Rotary joint connected with multiple air sources

Abstract

The utility model relates to a multi-path air source connected rotary joint which comprises a rotary joint shell, a rotary main shaft and a sealing structure, the rotary joint shell is of a hollow rod-shaped structure, a mounting hole is formed in one end of the rotary joint shell in the length direction, and a plurality of communicated air source connectors are formed in the side wall of the rotary joint shell in the length direction; the sealing structures are arranged in the rotating joint shell and seal two adjacent air source interfaces, the rotating main shaft is of a rod-shaped structure, sequentially penetrates through the multiple sealing structures through mounting holes and can rotate relative to the rotating joint shell, and multiple air source through holes are sequentially formed in the side wall of the rotating main shaft in the axial length direction; the multiple air source through holes are communicated to the bottom of the rotating main shaft and provided with air source outlets, every two adjacent air source through holes are spaced by 45 degrees in the circumferential direction of the rotating main shaft, and the number of the air source outlets corresponds to the number of the air source through holes, so that the eight air source channels can be communicated to the bottom of the rotating main shaft. The multiple gas channels of the rotating spindle communicate with the bottom of the rotating spindle at the same time.

Description

Technical Field

[0001] The present application relates to the field of semiconductor polishing technology, and in particular to a rotary joint for connecting multiple gas sources. Background Art

[0002] According to data from SEMI (Semiconductor Industry Association), the global semiconductor equipment industry, as an industry with significant cyclical characteristics, has achieved a rare four-year consecutive rapid growth. Since the end of 2022, with the slowdown of upstream wafer fab expansion cycle and the slowdown of downstream consumer demand, and the impact of TSMC and other FAB (semiconductor process) capital expenditure cuts, the global equipment market will fluctuate synchronously with the wafer fab expansion cycle and slow down its growth rate.

[0003] The semiconductor grinding head is a key component in the semiconductor grinding equipment. It is mainly used to press the wafer on the grinding pad and drive the wafer to rotate in the CMP process to achieve micro-grinding of the wafer. During the grinding process, the slurry composed of grinding particles will be placed between the wafer and the grinding pad. Through the friction of abrasives, frictional heat and chemical reactions, the surface of the wafer is made flat and smooth. The rotary joint connected to the semiconductor grinding head is a specially designed mechanism used to transmit gas (under pressure or vacuum) from a fixed inlet to a rotating outlet during the semiconductor grinding process to maintain and isolate the gas connection. This rotary joint can ensure that the grinding head can still maintain a stable gas supply when rotating at high speed, thereby ensuring the continuity and stability of the grinding process. The outer shell of the rotary joint is fixed with a bracket, and the main shaft of the rotary joint will rotate with the grinding head after connecting with the grinding head. There will be multiple passages on the main shaft from the side wall of the main shaft to the bottom of the main shaft to transmit gas. The diameter of the main shaft is small. If the passages inside the rotating main shaft are not arranged properly, it is impossible to open multiple passages connected to the external gas source at the same time. Utility Model Content

[0004] In view of this, the present application proposes a rotary joint with multiple gas source connections, which can simultaneously open multiple gas source passages.

[0005] According to one aspect of the present application, there is provided a rotary joint for connecting multiple gas sources, comprising: a rotary joint housing, a rotating main shaft and a sealing structure;

[0006] The rotary joint shell is a hollow rod-shaped structure, one end of which is provided with a mounting hole in the length direction, and the side wall of the rotary joint shell is provided with a plurality of connected air source interfaces along the length direction, the sealing structure is arranged inside the rotary joint shell to seal two adjacent air source interfaces, the rotating main shaft is a rod-shaped structure, which passes through the plurality of sealing structures in sequence through the mounting hole and can rotate relative to the rotary joint shell, and the side wall of the rotating main shaft is provided with a plurality of air source through holes in sequence along the axial length direction, the plurality of air source through holes are connected to the bottom of the rotating main shaft with an air source outlet, and the air source through holes correspond to and are connected with the air source interfaces one by one;

[0007] Two adjacent air source through holes are spaced apart by a preset angle along the circumferential direction of the rotating main shaft, the number of the air source outlets corresponds to the number of the air source through holes, and the plurality of air source outlets are arranged in a circular ring at the bottom of the rotating main shaft.

[0008] In a possible implementation, the plurality of air source through holes are arranged in a spiral structure along the axial length direction of the rotating main shaft.

[0009] In a possible implementation, the preset angle between any two adjacent air source through holes is in the range of 40 degrees to 50 degrees.

[0010] In a possible implementation, the interval between any two adjacent gas source outlets is equal.

[0011] In a possible implementation, any two adjacent air source through holes are spaced at an equal distance along the axial length direction of the rotating main shaft.

[0012] In a possible implementation, a side wall of the rotating main shaft is provided with an avoidance groove, and there are a plurality of the avoidance grooves, and the plurality of the avoidance grooves correspond one-to-one to the air source through holes.

[0013] In a possible implementation, the gas source through hole and the gas source outlet are connected to a gas source pipeline inside the rotating main shaft, and the cross section of the gas source pipeline along the axial length direction of the rotating main shaft is an "L"-shaped structure.

[0014] In a possible implementation, a rotary bearing is provided at the mounting hole of the rotary joint housing, and the inner side wall of the rotary joint housing is connected to the outer ring of the rotary bearing, and the side wall of the rotating main shaft is connected to the inner ring of the rotary bearing.

[0015] In a possible implementation, a gas chamber with a columnar structure is provided inside the rotary joint housing;

[0016] The gas chamber is a hollow structure, and is connected to the gas source through hole and the gas source interface respectively;

[0017] There are multiple gas chambers, and each of the gas chambers corresponds to the gas source through holes one by one.

[0018] In a possible implementation, a mounting base plate is provided at the bottom of the rotary joint housing, which is suitable for being mounted on a bracket.

[0019] The beneficial effects of the rotary joint with multiple air sources connected in the embodiment of the present application are as follows: the side wall of the rotating main shaft is provided with multiple air source through holes in sequence along the axial length direction, which are respectively connected to the bottom of the rotating main shaft inside the rotating main shaft, and a grinding head is connected to the bottom of the rotating main shaft, and the air source through hole is connected to an external air source to assist grinding. Among them, the rotating main shaft is rotatably arranged inside the rotating joint housing, and can be rotatably connected relative to the inside of the rotating joint housing by using a rotating bearing, the rotating main shaft is sealed with the mounting hole provided at the bottom of the rotating joint housing, and the side wall of the rotating joint housing is provided with an air source interface connected to the inside, which can connect the external air source to the air source through hole provided on the rotating main shaft, and a sealing structure is provided between each air source through hole for sealing. During use, the bottom of the rotating spindle is fixedly connected to the grinding head, and the rotating spindle will rotate with the rotation of the grinding head, so that the rotating spindle rotates relative to the rotary joint housing, and the rotating spindle is in a rotating state. Any adjacent air source through holes are spaced at a preset angle along the circumferential direction of the rotating spindle, so that the air source outlet connected to the bottom of the rotating spindle presents an annular structure on the circumferential plane of the rotating spindle. Even if the rotating spindle is in a rotating state, the gas ejected from the bottom of the rotating spindle is an annular structure composed of multiple air source outlets, and can also eject stable and uniform gas, so that the gas injection is not affected by the rotation of the rotating spindle. The air source through holes are spaced in the axial length direction of the rotating spindle, and adjacent air source through holes are spaced 45 degrees on the circumferential plane of the rotating spindle, so that 8 air source passages can be connected to the bottom of the rotating spindle.

[0020] Other features and aspects of the present application will become apparent from the following detailed description of exemplary embodiments with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate exemplary embodiments, features, and aspects of the present application and, together with the description, serve to explain the principles of the present application.

[0022] Figure 1 A cross-sectional schematic diagram showing a rotary joint connected to multiple gas sources according to an embodiment of the present application;

[0023] Figure 2 A bottom schematic diagram showing a rotary joint connected to multiple gas sources according to an embodiment of the present application;

[0024] Figure 3A schematic diagram showing a rotary joint for connecting multiple gas sources according to an embodiment of the present application. DETAILED DESCRIPTION

[0025] Various exemplary embodiments, features and aspects of the present application will be described in detail below with reference to the accompanying drawings. The same reference numerals in the accompanying drawings represent elements with the same or similar functions. Although various aspects of the embodiments are shown in the accompanying drawings, the drawings are not necessarily drawn to scale unless otherwise specified.

[0026] Among them, it needs to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the utility model or simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model.

[0027] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0028] The word “exemplary” is used exclusively herein to mean “serving as an example, example, or illustration.” Any embodiment described herein as “exemplary” is not necessarily to be construed as preferred or advantageous over other embodiments.

[0029] In addition, in order to better illustrate the present application, numerous specific details are given in the following specific embodiments. It should be understood by those skilled in the art that the present application can also be implemented without certain specific details. In some examples, methods, means, components and circuits well known to those skilled in the art are not described in detail in order to highlight the subject matter of the present application.

[0030] See also Figure 1 , Figure 2 and Figure 3The rotary joint of the embodiment of the present application with multiple gas sources connected comprises: a rotary joint housing 100, a rotating main shaft 200 and a sealing structure 300. The rotary joint housing 100 is a hollow rod-shaped structure, one end of which is provided with a mounting hole in the length direction, and a side wall of the rotary joint housing 100 is provided with a plurality of connected gas source interfaces 110 along the length direction. The sealing structure 300 is arranged inside the rotary joint housing to seal two adjacent gas source interfaces 110. The rotating main shaft 200 is a rod-shaped structure, which passes through the plurality of sealing structures 30 in sequence through the mounting hole. 0, can rotate relative to the rotary joint housing 100, and the side wall of the rotating main shaft 200 is sequentially provided with a plurality of gas source through holes 210 along the axial direction, the plurality of gas source through holes 210 are connected to the bottom of the rotating main shaft 200 with a gas source outlet 230, the gas source through holes 210 correspond to the gas source interface one by one and are connected, two adjacent gas source through holes 210 are spaced at a preset angle along the circumferential direction of the rotating main shaft 200, the number of the gas source outlets 230 corresponds to the number of the gas source through holes 210, and the plurality of gas source outlets 230 are arranged in a circular ring shape at the bottom of the rotating main shaft.

[0031] In this embodiment, the side wall of the rotating spindle 200 is provided with a plurality of air source through holes 210 in sequence along the axial length direction, which are respectively connected to the bottom of the rotating spindle 200 in the interior of the rotating spindle 200, and a grinding head is connected to the bottom of the rotating spindle 200, and the air source through hole 210 assists in grinding by connecting to an external air source. The rotating spindle 200 is rotatably arranged in the interior of the rotary joint housing 100, and can be rotatably connected relative to the interior of the rotary joint housing 100 by using a rotary bearing, the rotating spindle 200 is sealed with the mounting hole provided at the bottom of the rotary joint housing 100, the side wall of the rotary joint housing 100 is provided with an air source interface 110 connected to the interior, and an external air source can be connected to the air source through hole 210 provided on the rotating spindle 200, and a sealing structure 300 is provided between each air source through hole 210 for sealing. During use, the bottom of the rotating spindle 200 is fixedly connected to the grinding head, and the rotating spindle 200 will rotate with the rotation of the grinding head, so that the rotating spindle 200 rotates relative to the rotary joint housing 100, and the rotating spindle 200 is in a rotating state. Any adjacent air source through holes 210 are spaced at a preset angle along the circumferential direction of the rotating spindle 200, so that the air source outlet 230 connected to the bottom of the rotating spindle 200 is annular in the circumferential plane of the rotating spindle 200. When the main shaft 200 is in a rotating state, the gas ejected from the bottom of the rotating shaft 200 is an annular structure composed of multiple gas source outlets 230, and can also eject stable and uniform gas, so that the injection of the gas is not affected by the rotation of the rotating main shaft 200. The gas source through holes 210 are arranged at intervals in the axial direction of the rotating main shaft 200, and the adjacent gas source through holes 210 are spaced 45 degrees on the circumferential direction plane of the rotating main shaft 200, so that the 8 gas source passages 220 can be connected to the bottom of the rotating main shaft 200.

[0032] Among them, the semiconductor grinding head is a key component in the semiconductor grinding equipment. It is mainly used to press the wafer onto the grinding pad and drive the wafer to rotate in the CMP process to achieve micro-grinding of the wafer. During the grinding process, the slurry composed of abrasive particles will be placed between the wafer and the grinding pad. Through the effects of abrasive friction, frictional heat and chemical reactions, the wafer surface is made flat and smooth. The rotary joint connected to the semiconductor grinding head is a specially designed structure used to transfer gas (under pressure or vacuum) from a fixed inlet to a rotating outlet during the semiconductor grinding process to maintain and isolate the gas connection. This rotary joint can ensure that the grinding head can still maintain a stable gas supply when rotating at high speed, thereby ensuring the continuity and stability of the grinding process.

[0033] In a specific embodiment, multiple air source holes 210 are arranged in a spiral structure along the axial direction of the rotating main shaft 200, and the air source holes 210 are all located on the side walls of the rotating main shaft 200 in the axial direction, and are connected to the interior of the rotating main shaft 200, and are opened toward the bottom of the rotating main shaft 200, so as to transmit the external air source connected to the rotary joint housing 100 to the bottom of the rotating main shaft 200.

[0034] In a specific embodiment, the preset angle between any two adjacent gas source through holes 210 is within the range of 40 degrees to 50 degrees. Specifically, the angle between any two adjacent gas source through holes 210 is 45 degrees. When a plurality of gas source through holes 210 are arranged in a circle, there are 8 gas source outlets 230, and the corresponding gas source through holes 210 and gas source interfaces 110 are both 8.

[0035] In this embodiment, the number of gas source outlets 230 is 8, and the spacing angle between adjacent gas source through holes 210 is 45 degrees. Then, in the axial direction of the rotating main shaft 200, the spacing angle between two adjacent gas source through holes 210 on the circumferential direction plane of the rotating main shaft 200 is also 45 degrees.

[0036] In this embodiment, the interval between any two adjacent gas source outlets 230 is equal, and when the gas is sprayed, there will be no gas turbulence as a whole.

[0037] In a specific implementation, any two adjacent air source through holes 210 are equidistant along the axial length direction of the rotating main shaft 200 , so as to facilitate the opening of the air source through hole 210 on the rotating main shaft 200 and the passage connecting the air source through hole 210 and the air source outlet 230 .

[0038] In a specific embodiment, the side wall of the rotating main shaft 200 is provided with a plurality of avoidance grooves, and the plurality of avoidance grooves correspond one to one with the gas source through hole 210. The formation of the avoidance groove on the rotating main shaft 200 facilitates the installation of the rotating main shaft 200 relative to the rotary joint housing 100, and avoids damage to the position where the gas source through hole 210 is formed.

[0039] In a specific embodiment, the air source through hole 210 and the air source outlet 230 are connected with an air source pipeline inside the rotating main shaft. The air source pipeline is a cavity, and the cross-section of the air source pipeline along the axial length direction of the rotating main shaft 200 is an "L"-shaped structure. One end connected to the side wall of the rotating main shaft 200 is the air source through hole 210, and the other end connected to the bottom of the rotating main shaft 200 is the air source outlet 230, so that the air source through hole 210 and the air source outlet 230 are connected.

[0040] In a specific embodiment, a rotating bearing is provided at the mounting hole position of the rotating joint housing 100, and the inner side wall of the rotating joint housing 100 is connected to the outer ring of the rotating bearing, and the side wall of the rotating main shaft 200 is connected to the inner ring of the rotating bearing, so that the rotating main shaft 200 can rotate relative to the rotating joint housing 100.

[0041] In a specific embodiment, a gas chamber with a columnar structure is provided inside the rotary joint shell 100. The gas chamber is a hollow structure, and 8 gas chambers are respectively connected to 8 gas source through holes 210 and 8 gas source interfaces 110. The gas chamber is a columnar cavity, so that the gas source through hole 210 of the rotating main shaft 200 will not directly contact the rotary joint shell 100, and the gas is connected to the gas chamber provided inside the rotary joint shell 100 through the gas source interface 110 opened on the side wall of the rotary joint shell 100. When the rotating main shaft is in a rotating state and the two adjacent gas source interfaces 110 are relatively sealed, the gas fills the inside of the gas chamber and is then transmitted to the bottom of the rotating main shaft 200 through the gas source through hole 210.

[0042] In a specific embodiment, a mounting base plate 400 is provided at the bottom of the rotary joint housing 100 for mounting on a bracket to fix the rotary joint housing 100 in a suspended state for convenience of subsequent grinding.

[0043] The embodiments of the present application have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The selection of terms used herein is intended to best explain the principles of the embodiments, practical applications, or improvements to the technology in the market, or to enable other persons of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. A rotary joint for connecting multiple gas sources, suitable for connecting a grinding head, characterized in that: include: Rotary joint housing, rotating spindle and sealing structure; The rotary joint shell is a hollow rod-shaped structure, one end of which is provided with a mounting hole in the length direction, and the side wall of the rotary joint shell is provided with a plurality of connected air source interfaces along the length direction, the sealing structure is arranged inside the rotary joint shell to seal two adjacent air source interfaces, the rotating main shaft is a rod-shaped structure, and passes through a plurality of the sealing structures in sequence through the mounting hole, so as to be able to rotate relative to the rotary joint shell, and the side wall of the rotating main shaft is provided with a plurality of air source through holes in sequence along the axial length direction, the plurality of the air source through holes are connected to the bottom of the rotating main shaft with an air source outlet, and the air source through holes correspond to and are connected with the air source interfaces one by one; Two adjacent air source through holes are spaced apart by a preset angle along the circumferential direction of the rotating main shaft, the number of the air source outlets corresponds to the number of the air source through holes, and the plurality of air source outlets are arranged in a circular ring at the bottom of the rotating main shaft.

2. The rotary joint for connecting multiple gas sources according to claim 1, characterized in that: The plurality of air source through holes are arranged along the axial length direction of the rotating main shaft in a spiral structure.

3. The rotary joint for connecting multiple gas sources according to claim 2, characterized in that: The preset angle between any two adjacent air source through holes is within the range of 40 degrees to 50 degrees.

4. The rotary joint for connecting multiple gas sources according to claim 1, characterized in that: The intervals between any two adjacent gas source outlets are equal.

5. The rotary joint for connecting multiple gas sources according to claim 1, characterized in that: Any two adjacent air source through holes are spaced equidistantly from each other along the axial length direction of the rotating main shaft.

6. The rotary joint for connecting multiple gas sources according to claim 1, characterized in that: The side wall of the rotating main shaft is provided with an avoidance groove, and there are a plurality of the avoidance grooves, and the plurality of the avoidance grooves correspond to the air source through holes one by one.

7. The rotary joint for connecting multiple gas sources according to claim 1, characterized in that: The gas source through hole and the gas source outlet are connected to a gas source pipeline inside the rotating main shaft, and the cross-section of the gas source pipeline along the axial length direction of the rotating main shaft is an "L"-shaped structure.

8. The rotary joint for connecting multiple gas sources according to claim 1, characterized in that: A rotating bearing is provided at the mounting hole position of the rotating joint housing, and the inner side wall of the rotating joint housing is connected to the outer ring of the rotating bearing, and the side wall of the rotating main shaft is connected to the inner ring of the rotating bearing.

9. The rotary joint for connecting multiple gas sources according to claim 1, characterized in that: A gas chamber with a columnar structure is provided inside the rotary joint housing; The gas chamber is a hollow structure, and is connected to the gas source through hole and the gas source interface respectively; There are multiple gas chambers, and each of the gas chambers corresponds to the gas source through holes one by one.

10. The rotary joint for connecting multiple gas sources according to claim 1, characterized in that: A mounting base plate is provided at the bottom of the rotary joint housing and is suitable for being mounted on a bracket.

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