Cooling structure of coated substrate

Abstract

The utility model discloses a cooling structure of a coated substrate. The cooling structure comprises a fixed plate, a water cooling mechanism and a positioning mechanism, the water cooling mechanism is installed below the fixing plate and comprises a water cooling disc, a water inlet pipe is installed on the water cooling disc, a water outlet pipe is arranged on one side of the water inlet pipe, a water conveying groove is formed in the water cooling disc, and a loading disc is fixed to the water conveying groove; the positioning mechanism is installed on the loading disc and comprises a positioning ring, a supporting ring is fixed to the positioning ring, a substrate is arranged on the supporting ring, a pair of fixing bolts is connected to the loading disc in a sliding mode, positioning cones are connected to the fixing bolts in a threaded mode, and a pair of limiting grooves corresponding to the positioning cones are formed in the positioning ring. Compared with the prior art, the cooling structure of the coating substrate can position the substrate, so that the substrate is not easy to move on the loading disc, the evaporation effect of the substrate is improved, the quality of an evaporation film on the surface of the substrate is improved, and resource waste is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of substrate positioning, and in particular relates to a cooling structure of a film-plated substrate. Background Art

[0002] Vacuum evaporation, or evaporation for short, refers to a process in which a certain heating evaporation method is used under vacuum conditions to evaporate the coating material (or film material) and gasify it, so that the particles fly to the surface of the substrate and condense into a film. Evaporation is an earlier and more widely used vapor deposition technology, with the advantages of simple film formation method, high film purity and density, and unique film structure and performance. When the plating pot on the evaporation machine evaporates the raw materials, the substrate is usually placed on a ring-shaped loading plate. The ring-shaped loading plate can allow the part of the substrate that needs to be evaporated to leak out, and the surface of the substrate is evaporated.

[0003] In the prior art, in order to facilitate the placement and removal of the substrate, the size of the loading plate is usually larger than the substrate, which makes it easy for the substrate to move on the loading plate during the evaporation process, making it difficult to position the substrate, affecting the evaporation effect of the substrate, reducing the quality of the evaporated film on the surface of the substrate, reducing product quality, causing waste of resources, and thus causing economic losses.

[0004] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0005] The utility model aims to provide a cooling structure for a film-coated substrate, which can be used to solve the problem that the substrate is difficult to position.

[0006] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0007] The cooling structure of the coating substrate includes: a fixing plate, a water cooling mechanism and a positioning mechanism;

[0008] The water cooling mechanism is installed below the fixed plate, and the water cooling mechanism includes a water cooling plate, a water inlet pipe is installed on the water cooling plate, a water outlet pipe is arranged on one side of the water inlet pipe, a water delivery trough is excavated on the water cooling plate, and a loading plate is fixed on the water delivery trough;

[0009] The positioning mechanism is installed on the loading plate, and the positioning mechanism includes a positioning ring, a supporting ring is fixed on the positioning ring, a substrate is arranged on the supporting ring, a pair of fixing bolts are slidably connected to the loading plate, a positioning cone is threadedly connected to the fixing bolts, and a pair of limiting grooves corresponding to the positioning cones are drilled on the positioning ring.

[0010] In one or more embodiments of the present invention, a plurality of connecting rods are slidably connected between the water cooling plate and the fixed plate, and the connecting rods are used to connect the fixed plate and the water cooling plate.

[0011] In one or more embodiments of the present invention, a plurality of connecting rods are threadedly connected with a plurality of fixing nuts, and the fixing nuts can fix the fixing plate and the water cooling disk on the connecting rods.

[0012] In one or more embodiments of the present invention, a plurality of support rods are fixed on the positioning ring, the support rods are used to support the screw rods and the support plate, and a screw rod is fixed on the support rod, the screw rod is used to support the support plate.

[0013] In one or more embodiments of the utility model, a plurality of the screw rods are slidably connected to a support plate, the support plate is used to support the lifting block, and a plurality of the screw rods are threadedly connected to a fastening nut, which can fix the support plate on the screw rod.

[0014] In one or more embodiments of the utility model, a lifting block is slidably connected to the support plate, and pulling the lifting block can drive the support plate to move. A support nut is threadedly connected to the lifting block, and the support nut can fix the lifting block on the support plate.

[0015] In one or more embodiments of the utility model, a plurality of fixing rods are fixed on the positioning ring, the fixing rods are used to support fastening bolts and spring plates, and the fixing rods are threadedly connected with fastening bolts, which are used to fix the spring plates.

[0016] In one or more embodiments of the present invention, a plurality of the fastening bolts are slidably connected to a spring plate, and the spring plate is elastic so that the spring plate can fix the pressing plate.

[0017] In one or more embodiments of the present invention, a pressing plate is provided on the substrate, and the pressing plate is used to fix the substrate.

[0018] In one or more embodiments of the present invention, a pull rod is fixed on the pressing plate, and pulling the pull rod can drive the pressing plate to move.

[0019] Compared with the prior art, the cooling structure of the coated substrate of the utility model can position the substrate, making it difficult for the substrate to move on the loading plate, thereby improving the evaporation effect of the substrate, improving the quality of the evaporated film on the surface of the substrate, and reducing resource waste. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 A three-dimensional diagram of a cooling structure of a film-coated substrate in one embodiment of the utility model;

[0022] Figure 2 for Figure 1 The schematic diagram of the structure shown at A in the middle;

[0023] Figure 3 It is a cross-sectional view of a cooling structure of a film-coated substrate in one embodiment of the utility model;

[0024] Figure 4 for Figure 3 The schematic diagram of the structure shown at B in the figure;

[0025] Figure 5 for Figure 3 The schematic diagram of the structure shown at C in the middle;

[0026] Figure 6 for Figure 3 Schematic diagram of the structure shown in D.

[0027] Description of main reference numerals:

[0028] 1-fixed plate, 2-water cooling mechanism, 201-water cooling plate, 202-water inlet pipe, 203-water outlet pipe, 204-water trough, 205-loading plate, 206-connecting rod, 207-fixing nut, 3-positioning mechanism, 301-positioning ring, 302-support ring, 303-substrate, 304-fixing bolt, 305-positioning cone, 306-support rod, 307-screw, 308-support plate, 309-fastening nut, 310-lifting block, 311-support nut, 312-fixing rod, 313-fastening bolt, 314-spring plate, 315-pressing plate, 316-pull rod. DETAILED DESCRIPTION

[0029] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0030] like Figures 1 to 6 As shown, the cooling structure of the coating substrate in one embodiment of the utility model comprises: a fixing plate 1, a water cooling mechanism 2 and a positioning mechanism 3.

[0031] like Figure 1 As shown, the fixing plate 1 is used to support a plurality of connecting rods 206. The water cooling mechanism 2 is installed below the fixing plate 1, and the water cooling mechanism 2 includes a water cooling plate 201, and the water cooling plate 201 is used to support a loading plate 205. A water inlet pipe 202 is installed on the water cooling plate 201, and cold water can be transported to the inside of the water delivery tank 204 through the water inlet pipe 202. A water outlet pipe 203 is provided on one side of the water inlet pipe 202, and water in the water delivery tank 204 can be discharged through the water outlet pipe 203.

[0032] like Figure 3 to Figure 4 As shown, a water delivery trough 204 is excavated on the water cooling plate 201, and the water delivery trough 204 is used to deliver cold water, so that the cold water inside the water delivery trough 204 can cool the water cooling plate 201 and the loading plate 205. The loading plate 205 is fixed on the water delivery trough 204, and the loading plate 205 is used to support the positioning ring 301.

[0033] like Figure 1 As shown, a plurality of connecting rods 206 are slidably connected between the water cooling plate 201 and the fixed plate 1, and the connecting rods 206 are used to connect the fixed plate 1 and the water cooling plate 201. A plurality of fixing nuts 207 are threadedly connected to the plurality of connecting rods 206, and the fixing nuts 207 can fix the fixed plate 1 and the water cooling plate 201 on the connecting rods 206.

[0034] like Figure 3 to Figure 4 As shown, the positioning mechanism 3 is installed on the loading plate 205, and the positioning mechanism 3 includes a positioning ring 301, and the positioning ring 301 is used to support the supporting ring 302. The supporting ring 302 is fixed on the positioning ring 301, and the supporting ring 302 is used to support the substrate 303.

[0035] like Figure 3 to Figure 4 As shown, a substrate 303 is arranged on the support ring 302, and the surface of the substrate 303 can be evaporated. A pair of fixing bolts 304 are slidably connected to the loading plate 205, and the fixing bolts 304 are used to fix the positioning cone 305. The fixing bolts 304 are threadedly connected to the positioning cone 305, and the positioning cone 305 is used to position the positioning ring 301.

[0036] like Figures 1 to 4 As shown, a pair of limiting grooves corresponding to the positioning cones 305 are cut on the positioning ring 301, and the positioning cones 305 are placed inside the limiting grooves. A plurality of support rods 306 are fixed on the positioning ring 301, and the support rods 306 are used to support the screw rods 307 and the support plates 308.

[0037] like Figure 2 As shown, a screw rod 307 is fixed on the support rod 306, and the screw rod 307 is used to support the support plate 308. A plurality of screw rods 307 are slidably connected to the support plate 308, and the support plate 308 is used to support the lifting block 310. A fastening nut 309 is threadedly connected to each of the plurality of screw rods 307, and the fastening nut 309 can fix the support plate 308 on the screw rod 307.

[0038] like Figures 3 to 5 As shown, a lifting block 310 is slidably connected to the support plate 308, and pulling the lifting block 310 can drive the support plate 308 to move. A support nut 311 is threadedly connected to the lifting block 310, and the support nut 311 can fix the lifting block 310 on the support plate 308.

[0039] like Figure 6 As shown, a plurality of fixing rods 312 are also fixed on the positioning ring 301, and the fixing rods 312 are used to support the fastening bolts 313 and the spring plate 314. The fixing rods 312 are threadedly connected with the fastening bolts 313, and the fastening bolts 313 are used to fix the spring plate 314.

[0040] like Figures 1 to 6 As shown, a plurality of fastening bolts 313 are all slidably connected with spring plates 314, and the spring plates 314 are elastic, so that the spring plates 314 can fix the pressing plates 315. The pressing plates 315 are provided on the substrate 303, and the pressing plates 315 are used to fix the substrate 303. A pull rod 316 is fixed on the pressing plate 315, and pulling the pull rod 316 can drive the pressing plate 315 to move.

[0041] When in use, the substrate 303 is placed on the support ring 302, and the pressing plate 315 is placed on the substrate 303, so that the pressing plate 315 can fix the substrate 303, and a plurality of spring plates 314 are placed, and the spring plates 314 are fixed to the fixing rods 312 using the fastening bolts 313, so that the spring plates 314 can fix the pressing plates 315;

[0042] Place the support plate 308 on the multiple support rods 306 so that the screw rods 307 can support the support plate 308, and use the fastening nuts 309 to fix the support plate 308 on the screw rods 307. Pulling the lifting block 310 can drive the support plate 308 to move, thereby driving the positioning ring 301 and the multiple support rods 306 to move, and place the positioning ring 301 on the loading tray 205;

[0043] Align a pair of positioning grooves on the positioning ring 301 with the positioning cone 305, and place the positioning ring 301 so that the positioning cone 305 is inside the positioning groove. The positioning cone 305 can support the side wall of the positioning groove, so that the positioning ring 301 is not easy to move, thereby positioning the positioning ring 301;

[0044] The cold water is transported into the water tank 204 through the water inlet pipe 202. The cold water in the water tank 204 can cool the water cooling plate 201 and the loading plate 205 through heat exchange. After the cold water in the water tank 204 completes the heat exchange, it flows out through the water outlet pipe 203.

[0045] Compared with the prior art, the cooling structure of the coated substrate of the utility model can position the substrate, making it difficult for the substrate to move on the loading plate, thereby improving the evaporation effect of the substrate, improving the quality of the evaporated film on the surface of the substrate, and reducing resource waste.

[0046] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0047] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A cooling structure for a coated substrate, characterized in that: include: Fixed plate; A water cooling mechanism is installed below the fixed plate, the water cooling mechanism comprises a water cooling plate, a water inlet pipe is installed on the water cooling plate, a water outlet pipe is arranged on one side of the water inlet pipe, a water delivery trough is excavated on the water cooling plate, and a loading plate is fixed on the water delivery trough; A positioning mechanism is installed on the loading plate, and the positioning mechanism includes a positioning ring, a support ring is fixed on the positioning ring, a substrate is arranged on the support ring, a pair of fixing bolts are slidably connected to the loading plate, a positioning cone is threadedly connected to the fixing bolts, and a pair of limiting grooves corresponding to the positioning cones are drilled on the positioning ring.

2. The cooling structure of the coating substrate according to claim 1, characterized in that: A plurality of connecting rods are slidably connected between the water cooling plate and the fixing plate.

3. The cooling structure of the coating substrate according to claim 2, characterized in that: A plurality of fixing nuts are threadedly connected to the plurality of connecting rods.

4. The cooling structure of the coating substrate according to claim 1, characterized in that: A plurality of support rods are fixed on the positioning ring, and screw rods are fixed on the support rods.

5. The cooling structure of the coating substrate according to claim 4, characterized in that: A support plate is slidably connected to the plurality of screw rods, and a fastening nut is threadedly connected to the plurality of screw rods.

6. The cooling structure of the coating substrate according to claim 5, characterized in that: A lifting block is slidably connected to the support plate, and a supporting nut is threadedly connected to the lifting block.

7. The cooling structure of the coating substrate according to claim 1, characterized in that: A plurality of fixing rods are also fixed on the positioning ring, and fastening bolts are threadedly connected on the fixing rods.

8. The cooling structure of the coating substrate according to claim 7, characterized in that: A plurality of the fastening bolts are all slidably connected with spring plates.

9. The cooling structure of the coating substrate according to claim 1, characterized in that: A pressing plate is arranged on the substrate.

10. The cooling structure of the coating substrate according to claim 9, characterized in that: A pull rod is fixed on the pressing plate.

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