Multi-line laser and scanner

Abstract

The multi-line laser comprises a laser light source and a light source shaping part, and the light source shaping part comprises a collimation module, a light spot shaping module and a light splitting module; the light splitting module is used for splitting an incident light beam into a plurality of sub-light beams and emitting the sub-light beams at different emitting angles, so that the sub-light beams emitted from the light source shaping part form multi-line laser at a specified position; parameters of the multi-line laser can be adjusted according to the number of the sub-beams and the width of the sub-beams. According to the invention, the focal depth can be adjusted only by controlling the width of each sub-beam emitted by the light splitting module, so that large-focal-depth multi-line laser is realized. The aperture is not limited by the size of an incident light spot, and the permitted light transmission size of the aperture is far larger than that of the existing DOE light splitting technology. And for a large-focal-depth application scene, a higher energy utilization rate is achieved.

Description

Technical Field

[0001] The present application relates to the field of optical equipment, and in particular to a multi-line laser and a scanner. Background Art

[0002] The existing multi-line laser technology is as follows: the light spot emitted by the laser light source is collimated by a lens and then enters a prism, which shapes the point light spot into a line light spot, and finally splits it through a DOE (Diffractive Optical Elements) to expand it into a multi-line laser. Among them, the DOE copies the incident light spot and then projects it into each split light spot emitted at different angles. Each split light spot maintains the original optical characteristics of the incident light spot, including the size of the original light spot and the beam divergence angle, but with the exception of the optical power. The sum of the power of each split light spot obtained by DOE splitting is less than the power of the light spot incident to the DOE.

[0003] Since the intensity distribution of the output light spot has a certain focal depth, the spot size, working distance and focal depth are mutually balanced. Therefore, under the application requirements of large focal depth, existing multi-line lasers usually use an aperture in front of the DOE to physically block the light spot incident to the DOE to reduce the size of the incident light spot and obtain a larger focal depth. In order to obtain a large focal depth light energy distribution, an aperture is added in front of the DOE to reduce the size of the light spot incident to the DOE. The larger the focal depth, the smaller the incident light spot size required, and the smaller the incident light spot size, the lower the light energy utilization rate.

[0004] With regard to the problem of low light energy utilization rate of multi-line lasers in large focal depth application scenarios in related technologies, no effective solution has been proposed so far. Utility Model Content

[0005] In this embodiment, a multi-line laser and a scanner are provided to solve the problem of low light energy utilization rate of the multi-line laser in the application scenario with large focal depth in the related art.

[0006] In a first aspect, a multi-line laser is provided in this embodiment, comprising a laser light source and a light source shaping unit, wherein the light source shaping unit comprises a collimating module, a light spot shaping module and a light splitting module;

[0007] The laser light source is used to generate a light spot;

[0008] The collimation module is used to collimate or focus the incident light spot;

[0009] The light spot shaping module is used to shape the incident point light spot into a line light spot for outgoing emission;

[0010] The light splitting module is used to split the incident light beam into multiple sub-beams and emit them at different emission angles, so that the sub-beams emitted from the light source shaping part form multi-line lasers at specified positions; wherein the parameters of the multi-line lasers can be adjusted according to the number of the sub-beams and the width of the sub-beams.

[0011] In one embodiment, the parameters of the multi-line laser include at least one of the following: the number of laser lines, the brightness of the laser lines, and the focal depth.

[0012] In one embodiment, the focal length of the collimating module ranges from 6 mm to 12 mm.

[0013] In one embodiment, the output light spot of the laser light source passes through the collimation module, the light spot shaping module, and the light splitting module in sequence to form the multi-line laser;

[0014] Alternatively, the output light spot of the laser light source forms the multi-line laser after passing through the collimation module, the beam splitting module, and the light spot shaping module in sequence.

[0015] In one of the embodiments, the light splitting module includes a first optical surface;

[0016] The first optical surface of the light splitting module includes a plurality of facets with different inclination angles;

[0017] The incident light beam on the first optical surface is refracted at each of the small faces to form a plurality of sub-beams that are emitted at different emission angles;

[0018] The width of each of the sub-beams is determined by the width of its exit facet, the exit angle of each of the sub-beams is determined by the inclination angle of its exit facet, and the number of the sub-beams is determined by the number of the facets.

[0019] In one embodiment, the surface shape of each of the small faces can be a combination of one or more of a plane, a spherical surface, an aspherical surface, and a free-form surface.

[0020] In one embodiment, the overall surface shape of the first optical surface of the light splitting module is at least one of a concave surface, a convex surface, and an irregular surface.

[0021] In one embodiment, the light splitting module is a phase-adjustable diffractive optical device or a meta-lens.

[0022] In one of the embodiments, the first optical surface of the light splitting module includes a microstructure, and the microstructure is used to achieve phase control of the sub-beam.

[0023] In one embodiment, the microstructure is in at least one of a step-like, hole-like, and column-like shape.

[0024] In one of the embodiments, the light spot shaping module is a Powell prism, a cylindrical mirror, a micro-prism array structure, a phase-adjustable diffractive optical device or a meta-lens.

[0025] In one embodiment, the output light spot of the laser light source forms a multi-line laser at a specified position after passing through the collimation module, the light splitting module, and the light spot shaping module in sequence;

[0026] The collimation module and the light splitting module are an integrated structure;

[0027] Alternatively, the light splitting module and the light spot shaping module are an integrated structure.

[0028] In one embodiment, the output light spot of the laser light source forms a multi-line laser at a specified position after passing through the collimation module, the light spot shaping module, and the light splitting module in sequence;

[0029] The collimation module and the light spot shaping module are an integrated structure;

[0030] Alternatively, the light spot shaping module and the light splitting module are an integrated structure.

[0031] In one embodiment, the collimation module, the light spot shaping module and the light splitting module are an integrated structure.

[0032] In a second aspect, a scanner is provided in this embodiment, comprising a scanning device, wherein the scanning device comprises the multi-line laser provided in the first aspect.

[0033] In one of the embodiments, the scanner further comprises a tracking device, and the tracking device is used to track the position and posture of the scanning device.

[0034] Compared with the related art, the multi-line laser and scanner provided in this embodiment, its spectroscopic module can split the incident light beam into multiple sub-beams and emit them at different emission angles, so that the sub-beams emitted from the light source shaping part form a multi-line laser at a specified position; the parameters of the multi-line laser can be adjusted according to the number of sub-beams and the width of the sub-beams. Therefore, it is only necessary to control the width of each sub-beam emitted by the spectroscopic module to adjust the focal depth, thereby realizing a multi-line laser with a large focal depth. It is not limited by the size of the incident light spot, and the light transmission size allowed by the aperture is much larger than the existing DOE spectroscopic technology. For large focal depth application scenarios, it has higher energy utilization.

[0035] Details of one or more embodiments of the present application are set forth in the following drawings and description to make other features, objects, and advantages of the present application more readily apparent. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0037] Figure 1 is a schematic diagram of the structure of a multi-line laser provided in Example 1 of the present application;

[0038] Figure 2A It is a schematic diagram of the light path shaped by the Powell prism in one direction;

[0039] Figure 2B Powell prism in Figure 2A Schematic diagram of the shaping light path in the direction perpendicular to the direction shown;

[0040] Figure 3 It is a schematic diagram of the shaping light path of the microprism array structure;

[0041] Figure 4 is a schematic diagram of the surface microstructure of the meta-lens;

[0042] Figure 5A It is a schematic diagram of the light path in one direction of the laser light source divergence;

[0043] Figure 5B It is a schematic diagram of the light path in another vertical direction emitted by the laser light source;

[0044] Figure 6 is a schematic diagram of the structure of a multi-line laser provided in Example 2 of the present application;

[0045] Figure 7 This is a schematic diagram of the light splitting principle of a light splitting module provided in an embodiment of the present application.

[0046] Fig. 8A is a structural schematic diagram of a concave light splitting module provided in an embodiment of the present application;

[0047] Figure 8B is a structural schematic diagram of a convex light splitting module provided in an embodiment of the present application;

[0048] Fig. 9A It is a structural schematic diagram of a one- and two-dimensional light splitting module provided in an embodiment of the present application;

[0049] Fig. 9B is a schematic structural diagram of another two-dimensional light splitting module provided in an embodiment of the present application;

[0050] Fig. 10A is to use Fig. 9A A schematic diagram of the spectroscopic results of a parallel light source by a one-dimensional spectroscopic module;

[0051] Fig. 10B is to use Fig. 9B A schematic diagram of the splitting results of a parallel light source by a two-dimensional splitting module is provided;

[0052] Fig.11 This is a schematic diagram of the simulation effect of the multi-line laser provided in Example 3 of the present application. DETAILED DESCRIPTION

[0053] In order to more clearly understand the purpose, technical solutions and advantages of the present application, the present application is described and illustrated below in conjunction with the accompanying drawings and embodiments.

[0054] Unless otherwise defined, the technical terms or scientific terms involved in this application shall have the general meaning understood by people with ordinary skills in the technical field to which this application belongs. The words "one", "a", "a", "the", "these" and the like in this application do not represent quantitative restrictions, and they can be singular or plural. The terms "include", "comprise", "have" and any variants thereof involved in this application are intended to cover non-exclusive inclusions; for example, a process, method and system, product or device comprising a series of steps or modules (units) is not limited to the listed steps or modules (units), but may include unlisted steps or modules (units), or may include other steps or modules (units) inherent to these processes, methods, products or devices. The words "connect", "connected", "coupled" and the like involved in this application are not limited to physical or mechanical connections, but may include electrical connections, whether directly or indirectly. The "multiple" involved in this application refers to two or more. "And / or" describes the association relationship of associated objects, indicating that there can be three relationships. For example, "A and / or B" can mean: A exists alone, A and B exist at the same time, and B exists alone. Usually, the character " / " indicates that the objects associated with each other are in an "or" relationship. The terms "first", "second", "third", etc. involved in this application are only used to distinguish similar objects and do not represent a specific ordering of the objects.

[0055] See also Figure 1 The first embodiment of the present application provides a multi-line laser for generating multi-line laser. The multi-line laser includes a laser light source 100 and a light source shaping unit 001, wherein the light source shaping unit 001 includes a collimation module 200, a light spot shaping module 300, and a light splitting module 400. The output light spot of the laser light source 100 passes through the collimation module 200, the light spot shaping module 300, and the light splitting module 400 in sequence, and then forms a multi-line laser at a specified position.

[0056] The laser light source 100 is used to generate a light spot; the light source shaping unit 001 is used to shape and split the light spot generated by the laser light source 100 to form a multi-line laser with adjustable parameters. Specifically, the collimation module 200 is used to collimate or focus the incident light spot; the light spot shaping module 300 is used to shape the incident point light spot into a line light spot for emission; the beam splitting module 400 is used to split the incident light beam into multiple sub-beams and emit them at different emission angles, so that the sub-beams emitted from the light source shaping unit 001 form a multi-line laser at a specified position.

[0057] like Figure 1 As shown, the initial light spot generated by the laser light source 100 enters the collimation module 200 in the light source shaping part 001, is collimated into a nearly parallel light by the collimation module 200, and then enters the light spot shaping module 300; the light spot shaping module 300 shapes the light spot in a divergent angle direction into a line light spot, while not changing the direction of the light beam in another perpendicular divergent angle direction of the incident light source, completing the beam shaping of converting the point light spot into a line light spot; the outgoing light beam from the light spot shaping module 300 enters the light splitting module 400, is split into a plurality of sub-beams by the light splitting module 400 and is emitted at different emission angles, forming a multi-line laser at a specified position. The parameters of the multi-line laser can be adjusted according to the number of the sub-beams and the width of the sub-beams.

[0058] Specifically, the parameters of the multi-line laser include at least one of the following: the number of laser lines, the brightness of the laser lines, and the focal depth. The number of laser lines of the multi-line laser generated by the multi-line laser provided in this embodiment is determined by the number of sub-beams formed by the splitting module 400. The more sub-beams formed by the splitting module 400, the more laser lines of the multi-line laser generated. Therefore, if the number of laser lines of the multi-line laser formed is to be adjusted, it is only necessary to adjust the number of sub-beams formed by the splitting module 400 in the multi-line laser provided in this embodiment.

[0059] The brightness of the laser line of the multi-line laser generated by the multi-line laser provided in this embodiment is determined by the width of the sub-beams formed by the splitting module 400. The larger the width of the sub-beams formed by the splitting module 400, the higher the brightness of the laser line of the multi-line laser. Therefore, if the brightness of the laser line of the multi-line laser is to be adjusted, it is only necessary to adjust the width of the sub-beams formed by the splitting module 400 in the multi-line laser provided in this embodiment.

[0060] In addition, the minimum line width of the multi-line laser generated by the multi-line laser provided in this embodiment at a specified position is determined by the focal length of the collimator module 200. The larger the focal length of the collimator module 200, the smaller the line width of the multi-line laser formed at the specified position. However, since the larger the focal length of the collimator module 200, the longer the overall length of the laser and the larger the diameter, comprehensive consideration is required.

[0061] As an implementable embodiment, the focal length range of the collimation module 200 of the multi-line laser provided in this embodiment is between 6mm and 12mm. For example, 6mm, 8mm, 10mm, 12mm. By setting the focal length of the collimation module 200 in this way, the overall length of the multi-line laser is not too large to meet the use requirements while ensuring that the minimum line width of the multi-line laser formed at the specified position meets the large focal depth requirement. Taking the multi-line laser used in a handheld 3D scanner as an example, it is entirely possible to use a collimating lens with a focal length range of 6mm-12mm. It should be noted that the above-mentioned specified position is the optimal position of the use distance range defined by the product.

[0062] It should be noted here that the multi-line laser provided in this embodiment is a laser beam emitted from the spot shaping module 300, which is split into multiple sub-beams by the spectrometer module 400 and emitted at different emission angles to form a multi-line laser at a specified position. Since the energy of the spot is Gaussian, a large aperture can be used to block the spot with weaker energy at the edge, so that the uniform light energy in the middle is incident on the spectrometer module 400. Each sub-beam emitted by the spectrometer module 400 corresponds to a part of the incident beam of the spectrometer module 400. For the multi-line laser provided in this embodiment, in the application scenario with the same depth of focus requirement, the spot width allowed to be incident by the spectrometer module 400 is several times the spot width allowed to be incident by the DOE in the traditional method. In this way, the utilization rate of light energy is greatly improved.

[0063] Furthermore, in the prior art, DOE is used to copy the incident light spot and then project it into each split light spot emitted at different angles, and the laser parameters of the emitted light spot are restricted by the width of the incident light spot of the DOE. In view of the application requirements of large focal depth, the light spot incident to the DOE can only be physically shielded to reduce the size of its incident light spot, thereby obtaining a larger focal depth, but it also leads to a low utilization rate of light energy. The multi-line laser provided in the first embodiment of the present invention has a beam splitting module 400 that can split the incident light beam into multiple sub-beams and emit them at different emission angles, so that the sub-beams emitted from the light source shaping part form a multi-line laser at a specified position; the parameters of the multi-line laser can be adjusted according to the number of the sub-beams and the width of the sub-beams. The focal depth can be adjusted by only controlling the width of each sub-beam emitted by the beam splitting module 400. The smaller the beam width of the divided sub-beams, the greater the corresponding laser line focal depth, thereby realizing a large focal depth multi-line laser.

[0064] Therefore, compared with the prior art, the multi-line laser provided in the first embodiment is not limited by the incident spot size, and the light transmission size allowed by the aperture is much larger than the existing DOE spectroscopic technology, has higher energy utilization, and can achieve a larger focal depth.

[0065] Specifically, the laser light source 100 in the present application can be implemented by any light source among solid laser sources, gas laser sources, and semiconductor laser sources, which is not limited here.

[0066] The collimation module 200 in the present application can be implemented by lenses such as spherical lenses, aspherical lenses, and cylindrical lenses. The collimation module 200 can be composed of a single lens or a plurality of lenses. It should be supplemented that the focal length of the lens used to implement the collimation module 200 is determined by the size of the above-mentioned multi-line laser and the required laser line width. The larger the focal length, the longer the overall length of the multi-line laser, the thinner the laser line width, and the greater the depth of focus. In addition, the laser line width is also related to the diffraction quality factor of the laser light source 100. Generally, the greater the laser beam power, the greater the laser diffraction quality factor, and an aspheric lens is required to focus the laser spot.

[0067] The light spot shaping module 300 in the present application is mainly used to shape a point light spot into a line light spot, and can be a refractive light beam shaping device or a diffractive light beam shaping device.

[0068] Furthermore, the refractive spot shaping device uses the law of light refraction to achieve spot shaping, such as a Powell prism, a cylindrical mirror, or a micro-prism array structure. Figure 2A and Figure 2B The figure shows the schematic diagram of the shaping light path of the Powell prism in two perpendicular directions. The Powell prism is a cylindrical lens with a quadratic coefficient. It only shapes the light spot in one direction, and it is equivalent to a plane lens in the other perpendicular direction. The Powell prism controls the fan angle and energy uniformity of the line light spot through the material refractive index, cylindrical curvature radius and quadratic coefficient. When the fan angle of the laser line is large, a high refractive index material can be selected, such as n = 1.8; when the fan angle of the laser line is small, a low refractive index material can be selected, such as n = 1.5. Both the radius of curvature and the quadratic coefficient will affect the fan angle and uniformity of the light. In general, the radius of curvature has a greater impact on the fan angle, and the quadratic coefficient has a greater impact on the uniformity of the light. The radius of curvature is generally larger than the incident spot diameter, usually a positive value, and the quadratic coefficient is generally a negative value.

[0069] like Figure 3 The figure shows a schematic diagram of the shaping light path of the microprism array structure, in which the convex part is similar to the Powell prism, and the light beam passing through each small convex part can be shaped into a line laser. The superposition of multiple laser lines reduces the spatial coherence of the laser line, achieving the effect of suppressing laser speckle.

[0070] The diffraction-type spot shaping device mainly uses the wave nature of light to achieve spot shaping. Specifically, the light propagation speed through the raised area of ​​the diffraction element is lower than the light propagation speed through the lower area, so as to achieve controlled phase regulation and produce a diffraction effect to shape the light beam. By designing a microstructure pattern on the substrate material and changing the propagation phase of the incident light, the spot can be shaped into any desired intensity profile and shape. The spot shaping module 300 in the present application can be implemented using a phase-adjustable diffraction optical device and a meta-lens. A meta-lens is also called a super-lens, see Figure 4 , whose surface is composed of a sub-wavelength optical scatterer array, and the light beam is manipulated by adjusting the size, shape, distribution and other characteristics of the scatterers. These scatterers can be metal or dielectric nanorods, or sub-wavelength aperture structures in metal or dielectric films. Of course, the spot shaping module 300 in the present application can also use DOE in the prior art to achieve spot shaping, which will not be repeated here.

[0071] The spectrometer module 400 in the present application can also be implemented using a refractive spectrometer or a diffractive spectrometer. Specifically, the refractive spectrometer uses the small faces with different inclination angles on the spectrometer side to split the light and emit it at a specified angle. It can split the incident collimated or nearly collimated light beam into several light beams and emit them at different angles. By controlling the width of each small facet, the energy of each sub-beam and the focal depth of the laser line can be controlled. By controlling the inclination angle of each small facet, the emission angle of each sub-beam can be controlled, and a large focal depth multi-line laser with uniform energy can be achieved. For the refractive spectrometer, a specific embodiment will be provided below for illustration.

[0072] The diffractive spectrometer uses the microstructure design on its surface to achieve phase control to split the light beam and emit it in a specified direction. The diffractive spectrometer controls the energy of each sub-beam and the focal depth of the laser line by adjusting the periodic width of the microstructure. The diffractive spectrometer can be implemented using the above-mentioned phase-adjustable diffractive optical device or meta-lens, which will not be described here.

[0073] The collimation module 200 and the spot shaping module 300 in the above-mentioned embodiment 1 can be discrete or integrated. As an implementation method, the collimation module 200 and the spot shaping module 300 are integrated. The light-incoming surface of the integrated structure including the collimation module 200 and the spot shaping module 300 can be a spherical surface, an aspherical surface or other surface type that can realize the collimation function. The collimation module 200 and the spot shaping module 300 are integrated and can be processed together as a whole, reducing the processing cost and the assembly cost. At the same time, the size of the optical path can also be reduced.

[0074] The spot shaping module 300 and the spectroscopic module 400 in the above-mentioned embodiment 1 can be discrete or integrated. For example, one side of the integrated structure including the spot shaping module 300 and the spectroscopic module 400 uses a Powell prism, a cylindrical lens or a microprism array structure, and the other side uses a refractive spectroscopic device or a diffractive spectroscopic device. As another possible implementation method, the spot shaping module 300 and the spectroscopic module 400 are an integrated structure and are processed together as a whole, thereby reducing the processing cost and the assembly cost. At the same time, the size of the optical path can also be reduced.

[0075] As mentioned above, the spot shaping module 300 shapes the point spot of the laser in one divergent angle direction into a line spot, and the beam splitting module 400 splits the incident beam of the laser in another perpendicular divergent angle direction into several sub-beams and emits them at different emission angles, finally realizing multi-line laser at the specified position. Figure 5A and Figure 5B , is a schematic diagram of the light paths in two mutually perpendicular directions in the above-mentioned embodiment 1, and the arrows represent the transmission directions of the light. Figure 5A and Figure 5B As shown, the light beam emitted by the laser light source 100 is collimated by the collimation module 200 into a nearly parallel light, which will eventually realize the focusing of the light spot at the specified position; the light spot shaping module 300 shapes the light spot in one divergent angle direction of the light source into a linear light spot, which does not change the direction of the light path in another perpendicular divergent angle direction of the light source; the light splitting module 400 divides the light spot in another perpendicular divergent angle direction of the light source and emits it at different angles, and finally realizes a multi-line laser with a certain focal depth at the specified position.

[0076] It can be seen that the light spot shaping module 300 and the light splitting module 400 act in two mutually perpendicular directions respectively, so the order of the two can be exchanged and they can be in front and behind each other on the optical path.

[0077] See also Figure 6 Based on the same inventive concept, the second embodiment of the present application provides a multi-line laser for generating multi-line laser. The multi-line laser includes a laser light source 100 and a light source shaping unit 001, wherein the light source shaping unit 001 includes a collimation module 200, a light spot shaping module 300 and a light splitting module 400. The exit light spot of the laser light source 100 passes through the collimation module 200, the light splitting module 400 and the light spot shaping module 300 in sequence, and then forms a multi-line laser at a specified position.

[0078] The laser light source 100 is used to generate a light spot; the light source shaping unit 001 is used to shape and split the light spot generated by the laser light source 100 to form a multi-line laser with adjustable parameters. The collimation module 200 is used to collimate or focus the incident light spot; the light spot shaping module 300 is used to shape the incident point light spot into a line light spot for emission; the beam splitting module 400 is used to split the incident light beam into multiple sub-beams and emit them at different emission angles, so that the sub-beams emitted from the light source shaping unit 001 form a multi-line laser at a specified position.

[0079] like Figure 6 As shown, the initial light spot generated by the laser light source 100 enters the collimation module 200 in the light source shaping part 001, is collimated into nearly parallel light by the collimation module 200, and then enters the spectroscopic module 400; it is split into multiple sub-beams by the spectroscopic module 400 and emitted to the light spot shaping module 300 at different emission angles; the light spot shaping module 300 shapes the light spots in one divergent angle direction of the light source in the incident multiple sub-beams into line spots, while not changing the direction of the light beam in another perpendicular divergent angle direction of the incident light source, and after completing the beam shaping of converting multiple point light spots in different directions into line spots, a multi-line laser is formed at the specified position.

[0080] The parameters of the multi-line laser can be adjusted according to the number of the sub-beams and the width of the sub-beams.

[0081] Specifically, the parameters of the multi-line laser include at least one of the following: the number of laser lines, the brightness of the laser lines, and the focal depth. The number of laser lines of the multi-line laser generated by the multi-line laser provided in this embodiment is determined by the number of sub-beams formed by the splitting module 400. The more sub-beams formed by the splitting module 400, the more laser lines of the multi-line laser generated. Therefore, if the number of laser lines of the multi-line laser formed is to be adjusted, it is only necessary to adjust the number of sub-beams formed by the splitting module 400 in the multi-line laser provided in this embodiment.

[0082] The brightness of the laser line of the multi-line laser generated by the multi-line laser provided in this embodiment is determined by the width of the sub-beams formed by the splitting module 400. The larger the width of the sub-beams formed by the splitting module 400, the higher the brightness of the laser line of the multi-line laser. Therefore, if the brightness of the laser line of the multi-line laser is to be adjusted, it is only necessary to adjust the width of the sub-beams formed by the splitting module 400 in the multi-line laser provided in this embodiment.

[0083] In addition, the minimum line width of the multi-line laser generated by the multi-line laser provided in this embodiment at a specified position is determined by the focal length of the collimator module 200. The larger the focal length of the collimator module 200, the smaller the line width of the multi-line laser formed at the specified position. However, since the larger the focal length of the collimator module 200, the longer the overall length of the laser and the larger the diameter, comprehensive consideration is required.

[0084] As an implementable embodiment, the focal length range of the collimation module 200 of the multi-line laser provided in this embodiment is between 6mm and 12mm. For example, 6mm, 8mm, 10mm, 12mm. By setting the focal length of the collimation module 200 in this way, the overall length of the multi-line laser is not too large to meet the use requirements while ensuring that the minimum line width of the multi-line laser formed at the specified position meets the large focal depth requirement. Taking the multi-line laser used in a handheld 3D scanner as an example, it is entirely possible to use a collimating lens with a focal length range of 6mm-12mm. It should be noted that the above-mentioned specified position is the optimal position of the use distance range defined by the product.

[0085] It should be noted here that the multi-line laser provided in this embodiment enters the spectroscopic module 400 from the outgoing light beam of the collimation module 200, is split into multiple sub-beams by the spectroscopic module 400 and is emitted at different exit angles before entering the light spot shaping module 300 for shaping, and finally forms a multi-line laser at a specified position. Since the light spot energy is Gaussian distributed, a large aperture can be used to block the light spot with weaker energy at the edge, so that the uniform light energy in the middle is incident on the spectroscopic module 400. Each sub-beam emitted by the spectroscopic module 400 corresponds to a part of the incident light beam of the spectroscopic module 400. For the multi-line laser provided in this embodiment, in the application scenario with the same focal depth requirement, the light spot width allowed to be incident by the spectroscopic module 400 is several times the light spot width allowed to be incident by the DOE in the traditional method. In this way, the utilization rate of light energy is greatly improved.

[0086] Similarly, in response to the application requirements of large focal depth, the existing technology needs to physically block the light spot incident to the DOE to reduce the size of its incident light spot, thereby obtaining a larger focal depth, but it also leads to a lower light energy utilization rate. The multi-line laser provided in Example 2 of the present application, its beam splitting module 400 is able to split the incident light beam into multiple sub-beams and emit them at different emission angles, so that the sub-beams emitted from the light source shaping part form a multi-line laser at a specified position; the parameters of the multi-line laser can be adjusted according to the number of the sub-beams and the width of the sub-beams. The focal depth can be adjusted by only controlling the width of each sub-beam emitted by the beam splitting module 400. The smaller the beam width of the divided sub-beams, the greater the corresponding laser line focal depth, thereby realizing a large focal depth multi-line laser.

[0087] Therefore, compared with the prior art, the multi-line laser provided in the second embodiment has an aperture that allows a light transmission size that is much larger than the existing DOE spectroscopic technology, has a higher energy utilization rate, and can achieve a greater depth of focus.

[0088] The second embodiment provides a multi-line laser. Compared with the multi-line laser provided in the first embodiment, the only difference is that the optical path positions of the light splitting module 400 and the light spot shaping module 300 are interchanged. The specific implementation schemes of each module can be implemented with reference to the above-mentioned first embodiment, and the repeated parts will not be repeated.

[0089] The collimation module 200 and the light splitting module 400 in the above-mentioned second embodiment can be separate or integrated. For example, the light-incoming side of the integrated structure including the collimation module 200 and the light splitting module 400 can be a spherical surface, an aspherical surface or other surface type that can realize the collimation function, and the light splitting side can be a small surface with different tilt angles or a microstructure that can realize phase control.

[0090] As an implementation method, the collimating module 200 and the light splitting module 400 are integrated structures and processed together as a whole, thereby reducing the processing cost and the assembly cost. At the same time, the size of the optical path can also be reduced.

[0091] The light splitting module 400 and the light spot shaping module 300 in the above-mentioned second embodiment can be separate or integrated. For example, one side of the integrated structure including the light spot shaping module 300 and the light splitting module 400 uses a Powell prism, a cylindrical lens or a micro-polygon array structure, and the other side uses a refractive light splitting device or a diffractive light splitting device.

[0092] As another possible implementation, the light spot shaping module 300 and the light splitting module 400 are integrated structures and processed together as a whole, thereby reducing the processing cost and the assembly cost. At the same time, the size of the optical path can also be reduced.

[0093] Similarly, in the multi-line laser provided in the above-mentioned first and second embodiments, the collimation module 200, the spot shaping module 300 and the light splitting module 400 can be discrete or integrated. As an implementation method, the collimation module 200, the spot shaping module 300 and the light splitting module 400 are integrated structures and processed together as a whole, which reduces the processing cost and the assembly cost. At the same time, the size of the optical path can also be reduced.

[0094] Next, the embodiments of the present application provide a variety of refractive spectroscopic devices to implement the above-mentioned spectroscopic module 400 .

[0095] In one embodiment, see Figure 7, is a schematic diagram of the spectroscopic principle of the spectroscopic module 400, wherein the arrow represents the direction of light transmission. The spectroscopic module 400 includes a first optical surface, and the first optical surface includes a plurality of facets with different inclination angles. The incident light beam of the first optical surface is refracted at each facet to form a plurality of sub-beams and emerge at different emergent angles. The above-mentioned first optical surface can be the light emergent surface of the spectroscopic module 400, or it can be the light incident surface of the spectroscopic module 400. The width of each sub-beam is determined by the width of its emergent facet, the emergent angle of each sub-beam is determined by the inclination angle of its emergent facet, and the number of the sub-beams obtained by segmentation is determined by the number of the facets.

[0096] For the same focal depth requirement, that is, the same exit spot size, the prior art uses DOE for spectroscopy, and uses an aperture to reduce the initial incident spot size, and then distributes the incoming spot energy to each sub-beam. The spectroscopy module 400 provided in the present application allows a larger initial light beam to be incident, and is cut into the required exit spot size by the surface width of each small facet of the first optical surface. The energy of each sub-beam is the energy obtained by cutting the corresponding surface, and no redistribution is required. Therefore, the energy utilization rate is much higher than DOE spectroscopy, and the more divided beams, the higher the energy utilization rate.

[0097] Specifically, the surface shape of each of the above-mentioned small faces can be a combination of one or more of a plane, a spherical surface, an aspherical surface, and a free-form surface. The surface shape of each small face of the first optical surface of the light-splitting module 400 is a plane to meet the light-splitting requirements. If the light spot of each sub-beam needs to be reshaped, the surface shape of each small face can also be a spherical surface, an aspherical surface, a free-form surface or any other surface shape, or a combination of various surface shapes, and this application does not limit this.

[0098] Furthermore, the overall surface shape of the first optical surface is at least one of a concave surface, a convex surface, or an irregular surface shape. Fig. 8A and Figure 8B As shown, Fig. 8A is a structural schematic diagram of a light splitting module 400 whose first optical surface is a concave surface; Figure 8B FIG. 4 is a schematic structural diagram of a light splitting module 400 whose first optical surface is a convex surface.

[0099] The above Fig. 8A and Figure 8B The light splitting module 400 shown in the figure can realize one-dimensional light splitting. By changing the surface shape of the first optical surface 410, two-dimensional light splitting can also be realized. Fig. 9A and Fig. 9B As shown in FIG. 4 , two two-dimensional light splitting modules 400 are schematic diagrams of the structure. Taking the light splitting of parallel light sources as an example, Fig. 9A The two-dimensional light splitting module 400 shows a light splitting result for a parallel light source. Fig. 10A As shown; Fig. 9BThe two-dimensional light splitting module 400 shows a light splitting result for a parallel light source. Fig. 10B shown.

[0100] As an implementation method, the first optical surface includes a microstructure, and the microstructure is used to achieve phase control of the sub-beam. Further, the microstructure is in at least one of a step shape, a hole shape, and a column shape, which is not limited in the present application.

[0101] As a specific implementation, Example 3 of the present application provides a multi-line laser, including a laser diode with an excitation light power of 1.8W and a wavelength of 450nm, an aspheric lens with a focal length of 8mm, a Powell prism, and the above-mentioned refractive spectrometer. Among them, the Powell prism material is ZF7, the refractive index n=1.81, the radius of curvature is 1, and the quadratic coefficient is -4. The incident spot width of the refractive spectrometer is 4.5mm, and the width of each exit facet is 0.4mm. It is expected to achieve an 11-line laser at 300mm, where the divergence angle of the laser line length direction is 45°. Fig.11 This is the simulation effect of the multi-line laser provided in Example 3 of the present application in the optical simulation software Tracepro.

[0102] According to the simulation results, if the traditional DOE multi-line solution wants to achieve 11 lines of laser with the same focal depth, it needs to use a 0.4mm wide aperture to limit the size of the incoming spot, and the energy of each sub-beam is 1 / 11 of the energy of the outgoing sub-beam in this embodiment. If the traditional DOE multi-line solution wants to achieve 11 lines of laser with the same power, it needs to use a 4.5mm wide aperture to limit the size of the incoming spot, so that the focal depth of the laser line will be very small.

[0103] Therefore, compared with the traditional multi-line laser using DOE, this embodiment greatly improves the energy utilization rate of the laser and increases the focal depth of the laser line.

[0104] Based on the same inventive concept, an embodiment of the utility model further provides a scanner, including a scanning device, wherein the scanning device includes the multi-line laser provided in any of the above embodiments.

[0105] Furthermore, the above-mentioned scanner also includes a tracking device, and the tracking device is used to track the position and posture of the scanning device.

[0106] The multi-line laser and scanner provided in the embodiment of the present application, by designing the splitter module 400 to split the light beam, replaces the traditional DOE splitting, and realizes the control of the focal depth of each sub-beam laser line and the energy uniformity of each sub-beam by controlling the spot width of each sub-beam divided by the splitter module. The multi-line laser generated by the multi-line laser and scanner provided in the present application, the parameters of the multi-line laser can be adjusted according to the number of the sub-beams and the width of the sub-beams. Compared with the traditional multi-line laser and scanner, it has higher energy utilization and greater focal depth.

[0107] It should be understood that the specific embodiments described herein are only used to explain the application, rather than to limit it. Based on the embodiments provided in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the protection scope of this application.

[0108] Obviously, the drawings are only some examples or embodiments of the present application. For ordinary technicians in the field, the present application can also be applied to other similar situations based on these drawings without creative work. In addition, it is understandable that although the work done in this development process may be complicated and lengthy, for ordinary technicians in the field, certain changes in design, manufacturing or production based on the technical content disclosed in this application are only conventional technical means and should not be regarded as insufficient content disclosed in this application.

[0109] The term "embodiment" in this application refers to a specific feature, structure or characteristic described in conjunction with the embodiment that can be included in at least one embodiment of the present application. The appearance of this phrase in various locations in the specification does not necessarily mean the same embodiment, nor does it mean that it is mutually exclusive with other embodiments and is independent or optional. It is clearly or implicitly understood by those of ordinary skill in the art that the embodiments described in this application can be combined with other embodiments without conflict.

[0110] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of patent protection. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the scope of protection of the present application. Therefore, the scope of protection of the present application shall be subject to the attached claims.

Claims

1. A multi-line laser, characterized in that: It includes a laser light source and a light source shaping unit, wherein the light source shaping unit includes a collimation module, a light spot shaping module and a light splitting module; The laser light source is used to generate a light spot; The collimation module is used to collimate or focus the incident light spot; The light spot shaping module is used to shape the incident point light spot into a line light spot for outgoing emission; The beam splitting module is used to split the incident light beam into multiple sub-beams and emit them at different emission angles, so that the sub-beams emitted from the light source shaping part form multi-line lasers at specified positions; wherein the parameters of the multi-line lasers are adjusted according to the number of the sub-beams and the width of the sub-beams.

2. The multi-line laser according to claim 1, characterized in that: The parameters of the multi-line laser include at least one of the following: the number of laser lines, the brightness of the laser lines, and the focal depth.

3. The multi-line laser according to claim 1, characterized in that: The focal length of the collimating module ranges from 6 mm to 12 mm.

4. The multi-line laser according to any one of claims 1 to 3, characterized in that: The output light spot of the laser light source passes through the collimation module, the light spot shaping module, and the light splitting module in sequence to form the multi-line laser; Alternatively, the output light spot of the laser light source forms the multi-line laser after passing through the collimation module, the beam splitting module, and the light spot shaping module in sequence.

5. The multi-line laser according to claim 4, characterized in that: The light splitting module includes a first optical surface; The first optical surface of the light splitting module includes a plurality of facets with different inclination angles; the incident light beam on the first optical surface is refracted at each of the facets to form a plurality of sub-beams which are emitted at different emission angles; The width of each of the sub-beams is determined by the width of its exit facet, the exit angle of each of the sub-beams is determined by the inclination angle of its exit facet, and the number of the sub-beams is determined by the number of the facets.

6. The multi-line laser according to claim 5, characterized in that: The surface shape of each of the small faces is a combination of one or more of a plane, a spherical surface, an aspherical surface, and a free-form surface.

7. The multi-line laser according to claim 5, characterized in that: The overall surface shape of the first optical surface of the light splitting module is at least one of a concave surface, a convex surface, and an irregular surface.

8. The multi-line laser according to claim 4, characterized in that: The light splitting module is a diffractive optical device or a meta-lens with adjustable phase.

9. The multi-line laser according to claim 5, characterized in that: The first optical surface of the light splitting module includes a microstructure, and the microstructure is used to achieve phase control of the sub-beam.

10. The multi-line laser according to claim 9, characterized in that: The microstructure is in at least one of a step shape, a hole shape, and a column shape.

11. The multi-line laser according to claim 4, characterized in that: The light spot shaping module is a Powell prism, a cylindrical mirror, a microprism array structure, a phase-adjustable diffractive optical device or a meta-lens.

12. The multi-line laser according to any one of claims 1 to 3, characterized in that: The output light spot of the laser light source passes through the collimation module, the light splitting module, and the light spot shaping module in sequence, and forms a multi-line laser at a designated position; The collimation module and the light splitting module are an integrated structure; Alternatively, the light splitting module and the light spot shaping module are an integrated structure.

13. The multi-line laser according to any one of claims 1 to 3, characterized in that: The output light spot of the laser light source passes through the collimation module, the light spot shaping module, and the light splitting module in sequence, and forms a multi-line laser at a specified position; The collimation module and the light spot shaping module are an integrated structure; Alternatively, the light spot shaping module and the light splitting module are an integrated structure.

14. The multi-line laser according to any one of claims 1 to 3, characterized in that: The collimation module, the light spot shaping module and the light splitting module are an integrated structure.

15. A scanner, characterized in that: The method comprises a scanning device, wherein the scanning device comprises the multi-line laser according to any one of claims 1 to 14.

16. The scanner according to claim 15, characterized in that It also includes a tracking device, which is used to track the position and posture of the scanning device.

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