Vacuum evaporation device and cooling assembly thereof

Abstract

The vacuum evaporation device comprises a bottom plate and a vacuum evaporation box, a mounting cylinder is fixed to the inner bottom wall of the vacuum evaporation box, an evaporation source is arranged in the mounting cylinder, the cooling assembly is jointly mounted on the bottom plate and the vacuum evaporation box, and the cooling assembly comprises a liquid storage box, a circulating pump and a cooling pipe. The cooling pipe penetrates through the side wall of the vacuum evaporation box and is fixed, the mounting cylinder is sleeved with the cooling pipe in a spiral shape, the end, away from the circulating pump, of the cooling pipe is fixed and communicated with the side wall of the liquid storage box, the cooling assembly further comprises a refrigerator arranged on the cooling pipe, and when an evaporation source needs to be cooled, a worker starts the circulating pump and the refrigerator; according to the vacuum evaporation device, the cooling liquid in the liquid storage tank is pumped into the cooling pipe and circulated, the cooling liquid in the cooling pipe is cooled by the refrigerator, and the cooling liquid takes away heat dissipated by the mounting cylinder in the process of flowing around the mounting cylinder, so that the evaporation source is rapidly cooled, the cooling efficiency of the evaporation source is improved, and the working efficiency of the vacuum evaporation device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum evaporation, in particular to a vacuum evaporation device and a cooling component thereof. Background Art

[0002] Vacuum evaporation refers to a process in which a certain heating evaporation method is used to evaporate the coating material (or film material) under vacuum conditions and gasify it, so that the particles fly to the surface of the substrate and condense into a film. Evaporation is an earlier and more widely used vapor deposition technology, with the advantages of simple film formation method, high film purity and density, and unique film structure and performance.

[0003] After completing an evaporation process, it is necessary to wait for the evaporation source to cool to room temperature before opening the vacuum chamber. The vacuum evaporation device in the prior art usually adopts natural cooling, which has low cooling efficiency and takes a long time, affecting the working efficiency of the vacuum evaporation device. Utility Model Content

[0004] In order to solve the above problems, the utility model provides a vacuum evaporation device and a cooling component thereof.

[0005] The above technical objectives of the utility model are achieved through the following technical solutions: a vacuum evaporation device and a cooling component thereof, comprising a base plate and a vacuum evaporation box fixed to the upper surface of the base plate, a mounting tube fixed to the bottom wall of the vacuum evaporation box, an evaporation source arranged in the mounting tube, a cooling component for cooling the evaporation source being installed on the base plate and the vacuum evaporation box together, the cooling component comprising a liquid storage tank fixed to the upper surface of the base plate, a circulation pump fixed to and connected to the side wall of the liquid storage tank, a cooling pipe fixed to and connected to the water outlet of the circulation pump, the cooling pipe passes through the side wall of the vacuum evaporation box and is fixed, the cooling pipe is spirally sleeved on the mounting tube, the end of the cooling pipe away from the circulation pump is fixed to and connected to the side wall of the liquid storage tank, and the cooling component also includes a refrigerator arranged on the cooling pipe.

[0006] By adopting the above technical solution, when the evaporation source needs to be cooled, the staff starts the circulation pump and the refrigerator, pumps the coolant in the liquid storage tank into the cooling pipe and circulates it, and the refrigerator cools down the coolant in the cooling pipe. The coolant takes away the heat emitted by the mounting tube while flowing around the mounting tube, thereby quickly cooling the evaporation source, improving the cooling efficiency of the evaporation source, and thus improving the working efficiency of the vacuum evaporation device.

[0007] Furthermore, the fixing sleeve on the side wall of the mounting tube is provided with heat dissipation fins.

[0008] By adopting the above technical solution, the heat dissipation fins have good thermal conductivity, and can quickly absorb and dissipate the heat in the installation tube, thereby reducing the temperature of the evaporation source more quickly.

[0009] Furthermore, a cooling fan for dissipating heat from the refrigerator is fixed to the side wall of the liquid storage tank.

[0010] By adopting the above technical solution, a large amount of heat is generated during the operation of the refrigerator, and the heat dissipation fan provides a heat dissipation effect for the refrigerator, so that the heat generated by the refrigerator is quickly dissipated, which is conducive to quickly cooling the coolant.

[0011] Furthermore, a controller is provided on the base plate, and the controller is electrically connected to the circulation pump, the refrigerator and the cooling fan.

[0012] By adopting the above technical solution, the staff can control the circulation pump, the refrigerator and the cooling fan through the controller, which is conducive to the staff's convenient control and adjustment of the cooling components.

[0013] Furthermore, a liquid injection port is formed through the upper surface of the liquid storage box, and a sealing plug is provided in the liquid injection port.

[0014] By adopting the above technical solution, when the coolant in the liquid storage tank needs to be added, the staff can open the sealing plug to add the coolant into the liquid storage tank, which is convenient for adding the coolant.

[0015] Furthermore, a liquid level meter for monitoring the liquid level in the liquid storage tank is installed on the side wall of the liquid storage tank.

[0016] By adopting the above technical solution and setting the liquid level meter, it is convenient for the staff to monitor the liquid level in the liquid storage tank, thereby reducing the probability that the cooling component cannot be used normally due to insufficient coolant in the liquid storage tank.

[0017] Furthermore, the liquid level meter is electrically connected to the controller, and an alarm electrically connected to the controller is provided on the upper surface of the liquid storage tank.

[0018] By adopting the above technical solution, when the liquid level meter detects that the coolant in the liquid storage tank is insufficient, the controller controls the alarm to send out an audible and visual alarm, thereby reminding the staff to add the coolant in time.

[0019] In summary, the utility model has the following beneficial effects:

[0020] 1. In the present application, when the evaporation source needs to be cooled, the staff starts the circulation pump and the refrigerator, pumps the coolant in the liquid storage tank into the cooling pipe and circulates it, and the refrigerator cools down the coolant in the cooling pipe. The coolant takes away the heat emitted by the installation tube during the process of flowing around the installation tube, thereby quickly cooling the evaporation source, improving the cooling efficiency of the evaporation source, and thus improving the working efficiency of the vacuum evaporation device;

[0021] 2. In this application, the heat sink fins have good thermal conductivity and can quickly absorb and dissipate the heat in the installation tube, thereby reducing the temperature of the evaporation source more quickly;

[0022] 3. In the present application, a large amount of heat is generated during the operation of the refrigerator, and the cooling fan provides a heat dissipation effect for the refrigerator, so that the heat generated by the refrigerator is quickly dissipated, which is conducive to the rapid cooling of the coolant. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the utility model;

[0024] Figure 2 It is a schematic cross-sectional structure diagram of an embodiment of the utility model.

[0025] In the figure: 1. base plate; 2. vacuum evaporation box; 3. mounting tube; 4. evaporation source; 5. cooling assembly; 51. liquid storage tank; 511. liquid filling port; 52. circulation pump; 53. cooling pipe; 54. refrigerator; 6. cooling fins; 7. cooling fan; 8. controller; 9. sealing plug; 10. liquid level gauge; 11. alarm. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application; obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application without making creative work are within the scope of protection of the present application.

[0027] like Figure 1 and Figure 2 As shown, an embodiment of the present application discloses a vacuum evaporation device and a cooling component thereof, including a base plate 1, a vacuum evaporation box 2, a mounting tube 3, an evaporation source 4 and a cooling component 5.

[0028] The bottom plate 1 is a rectangular plate-shaped structure, and the bottom plate 1 is used to carry the device. The vacuum evaporation box 2 is a vacuum evaporation box 2 commonly used in the prior art and applicable to the present embodiment, and the vacuum evaporation box 2 is fixed on the upper surface of the bottom plate 1. The mounting tube 3 is a cylindrical structure with an open top, and the mounting tube 3 is fixed on the inner bottom wall of the vacuum evaporation box 2. The evaporation source 4 is an evaporation source 4 commonly used in the prior art and applicable to the present embodiment, and the evaporation source 4 is arranged in the mounting tube 3.

[0029] The cooling assembly 5 is installed on the base plate 1 and the vacuum evaporation box 2, and is used to cool the evaporation source 4. The cooling assembly 5 includes a liquid storage tank 51, a circulation pump 52, a cooling pipe 53 and a refrigerator 54. The liquid storage tank 51 is a rectangular box structure, and the liquid storage tank 51 is fixed on the upper surface of the base plate 1. The circulation pump 52 is a circulation pump 52 commonly used in the prior art and applicable to the present embodiment, and the water inlet of the circulation pump 52 is fixed and connected to the side wall of the liquid storage tank 51. The cooling pipe 53 is fixed and connected to the water outlet of the circulation pump 52, and the cooling pipe 53 penetrates the side wall of the vacuum evaporation box 2 and is fixed. The cooling pipe 53 is spirally sleeved on the mounting tube 3, and the end of the cooling pipe 53 away from the circulation pump 52 is fixed and connected to the side wall of the liquid storage tank 51. The refrigerator 54 is a refrigerator 54 commonly used in the prior art and applicable to the present embodiment, and the refrigerator 54 is arranged on the cooling pipe 53.

[0030] When the evaporation source 4 needs to be cooled, the staff starts the circulation pump 52 and the refrigerator 54, pumps the coolant in the liquid storage tank 51 into the cooling pipe 53 and circulates it. The refrigerator 54 cools down the coolant in the cooling pipe 53. The coolant takes away the heat emitted by the mounting tube 3 while flowing around the mounting tube 3, thereby quickly cooling the evaporation source 4, improving the cooling efficiency of the evaporation source 4, and thus improving the working efficiency of the vacuum evaporation device.

[0031] In order to lower the temperature of the evaporation source 4 more quickly, a heat dissipation fin 6 is fixedly mounted on the side wall of the mounting tube 3. The heat dissipation fin 6 has good thermal conductivity and can quickly absorb and dissipate the heat in the mounting tube 3, thereby lowering the temperature of the evaporation source 4 more quickly.

[0032] In order to quickly cool the coolant, a cooling fan 7 for dissipating heat from the refrigerator 54 is fixed to the side wall of the liquid storage tank 51. A large amount of heat will be generated during the operation of the refrigerator 54. The cooling fan 7 provides a heat dissipation effect for the refrigerator 54, so that the heat generated by the refrigerator 54 can be quickly dissipated, which is conducive to quickly cooling the coolant.

[0033] In order to facilitate convenient control and adjustment of the cooling component 5, a controller 8 is provided on the base plate 1. The controller 8 is electrically connected to the circulation pump 52, the refrigerator 54 and the cooling fan 7. The staff controls the circulation pump 52, the refrigerator 54 and the cooling fan 7 through the controller 8, which facilitates the staff to conveniently control and adjust the cooling component 5.

[0034] In order to facilitate the filling of coolant, a filling port 511 is opened through the upper surface of the liquid storage tank 51, and a sealing plug 9 is arranged in the filling port 511. When the coolant in the liquid storage tank 51 needs to be added, the staff can open the sealing plug 9 to fill the coolant in the liquid storage tank 51, so as to facilitate the filling of the coolant.

[0035] In order to reduce the probability of insufficient coolant in the liquid storage tank 51, a liquid level gauge 10 for monitoring the liquid level in the liquid storage tank 51 is installed on the side wall of the liquid storage tank 51. The setting of the liquid level gauge 10 facilitates the staff to monitor the liquid level in the liquid storage tank 51, thereby reducing the probability that the cooling component 5 cannot be used normally due to insufficient coolant in the liquid storage tank 51.

[0036] In order to remind the staff to add coolant in time, the liquid level meter 10 is electrically connected to the controller 8, and an alarm 11 electrically connected to the controller 8 is provided on the upper surface of the liquid storage tank 51. When the liquid level meter 10 detects that there is insufficient coolant in the liquid storage tank 51, the alarm 11 is controlled by the controller 8 to emit an audible and visual alarm, thereby reminding the staff to add coolant in time.

[0037] The operating principle of a vacuum evaporation device and its cooling component in this embodiment is as follows: when the evaporation source 4 needs to be cooled, the staff starts the circulation pump 52 and the refrigerator 54, pumps the coolant in the liquid storage tank 51 into the cooling pipe 53 and circulates it, and the refrigerator 54 cools down the coolant in the cooling pipe 53. The coolant takes away the heat emitted by the mounting tube 3 while flowing around the mounting tube 3, thereby quickly cooling the evaporation source 4, improving the cooling efficiency of the evaporation source 4, and thus improving the working efficiency of the vacuum evaporation device.

[0038] The above is only a preferred embodiment of the present invention. The protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A vacuum evaporation device and a cooling assembly thereof, comprising a base plate (1) and a vacuum evaporation box (2) fixed to the upper surface of the base plate (1), wherein: A mounting tube (3) is fixed to the bottom wall of the vacuum evaporation box (2), an evaporation source (4) is arranged in the mounting tube (3), a cooling assembly (5) for cooling the evaporation source (4) is installed on the bottom plate (1) and the vacuum evaporation box (2), the cooling assembly (5) comprising a liquid storage tank (51) fixed to the upper surface of the bottom plate (1), a circulation pump (52) fixed to and connected with the side wall of the liquid storage tank (51), and a cooling pipe (53) fixed to and connected with the water outlet of the circulation pump (52), the cooling pipe (53) passes through the side wall of the vacuum evaporation box (2) and is fixed, the cooling pipe (53) is spirally sleeved on the mounting tube (3), one end of the cooling pipe (53) away from the circulation pump (52) is fixed to and connected with the side wall of the liquid storage tank (51), and the cooling assembly (5) also comprises a refrigerator (54) arranged on the cooling pipe (53).

2. The vacuum evaporation device and cooling assembly thereof according to claim 1, characterized in that: The side wall fixing sleeve of the installation cylinder (3) is provided with heat dissipation fins (6).

3. The vacuum evaporation device and cooling assembly thereof according to claim 2, characterized in that: A cooling fan (7) for dissipating heat from the refrigerator (54) is fixed to the side wall of the liquid storage tank (51).

4. The vacuum evaporation device and cooling assembly thereof according to claim 3, characterized in that: A controller (8) is provided on the base plate (1), and the controller (8) is electrically connected to the circulation pump (52), the refrigerator (54) and the heat dissipation fan (7).

5. The vacuum evaporation device and cooling assembly thereof according to claim 4, characterized in that: A liquid injection port (511) is provided through the upper surface of the liquid storage box (51), and a sealing plug (9) is provided in the liquid injection port (511).

6. The vacuum evaporation device and cooling assembly thereof according to claim 5, characterized in that: A liquid level meter (10) for monitoring the liquid level in the liquid storage tank (51) is installed on the side wall of the liquid storage tank (51).

7. The vacuum evaporation device and cooling assembly thereof according to claim 6, characterized in that: The liquid level meter (10) is electrically connected to the controller (8), and an alarm (11) electrically connected to the controller (8) is provided on the upper surface of the liquid storage tank (51).

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