Cooling liquid supply equipment of multi-wire cutting machine

Abstract

The utility model discloses a cooling liquid supply device of a multi-wire cutting machine, which comprises a liquid storage tank, a liquid outlet guide plate is arranged on one side of the liquid storage tank, a partition spoiler is arranged in the liquid storage tank, the interior of the liquid storage tank is divided into a liquid inlet space and a liquid outlet space by the partition spoiler, and the liquid inlet space is communicated with the liquid outlet space. A receding part used for penetrating through the liquid inlet space and the liquid outlet space is arranged between the bottom of the separation spoiler and the bottom of the liquid storage tank, the liquid outlet guide plate is arranged on one side of the liquid outlet space, the arrangement height of the liquid outlet guide plate is larger than that of the bottom of the separation spoiler, and distribution liquid inlet pipes are arranged in the liquid inlet space. The liquid supply device can supply liquid stably and is convenient to clean.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer preparation, in particular to a cooling liquid supply device for a multi-wire saw. Background Art

[0002] The multi-wire saw is a device used for silicon wafer cutting. It is a wire cutting technology with multiple cutting wires that can cut crystal rods in batches with high processing efficiency.

[0003] Because it is a wire cutting technology, it needs to use coolant to assist cutting during the cutting process. The existing coolant supply device uses a side supply into the distribution box, and the liquid is discharged from the transverse opening slot set at the front end of the distribution box. However, because the liquid is supplied from one end, the liquid supply pressure at the transverse opening slot close to the liquid supply end is high, and the pressure at the end far away is low, which leads to uneven liquid supply and affects the operating stability of the equipment. In addition, during the circulation process, some crystals of coolant will block the transverse opening slot, making it difficult to clean. Summary of the invention

[0004] The technical problem to be solved by the utility model is to provide a cooling liquid supply device for a multi-wire cutting machine, which can stably supply liquid and is easy to clean.

[0005] In order to solve the above technical problems, the utility model provides a coolant supply device for a multi-wire cutting machine, including a liquid storage tank, a liquid outlet guide plate is arranged on one side of the liquid storage tank, a partition baffle plate is arranged in the liquid storage tank, the partition baffle plate divides the interior of the liquid storage tank into a liquid inlet space and a liquid outlet space, and an escape portion for connecting the liquid inlet space and the liquid outlet space is arranged between the bottom of the partition baffle plate and the bottom of the liquid storage tank, the liquid outlet guide plate is arranged on one side of the liquid outlet space, and the setting height is higher than the setting height of the bottom of the partition baffle plate, and a distributed liquid inlet pipe is arranged in the liquid inlet space.

[0006] Furthermore, an arc-shaped bracket is arranged at the top of the liquid inlet space, and the arc-shaped bracket is used to tow the distribution liquid inlet pipe, and the two ends of the arc-shaped bracket are respectively connected to the top of one side of the corresponding liquid storage tank and the top of the partition baffle.

[0007] Furthermore, the distributed liquid inlet pipe includes a transverse distribution pipe, the bottom of which is provided with at least two downwardly facing liquid outlets which are evenly distributed, and a liquid inlet connecting pipe is provided in the middle of the transverse distribution pipe, and the liquid inlet connecting pipe is connected to the main pipe.

[0008] Furthermore, a quick-release joint is provided between the liquid inlet connecting pipe and the main pipe.

[0009] Furthermore, slots are provided on the inner walls of the liquid storage tank at both ends of the partitioning baffle plate, and the partitioning baffle plate is inserted into the slots for limiting position.

[0010] Furthermore, a rubber pad is arranged in the slot.

[0011] Furthermore, the liquid outlet guide plate includes an upper platform, a slope connection portion and a lower platform formed by bending, and flow-blocking bending portions are arranged on both sides of the liquid outlet guide plate.

[0012] Furthermore, mounting support arm plates are arranged on the outer walls at both ends of the liquid storage tank, the mounting support arm plates are arranged on a placing bracket, the placing bracket is arranged on a placing groove, and the placing groove is arranged on a tightening screw.

[0013] Beneficial effects of the utility model:

[0014] A separation baffle is used to separate the liquid storage tank into a liquid inlet space and a liquid outlet space, so that the coolant can flow out in the form of overflow. The liquid disturbance in the liquid inlet space will not directly affect the flow of liquid out of the liquid outlet space, which has a relatively smooth liquid discharge effect, avoids problems such as coolant splashing, and has good liquid discharge stability.

[0015] Since it is overflow outflow, combined with the guidance of the liquid outlet guide plate, the overall liquid outlet space does not need a narrow opening to limit the flow, so there is no problem of clogging, and the use effect is good.

[0016] The distributed liquid inlet pipe supplies liquid directly from top to bottom, which is easy to disassemble, easy to repair and maintain, and also convenient for cleaning the inside of the liquid storage tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0018] Figure 2 The utility model Figure 1 Schematic diagram of the cross-sectional structure;

[0019] Figure 3 It is a schematic diagram of the structure of the detachable partition spoiler of the utility model;

[0020] Figure 4 It is a structural schematic diagram of the installation position of the liquid storage tank of the utility model. DETAILED DESCRIPTION

[0021] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0022] Reference Figures 1 to 3As shown, an embodiment of the coolant supply device of the multi-wire cutting machine of the utility model comprises a liquid storage tank 1, a liquid outlet guide plate 2 is arranged on one side of the liquid storage tank, a partition baffle plate 3 is arranged in the liquid storage tank, the partition baffle plate divides the interior of the liquid storage tank into a liquid inlet space 4 and a liquid outlet space 5, a avoidance portion 6 for connecting the liquid inlet space and the liquid outlet space is arranged between the bottom of the partition baffle plate and the bottom of the liquid storage tank, the liquid outlet guide plate is arranged on one side of the liquid outlet space, and the setting height is higher than the setting height of the bottom of the partition baffle plate, and a distributed liquid inlet pipe 7 is arranged in the liquid inlet space.

[0023] When in use, the coolant is directly supplied into the liquid storage tank from top to bottom through the distribution liquid inlet pipe. The coolant enters the liquid inlet space and enters the liquid outlet space from the avoidance portion, and the liquid level continues to rise. When the liquid level exceeds the height of the liquid outlet guide plate, the coolant in the liquid outlet space will flow out along the liquid outlet guide plate. The continuous liquid supply will cause disturbance to the coolant in the liquid inlet space. Due to the obstruction of the separation baffle, the coolant disturbance in the liquid outlet space is small and has almost no effect, thereby achieving a stable liquid discharge effect.

[0024] Moreover, the liquid storage tank is in the shape of an upper opening as a whole, so there is no problem of clogging, and when there are some impurities at the bottom of the tank, they can be easily cleaned, and the stability of use is better.

[0025] An arc-shaped bracket 8 is arranged at the top of the above-mentioned liquid inlet space. The arc-shaped bracket is used to tow the distributed liquid inlet pipe. The distributed liquid inlet pipe can be directly erected on the liquid storage tank to form an effective supporting effect. Specifically, the two ends of the arc-shaped bracket are respectively connected to the top of one side of the corresponding liquid storage tank and the top of the dividing baffle plate, and are fixed across the top of the liquid inlet space. It can be fixed by welding or by bolts.

[0026] Through the setting of the arc-shaped bracket, the distribution liquid inlet pipe is designed to include a transverse distribution pipe 9. The transverse distribution pipe can be placed on two arc-shaped brackets, which is stable and reliable. At least two downward liquid outlets 10 are arranged at the bottom of the transverse distribution pipe and are evenly distributed to meet the flow effect. A liquid inlet connecting pipe 11 is arranged in the middle of the transverse distribution pipe. The liquid inlet connecting pipe is connected to the main pipe 12, and a quick-release joint 13 is arranged between the liquid inlet connecting pipe and the main pipe, so that the transverse distribution pipe and the liquid inlet connecting pipe can form a whole, and then be quickly connected to the main pipe, which is convenient for operation during repair and maintenance.

[0027] The partitioning group flow plate can be welded and fixed on the inner wall of the liquid storage tank, and of course it can also be detachably arranged on the inner wall of the liquid storage tank, that is, slots 14 are arranged on the inner walls of the liquid storage tank corresponding to the two ends of the partitioning group flow plate, and the partitioning baffle plate is inserted in the slot for limited installation. After the partitioning baffle plate can be disassembled, there is a larger operating space when cleaning the inside of the liquid storage tank, and the distribution inlet pipe does not need to be disassembled. It only needs to contact and lock the arc bracket to disassemble the partitioning group flow plate, which is convenient and fast, and the weight of the distribution inlet pipe can be applied to the partitioning baffle plate through the arc bracket, and the partitioning baffle plate will not move. Of course, a rubber pad can also be arranged in the slot. When the partitioning baffle plate is inserted into the slot, the two sides contact with the rubber pad to form a sealing effect. The extrusion force formed after the rubber pad is compressed can also ensure that the installation position of the partitioning baffle plate is fixed.

[0028] In order to further improve the stability of the coolant when it flows out, the liquid outlet guide plate is designed to include an upper platform 15, a slope connecting part 16 and a lower platform 17 formed by bending. After the coolant flows out through the upper platform, it flows obliquely downward through the slope connecting part to avoid direct falling, which plays a good buffering role. Flow blocking bends 18 are provided on both sides of the liquid outlet guide plate to ensure that the coolant does not flow out laterally.

[0029] In one embodiment, referring to Figure 4 As shown, in order to make the liquid storage tank more convenient to install in the equipment, mounting support arm plates 19 are arranged on the outer walls at both ends of the liquid storage tank, and the mounting support arm plates are arranged on the placement bracket 20, and the placement bracket is provided with a placement slot, and the placement slot is provided with a tightening screw 21. During installation, the liquid storage tank can be directly placed in the placement slot of the placement bracket through two mounting support arm plates to achieve effective limit, and then the position can be locked by the tightening screw. The operation is convenient and the fixing effect is good. When it needs to be disassembled, it only needs to loosen the tightening screw to take it out. The placement bracket can be directly fixed in the equipment.

[0030] The above embodiments are only preferred embodiments for fully illustrating the present invention, and the protection scope of the present invention is not limited thereto. Any equivalent substitution or modification made by a person skilled in the art based on the present invention is within the protection scope of the present invention.

Claims

1. A cooling liquid supply device for a multi-wire cutting machine, characterized in that: It includes a liquid storage tank, a liquid outlet guide plate is arranged on one side of the liquid storage tank, a partition baffle is arranged in the liquid storage tank, the partition baffle divides the interior of the liquid storage tank into a liquid inlet space and a liquid outlet space, an escape portion for connecting the liquid inlet space and the liquid outlet space is arranged between the bottom of the partition baffle and the bottom of the liquid storage tank, the liquid outlet guide plate is arranged on one side of the liquid outlet space, and the setting height is higher than the setting height of the bottom of the partition baffle, and a distributed liquid inlet pipe is arranged in the liquid inlet space.

2. The cooling liquid supply device for a multi-wire cutting machine according to claim 1, characterized in that: An arc-shaped bracket is arranged on the top of the liquid inlet space, and the arc-shaped bracket is used to tow the distribution liquid inlet pipe, and the two ends of the arc-shaped bracket are respectively connected to the top of one side of the corresponding liquid storage tank and the top of the partition baffle.

3. The cooling liquid supply device for a multi-wire cutting machine according to claim 1, characterized in that: The distribution liquid inlet pipe comprises a transverse distribution pipe, at least two downward liquid outlets are arranged at the bottom of the transverse distribution pipe and are evenly distributed, and a liquid inlet connecting pipe is arranged in the middle of the transverse distribution pipe, and the liquid inlet connecting pipe is connected to the main pipe.

4. The cooling liquid supply device for a multi-wire cutting machine according to claim 3, characterized in that: A quick-release joint is provided between the liquid inlet connecting pipe and the main pipe.

5. The cooling liquid supply device for a multi-wire cutting machine according to claim 1, characterized in that: Slots are arranged on the inner walls of the liquid storage tank at both ends of the partitioning baffle plate, and the partitioning baffle plate is inserted in the slots to limit the position.

6. The cooling liquid supply device for a multi-wire cutting machine according to claim 5, characterized in that: A rubber pad is arranged in the slot.

7. The cooling liquid supply device for a multi-wire saw according to claim 1, characterized in that: The liquid outlet guide plate comprises an upper platform, a slope connection portion and a lower platform formed by bending, and flow-blocking bending portions are arranged on both sides of the liquid outlet guide plate.

8. The cooling liquid supply device for a multi-wire cutting machine according to claim 1, characterized in that: The outer walls at both ends of the liquid storage tank are provided with mounting support arm plates, the mounting support arm plates are arranged on a placing bracket, the placing bracket is provided with a placing groove, and the placing groove is provided with a tightening screw.

Images