

[0001] The present application relates to the field of ultra-high vacuum technology and, in particular, to a vacuum obtaining component and a vacuum system. Background Art

[0002] An ultra-high vacuum (UHV) system generally consists of a pump body group, which includes a plurality of pump bodies, so as to realize step-by-step vacuum extraction through the plurality of pump bodies.

[0003] When multiple entities need to be evacuated, the existing ultra-high vacuum system needs to be equipped with pump groups corresponding to the number of entities, which makes the overall structure of the system complex and has the defect of wasting the capacity of the pump group. Utility Model Content

[0004] In view of this, the purpose of the present application is to provide a vacuum acquisition component and a vacuum system to solve the problem of low pump capacity utilization in existing ultra-high vacuum systems.

[0005] In order to achieve the above technical objectives, the first aspect of the present application provides a vacuum obtaining assembly, comprising: a plurality of main bodies, a plurality of main pumps, a pre-pump and a fore-stage pump;

[0006] The multiple main bodies are connected to the multiple main pumps in a one-to-one correspondence;

[0007] A plurality of the main bodies are connected to the pre-pump;

[0008] The pre-pump is connected to the front-stage pump.

[0009] Further, the main body is connected to the main pump via a first pipeline;

[0010] The first pipeline is provided with a first metal valve;

[0011] The first metal valve is used to control the on-off of the first pipeline.

[0012] Furthermore, a first vacuum detector is provided on the first pipeline.

[0013] Furthermore, the main body is connected to the pre-pump via a second pipeline;

[0014] A second metal valve is provided on the second pipeline;

[0015] The second metal valve is used to control the on-off of the second pipeline.

[0016] Furthermore, the pre-pump is connected to the fore-stage pump via a third pipeline;

[0017] The third pipeline is provided with a pressure difference solenoid valve;

[0018] The pressure difference solenoid valve is used to control the on-off of the third pipeline.

[0019] Furthermore, a second vacuum detector is provided on the third pipeline.

[0020] Furthermore, a leak detection port is provided on the third pipeline.

[0021] Furthermore, a heating wire wound in a threaded shape is provided on the pipeline connecting the main body and the main pump, the pipeline connecting the main body and the pre-pump, and the pipeline connecting the pre-pump and the front-stage pump.

[0022] Furthermore, a heat-insulating layer is provided on the outer periphery of the pipeline wound with the heating wire.

[0023] A second aspect of the present application provides a vacuum system, comprising any of the vacuum obtaining components described above.

[0024] It can be seen from the above technical solutions that the present application provides a vacuum acquisition component and a vacuum system, which are used to solve the problem of low utilization rate of pump group capacity in existing ultra-high vacuum systems. The vacuum acquisition component includes: multiple main bodies, multiple main pumps, pre-pumps and front-stage pumps; multiple main bodies are connected to multiple main pumps in a one-to-one correspondence; multiple main bodies are connected to the pre-pumps; and the pre-pumps are connected to the front-stage pumps.

[0025] In this solution, the pre-pump and the front-stage pump are connected to multiple main bodies at the same time, so that the two can perform pre-pumping for multiple main bodies at the same time, which can effectively improve the effective utilization of the pump group capacity; at the same time, each main body is connected to the main pump, which can solve the problem of low utilization of the pump group capacity in the existing ultra-high vacuum system without affecting the ultra-high vacuum environment of the main body. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0027] Figure 1 A schematic diagram of the circuit structure of a vacuum obtaining component provided in an embodiment of the present application;

[0028] Figure 2 A schematic diagram of a heating wire provided in a pipeline of a vacuum obtaining component provided in an embodiment of the present application. DETAILED DESCRIPTION

[0029] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the specification of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection requested by the present application.

[0030] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0031] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0032] See also Figure 1 In the first aspect of the embodiment of the present application, a vacuum obtaining assembly is provided, comprising: a plurality of main bodies 10, a plurality of main pumps 20, a pre-pump 30 and a front-stage pump 40. The plurality of main bodies 10 are connected to the plurality of main pumps 20 in a one-to-one correspondence, so that each main pump 20 can perform vacuum extraction on the main body 10 in a one-to-one correspondence.

[0033] The plurality of main bodies 10 are connected to the pre-pump 30 , and the pre-pump 30 is connected to the fore-pump 40 , so that the pre-pump 30 and the fore-pump 40 can jointly perform vacuum extraction on the plurality of main bodies 10 .

[0034] The main pump 20 can ensure that the main body 10 draws an ultra-vacuum vacuum degree; the pre-pump 30 and the front-stage pump 40 can improve the utilization rate of the pump group.

[0035] In actual application, multiple main bodies 10 can be connected to the same pre-pump 30 and pre-pump 40; in this embodiment, there are two main bodies 10, which can improve the utilization rate of the pump group while ensuring the vacuum extraction effect of the pre-pump 30 and the pre-pump 40.

[0036] In a more specific embodiment, the main body 10 is connected to the main pump 20 via a first pipeline 100 ; a first metal valve 110 is provided on the first pipeline 100 ; the first metal valve 110 is used to control the on-off of the first pipeline 100 .

[0037] The first metal valve 110 on the first pipeline 100 can control the connection and isolation between the main pump 20 and the main body 10, so that the first metal valve 110 can be closed when the main pump 20 needs to be replaced without destroying the ultra-high vacuum environment of the main body 10.

[0038] Furthermore, a first vacuum detector 120 is provided on the first pipeline 100 , which can detect the vacuum degree of the first pipeline 100 , thereby detecting whether the vacuum degree in the main body 10 meets the requirements.

[0039] In one embodiment, the main body 10 is connected to the pre-pump 30 via a second pipeline 200 ; a second metal valve 210 is disposed on the second pipeline 200 ; and the second metal valve 210 is used to control the on-off of the second pipeline 200 .

[0040] Specifically, each main body 10 is connected to the pre-pump 30 through the second pipeline 200, so that the pre-pump 30 can independently control whether each main body 10 is connected through the second metal valve 210, so as to select the number of main bodies 10 that the pre-pump 30 needs to connect according to demand.

[0041] Furthermore, the pre-pump 30 is connected to the front-stage pump 40 via a third pipeline 300 ; a differential pressure solenoid valve 310 is provided on the third pipeline 300 ; the differential pressure solenoid valve 310 is used to control the on-off of the third pipeline 300 .

[0042] The pressure difference solenoid valve 310 can be closed when the pressure difference between the pre-pump 30 and the front-stage pump 40 exceeds a preset value, so as to prevent the front-stage pump 40 from destroying the vacuum environment of the main body 10 when returning air. At the same time, through the pressure difference solenoid valve 310 and the second metal valve 210, it is possible to replace the pre-pump 30 or the front-stage pump 40 without affecting the vacuum environment in the main body 10.

[0043] In another embodiment, a second vacuum detector 320 is disposed on the third pipeline 300 .

[0044] The second vacuum detector 320 can detect the vacuum degree of the third pipeline 300 during the pre-pumping process of the front-stage pump 40 and the pre-pump 30 , thereby determining the opening time of the first metal valve 110 .

[0045] Specifically, the second pipeline 200 is connected between the first metal valve 110 and the main body 100. During the vacuum extraction process, the front pump 40, the pressure difference solenoid valve 310, the pre-pump 30 and the second metal valve 210 are first turned on, so that the front pump 40 and the pre-pump 30 extract the main body 10 to the first vacuum degree; wherein, whether the main body 10 is extracted to the first vacuum degree can be determined by the second vacuum detector 320.

[0046] After the main body 10 is evacuated to the first vacuum degree, the first metal valve 110 is opened, and the main pump 30 evacuates the main body 10 to the second vacuum degree; correspondingly, whether the main body 10 is evacuated to the second vacuum degree can be determined by the first vacuum detector 120.

[0047] In a further improved embodiment, a leak detection port 330 is provided on the third pipeline 300. Correspondingly, a valve for controlling the opening and closing of the leak detection port 330 may be provided on the leak detection port 330.

[0048] The leak detection port 330 can detect whether the pipeline is leaking after the main body 10 reaches a preset vacuum degree, taking into account the helium spray leak detection requirements of the entire vacuum system.

[0049] In other embodiments, see Figure 1 and Figure 2 A heating wire 400 wound in a threaded shape is provided on the pipeline connecting the main body 10 and the main pump 20, the pipeline connecting the main body 10 and the pre-pump 30, and the pipeline connecting the pre-pump 30 and the front-stage pump 40.

[0050] Specifically, the heating wire 400 can be wound around the first pipeline 100, the second pipeline 200 and the third pipeline 300. The heating wire 400 is wound in a spiral shape, which can effectively ensure the uniformity of heating each pipeline.

[0051] The heating wire 400 can effectively heat the gas and water in the first pipeline 100, the second pipeline 200 and the third pipeline 300, so that the water is vaporized into gas and the gas is more active, so that it can be more effectively pumped out by the pump group.

[0052] Furthermore, an insulation layer 500 is provided around the periphery of the pipeline wrapped with the heating wire 400, that is, an insulation layer 500 is provided around the periphery of the first pipeline 100, the second pipeline 200 and the third pipeline 300, which can prevent the temperature of the heating wire 400 from dissipating too quickly, thereby improving heat utilization.

[0053] A second aspect of the present application provides a vacuum system, comprising any of the vacuum obtaining components described above.

[0054] Specifically, the vacuum system provided in this embodiment may further include an inflation component, a heating component, an exhaust component, and a control component connected to the main body 10 .

[0055] The above are only preferred embodiments of the present application and are not intended to limit the present utility model. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the aforementioned examples or make equivalent substitutions for some of the technical features therein. However, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A vacuum obtaining component, characterized in that: include: A plurality of main bodies (10), a plurality of main pumps (20), a pre-pump (30) and a front-stage pump (40); The plurality of main bodies (10) are connected to the plurality of main pumps (20) in a one-to-one correspondence; A plurality of the main bodies (10) are connected to the pre-pump (30); The pre-pump (30) is connected to the front-stage pump (40).

2. The vacuum obtaining assembly according to claim 1, characterized in that: The main body (10) is connected to the main pump (20) via a first pipeline (100); The first pipeline (100) is provided with a first metal valve (110); The first metal valve (110) is used to control the on-off of the first pipeline (100).

3. The vacuum obtaining assembly according to claim 2, characterized in that: The first pipeline (100) is provided with a first vacuum detector (120).

4. The vacuum obtaining assembly according to claim 1, characterized in that: The main body (10) and the pre-pump (30) are connected via a second pipeline (200); The second pipeline (200) is provided with a second metal valve (210); The second metal valve (210) is used to control the on-off of the second pipeline (200).

5. The vacuum obtaining assembly according to claim 1, characterized in that: The pre-pump (30) is connected to the front-stage pump (40) via a third pipeline (300); The third pipeline (300) is provided with a pressure difference solenoid valve (310); The differential pressure solenoid valve (310) is used to control the on-off of the third pipeline (300).

6. The vacuum obtaining assembly according to claim 5, characterized in that: The third pipeline (300) is provided with a second vacuum detector (320).

7. The vacuum obtaining assembly according to claim 5, characterized in that: The third pipeline (300) is provided with a leak detection port (330).

8. The vacuum obtaining assembly according to claim 1, characterized in that: A heating wire (400) wound in a threaded shape is provided on the pipeline connecting the main body (10) and the main pump (20), the pipeline connecting the main body (10) and the pre-pump (30), and the pipeline connecting the pre-pump (30) and the front-stage pump (40).

9. The vacuum obtaining assembly according to claim 8, characterized in that: A heat-insulating layer (500) is provided on the outer periphery of the pipeline around which the heating wire (400) is wound.

10. A vacuum system, characterized in that: A vacuum obtaining assembly comprising the vacuum obtaining assembly according to any one of claims 1 to 9.

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