Modularized gas pipeline for LP high-temperature heating process

Abstract

The utility model provides a modularized gas pipeline for an LP high-temperature heating process, which comprises a plurality of connecting pipes, and the connecting pipes are of hollow structures and are used for gas to pass through; the connecting pipes are connected end to end to form a gas pipeline, and gas enters from the head of the gas pipeline and flows out from the tail of the gas pipeline; an internal thread and an external thread are arranged at the two ends of the connecting pipe in the middle of the gas pipeline respectively, the internal thread is located at the tail end of the connecting pipe, the external thread is located at the head end of the connecting pipe, the internal thread at the tail end of the connecting pipe is connected with the external thread at the head end of the rear connecting pipe, and the external thread at the head end of the connecting pipe is connected with the internal thread at the tail end of the front connecting pipe. And the head-to-tail detachable connection of the plurality of connecting pipes is realized. The low-pressure chemical vapor deposition device has the beneficial effects that the risk of blockage of the gas inlet pipe in the low-pressure chemical vapor deposition process is effectively reduced, the maintenance process is obviously simplified, and the maintenance cost is greatly reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor preparation, and in particular relates to a modular gas transmission pipeline used in an LP high-temperature heating process. Background Art

[0002] In the process of preparing photovoltaic cells, low-pressure chemical vapor deposition (LP-CVD) technology plays an indispensable role. By introducing oxygen and silane under high temperature and low pressure conditions, oxygen reacts with silicon to generate a silicon oxide film, thereby forming an ultra-thin oxide layer on the back of the silicon wafer. This process not only provides good interface passivation for the silicon wafer, but also significantly improves its electronic properties. It is one of the key steps in producing photovoltaic cells to improve efficiency.

[0003] However, the traditional intake pipe design adopts a fixed diameter, and is often characterized by a smaller diameter and a longer tube body to meet the needs of fine gas flow control. Although it can achieve effective delivery of oxygen and silane, silane residue is prone to appear at the pipe mouth during high-flow silane delivery. These residual silane reacts with the oxygen in the furnace tube to produce a mixture of silica and silicon, which accumulates over time and causes blockage in the intake pipe. Once blockage occurs, the traditional solution is to replace the entire intake pipe, which not only increases the complexity of maintenance, but also greatly increases production costs, becoming a major bottleneck affecting production efficiency and product quality. Utility Model Content

[0004] In view of this, the utility model aims to propose a modular gas pipeline for LP high-temperature heating process, so as to effectively reduce the risk of inlet pipe blockage during low-pressure chemical vapor deposition, significantly simplify the maintenance process, and greatly reduce maintenance costs.

[0005] In order to achieve the above object, the technical solution of the utility model is implemented as follows:

[0006] A modular gas transmission pipeline for LP high temperature heating process, comprising a plurality of connecting pipes, wherein the connecting pipes are hollow structures for gas to pass through;

[0007] A plurality of connecting pipes are connected end to end to form a gas pipeline, and the gas enters from the head of the gas pipeline and flows out from the tail thereof;

[0008] The two ends of the connecting pipe located in the middle part of the gas transmission pipeline are respectively provided with internal threads and external threads. The internal threads are located at the tail end of the connecting pipe, and the external threads are located at the head end of the connecting pipe. The internal threads at the tail end of the connecting pipe are connected to the external threads at the head end of the next connecting pipe, and the external threads at the head end of the connecting pipe are connected to the internal threads at the tail end of the previous connecting pipe, thereby realizing a detachable connection between the head and tail of several connecting pipes.

[0009] Furthermore, the connecting pipe is an axisymmetric structure, and a plurality of connecting pipes are connected end to end with their central axes overlapping, so that the formed gas transmission pipeline is also an axisymmetric structure.

[0010] Furthermore, the interior of the connecting pipe is a variable diameter structure, and the hollow chamber inside the connecting pipe is truncated cone-shaped, so that the diameter of the connecting pipe head end is smaller than the diameter of the tail end thereof, so that the internal diameter of the gas transmission pipeline gradually increases.

[0011] Furthermore, the outside of the connecting pipe is a variable diameter structure, and the tapers of the multiple connecting pipes connected end to end are consistent, so that the gas transmission pipeline has a smooth variable diameter shape.

[0012] Furthermore, the connecting pipe head end located in the middle of the gas pipeline is provided with a protrusion, the external thread is located on the outer side of the protrusion, and the connecting pipe tail end is provided with a recess, and the internal thread is located on the side wall of the recess;

[0013] The protrusion and the recess cooperate with each other to position two connecting pipes when they are connected.

[0014] Furthermore, an isolation gasket is provided at the bottom of the protrusion to seal the gas transmission space inside the gas transmission pipeline.

[0015] Furthermore, it includes four connecting tubes, the top diameters of the four connecting tubes are 2cm, 2.5cm, 3cm, and 3.5cm respectively, the bottom diameters are 2.5cm, 3cm, 3.5cm, and 4cm respectively, and the lengths of the four connecting tubes are all 50cm.

[0016] Compared with the prior art, the modular gas pipeline for LP high temperature heating process described in the utility model has the following beneficial effects:

[0017] (1) The utility model discloses a modular gas pipeline for LP high-temperature heating process, which is composed of a plurality of hollow connecting pipes, which are connected end to end to form a gas pipeline. By providing internal threads and external threads at both ends of the connecting pipes, a detachable and modular connection between the connecting pipes is achieved. When the gas pipeline is seriously blocked, only the connecting pipe at the blocked part needs to be cut off and replaced with a new one, which greatly saves costs.

[0018] (2) The modular gas pipeline for LP high temperature heating process described in the utility model has a truncated cone-shaped variable diameter structure inside the connecting pipe, so that the internal diameter of the gas pipeline gradually increases, and the external part also presents a consistent variable diameter structure, maintaining the overall taper consistency, ensuring the silane flow rate while reducing the blockage of the silane reactant;

[0019] (3) The modular gas pipeline for LP high-temperature heating process described in the utility model has a design of protrusions and depressions that not only realizes precise positioning during assembly, but also achieves a good sealing effect through the isolation gasket, thereby ensuring the safety of the gas pipeline and the efficiency of gas transmission. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The accompanying drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the accompanying drawings:

[0021] Figure 1 This is a schematic diagram of a front view of a gas pipeline according to an embodiment of the utility model;

[0022] Figure 2 This is a schematic diagram of an axonometric exploded view of a gas pipeline according to an embodiment of the utility model;

[0023] Figure 3 This is a schematic diagram of a front cross-sectional view of a gas pipeline according to an embodiment of the utility model;

[0024] Figure 4 It is a schematic diagram of a partial cross-sectional view of a gas pipeline according to an embodiment of the utility model.

[0025] Description of reference numerals:

[0026] 1-gas transmission pipeline; 2-connecting pipe; 3-protrusion; 4-depression. DETAILED DESCRIPTION

[0027] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0028] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0029] Example 1: A modular gas pipeline 1 for LP high temperature heating process.

[0030] like Figure 1-Figure 4 As shown, the gas pipeline 1 is composed of a plurality of hollow connecting pipes 2, which are connected end to end to form the gas pipeline 1, allowing silane gas to enter from the head and flow out from the tail. By providing internal threads and external threads at both ends of the connecting pipe 2, a detachable and modular connection between the connecting pipes 2 is achieved. The advantage is that when the gas pipeline 1 is seriously blocked, only the connecting pipe 2 at the blocked part needs to be cut off and replaced with a new connecting pipe 2, which greatly saves costs.

[0031] Specifically, several connecting pipes 2 are connected end to end to form a gas pipeline 1, and the gas enters from the head of the gas pipeline 1 and flows out from its tail. The two ends of the connecting pipe 2 located in the middle of the gas pipeline 1 are respectively provided with internal threads and external threads, the internal threads are located at the tail end of the connecting pipe 2, and the external threads are located at the head end of the connecting pipe 2. The internal threads at the tail end of the connecting pipe 2 are connected with the external threads at the head end of the next connecting pipe 2, and the external threads at the head end of the connecting pipe 2 are connected with the internal threads at the tail end of the previous connecting pipe 2, so as to realize the detachable connection between the head and tail of several connecting pipes 2. The connecting pipe 2 is an axisymmetric structure, and several connecting pipes 2 are connected end to end with the central axis coincident, and the formed gas pipeline 1 is also an axisymmetric structure, which ensures the uniformity and stability of gas flow.

[0032] Example 2: Based on Example 1, improvements are made to prevent silane accumulation reaction.

[0033] like Figure 2 As shown, the connecting pipe 2 adopts a truncated cone-shaped variable diameter structure, and the hollow chamber inside the connecting pipe 2 is truncated cone-shaped, so that the diameter of the head end of the connecting pipe 2 is smaller than the diameter of its tail end, so that the internal diameter of the gas transmission pipeline 1 gradually increases. The advantage is that the actual observation on site shows that the blockage position of the intake pipe is mainly located at one quarter of the distance from the pipe mouth. The truncated cone-shaped variable diameter structure design similar to the trumpet shape ensures the flow rate of silane while reducing the blockage of silane reactants.

[0034] Furthermore, the outside of the connecting pipe 2 is a variable diameter structure, and the tapers of the multiple connecting pipes 2 connected end to end are consistent, so that the gas transmission pipeline 1 has a smooth variable diameter shape.

[0035] Embodiment 3: Improvement based on embodiment 1.

[0036] A protrusion 3 is provided at the head end of the connecting pipe 2 located in the middle of the gas pipeline 1, and the external thread is located on the outer side of the protrusion 3. A recess 4 is provided at the tail end of the connecting pipe 2, and the internal thread is located on the side wall of the recess 4. The protrusion 3 cooperates with the recess 4 to position the two connecting pipes 2 when they are connected. An isolation gasket is provided at the bottom of the protrusion 3 to seal the gas transmission space inside the gas pipeline 1. The design of the protrusion 3 and the recess 4 not only achieves precise positioning during assembly, but also achieves a good sealing effect through the isolation gasket, ensuring the safety of the gas pipeline 1 and the efficiency of gas transmission.

[0037] Preferred embodiment: The gas transmission pipeline 1 includes four connecting pipes 2, the top diameters of the four connecting pipes 2 are 2 cm, 2.5 cm, 3 cm, and 3.5 cm, respectively, and the bottom diameters are 2.5 cm, 3 cm, 3.5 cm, and 4 cm, respectively, and the lengths of the four connecting pipes 2 are all 50 cm. After multiple experiments, it has been verified that the size design in this embodiment meets the requirements of the LP high-temperature heating process while achieving a lower number of replacement times for the connecting pipes 2, thus achieving a balance between process optimization and cost-effectiveness.

[0038] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. These modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model, and they should all be included in the scope of the claims and specification of the utility model.

[0039] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A modular gas pipeline for LP high temperature heating process, characterized in that: It includes a plurality of connecting pipes, each of which is a hollow structure for gas to pass through; A plurality of connecting pipes are connected end to end to form a gas pipeline, and the gas enters from the head of the gas pipeline and flows out from the tail thereof; The two ends of the connecting pipe located in the middle part of the gas transmission pipeline are respectively provided with internal threads and external threads. The internal threads are located at the tail end of the connecting pipe, and the external threads are located at the head end of the connecting pipe. The internal threads at the tail end of the connecting pipe are connected to the external threads at the head end of the next connecting pipe, and the external threads at the head end of the connecting pipe are connected to the internal threads at the tail end of the previous connecting pipe, thereby realizing a detachable connection between the head and tail of several connecting pipes.

2. A modular gas pipeline for LP high temperature heating process according to claim 1, characterized in that: The connecting pipe is an axisymmetric structure, and a plurality of connecting pipes are connected end to end with their central axes overlapped, so that the formed gas transmission pipeline is also an axisymmetric structure.

3. A modular gas pipeline for LP high temperature heating process according to claim 1, characterized in that: The interior of the connecting pipe is a variable diameter structure, and the hollow chamber inside the connecting pipe is truncated cone-shaped, so that the diameter of the head end of the connecting pipe is smaller than the diameter of the tail end thereof, so that the internal diameter of the gas transmission pipeline gradually increases.

4. A modular gas pipeline for LP high temperature heating process according to claim 3, characterized in that: The outside of the connecting pipe is a variable diameter structure, and the tapers of the connecting pipes connected end to end are consistent, so that the gas transmission pipeline has a smooth variable diameter shape.

5. A modular gas pipeline for LP high temperature heating process according to claim 1, characterized in that: The connecting pipe head end located in the middle of the gas pipeline is provided with a protrusion, the external thread is located on the outer side of the protrusion, and the connecting pipe tail end is provided with a recess, and the internal thread is located on the side wall of the recess; The protrusion and the recess cooperate with each other to perform positioning when two connecting pipes are connected.

6. A modular gas pipeline for LP high temperature heating process according to claim 5, characterized in that: An isolation gasket is provided at the bottom of the protrusion to seal the gas transmission space inside the gas transmission pipeline.

7. A modular gas pipeline for LP high temperature heating process according to claim 3, characterized in that: It comprises four connecting tubes, the top diameters of the four connecting tubes are 2cm, 2.5cm, 3cm and 3.5cm respectively, the bottom diameters are 2.5cm, 3cm, 3.5cm and 4cm respectively, and the lengths of the four connecting tubes are all 50cm.

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