Rapid cooling structure of single crystal furnace

Abstract

The utility model belongs to the technical field of single crystal furnaces, and discloses a single crystal furnace rapid cooling structure which comprises a lower furnace body, an upper furnace body arranged on the lower furnace body, a water cooling input pipe connected with the side wall of the lower furnace body and a water cooling output pipe connected with the side wall of the lower furnace body. And a moving groove is formed in the inner wall of the heat preservation cavity, a sliding block is arranged in the moving groove in a sliding mode, a cleaning rod is fixed to the side wall of the sliding block, and a driving assembly used for driving the cleaning rod is arranged on the lower furnace body. The heat preservation device has the effect of reducing the difficulty of cleaning the heat preservation cavity by workers.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a rapid cooling structure of a single crystal furnace. Background Art

[0002] At present, in the production process of single crystal silicon in the semiconductor and solar energy industries, the Czochralski production process is more commonly used, and the equipment used is a Czochralski single crystal furnace. When using a single crystal furnace to pull a single crystal silicon rod, the silicon material needs to be heated to above 1420°C to melt it, and then the crystal is pulled into shape. The process flow of using a single crystal furnace for Czochralski single crystal production includes furnace loading, charging, furnace closure, evacuation, melting, crystal seeding, necking, shoulder release, equal diameter, finishing, furnace shutdown, furnace dismantling and other processes. The above-mentioned whole production process takes about 75 hours. Due to the slow cooling speed of the single crystal furnace, most of the existing single crystal furnaces can only rely on natural cooling methods to complete cooling very slowly, and then heat the next batch of workpieces. Because of the existence of the insulation layer, the natural cooling time takes a long time, so that the current furnace shutdown process takes 6 hours, which is time-consuming. If the furnace is dismantled in advance, the temperature is too high, which will damage the thermal field components in the single crystal furnace and increase production costs.

[0003] A single crystal furnace rapid cooling structure is disclosed in a Chinese utility model patent with publication number CN217104136U, including a furnace body, the furnace body including a furnace bottom, a lower furnace body arranged on the furnace bottom, and an upper furnace body detachably connected to the lower furnace body, the lower furnace body including an inner cylinder arranged in the innermost layer and an outer cylinder wrapped and arranged outside the inner cylinder, a certain gap is provided between the inner cylinder and the outer cylinder as a heat preservation cavity, a heat preservation medium is provided in the heat preservation cavity, a water-cooled copper tube is provided in the heat preservation cavity, the water-cooled copper tube is coiled around the inner cylinder, a plurality of fins fixedly connected to the side wall of the inner cylinder are further provided in the heat preservation cavity, the water-cooled copper tube runs through the fin arrangement, the utility model improves the cooling efficiency, can play a role of rapid cooling, is convenient for quickly processing the next batch of single crystal silicon, and is convenient for rapid cooling to maintain the furnace.

[0004] With respect to the above-mentioned related technologies, the inventor believes that there are the following defects: the above-mentioned device injects cooling water into the water cooling input pipe to allow cooling water to enter the heat preservation chamber, thereby dissipating heat from the inner cylinder. During long-term use, dirt such as scale, sediment and bacteria will accumulate on the inner wall of the heat preservation chamber, making it difficult to clean. If not handled, it is easy to reduce the cooling effect of the cooling water, which is not conducive to improving the user experience of the staff. Utility Model Content

[0005] In order to solve the above problems, the utility model provides a single crystal furnace rapid cooling structure.

[0006] The above technical purpose of the utility model is achieved through the following technical solutions: a single crystal furnace rapid cooling structure, including a lower furnace body, an upper furnace body arranged on the lower furnace body, a water-cooling input pipe interconnected with the side wall of the lower furnace body, and a water-cooling output pipe interconnected with the side wall of the lower furnace body, an insulation cavity is arranged in the lower furnace body, a movable groove is opened on the inner wall of the insulation cavity, a slider is slidably arranged in the movable groove, a cleaning rod is fixed on the side wall of the slider, and a driving component for driving the cleaning rod is arranged on the lower furnace body.

[0007] Furthermore, cleaning plates are provided at both ends of the side walls of the cleaning rod away from the sliding block.

[0008] By adopting the above technical solution, when the staff needs to dissipate heat from the single crystal furnace, the staff needs to move the upper furnace body upward to separate the upper furnace body from the lower furnace body, and connect the water cooling input pipe and the water cooling output pipe to the water cooling device, so that the water cooling device can inject cooling water into the insulation cavity, thereby quickly cooling the lower furnace body. During long-term use, dirt such as scale, sediment and bacteria will accumulate on the inner wall of the insulation cavity, and the staff needs to clean the insulation cavity regularly. At this time, the staff needs to inject cleaning liquid into the water cooling input pipe and start the driving assembly, so that the cleaning rod can move along the extension direction of the moving groove, so that the cleaning rod, cleaning liquid and cleaning plate cooperate with each other to clean the inner wall of the insulation cavity, thereby reducing the cleaning difficulty of the staff.

[0009] Furthermore, bristles are provided on the side wall of the cleaning rod close to the slider and the side walls of the two cleaning plates away from each other.

[0010] Furthermore, an annular groove is formed through the upper surface of the lower furnace body, and the driving assembly includes a driving rod arranged on the upper surface of the cleaning plate and a partition arranged in the annular groove for closing the annular groove.

[0011] Furthermore, the driving rod includes a placement rod fixed to the upper surface of the cleaning plate, a slide groove is provided on the upper surface of the placement rod, and the driving rod also includes a slide rod slidably arranged in the slide groove.

[0012] By adopting the above technical solution, when the staff needs to clean the heat preservation chamber, they only need to inject cleaning liquid into the water cooling input pipe, remove the partition, and then pull the slide bar upward. Furthermore, the staff only needs to move the slide bar along the extension direction of the annular groove, and the cleaning plate can move with the slide bar, thereby reducing the difficulty of cleaning the inner wall of the heat preservation chamber for the staff.

[0013] Furthermore, a support spring is fixed to the bottom surface of the slide rod, and the other end of the support spring is fixed to the inner bottom wall of the slide groove.

[0014] By adopting the above technical solution, when the staff takes out the partition, the slide rod automatically pops out under the action of the supporting spring, thereby reducing the operating difficulty of the staff.

[0015] Furthermore, a clamping block is arranged on the inner wall of the slide groove, and a clamping groove matching with the clamping block is opened on the side wall of the slide rod.

[0016] By adopting the above technical solution, in order to improve the stability of the partition, when the staff does not need to use the slide bar, the staff only needs to press the slide bar downward and slowly release the slide bar, so that the card block and the card slot are aligned and connected to each other, and then the card block blocks the slide bar, so that the slide bar remains stable, thereby reducing the probability of the slide bar pressing against the partition at this time. Subsequently, when the staff needs to use the slide bar, the staff only needs to take out the partition and quickly release their fingers after pressing the slide bar, so that the slide bar can be quickly reset under the action of the support spring, so that the upper end of the slide bar moves to the upper direction of the lower furnace body, thereby reducing the difficulty of operation for the staff.

[0017] Furthermore, a placement groove is provided on the upper surface of the partition to reduce the difficulty for workers to take out the partition.

[0018] In summary, the utility model has the following beneficial effects:

[0019] 1. In this application, when the staff needs to dissipate heat from the single crystal furnace, the staff needs to move the upper furnace body upward to separate the upper furnace body from the lower furnace body, and connect the water cooling input pipe and the water cooling output pipe to the water cooling device, so that the water cooling device can inject cooling water into the insulation chamber, thereby quickly cooling the lower furnace body. During long-term use, dirt such as scale, sediment and bacteria will accumulate on the inner wall of the insulation chamber, and the staff needs to clean the insulation chamber regularly. At this time, the staff needs to inject cleaning liquid into the water cooling input pipe and start the drive assembly, so that the cleaning rod can move along the extension direction of the moving groove, so that the cleaning rod, cleaning liquid and cleaning plate cooperate with each other to clean the inner wall of the insulation chamber, thereby reducing the cleaning difficulty for the staff;

[0020] 2. In this application, when the staff needs to clean the insulation chamber, they need to inject cleaning liquid into the water cooling input pipe, remove the partition, and then pull the slide bar upward. Furthermore, the staff only needs to move the slide bar along the extension direction of the annular groove to make the cleaning plate move with the slide bar, thereby reducing the difficulty of cleaning the inner wall of the insulation chamber for the staff;

[0021] 3. In this application, in order to improve the stability of the partition, when the staff does not need to use the slide bar, the staff only needs to press the slide bar downward and slowly release the slide bar, so that the card block and the card slot are aligned and connected to each other, and then the card block blocks the slide bar, so that the slide bar remains stable, thereby reducing the probability of the slide bar pressing against the partition. Later, when the staff needs to use the slide bar, the staff only needs to take out the partition and quickly release their fingers after pressing the slide bar, so that the slide bar can be quickly reset under the action of the support spring, so that the upper end of the slide bar moves to the upper direction of the lower furnace body, thereby reducing the difficulty of operation for the staff. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the utility model;

[0023] Figure 2 This is a schematic diagram of the placement slot and its connection structure of an embodiment of the utility model;

[0024] Figure 3 This is a schematic diagram of the movable slot and its connection structure in an embodiment of the utility model;

[0025] Figure 4 It is a schematic diagram of a driving rod and its connection structure according to an embodiment of the utility model.

[0026] In the figure: 1. lower furnace body; 11. upper furnace body; 2. water-cooling input pipe; 21. water-cooling output pipe; 3. insulation chamber; 31. moving groove; 4. sliding block; 41. cleaning rod; 42. annular groove; 5. driving assembly; 51. driving rod; 511. setting rod; 512. sliding rod; 513. sliding groove; 52. partition; 6. cleaning plate; 7. supporting spring; 71. block; 8. slot; 9. setting slot. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application; obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application without making creative work are within the scope of protection of the present application.

[0028] like Figure 1-4As shown, the embodiment of the present application discloses a single crystal furnace rapid cooling structure, including a lower furnace body 1, an upper furnace body 11, a water-cooling input pipe 2, a water-cooling output pipe 21, a slider 4, a cleaning rod 41, a driving assembly 5, a cleaning plate 6, a support spring 7 and a clamping block 71. The upper furnace body 11 is arranged on the lower furnace body 1, the water-cooling input pipe 2 is a circular tubular structure, and the water-cooling input pipe 2 is connected to the side wall of the lower furnace body 1. The water-cooling output pipe 21 is a circular tubular structure, and the water-cooling output pipe 21 is connected to the side wall of the lower furnace body 1. An insulation chamber 3 is arranged in the lower furnace body 1, and a moving groove 31 is opened on the inner wall of the insulation chamber 3. The slider 4 is a rectangular block structure, and the slider 4 is slidably arranged in the moving groove 31. The cleaning rod 41 is a rod-shaped structure, and the cleaning rod 41 is fixed to the side wall of the slider 4.

[0029] An annular groove 42 is provided through the upper surface of the lower furnace body 1. The driving assembly 5 is arranged on the lower furnace body 1 for driving the cleaning rod 41. The driving assembly 5 includes a driving rod 51 and a partition 52. The driving rod 51 is arranged on the upper surface of the cleaning plate 6. The driving rod 51 includes a placement rod 511 and a slide rod 512. The placement rod 511 is a rectangular rod-shaped structure. The placement rod 511 and the upper surface of the cleaning plate 6 are fixed to each other. A slide groove 513 is provided on the upper surface of the placement rod 511. The slide rod 512 is a rectangular rod-shaped structure. The slide rod 512 is slidably arranged in the slide groove 513. The partition 52 is a plate-shaped structure with a circular cross section. The partition 52 is arranged in the annular groove 42 for closing the annular groove 42.

[0030] When the staff needs to clean the heat preservation chamber 3, the staff needs to inject the cleaning liquid into the water cooling input pipe 2, remove the partition plate 52, and then pull the slide bar 512 upward. Furthermore, the staff only needs to move the slide bar 512 along the extension direction of the annular groove 42 to make the cleaning plate 6 move with the slide bar 512, thereby reducing the difficulty of cleaning the inner wall of the heat preservation chamber 3 for the staff.

[0031] The cleaning plate 6 is a plate-shaped structure. Two cleaning plates 6 are provided and are respectively arranged at two ends of the side wall of the cleaning rod 41 away from the slider 4.

[0032] A plurality of bristles are provided and are sequentially distributed on the side wall of the cleaning rod 41 close to the slider 4 and the side walls of the two cleaning plates 6 away from each other (not shown in the figure), so as to improve the cleaning effect of the cleaning rod 41 and the cleaning plates 6.

[0033] One end of the support spring 7 is fixed to the bottom surface of the slide bar 512, and the other end of the support spring 7 is fixed to the inner bottom wall of the slide groove 513. When the staff takes out the partition 52, the slide bar 512 automatically pops out under the action of the support spring 7, thereby reducing the difficulty of operation for the staff.

[0034] The block 71 is a block-shaped structure, and is disposed on the inner wall of the slide groove 513 . A slot 8 matching the block 71 is formed on the side wall of the slide rod 512 .

[0035] In order to improve the stability of the partition 52, when the staff does not need to use the slide bar 512, the staff only needs to press the slide bar 512 downward and slowly release the slide bar 512, so that the block 71 and the slot 8 are directly opposite and connected to each other, and then the block 71 blocks the slide bar 512, so that the slide bar 512 remains stable, thereby reducing the probability of the slide bar 512 pressing against the partition 52. Subsequently, when the staff needs to use the slide bar 512, the staff only needs to take out the partition 52 and quickly release the finger after pressing the slide bar 512, so that the slide bar 512 can be quickly reset under the action of the support spring 7, so that the upper end of the slide bar 512 moves to the upper direction of the lower furnace body 1, thereby reducing the difficulty of operation for the staff.

[0036] In order to improve the user experience of the staff, a placement groove 9 is opened on the upper surface of the partition 52 to reduce the difficulty of the staff to take out the partition 52.

[0037] The use principle of a single crystal furnace rapid cooling structure in this embodiment is as follows: when the staff needs to dissipate heat from the single crystal furnace, the staff needs to move the upper furnace body 11 upwards to separate the upper furnace body 11 from the lower furnace body 1, and connect the water cooling input pipe 2 and the water cooling output pipe 21 to the water cooling device, so that the water cooling device can inject cooling water into the insulation chamber 3, thereby rapidly cooling the lower furnace body 1. In long-term use, dirt such as scale, sediment and bacteria will accumulate on the inner wall of the insulation chamber 3, and the staff needs to regularly clean the insulation chamber 3. At this time, the staff needs to inject cleaning liquid into the water cooling input pipe 2 and start the driving assembly 5, so that the cleaning rod 41 can move along the extension direction of the moving groove 31, thereby making the cleaning rod 41, the cleaning liquid and the cleaning plate 6 cooperate with each other and clean the inner wall of the insulation chamber 3, thereby reducing the cleaning difficulty of the staff.

[0038] The above is only a preferred embodiment of the present invention. The protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A single crystal furnace rapid cooling structure, comprising a lower furnace body (1), an upper furnace body (11) arranged on the lower furnace body (1), a water cooling input pipe (2) interconnected with the side wall of the lower furnace body (1), and a water cooling output pipe (21) interconnected with the side wall of the lower furnace body (1), wherein: The lower furnace body (1) is provided with a heat preservation chamber (3), the inner wall of the heat preservation chamber (3) is provided with a movable groove (31), a slider (4) is slidably arranged in the movable groove (31), a cleaning rod (41) is fixed on the side wall of the slider (4), and a driving component (5) for driving the cleaning rod (41) is provided on the lower furnace body (1).

2. The single crystal furnace rapid cooling structure according to claim 1 is characterized in that: Cleaning plates (6) are provided at both ends of the side wall of the cleaning rod (41) away from the slider (4).

3. The single crystal furnace rapid cooling structure according to claim 2 is characterized in that: Brushes are arranged on the side wall of the cleaning rod (41) close to the slider (4) and the side walls of the two cleaning plates (6) away from each other.

4. The single crystal furnace rapid cooling structure according to claim 3 is characterized in that: The upper surface of the lower furnace body (1) is provided with an annular groove (42) extending therethrough, and the driving assembly (5) comprises a driving rod (51) arranged on the upper surface of the cleaning plate (6) and a partition plate (52) arranged in the annular groove (42) for closing the annular groove (42).

5. The single crystal furnace rapid cooling structure according to claim 4 is characterized in that: The driving rod (51) comprises a placement rod (511) fixed to the upper surface of the cleaning plate (6), a slide groove (513) is provided on the upper surface of the placement rod (511), and the driving rod (51) further comprises a slide rod (512) slidably arranged in the slide groove (513).

6. The single crystal furnace rapid cooling structure according to claim 5 is characterized in that: A support spring (7) is fixed to the bottom surface of the slide rod (512), and the other end of the support spring (7) is fixed to the inner bottom wall of the slide groove (513).

7. The single crystal furnace rapid cooling structure according to claim 6 is characterized in that: A clamping block (71) is provided on the inner wall of the sliding groove (513), and a clamping groove (8) matching with the clamping block (71) is provided on the side wall of the sliding rod (512).

8. The single crystal furnace rapid cooling structure according to claim 7 is characterized in that: The upper surface of the partition (52) is provided with a placement groove (9) for reducing the difficulty for workers to remove the partition (52).

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